公开(公告)号：US06225754B1

公开(公告)日：2001-05-01

申请号：US09293843

申请日：1999-04-19

申请人： Makoto Horiuchi ,  Kiyoshi Takahashi ,  Mamoru Takeda

发明人： Makoto Horiuchi ,  Kiyoshi Takahashi ,  Mamoru Takeda

IPC分类号： H05B3700

CPC分类号： H05B41/2928

摘要： A method and apparatus for operating a high pressure discharge lamp is disclosed. Oscillation in the discharge arc periphery, a problem that occurs with high frequency operation, is eliminated. A high pressure discharge lamp is operated by applying thereto a dc or rectangular wave current to which is superposed an ac component shaped by a high frequency ripple signal that has been amplitude modulated by a modulation signal for inducing instantaneous fluctuations in the power supply input to both ends of the arc gap. The ripple level is thereby temporally varied, and stable operating is possible even exceeding the ripple level at which oscillation in the arc periphery begins.

摘要翻译： 公开了一种用于操作高压放电灯的方法和装置。 放电电弧周边的振荡消除了高频工作时出现的问题。 通过向其施加直流或矩形波电流来操作高压放电灯，该直流或矩形波电流叠加有由已经被调制信号幅度调制的高频纹波信号形成的交流分量，用于引起电源输入端的瞬时波动 电弧间隙的端部。 纹波电平由此暂时变化，即使超过电弧周边的振荡开始的纹波电平，也能够稳定地工作。

公开(公告)号：US06176265B1

公开(公告)日：2001-01-23

申请号：US08747245

申请日：1996-11-12

申请人： Kiyoshi Takahashi ,  Kazuo Takahashi

发明人： Kiyoshi Takahashi ,  Kazuo Takahashi

IPC分类号： F16K1107

CPC分类号： F16K51/02 ,  H01L21/6838 ,  Y10T137/7036 ,  Y10T137/86879

摘要： Pick-up tools and other devices for handling semiconductor wafers are require to be capable of withstanding corrosive chemical substances and extreme temperatures, and the valve unit for use in such devices must meet these requirements. The valve unit is also desired to be free from electrostatic charging. To this end, the valve unit comprises a valve main body, having a valve seat defined therein, which is made of relatively electroconductive and self-lubricating material such as PTFE, and a valve case which is injection molded around the valve unit and made of a material having some electroconductivity and a high resistance against deformation such as PEEK mixed with carbon fibers. Provision of annular grooves on the outer surface of the valve main body improves the attachment between the valve main body and the valve case so as to improve both the sealing performance and the mechanical integrity of the valve unit.

摘要翻译： 用于处理半导体晶片的拾取工具和其他装置需要能够承受腐蚀性化学物质和极端温度，并且用于这种装置的阀单元必须满足这些要求。 阀门单元也希望没有静电充电。 为此，阀单元包括阀主体，其具有限定在其中的阀座，其由诸如PTFE的相对导电和自润滑材料制成，以及阀壳，其被注塑在阀单元周围并由 具有一些导电性和高变形性的材料，例如与碳纤维混合的PEEK。 在阀主体的外表面上设置环形槽可改善阀主体和阀壳之间的连接，从而提高阀单元的密封性能和机械完整性。

公开(公告)号：US5776602A

公开(公告)日：1998-07-07

申请号：US546833

申请日：1995-10-23

申请人： Hideyuki Ueda ,  Kenji Kuwahara ,  Hiroshi Seki ,  Sadayuki Okazaki ,  Masaru Odagiri ,  Kiyoshi Takahashi ,  Mikio Murai

发明人： Hideyuki Ueda ,  Kenji Kuwahara ,  Hiroshi Seki ,  Sadayuki Okazaki ,  Masaru Odagiri ,  Kiyoshi Takahashi ,  Mikio Murai

IPC分类号： G11B5/66 ,  G11B5/72 ,  G11B5/725

CPC分类号： G11B5/72 ,  G11B5/725 ,  Y10S428/90 ,  Y10T428/26 ,  Y10T428/265 ,  Y10T428/30

摘要： A magnetic recording medium of the present invention includes: a non-magnetic substrate; a ferromagnetic thin metal layer formed on the non-magnetic substrate; and a carbon layer and a lubricant layer in contact with the carbon layer, which is formed above the ferromagnetic thin metal layer so that the lubricant layer is an outermost layer, wherein the carbon layer contains nitrogen atoms, a Raman spectrum of the carbon layer has a peak A in the range of about 1310 to about 1410 cm.sup.-1 and a peak B in the range of about 1520 to about 1570 cm.sup.-1, and a ratio of integrated intensities of the peak A to the peak B is in the range of about 1.2 to about 2.0.

摘要翻译： 本发明的磁记录介质包括：非磁性基板; 形成在非磁性基板上的铁磁性薄金属层; 以及与铁层接触的碳层和润滑剂层，其形成在铁磁性薄金属层的上方，使得润滑层为最外层，其中碳层含有氮原子，碳层的拉曼光谱具有 在约1310至约1410cm -1范围内的峰A和约1520至约1570cm -1范围内的峰B，峰A与峰B的积分强度之比在该范围内 为约1.2至约2.0。

公开(公告)号：US5567647A

公开(公告)日：1996-10-22

申请号：US354067

申请日：1994-12-06

申请人： Kiyoshi Takahashi

发明人： Kiyoshi Takahashi

IPC分类号： H01L21/28 ,  H01L21/285 ,  H01L21/338

CPC分类号： H01L29/66863 ,  H01L21/28581 ,  H01L21/28587

摘要： A method for fabricating a gate electrode structure of a semiconductor device includes the steps of forming a refractory metal layer of such as tungsten over a substrate, a nitride layer of such as tungsten nitride on the refractory metal layer, and a low resistance metal layer of such as gold (Au) on the nitride layer, and etching and removing the portions of the refractory metal layer and the nitride layer that are existing outside a predetermined region. In place of the refractory metal layer, the refractory metal compound layer may be used. The nitride layer is formed by introducing a nitrogen gas into a sputtering system where reactive sputtering is carried out. Without sacrificing the reliability of the gate or barrier characteristics, it is possible to reduce the number of process steps otherwise required.

摘要翻译： 一种制造半导体器件的栅电极结构的方法包括以下步骤：在基片上形成诸如钨的难熔金属层，在难熔金属层上形成诸如氮化钨的氮化物层，以及低阻金属层 例如氮化物层上的金（Au），以及蚀刻并除去存在于预定区域外的难熔金属层和氮化物层的部分。 可以使用难熔金属化合物层代替难熔金属层。 通过将氮气引入到进行反应性溅射的溅射系统中来形成氮化物层。 不牺牲门的可靠性或屏障特性，可以减少否则需要的处理步骤的数量。

公开(公告)号：US5540957A

公开(公告)日：1996-07-30

申请号：US472297

申请日：1995-06-07

申请人： Hideyuki Ueda ,  Kenji Kuwahara ,  Hiroshi Seki ,  Kiyoshi Takahashi ,  Masaru Odagiri ,  Mikio Murai ,  Yukikazu Ohchi

发明人： Hideyuki Ueda ,  Kenji Kuwahara ,  Hiroshi Seki ,  Kiyoshi Takahashi ,  Masaru Odagiri ,  Mikio Murai ,  Yukikazu Ohchi

IPC分类号： G11B5/72 ,  H05H1/00

CPC分类号： G11B5/72 ,  Y10S428/90 ,  Y10T428/26 ,  Y10T428/265 ,  Y10T428/30

摘要： A magnetic recording media comprising a non-magnetic substrate, a ferromagnetic thin film on the non-magnetic substrate, a hard carbon film on the ferromagnetic thin film, a modified layer of which atomic ratio of nitrogen/carbon is 0.8% or more, and of which thickness is less than 3 nm on the hard carbon film, and a lubricant layer on the modified layer, has excellent electromagnetic conversion characteristic, running stability, durability, and weatherability.

摘要翻译： 一种磁性记录介质，包括非磁性基板，非磁性基板上的铁磁性薄膜，铁磁性薄膜上的硬质碳膜，氮/碳的原子比为0.8％以上的改性层，以及 在硬碳膜上的厚度小于3nm，改性层上的润滑剂层具有优异的电磁转换特性，运行稳定性，耐久性和耐候性。

公开(公告)号：US5451427A

公开(公告)日：1995-09-19

申请号：US046712

申请日：1993-04-16

申请人： Kiyoshi Takahashi ,  Mikio Murai ,  Masaru Odagiri

发明人： Kiyoshi Takahashi ,  Mikio Murai ,  Masaru Odagiri

IPC分类号： G11B5/72 ,  G11B5/725 ,  G11B5/00

CPC分类号： G11B5/725 ,  G11B5/72

摘要： With the use of a novel method in which after a magnetic recording medium carrying a ferromagnetic metal thin film is heated, a protective layer is developed on the ferromagnetic metal thin film by a known plasma CVD technique while an out gas from the magnetic recording medium being eliminated by absorption, another method in which a ferromagnetic metal thin film and a protective layer are formed in succession within a vacuum chamber, or a further method in which after a non-magnetic substrate is heated, a ferromagnetic metal thin film and a protective layer are formed in succession within a vacuum chamber while an out gas from the non-magnetic substrate and the ferromagnetic metal thin film being eliminated by absorption, the atomic ratio of the hydroxyl group to a primary component metal element contained in the ferromagnetic metal thin film can be decreased at the interface between the ferromagnetic metal thin film and the protective layer.

摘要翻译： 通过使用一种新型的方法，其中在承载铁磁性金属薄膜的磁记录介质被加热之后，通过已知的等离子体CVD技术在强磁性金属薄膜上形成保护层，而来自磁记录介质的出气是 通过吸收除去其中在真空室内连续形成强磁性金属薄膜和保护层的另一种方法，其中在非磁性基板被加热之后，强磁性金属薄膜和保护层 在真空室内连续形成，而通过吸收除去来自非磁性基板和强磁性金属薄膜的外部气体，可以将包含在强磁性金属薄膜中的羟基与主要成分金属元素的原子比可以 在铁磁金属薄膜和保护层之间的界面处减小。

公开(公告)号：US5393429A

公开(公告)日：1995-02-28

申请号：US970132

申请日：1992-11-02

申请人： Takashi Nakayama ,  Hiroshi Umino ,  Yasuyuki Sakakura ,  Kiyoshi Takahashi

发明人： Takashi Nakayama ,  Hiroshi Umino ,  Yasuyuki Sakakura ,  Kiyoshi Takahashi

IPC分类号： B01D11/04 ,  B01J14/00 ,  B01J19/00 ,  B01D11/00

CPC分类号： B01D11/043 ,  Y10S210/05

摘要： In a non-agitational, countercurrent flow type of liquid-liquid contacting tower, splitter plates with plural slits and/or holes through which light and heavy liquids flow, and baffles having the appropriate shapes and areas in order to cover the liquid flowing upward or downward, are alternately mounted horizontally inside the tower shell in vertical direction. The ratios of the opening area to the total cross-sectional area in the splitter plate are 10% to 40%, and the opening area of a baffles is larger than the aperture area of a splitter plate. The advantages of this invention are as follows: Because of the high contacting efficiency, a relatively smaller contactor has an equivalent performance with that of a larger contactor; there exists no risk of plugging due to scum accumulation, and maintenance is easy.

摘要翻译： 在非搅动式逆流流动型液 - 液接触塔中，具有多个狭缝和/或多个狭缝和/或孔的分离板，轻质和重质液体通过其流动，以及具有适当形状和面积的挡板以覆盖向上流动的液体或 向下，在垂直方向上交替地水平地安装在塔壳内。 分离板中的开口面积与总横截面积的比率为10％〜40％，挡板的开口面积大于分离板的开口面积。 本发明的优点如下：由于接触效率高，相对较小的接触器具有与较大接触器相当的性能; 由于浮渣积聚，不存在堵塞的风险，维护容易。

公开(公告)号：US5104685A

公开(公告)日：1992-04-14

申请号：US762080

申请日：1991-09-19

申请人： Kiyoshi Takahashi ,  Mikio Murai ,  Masaru Odagiri

发明人： Kiyoshi Takahashi ,  Mikio Murai ,  Masaru Odagiri

IPC分类号： G11B5/72 ,  G11B5/84

CPC分类号： G11B5/8408 ,  G11B5/72

摘要： A method of producing a magnetic recording medium has the steps of forming a ferromagnetic metallic film layer on a non-magnetic substrate, forming, by a plasma CVD process, a protective layer on the ferromagnetic metallic film layer, and forming an oxidation layer on the protective layer by a process conducted in a vacuum atmosphere. An apparatus is disclosed for carrying out this method has a plasma CVD system for forming a ferromagnetic metallic film layer on a non-magnetic substrate, a feeding device including a plurality of rollers and for feeding the substrate carrying the ferromagnetic metal film layer in a predetermined direction, a processing device disposed at a position corresponding to one of the rollers and capable of forming a protective layer on the ferromagnetic metallic film layer, and a vacuum processing device capable of forming an oxidation layer and disposed downstream of the plasma CVD system as viewed in the direction of feed of the substrate effected by the feeding device.

摘要翻译： 制造磁记录介质的方法具有以下步骤：在非磁性基板上形成强磁性金属膜层，通过等离子体CVD工艺形成强磁性金属膜层上的保护层，并在其上形成氧化层 保护层通过在真空气氛中进行的方法。 公开了一种用于实施该方法的装置，其具有用于在非磁性基板上形成强磁性金属膜层的等离子体CVD系统，包括多个辊的馈送装置，以及将承载强磁性金属膜层的基板馈送到预定的 方向，设置在与一个辊对应的位置并且能够在强磁性金属膜层上形成保护层的处理装置，以及能够形成氧化层并设置在等离子体CVD系统的下游的真空处理装置，如图所示 在由进给装置进行的基板的进给方向上。

公开(公告)号：US5011531A

公开(公告)日：1991-04-30

申请号：US456236

申请日：1989-12-27

申请人： Kiyoshi Takahashi ,  Nobuyoshi Takashiba ,  Shinji Kojima ,  Haruji Okuda ,  Shigeru Ohmiya ,  Ryuichi Ikeda

发明人： Kiyoshi Takahashi ,  Nobuyoshi Takashiba ,  Shinji Kojima ,  Haruji Okuda ,  Shigeru Ohmiya ,  Ryuichi Ikeda

IPC分类号： B23K26/00 ,  C21C7/072 ,  C21C7/10 ,  C22B9/04 ,  C22B9/05 ,  F27D3/16 ,  H01S3/097

CPC分类号： F27D3/16 ,  C21C7/072 ,  C21C7/10 ,  C22B9/04 ,  C22B9/055

摘要： A method and apparatus for vacuum degassing blows gas into molten metal so as to form a substantially uniformly distributed bubble over the path area defined by an induction pipe. In order to achieve this, discharge nozzles are separated into at least two groups. The pressures of the gases discharged through the discharge nozzles in different groups are controlled independently of the other so that gas blown through a first group of nozzles forms bubbles at around the central portion of the induction pipe and the pressure of the gas blown through the other group of nozzles is adjusted for forming the bubbles in the vicinity of the periphery of the induction pipe.

摘要翻译： 用于真空脱气的方法和装置将气体吹入熔融金属中，以便在由感应管限定的路径区域上形成基本均匀的气泡分布。 为了实现这一点，排出喷嘴被分成至少两组。 通过不同组中的排出喷嘴排出的气体压力被独立地控制，使得通过第一组喷嘴吹出的气体在感应管的中心部分周围形成气泡。 通过另一第二组喷嘴吹送的气体的压力被调节以在吸气管的周围附近形成气泡。

公开(公告)号：US4875120A

公开(公告)日：1989-10-17

申请号：US232780

申请日：1988-08-16

申请人： Kiyoshi Takahashi ,  Masayuki Noda

发明人： Kiyoshi Takahashi ,  Masayuki Noda

IPC分类号： G11B5/55 ,  G11B5/56 ,  G11B21/08

CPC分类号： G11B5/5521 ,  G11B21/08

摘要： A head driving apparatus for displacing a magnetic head comprises a plurality of slender rods, the respective ends of which are fixed to one another. The slender rods are twisted together by a motor or the like which is connected to ends of the rods thereof, so that the other ends of the slender rods are finely displaced against the force of an urging element, such as a coiled spring. Thus, it is easy to make the apparatus operating noise not noticeable and the motor capacity small.

摘要翻译： 用于移动磁头的头驱动装置包括多个细长杆（2），其相应的端部彼此固定。 细长的杆通过连接到其一端的马达（7）或类似物扭转在一起，使得细长杆的另一端克服施力装置（14）的力（例如盘绕的 弹簧。 因此，容易使装置的噪声和电动机容量小。