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公开(公告)号：US20120067843A1
公开(公告)日：2012-03-22
申请号：US13064301
申请日：2011-03-16
申请人： Akira Watanabe , Kaori Kimura , Yousuke Isowaki , Yoshiyuki Kamata , Naoko Kihara , Akira Kikitsu
发明人： Akira Watanabe , Kaori Kimura , Yousuke Isowaki , Yoshiyuki Kamata , Naoko Kihara , Akira Kikitsu
IPC分类号： C23F1/02
CPC分类号： H01L21/3086 , B82Y10/00 , G03F7/0002 , G03F7/165 , G03F7/168 , G11B5/743 , G11B5/82 , G11B5/855 , H01L21/0332 , H01L21/0337 , H01L21/3081
摘要： A method of forming a fine pattern according to an embodiment includes: forming a hard mask on a substrate; forming a mask reinforcing member on the hard mask; forming a di-block copolymer layer on the mask reinforcing member, the di-block copolymer layer comprising a sea-island structure; forming a pattern comprising a concave-convex structure in the di-block copolymer layer, with island portions of the sea-island structure being convex portions; and transferring the pattern onto the hard mask by performing etching on the mask reinforcing member and the hard mask, with a mask being the pattern formed in the di-block copolymer layer. The mask reinforcing member is comprised of a material having an etching speed that is higher than an etching speed for the hard mask and is lower than an etching speed for sea portions of the sea-island structure of the di-block copolymer layer.
摘要翻译： 根据实施例的形成精细图案的方法包括：在基底上形成硬掩模; 在所述硬掩模上形成掩模加强部件; 在掩模加强部件上形成二嵌段共聚物层，二嵌段共聚物层包含海岛结构体; 在所述二嵌段共聚物层中形成包括凹凸结构的图案，所述海岛结构的岛部是凸部; 并通过在掩模增强部件和硬掩模上进行蚀刻将图案转印到硬掩模上，其中掩模是在二嵌段共聚物层中形成的图案。 掩模加强部件由蚀刻速度高于硬掩模的蚀刻速度的材料构成，并且低于二嵌段共聚物层的海岛结构的海水部分的蚀刻速度。
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公开(公告)号：US20110235212A1
公开(公告)日：2011-09-29
申请号：US13007395
申请日：2011-01-14
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/855 , Y10T428/12465
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming on a magnetic recording layer a first hard mask, a second hard mask, a third hard mask and a resist, imprinting the resist with a stamper, removing a residue left in the recesses of the patterned resist, etching the third hard mask by use of the patterned resist as a mask, etching the second hard mask by use of the third hard mask as a mask, etching the first hard mask by use of the second hard mask as a mask, forming a pattern of the magnetic recording layer with ion beam irradiation, and removing the first hard mask by use of a remover liquid with higher reactivity to the metal material of the first hard mask than to a constituent element of the magnetic recording layer.
摘要翻译： 根据一个实施例，制造磁记录介质的方法包括在磁记录层上形成第一硬掩模，第二硬掩模，第三硬掩模和抗蚀剂，用压模压印抗蚀剂，除去留在 图案化抗蚀剂的凹部，通过使用图案化的抗蚀剂作为掩模蚀刻第三硬掩模，通过使用第三硬掩模作为掩模蚀刻第二硬掩模，通过使用第二硬掩模蚀刻第一硬掩模 作为掩模，通过离子束照射形成磁记录层的图案，并且通过使用对第一硬掩模的金属材料具有较高反应性的去除剂液体除去第一硬掩模，而不是磁记录的构成元件 层。
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公开(公告)号：US08333899B2
公开(公告)日：2012-12-18
申请号：US13007395
申请日：2011-01-14
IPC分类号： B44C1/22
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/855 , Y10T428/12465
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming on a magnetic recording layer a first hard mask, a second hard mask, a third hard mask and a resist, imprinting the resist with a stamper, removing a residue left in the recesses of the patterned resist, etching the third hard mask by use of the patterned resist as a mask, etching the second hard mask by use of the third hard mask as a mask, etching the first hard mask by use of the second hard mask as a mask, forming a pattern of the magnetic recording layer with ion beam irradiation, and removing the first hard mask by use of a remover liquid with higher reactivity to the metal material of the first hard mask than to a constituent element of the magnetic recording layer.
摘要翻译： 根据一个实施例，制造磁记录介质的方法包括在磁记录层上形成第一硬掩模，第二硬掩模，第三硬掩模和抗蚀剂，用压模压印抗蚀剂，除去留在 图案化抗蚀剂的凹部，通过使用图案化的抗蚀剂作为掩模蚀刻第三硬掩模，通过使用第三硬掩模作为掩模蚀刻第二硬掩模，通过使用第二硬掩模蚀刻第一硬掩模 作为掩模，通过离子束照射形成磁记录层的图案，并且通过使用对第一硬掩模的金属材料具有较高反应性的去除剂液体除去第一硬掩模，而不是磁记录的构成元件 层。
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4.发明授权公开(公告)号：US08634153B2
公开(公告)日：2014-01-21
申请号：US13351167
申请日：2012-01-16
申请人： Tomoyuki Maeda , Yousuke Isowaki , Akira Watanabe
发明人： Tomoyuki Maeda , Yousuke Isowaki , Akira Watanabe
CPC分类号： G11B5/7325 , G11B5/746 , G11B5/855
摘要： According to one embodiment, a magnetic recording medium includes a substrate, an auxiliary layer formed on the substrate, and at least one perpendicular magnetic recording layer formed on the auxiliary layer. The perpendicular magnetic recording layer includes a magnetic dot pattern. The perpendicular magnetic recording layer is made of an alloy material containing one element selected from iron and cobalt, and one element selected from platinum and palladium. This alloy material has the L10 structure, and is (001)-oriented. The auxiliary layer includes a dot-like first region covered with the magnetic dot pattern, and a second region not covered with the magnetic dot pattern. The first region is made of one metal selected from (100)-oriented nickel and (100)-oriented iron. The second region contains an oxide of the metal used in the first region.
摘要翻译： 根据一个实施例，磁记录介质包括基板，形成在基板上的辅助层以及形成在辅助层上的至少一个垂直磁记录层。 垂直磁记录层包括磁点图形。 垂直磁记录层由含有选自铁和钴的一种元素的合金材料和选自铂和钯的一种元素制成。 该合金材料具有L10结构，为（001）取向。 辅助层包括用磁点图案覆盖的点状第一区域和未被磁点图案覆盖的第二区域。 第一区域由选自（100）取向的镍和（100）取向的铁中的一种金属制成。 第二区域包含在第一区域中使用的金属的氧化物。
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5.发明申请公开(公告)号：US20120275059A1
公开(公告)日：2012-11-01
申请号：US13351167
申请日：2012-01-16
申请人： Tomoyuki Maeda , Yousuke Isowaki , Akira Watanabe
发明人： Tomoyuki Maeda , Yousuke Isowaki , Akira Watanabe
CPC分类号： G11B5/7325 , G11B5/746 , G11B5/855
摘要： According to one embodiment, a magnetic recording medium includes a substrate, an auxiliary layer formed on the substrate, and at least one perpendicular magnetic recording layer formed on the auxiliary layer. The perpendicular magnetic recording layer includes a magnetic dot pattern. The perpendicular magnetic recording layer is made of an alloy material containing one element selected from iron and cobalt, and one element selected from platinum and palladium. This alloy material has the L10 structure, and is (001)-oriented. The auxiliary layer includes a dot-like first region covered with the magnetic dot pattern, and a second region not covered with the magnetic dot pattern. The first region is made of one metal selected from (100)-oriented nickel and (100)-oriented iron. The second region contains an oxide of the metal used in the first region.
摘要翻译： 根据一个实施例，磁记录介质包括基板，形成在基板上的辅助层以及形成在辅助层上的至少一个垂直磁记录层。 垂直磁记录层包括磁点图形。 垂直磁记录层由含有选自铁和钴的一种元素的合金材料和选自铂和钯的一种元素制成。 该合金材料具有L10结构，为（001）取向。 辅助层包括用磁点图案覆盖的点状第一区域和未被磁点图案覆盖的第二区域。 第一区域由选自（100）取向的镍和（100）取向的铁中的一种金属制成。 第二区域包含在第一区域中使用的金属的氧化物。
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6.发明申请MAGNETIC RECORDING MEDIUM, METHOD OF MANUFACTURING THE SAME, AND MAGNETIC RECORDING/REPRODUCTION APPARATUS 审中-公开磁记录介质，其制造方法和磁记录/再现装置公开(公告)号：US20120275058A1
公开(公告)日：2012-11-01
申请号：US13351127
申请日：2012-01-16
申请人： Tomoyuki Maeda , Yousuke Isowaki , Akira Watanabe
发明人： Tomoyuki Maeda , Yousuke Isowaki , Akira Watanabe
CPC分类号： G11B5/855 , G11B5/7325 , G11B5/746
摘要： According to one embodiment, a magnetic recording medium includes a substrate, an auxiliary layer formed on the substrate, and at least one perpendicular magnetic recording layer formed on the auxiliary layer. The perpendicular magnetic recording layer includes a magnetic dot pattern. The perpendicular magnetic recording layer is made of an alloy material containing one element selected from iron and cobalt, and one element selected from platinum and palladium. This alloy material has the L10 structure, and is (001)-oriented. The auxiliary layer includes a dot-like first region covered with the magnetic dot pattern, and a second region not covered with the magnetic dot pattern. The first region is made of a (100)-oriented nickel oxide. The second region contains nickel used in the first region as a main component.
摘要翻译： 根据一个实施例，磁记录介质包括基板，形成在基板上的辅助层以及形成在辅助层上的至少一个垂直磁记录层。 垂直磁记录层包括磁点图形。 垂直磁记录层由含有选自铁和钴的一种元素的合金材料和选自铂和钯的一种元素制成。 该合金材料具有L10结构，为（001）取向。 辅助层包括用磁点图案覆盖的点状第一区域和未被磁点图案覆盖的第二区域。 第一区域由（100）取向的氧化镍制成。 第二区域包含在第一区域中使用的镍作为主要成分。
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7.发明授权公开(公告)号：US08349163B2
公开(公告)日：2013-01-08
申请号：US12961388
申请日：2010-12-06
CPC分类号： G11B5/855 , B82Y10/00 , B82Y40/00 , C25D1/003 , C25D1/10 , G03F7/0002 , G11B5/746 , G11B5/865
摘要： According to one embodiment, an electroforming master comprises a patterns of protrusions and recesses formed on one major surface of an Si substrate having two major surfaces, corresponding to information for positioning of a read/write head (a preamble, address, and burst), recording tracks or recording bits. Impurity ions are doped in the surface of this patterns of protrusions and recesses. The impurity ion concentration distribution in the film thickness direction of the Si substrate has a peak in a portion from the patterns of protrusions and recesses surface to a depth of 40 nm in the film thickness direction. The impurity concentration of this peak is 1×1020 to 2×1021 ions/cm3.
摘要翻译： 根据一个实施例，电铸母版包括形成在具有两个主表面的Si衬底的一个主表面上的突起和凹槽的图案，其对应于用于定位读/写头（前导码，地址和突发）的信息， 记录轨道或记录位。 杂质离子掺杂在这种突起和凹陷图案的表面。 Si衬底的膜厚方向上的杂质离子浓度分布在从薄膜厚度方向的突起和凹陷表面的图案到深度为40nm的部分中具有峰值。 该峰的杂质浓度为1×1020〜2×1021离子/ cm3。
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公开(公告)号：US09028704B2
公开(公告)日：2015-05-12
申请号：US13659749
申请日：2012-10-24
CPC分类号： G11B5/3163 , G11B5/3116 , G11B5/82 , G11B5/855
摘要： A manufacturing method of a magnetic recording medium includes follows: forming a magnetic recording layer on a substrate; forming an under layer and a metal release layer that forms an alloy with the under layer on the magnetic recording layer in this order and forming an alloyed release layer by alloying the under layer and the metal release layer; forming a mask layer on the alloyed release layer; forming a resist layer on the mask layer; providing a protrusion-recess pattern by patterning the resist layer; transferring the protrusion-recess pattern to the mask layer; transferring the protrusion-recess pattern to the alloyed release layer; transferring the protrusion-recess pattern to the magnetic recording layer; dissolving the alloyed release layer by using a stripping solution and removing a layer formed on the alloyed release layer from an upper side of the magnetic recording layer.
摘要翻译： 磁记录介质的制造方法如下：在基板上形成磁记录层; 形成下层和金属剥离层，其与磁性记录层上的下层依次形成合金，并通过使底层和金属剥离层合金化而形成合金剥离层; 在合金剥离层上形成掩模层; 在掩模层上形成抗蚀剂层; 通过图案化抗蚀剂层提供突起 - 凹陷图案; 将突起凹部图案转印到掩模层; 将所述突起凹部图案转印到所述合金剥离层; 将突起凹部图案转印到磁记录层; 通过使用剥离溶液溶解合金剥离层，并从磁记录层的上侧除去在合金剥离层上形成的层。
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公开(公告)号：US20130216864A1
公开(公告)日：2013-08-22
申请号：US13597608
申请日：2012-08-29
CPC分类号： G11B5/855
摘要： According to at least one embodiment, a release layer, a first mask layer containing a first metal material, an antidiffusion layer containing an oxide or nitride of the first metal material, and a second mask layer containing a second metal material are formed on a magnetic recording layer, a resist layer is formed on the second mask layer, and projections pattern is formed in the resist layer and sequentially transferred to the second mask layer, antidiffusion layer, first mask layer, release layer, and magnetic recording layer. After that, the release layer is removed.
摘要翻译： 根据至少一个实施方式，在磁性体上形成剥离层，含有第一金属材料的第一掩模层，含有第一金属材料的氧化物或氮化物的防扩散层，以及含有第二金属材料的第二掩模层 在第二掩模层上形成抗蚀剂层，并且在抗蚀剂层中形成突起图案，并依次转印到第二掩模层，反扩散层，第一掩模层，剥离层和磁记录层。 之后，去除释放层。
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公开(公告)号：US08858809B2
公开(公告)日：2014-10-14
申请号：US13607134
申请日：2012-09-07
申请人： Akira Watanabe , Kaori Kimura , Kazutaka Takizawa , Takeshi Iwasaki , Tsuyoshi Onitsuka , Akihiko Takeo
发明人： Akira Watanabe , Kaori Kimura , Kazutaka Takizawa , Takeshi Iwasaki , Tsuyoshi Onitsuka , Akihiko Takeo
CPC分类号： G11B5/855
摘要： A manufacturing method of a magnetic recording medium includes steps of forming a magnetic recording layer, a first mask layer, a second mask layer containing silicon as primary component, a strip layer, a third mask layer, and a resist layer, a step of patterning the resist layer to provide a pattern, steps of transferring the pattern to the third mask layer, to the strip layer, and to the second mask layer, a step of removing the strip layer by wet etching and of stripping the third mask layer and the resist layer above the magnetic recording layer, steps of transferring the pattern to the first mask layer and to the magnetic recording layer, and a step of stripping the first mask layer remaining on the magnetic recording layer.
摘要翻译： 磁记录介质的制造方法包括以下步骤：形成磁记录层，第一掩模层，含硅作为主要成分的第二掩模层，带状层，第三掩模层和抗蚀剂层，图案化步骤 提供图案的抗蚀剂层，将图案转移到第三掩模层的步骤，到带状层和第二掩模层，通过湿法蚀刻去除剥离层并剥离第三掩模层的步骤和 抗蚀剂层，将图案转印到第一掩模层和磁记录层的步骤，以及剥离残留在磁记录层上的第一掩模层的步骤。
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