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161 条记录 (耗时 0.032 秒)

    Magnetic recording medium and magnetic storage device
    81.
    发明授权
    Magnetic recording medium and magnetic storage device 有权
    磁记录介质和磁存储装置

    公开(公告)号：US08049993B2

    公开(公告)日：2011-11-01

    申请号：US12076004

    申请日：2008-03-12

    申请人： Satoshi Shirotori ,  Yoshiyuki Kamata ,  Kaori Kimura

    发明人： Satoshi Shirotori ,  Yoshiyuki Kamata ,  Kaori Kimura

    IPC分类号： G11B5/82 ,  G11B5/72

    CPC分类号： G11B5/855 ,  G11B5/72

    摘要： A magnetic recording medium includes: a substrate; a recording layer that is formed on the substrate to have a grooved pattern; and a protection layer formed on the recording layer to fill in the grooved pattern, wherein the recording layer is defined to have a servo portion that retains servo data and a recording track portion that retains recording data, and wherein a first film thickness of the protection layer at the servo portion is larger than a second film thickness of the protection layer at the recording track portion by a thickness that is in a range from 1 nm to 10 nm.

    摘要翻译： 磁记录介质包括：基板; 在所述基板上形成有凹槽图案的记录层; 以及形成在所述记录层上以填充所述带槽图案的保护层，其中所述记录层被限定为具有保持伺服数据的伺服部分和保留记录数据的记录轨道部分，并且其中所述保护层的第一膜厚度 伺服部分的层位于记录磁道部分处的保护层的第二膜厚度大于1nm至10nm范围内的厚度。

    Method of forming patterns using imprint material
    82.
    发明申请
    Method of forming patterns using imprint material 审中-公开
    使用压印材料形成图案的方法

    公开(公告)号：US20070065588A1

    公开(公告)日：2007-03-22

    申请号：US11520023

    申请日：2006-09-13

    申请人： Naoko Kihara ,  Yoshiyuki Kamata ,  Satoshi Shirotori ,  Katsuyuki Naito

    发明人： Naoko Kihara ,  Yoshiyuki Kamata ,  Satoshi Shirotori ,  Katsuyuki Naito

    IPC分类号： B05D3/12 ,  B05D3/02 ,  B29C71/02

    CPC分类号： G11B5/855

    摘要： A method of forming patterns includes coating a toroidal substrate having a center hole with an imprint material containing a precursor of a metal oxide film, selected from the group consisting of a metal alkoxide and a metal oxide, and an ether type nonionic surfactant containing fluorine or silicon, imprinting a stamper on the imprint material to transfer patterns of protrusions and recesses of the stamper to the imprint material, and removing organic components from the imprint material through plasma processing or heat treatment to form a metal oxide film having patterns of protrusions and recesses.

    摘要翻译： 形成图案的方法包括用具有中心孔的环形基板涂覆含有金属氧化物膜的前体的压印材料，所述金属氧化物膜的前体选自金属醇盐和金属氧化物，以及含有氟的醚型非离子表面活性剂 硅，在压印材料上压印压模以将压模的突起和凹陷的图案转印到压印材料，以及通过等离子体处理或热处理从压印材料中去除有机组分以形成具有突起和凹陷图案的金属氧化物膜 。

    Method for manufacturing magnetic recording medium
    83.
    发明授权
    Method for manufacturing magnetic recording medium 有权
    磁记录介质的制造方法

    公开(公告)号：US07686972B2

    公开(公告)日：2010-03-30

    申请号：US11705037

    申请日：2007-02-12

    申请人： Hiroyuki Hieda ,  Yoshiyuki Kamata ,  Satoshi Shirotori

    发明人： Hiroyuki Hieda ,  Yoshiyuki Kamata ,  Satoshi Shirotori

    IPC分类号： B44C1/22 ,  C03C15/00 ,  C03C25/68 ,  C23F1/00

    CPC分类号： G11B5/855 ,  G11B5/85

    摘要： It is made possible to manufacturing a magnetic recording medium capable of high-density recording at low cost. A method for manufacturing a magnetic recording medium, includes: forming a magnetic film on a substrate; and forming a pattern transfer film, into which a concavo-convex pattern of a magnetic recording medium is to be transferred by imprinting, by vapor-depositing a material for forming the pattern transfer film onto the magnetic film while heating the material at a temperature of 100° C. to 400° C. in a vacuum of 1×10−3 Torr or less.

    摘要翻译： 能够以低成本制造能够高密度记录的磁记录介质。 一种制造磁记录介质的方法，包括：在基板上形成磁膜; 并且通过在形成图案转印膜的材料上气相沉积到磁性膜上形成图案转印膜，通过压印将磁记录介质的凹凸图案转印到该图案转印膜中，同时在 在1×10 -3 Torr或更低的真空中为100℃至400℃。

    Perpendicular magnetic recording medium
    87.
    发明授权
    Perpendicular magnetic recording medium 有权
    垂直磁记录介质

    公开(公告)号：US07195827B2

    公开(公告)日：2007-03-27

    申请号：US10722599

    申请日：2003-11-28

    申请人： Tomoyuki Maeda ,  Akira Kikitsu ,  Hiroyuki Hieda ,  Yoshiyuki Kamata

    发明人： Tomoyuki Maeda ,  Akira Kikitsu ,  Hiroyuki Hieda ,  Yoshiyuki Kamata

    IPC分类号： G11B5/66

    CPC分类号： G11B5/732 ,  G11B5/65 ,  G11B5/7325

    摘要： A perpendicular magnetic recording medium includes a substrate, an underlayer formed on the substrate, and containing at least one element selected from the group A consisting of Pt, Pd, Rh, Ag, Au, Ir and Fe, and at least one element or compound selected from the group B consisting of C, Ta, Mo, W, Nb, Zr, Hf, V, Mg, Al, Zn, Sn, In, Bi, Pb, Cd, SiO2, MgO, Al2O3, TaC, TiC, TaN, TiN, B2O3, ZrO2, In2O3 and SnO2, and a magnetic layer formed on the underlayer, containing at least one element selected from the group consisting of Fe, Co, and Ni, and at least one element selected from the group consisting of Pt, Pd, Au and Ir, and containing crystal grains having an L10 structure.

    摘要翻译： 垂直磁记录介质包括衬底，形成在衬底上的底层，并且包含选自由Pt，Pd，Rh，Ag，Au，Ir和Fe组成的组A中的至少一种元素，以及至少一种元素或化合物 选自由C，Ta，Mo，W，Nb，Zr，Hf，V，Mg，Al，Zn，Sn，In，Bi，Pb，Cd，SiO 2，MgO组成的组B ，Al 2 O 3，TaC，TiC，TaN，TiN，B 2 O 3 3，ZrO 2 3 3＆lt; 2＆gt;和在底层上形成的含有至少一个元素的磁性层 选自Fe，Co和Ni中的至少一种元素，以及选自Pt，Pd，Au和Ir中的至少一种元素，并且含有具有L 1 O 3结构的晶粒。

    Magnetic recording media, magnetic recording apparatus, and stamper
    88.
    发明申请
    Magnetic recording media, magnetic recording apparatus, and stamper 有权
    磁记录介质，磁记录装置和压模

    公开(公告)号：US20060012905A1

    公开(公告)日：2006-01-19

    申请号：US11182065

    申请日：2005-07-15

    申请人： Takeshi Okino ,  Akira Kikitsu ,  Yoichiro Tanaka ,  Yoshiyuki Kamata

    发明人： Takeshi Okino ,  Akira Kikitsu ,  Yoichiro Tanaka ,  Yoshiyuki Kamata

    IPC分类号： G11B5/09 ,  G11B5/86

    CPC分类号： G11B5/74 ,  B82Y10/00 ,  G11B5/59688 ,  G11B5/743 ,  G11B5/82 ,  G11B5/855 ,  G11B5/865 ,  G11B2005/0029

    摘要： A magnetic recording media has a magnetic layer formed on a substrate and includes data regions including a magnetic pattern constituting a recoding track and servo regions including magnetic patterns used as address bits, the data regions and the servo regions being contained in a plane of the magnetic layer. In a case where two magnetic patterns used as address bits on the servo regions corresponding to two adjacent recording tracks are arranged in such a manner that one corner of one of the magnetic patterns is closest to one corner of the other, the corners of the two magnetic patterns are substantially joined together.

    摘要翻译： 磁记录介质具有在基板上形成的磁性层，并且包括包括构成记录轨迹的磁图案的数据区域和包括用作地址位的磁图案的伺服区域，数据区域和伺服区域包含在磁性平面中 层。 在与两个相邻的记录磁道对应的伺服区域上用作地址位的两个磁图形被布置成使得一个磁性图案的一个角最靠近另一个的角部的情况下， 磁性图案基本上连接在一起。

    Method of forming fine pattern
    89.
    发明申请
    Method of forming fine pattern 审中-公开
    形成精细图案的方法

    公开(公告)号：US20120067843A1

    公开(公告)日：2012-03-22

    申请号：US13064301

    申请日：2011-03-16

    申请人： Akira Watanabe ,  Kaori Kimura ,  Yousuke Isowaki ,  Yoshiyuki Kamata ,  Naoko Kihara ,  Akira Kikitsu

    发明人： Akira Watanabe ,  Kaori Kimura ,  Yousuke Isowaki ,  Yoshiyuki Kamata ,  Naoko Kihara ,  Akira Kikitsu

    IPC分类号： C23F1/02

    CPC分类号： H01L21/3086 ,  B82Y10/00 ,  G03F7/0002 ,  G03F7/165 ,  G03F7/168 ,  G11B5/743 ,  G11B5/82 ,  G11B5/855 ,  H01L21/0332 ,  H01L21/0337 ,  H01L21/3081

    摘要： A method of forming a fine pattern according to an embodiment includes: forming a hard mask on a substrate; forming a mask reinforcing member on the hard mask; forming a di-block copolymer layer on the mask reinforcing member, the di-block copolymer layer comprising a sea-island structure; forming a pattern comprising a concave-convex structure in the di-block copolymer layer, with island portions of the sea-island structure being convex portions; and transferring the pattern onto the hard mask by performing etching on the mask reinforcing member and the hard mask, with a mask being the pattern formed in the di-block copolymer layer. The mask reinforcing member is comprised of a material having an etching speed that is higher than an etching speed for the hard mask and is lower than an etching speed for sea portions of the sea-island structure of the di-block copolymer layer.

    摘要翻译： 根据实施例的形成精细图案的方法包括：在基底上形成硬掩模; 在所述硬掩模上形成掩模加强部件; 在掩模加强部件上形成二嵌段共聚物层，二嵌段共聚物层包含海岛结构体; 在所述二嵌段共聚物层中形成包括凹凸结构的图案，所述海岛结构的岛部是凸部; 并通过在掩模增强部件和硬掩模上进行蚀刻将图案转印到硬掩模上，其中掩模是在二嵌段共聚物层中形成的图案。 掩模加强部件由蚀刻速度高于硬掩模的蚀刻速度的材料构成，并且低于二嵌段共聚物层的海岛结构的海水部分的蚀刻速度。