摘要:
Disclosed is a small-sized vibration type gyrosensor device of high sensitivity provided with a cantilevered oscillator. A cantilevered oscillator 11, provided with a lower electrode, a piezoelectric film and an upper electrode, formed on a single-crystal silicon substrate by a thin film forming process, includes, as an upper electrode, a driving electrode 6a, formed along the length of the oscillator 11 for applying the voltage for causing oscillations of the oscillator 11, and first and second detection electrodes 6b, 6c, formed on both sides of the driving electrode 6a parallel to the longitudinal direction of the oscillator, without contacting with the driving electrode 6a. With a width W0 of the driving electrode 6a, a width W1 of the first detection electrode 6b, a width W2 of the second detection electrode 6c and with W=W0+W1+W2, the condition of 0.5
摘要翻译:公开了一种具有悬臂振荡器的高灵敏度的小型振动式陀螺仪。 通过薄膜形成工艺在单晶硅衬底上形成的具有下电极,压电膜和上电极的悬臂振荡器11包括沿着上电极形成的驱动电极6a, 用于施加用于引起振荡器11的振荡的电压的振荡器11的长度以及形成在驱动电极6的平行于振荡器的纵向的两侧上的第一和第二检测电极6b,6c,而不接触 与驱动电极6a连接。 驱动电极6a的宽度W 0,第一检测电极6b的宽度W 1,第二检测电极6c的宽度W 2,W = W 0 + W 1 + W 2,条件 为0.5 <(W 0 / W)<1。
摘要:
A disk storage apparatus has a magnetic head (8) that is completely retracted outside of a disk cartridge, except upon a reading/writing operation. The magnetic head (8) is inserted into the disk cartridge (16) only upon the reading/writing operation. The disk storage apparatus can completely retract a rotation actuator to an outside of a disk cartridge. The disk storage apparatus can be reliably and stably operated and has a reduced overall thickness.
摘要:
A disc-shaped recording medium for which information signals are recorded and/or reproduced in a state in which a rotating recording and/or reproducing head is floated a pre-set distance from a signal recording region carrying surface of the disc-shaped recording medium. The disc-shaped recording medium has an area radially outside of the outer perimeter of center opening by at least 0.1 mm clamped by a clamp mechanism. This area is coplanar as each surface of the disc-shaped recording medium carrying the signal recording region. It is possible in this manner to prevent eccentricity of the rotating disc-shaped recording medium and consequent collision of the recording and/or reproducing head against the disc-shaped recording medium.
摘要:
A track jump apparatus for making an actuator jump in order to move a spot position of a laser beam emitted through an objective lens of the actuator from a current position to an object position corresponding to a desired recording track on a recording medium. The track jump apparatus includes: an actuator driving device that moves the actuator in accordance with a driving signal; a tracking error signal detecting device that detects a tracking error signal on the basis of a change of return light from the recording medium caused by a change of the spot position of the laser beam relative to the recording track; a feed-forward control device that applies an acceleration pulse and a deceleration pulse to the actuator driving device; and a position control device that controls a position of the actuator using a feedback of the driving signal so as to reduce a difference between an object value and the tracking error signal detected by the tracking error signal detecting device, when making the actuator jump in order to move the spot position of the laser beam from the current position to the object position. The feed-forward control device sets a constant speed period during which neither of the acceleration pulse and the deceleration pulse is applied to the actuator driving device between an acceleration period during which the acceleration pulse is applied to the actuator driving device and a deceleration period during which the deceleration pulse is applied to the actuator driving device.
摘要:
A polishing apparatus and a polishing method can effectively prevent large diameter particles from being fed with slurry to an object to be polished. A large-diameter particle screener blocks or disperses large diameter particles from entering the slurry. Then, slurry free from large diameter particles is taken up from a slurry container by an intake pipe and fed to the object to be polished.
摘要:
A door operable in unison with a cartridge holder is provided at the entrance of the apparatus, whereby a movement amount of a cartridge holder (23) is set to be an amount made smaller than a thickness of a disk cartridge (1) and also to be an amount in which the disk cartridge (1) can be prevented from interfering with a spindle motor (3) when the disk cartridge (1) is loaded and unloaded. The thickness of the disk storage apparatus can be reduced, and hence the whole of the disk storage apparatus can be reduced in thickness.
摘要:
In order to efficiently polish a large-area member to be polished to a desired shape, a polishing apparatus includes a first polishing station including a first holding unit for holding a member to be polished in a state in which a surface to be polished thereof is upwardly placed, and a first polishing head for holding and rotating a polishing pad whose polishing surface is larger than the surface to be polished in a state of contacting the surface to be polished, a detection station for detecting a polished state of the surface to be polished in a state in which the surface to be polished is upwardly placed, and a second polishing station including a second holding unit for holding the member to be polished in a state in which the surface to be polished thereof is upwardly placed, and a second polishing head for holding and rotating a polishing pad whose polishing surface is smaller than the surface to be polished in a state of contacting the surface to be polished.
摘要:
It is an object of the present invention to provide a disk storage apparatus which employs a rotary actuator mechanically excellent as compared with a linear-movement actuator and can employ, in a disk cartridge, a slidable shutter that easily prevents dusts from entering the disk cartridge, and a disk cartridge therefor.The disk storage apparatus includes a disk cartridge in which a disk-like storage medium is rotatably accommodated, an apparatus body onto which the disk cartridge is detachably loaded, a shutter opening and closing mechanism provided on the apparatus body for, in an interlocking operation with an operation of attaching and detaching the disk cartridge, opening and closing a shutter capable of opening and closing a head-positioning-mechanism insertion slot of the disk cartridge, and a rotary head-positioning mechanism provided on the apparatus body for inserting a head portion for recording and/or reproducing information on and/or from the disk-like storage medium through the head-positioning-mechanism insertion slot opened when the disk cartridge is loaded. The disk cartridge includes a slidable shutter for opening and closing the head-positioning-mechanism insertion slot by its sliding operation. The rotary head-positioning mechanism includes a rotation actuator for inserting the head unit into the disk cartridge through the head-positioning-mechanism insertion slot.According to the disk storage apparatus, it is possible to provide the disk storage apparatus which makes it difficult for the dusts to enter the disk cartridge and has a high reliability in the recording and/or reproduction.
摘要:
An apparatus for semiconductor device manufacture is disclosed, which apparatus includes first and second, different exposure systems each for forming an image of a circuit pattern on a substrate coated with a photosensitive material, and a stationary member for supporting the first and second exposure systems.