Vibration type gyrosensor device
    81.
    发明申请
    Vibration type gyrosensor device 有权
    振动式陀螺仪器

    公开(公告)号:US20050241395A1

    公开(公告)日:2005-11-03

    申请号:US11088480

    申请日:2005-03-24

    CPC分类号: G01C19/5642

    摘要: Disclosed is a small-sized vibration type gyrosensor device of high sensitivity provided with a cantilevered oscillator. A cantilevered oscillator 11, provided with a lower electrode, a piezoelectric film and an upper electrode, formed on a single-crystal silicon substrate by a thin film forming process, includes, as an upper electrode, a driving electrode 6a, formed along the length of the oscillator 11 for applying the voltage for causing oscillations of the oscillator 11, and first and second detection electrodes 6b, 6c, formed on both sides of the driving electrode 6a parallel to the longitudinal direction of the oscillator, without contacting with the driving electrode 6a. With a width W0 of the driving electrode 6a, a width W1 of the first detection electrode 6b, a width W2 of the second detection electrode 6c and with W=W0+W1+W2, the condition of 0.5

    摘要翻译: 公开了一种具有悬臂振荡器的高灵敏度的小型振动式陀螺仪。 通过薄膜形成工艺在单晶硅衬底上形成的具有下电极,压电膜和上电极的悬臂振荡器11包括沿着上电极形成的驱动电极6a, 用于施加用于引起振荡器11的振荡的电压的振荡器11的长度以及形成在驱动电极6的平行于振荡器的纵向的两侧上的第一和第二检测电极6b,6c,而不接触 与驱动电极6a连接。 驱动电极6a的宽度W 0,第一检测电极6b的宽度W 1,第二检测电极6c的宽度W 2,W = W 0 + W 1 + W 2,条件 为0.5 <(W 0 / W)<1。

    Disc-shaped recording medium and disc driving system
    84.
    发明授权
    Disc-shaped recording medium and disc driving system 失效
    碟形记录介质和盘驱动系统

    公开(公告)号:US06462903B1

    公开(公告)日:2002-10-08

    申请号:US09509786

    申请日:2000-03-30

    IPC分类号: G11B17028

    摘要: A disc-shaped recording medium for which information signals are recorded and/or reproduced in a state in which a rotating recording and/or reproducing head is floated a pre-set distance from a signal recording region carrying surface of the disc-shaped recording medium. The disc-shaped recording medium has an area radially outside of the outer perimeter of center opening by at least 0.1 mm clamped by a clamp mechanism. This area is coplanar as each surface of the disc-shaped recording medium carrying the signal recording region. It is possible in this manner to prevent eccentricity of the rotating disc-shaped recording medium and consequent collision of the recording and/or reproducing head against the disc-shaped recording medium.

    摘要翻译: 在旋转记录和/或再现头从盘形记录介质的信号记录区域承载表面浮动预定距离的状态下记录和/或再现信息信号的盘形记录介质 。 盘状记录介质具有通过夹紧机构夹持的至少0.1mm的中心开口的外周的径向外侧的区域。 该区域作为承载信号记录区域的盘形记录介质的每个表面是共面的。 以这种方式可以防止旋转的盘形记录介质的偏心,并且随之而来的是记录和/或再现头与盘形记录介质的碰撞。

    Track jump apparatus
    85.
    发明授权
    Track jump apparatus 失效
    轨道跳跃装置

    公开(公告)号:US06442111B1

    公开(公告)日:2002-08-27

    申请号:US09428943

    申请日:1999-10-28

    IPC分类号: G11B700

    摘要: A track jump apparatus for making an actuator jump in order to move a spot position of a laser beam emitted through an objective lens of the actuator from a current position to an object position corresponding to a desired recording track on a recording medium. The track jump apparatus includes: an actuator driving device that moves the actuator in accordance with a driving signal; a tracking error signal detecting device that detects a tracking error signal on the basis of a change of return light from the recording medium caused by a change of the spot position of the laser beam relative to the recording track; a feed-forward control device that applies an acceleration pulse and a deceleration pulse to the actuator driving device; and a position control device that controls a position of the actuator using a feedback of the driving signal so as to reduce a difference between an object value and the tracking error signal detected by the tracking error signal detecting device, when making the actuator jump in order to move the spot position of the laser beam from the current position to the object position. The feed-forward control device sets a constant speed period during which neither of the acceleration pulse and the deceleration pulse is applied to the actuator driving device between an acceleration period during which the acceleration pulse is applied to the actuator driving device and a deceleration period during which the deceleration pulse is applied to the actuator driving device.

    摘要翻译: 一种用于使致动器跳跃的轨道跳跃装置,以便将通过致动器的物镜发射的激光束的光点位置从当前位置移动到对应于记录介质上的期望记录轨道的对象位置。 轨道跳跃装置包括:致动器驱动装置,其根据驱动信号使致动器移动; 跟踪误差信号检测装置,其基于由激光束的光点位置相对于记录轨道的变化引起的来自记录介质的返回光的变化来检测跟踪误差信号; 向所述致动器驱动装置施加加速度脉冲和减速脉冲的前馈控制装置; 以及位置控制装置,其使用所述驱动信号的反馈来控制所述致动器的位置,以便在使所述致动器按顺序跳跃时减小由所述跟踪误差信号检测装置检测到的对象值和所述跟踪误差信号之间的差异 将激光束的光点位置从当前位置移动到物体位置。 前馈控制装置设定恒定速度期间,在该恒定速度期间,加速脉冲和减速脉冲都不会在致动器驱动装置施加加速度脉冲的加速期间和致动器驱动装置的加减速期间 减速脉冲施加到致动器驱动装置。

    Polishing apparatus with slurry screening
    86.
    发明授权
    Polishing apparatus with slurry screening 失效
    抛光设备用浆料筛选

    公开(公告)号:US06352469B1

    公开(公告)日:2002-03-05

    申请号:US09433067

    申请日:1999-11-03

    IPC分类号: B24B700

    摘要: A polishing apparatus and a polishing method can effectively prevent large diameter particles from being fed with slurry to an object to be polished. A large-diameter particle screener blocks or disperses large diameter particles from entering the slurry. Then, slurry free from large diameter particles is taken up from a slurry container by an intake pipe and fed to the object to be polished.

    摘要翻译: 抛光装置和抛光方法可以有效地防止大直径颗粒向被抛光物体供给浆料。 大直径颗粒筛选器阻挡或分散大直径颗粒进入浆料。 然后,通过进气管从浆料容器中吸收没有大直径颗粒的浆料并供给到待抛光对象物。

    Disk cartridge loading apparatus and disk storage apparatus including such disk cartridge loading apparatus
    87.
    发明授权
    Disk cartridge loading apparatus and disk storage apparatus including such disk cartridge loading apparatus 失效
    包括这种盘盒装载装置的盘盒装载装置和盘存储装置

    公开(公告)号:US06268977B1

    公开(公告)日:2001-07-31

    申请号:US09299498

    申请日:1999-04-26

    IPC分类号: G11B1704

    CPC分类号: G11B17/0438

    摘要: A door operable in unison with a cartridge holder is provided at the entrance of the apparatus, whereby a movement amount of a cartridge holder (23) is set to be an amount made smaller than a thickness of a disk cartridge (1) and also to be an amount in which the disk cartridge (1) can be prevented from interfering with a spindle motor (3) when the disk cartridge (1) is loaded and unloaded. The thickness of the disk storage apparatus can be reduced, and hence the whole of the disk storage apparatus can be reduced in thickness.

    摘要翻译: 在设备的入口处设置与盒保持器一致操作的门,由此将盒保持器(23)的移动量设定为小于盘盒(1)的厚度的量,并且还将 是当盘盒(1)装载和卸载时可以防止磁盘盒(1)与主轴电机(3)干涉的量。 可以减小磁盘存储装置的厚度,从而可以减小整个磁盘存储装置的厚度。

    Polishing apparatus and method
    88.
    发明授权
    Polishing apparatus and method 失效
    抛光设备和方法

    公开(公告)号:US06183345B2

    公开(公告)日:2001-02-06

    申请号:US09045651

    申请日:1998-03-20

    IPC分类号: B24B2900

    摘要: In order to efficiently polish a large-area member to be polished to a desired shape, a polishing apparatus includes a first polishing station including a first holding unit for holding a member to be polished in a state in which a surface to be polished thereof is upwardly placed, and a first polishing head for holding and rotating a polishing pad whose polishing surface is larger than the surface to be polished in a state of contacting the surface to be polished, a detection station for detecting a polished state of the surface to be polished in a state in which the surface to be polished is upwardly placed, and a second polishing station including a second holding unit for holding the member to be polished in a state in which the surface to be polished thereof is upwardly placed, and a second polishing head for holding and rotating a polishing pad whose polishing surface is smaller than the surface to be polished in a state of contacting the surface to be polished.

    摘要翻译: 为了将要抛光的大面积构件有效地研磨成所需的形状,抛光装置包括:第一抛光站,包括:第一保持单元,用于在要抛光的表面被抛光的状态下保持要抛光的构件 向上放置的第一抛光头,以及用于保持和旋转抛光表面的抛光表面大于待抛光表面的抛光表面的第一抛光头,用于检测表面抛光状态的检测站 在抛光表面被向上放置的状态下被抛光;以及第二抛光台,其包括第二保持单元,用于在待抛光表面向上放置的状态下保持待抛光元件, 抛光头,用于在与要抛光的表面接触的状态下保持和旋转其研磨表面小于待抛光表面的抛光垫。

    Disk storage apparatus and disk cartridge
    89.
    发明授权
    Disk storage apparatus and disk cartridge 失效
    磁盘存储设备和磁盘盒

    公开(公告)号:US6034840A

    公开(公告)日:2000-03-07

    申请号:US913760

    申请日:1998-01-08

    摘要: It is an object of the present invention to provide a disk storage apparatus which employs a rotary actuator mechanically excellent as compared with a linear-movement actuator and can employ, in a disk cartridge, a slidable shutter that easily prevents dusts from entering the disk cartridge, and a disk cartridge therefor.The disk storage apparatus includes a disk cartridge in which a disk-like storage medium is rotatably accommodated, an apparatus body onto which the disk cartridge is detachably loaded, a shutter opening and closing mechanism provided on the apparatus body for, in an interlocking operation with an operation of attaching and detaching the disk cartridge, opening and closing a shutter capable of opening and closing a head-positioning-mechanism insertion slot of the disk cartridge, and a rotary head-positioning mechanism provided on the apparatus body for inserting a head portion for recording and/or reproducing information on and/or from the disk-like storage medium through the head-positioning-mechanism insertion slot opened when the disk cartridge is loaded. The disk cartridge includes a slidable shutter for opening and closing the head-positioning-mechanism insertion slot by its sliding operation. The rotary head-positioning mechanism includes a rotation actuator for inserting the head unit into the disk cartridge through the head-positioning-mechanism insertion slot.According to the disk storage apparatus, it is possible to provide the disk storage apparatus which makes it difficult for the dusts to enter the disk cartridge and has a high reliability in the recording and/or reproduction.

    摘要翻译: PCT No.PCT / JP97 / 00133 Sec。 371日期1998年1月8日 102(e)日期1998年1月8日PCT 1997年1月22日PCT PCT。 WO97 / 27586 PCT公开号 日期:1997年7月31日本发明的目的是提供一种盘形存储装置,其采用与线性运动致动器相比机械性优异的旋转致动器,并且可以在盘盒中采用容易防止灰尘的可滑动挡板 进入磁盘盒,以及一个磁盘盒。 磁盘存储装置包括盘式存储介质可旋转地容纳的盘盒,可拆卸地装载盘盒的装置本体,设置在装置本体上的活门开闭机构, 安装和拆卸盘盒的操作,打开和关闭能够打开和关闭盘盒的打印头定位机构插入口的挡板以​​及设置在装置本体上的旋转头定位机构,用于插入头部 用于在盘式存储介质上和/或从盘式存储介质通过当装入盘盒时打开的头定位机构插入口来记录和/或再现信息。 盘盒包括用于通过其滑动操作打开和关闭头部定位机构插入槽的可滑动挡板。 旋转头定位机构包括旋转致动器,用于通过头部定位机构插入孔将头单元插入盘盒。 根据磁盘存储装置,可以提供使灰尘难以进入盘盒的盘存储装置,并且在记录和/或再现中具有高可靠性。

    Semiconductor device manufacturing apparatus
    90.
    发明授权
    Semiconductor device manufacturing apparatus 失效
    半导体装置制造装置

    公开(公告)号:US6023068A

    公开(公告)日:2000-02-08

    申请号:US968865

    申请日:1997-11-05

    申请人: Kazuo Takahashi

    发明人: Kazuo Takahashi

    IPC分类号: G03F7/20 H01L21/30

    摘要: An apparatus for semiconductor device manufacture is disclosed, which apparatus includes first and second, different exposure systems each for forming an image of a circuit pattern on a substrate coated with a photosensitive material, and a stationary member for supporting the first and second exposure systems.

    摘要翻译: 公开了一种用于半导体器件制造的装置,该装置包括第一和第二不同的曝光系统,每个用于在涂覆有感光材料的基底上形成电路图案的图像,以及用于支撑第一和第二曝光系统的固定部件。