Method of making a solid state imager with reduced smear
    82.
    发明授权
    Method of making a solid state imager with reduced smear 失效
    制造具有减少涂片的固态成像仪的方法

    公开(公告)号:US5763292A

    公开(公告)日:1998-06-09

    申请号:US484892

    申请日:1995-06-07

    IPC分类号: H01L27/148 H01L21/00

    摘要: A CCD solid state imaging device can reduce a smear component. This CCD solid state imaging device comprises a plurality of photosensor sections (10) arranged in a matrix fashion, a vertical transfer register (5) having a transfer electrode (16) disposed at every column of the photosensor sections, a shunt line layer (33) connected to the transfer electrode (16) on the vertical transfer register (5), and a photo-shield layer (38) formed so as to surround the photosensor section 10 through an interlayer insulating layer (37) which covers the shunt layer (33), in which the interlayer insulating layer (37) is formed under an overhang portion (38a) of the photo-shield layer (38) to the photosensor section (10).

    摘要翻译: CCD固态成像装置可以减少拖尾部件。 该CCD固态成像装置包括以矩阵方式布置的多个光电传感器部分(10),具有设置在光电传感器部分的每列处的转移电极(16)的垂直传送寄存器(5),分流线层 )连接到垂直传送寄存器(5)上的转印电极(16),以及光掩模层(38),其通过覆盖分流层的层间绝缘层(37)形成为围绕光电传感器部分10 33),其中层间绝缘层(37)形成在光屏蔽层(38)的悬垂部分(38a)下面到光电传感器部分(10)。