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81.发明授权Automatic focus detection method, automatic focus detection apparatus, and inspection apparatus 失效自动对焦检测方法，自动对焦检测装置和检查装置
公开(公告)号：US6091075A
公开(公告)日：2000-07-18
申请号：US87901
申请日：1998-06-01
申请人： Yukihiro Shibata , Shunji Maeda , Hiroshi Makihara , Minoru Yoshida , Yasuhiko Nakayama , Kenji Oka
发明人： Yukihiro Shibata , Shunji Maeda , Hiroshi Makihara , Minoru Yoshida , Yasuhiko Nakayama , Kenji Oka
CPC分类号： G02B21/241 , G01N21/9501
摘要： An automatic focus detection method comprises the steps of: irradiating onto a single spot of a sample a plurality of beams of illuminating light transmitted and condensed through an objective lens in a symmetrically diagonal manner with respect to an optical axis of the objective lens; branching reflected light from the same spot of the illuminated sample after transmission through the objective lens, in directions of illumination symmetrical with respect to the optical axis so as to obtain a plurality of optical images; and causing a photoelectric conversion device to receive the branched optical images for conversion to an electric signal representing light intensity distribution of the images, whereby a defocus of the sample is detected based on a discrepancy between the optical axis and the center of the light intensity distribution.
摘要翻译： 一种自动对焦检测方法，包括以下步骤：以相对于物镜的光轴对称对角线的方式，将通过物镜透射和聚光的多束照明光照射在样品的单个点上; 在相对于光轴对称的照明方向透射物镜之后，将来自照射样品的同一点的反射光分支，以获得多个光学图像; 并且使光电转换装置接收用于转换为表示图像的光强度分布的电信号的分支光学图像，由此基于光轴和光强度分布的中心之间的差异来检测样品的散焦 。
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公开(公告)号：US5614926A
公开(公告)日：1997-03-25
申请号：US579033
申请日：1995-12-19
CPC分类号： G06F3/04883
摘要： A word processor is provided with a handwriting text processing function. A display displays document and text processing information. A pointing device enters handwritten text processing figures on a display. A memory stores text processing instructions associated with an text processing figure drawn on the screen. A direction in which the pointing device is moved on the screen to draw a figure, a length of the drawn figure on the screen, and/or which of several regions of the display the pointing device is presently pointing to are determined and used to distinguish different text processing functions associated with the same basic handwritten text processing figure. The word processor uses this information to selectively execute different kinds of text processing instructions such as an up-scroll of the screen, a down-scroll of the screen, a display of document head, a display of document tail, a display of underline, a display of line head, an arbitrary cursor movement, and a cursor shift on the same line.
摘要翻译： 文字处理器具有手写文字处理功能。 显示器显示文档和文本处理信息。 指示设备在显示器上输入手写文字处理图。 存储器存储与在屏幕上绘制的文本处理图形相关联的文本处理指令。 指定设备在屏幕上移动以绘制图形的方向，屏幕上绘制的图形的长度和/或指示设备当前指向的显示器的几个区域中的哪一个被确定并用于区分 不同的文字处理功能与相同的基本手写文字处理图相关联。 字处理器使用该信息来选择性地执行不同类型的文本处理指令，例如屏幕的向上滚动，屏幕的向下滚动，文档头的显示，文档尾部的显示，下划线的显示， 行头的显示，任意的光标移动和同一行上的光标移位。
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83.发明授权Communication processing device that stores communication data in buffers, image forming apparatus, and method of communication processing 失效将通信数据存储在缓冲器中的通信处理装置，图像形成装置和通信处理方法公开(公告)号：US08751702B2
公开(公告)日：2014-06-10
申请号：US13770121
申请日：2013-02-19
申请人： Yukihiro Shibata
发明人： Yukihiro Shibata
IPC分类号： G06F13/20
CPC分类号： G06F5/14 , G06F1/3206 , G06F1/3275 , G06F5/10 , Y02D10/13 , Y02D10/14
摘要： A communication processing device includes a communication data processing circuit that (i) issues an access request for a buffer specified by a descriptor, among a plurality of buffers in a first memory, and (ii) outputs a predetermined switching permission signal at a time when a data access for one of the plurality of buffers is completed. The communication processing device also includes a second memory and a transmission destination switching circuit. The second memory includes a plurality of alternative buffers corresponding to the plurality of buffers. The transmission destination switching circuit switches a transmission destination of the access request from one of the plurality of buffers in the first memory to one of the plurality of alternative buffers in the second memory, based on the switching permission signal.
摘要翻译： 一种通信处理装置，包括：通信数据处理电路，其在第一存储器中的多个缓冲器中发出对由描述符指定的缓冲器的访问请求;以及（ii）在第一存储器中输出预定的切换许可信号， 完成对多个缓冲器之一的数据访问。 通信处理装置还包括第二存储器和发送目的地切换电路。 第二存储器包括对应于多个缓冲器的多个替代缓冲器。 发送目的地交换电路基于切换许可信号，将第一存储器中的多个缓冲器中的一个缓冲器中的一个切换到第二存储器中的多个替换缓冲器之一。
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公开(公告)号：US08416292B2
公开(公告)日：2013-04-09
申请号：US12389962
申请日：2009-02-20
IPC分类号： H04N7/18
CPC分类号： G01N21/9501 , G01N21/95607 , G06T7/0004 , G06T2207/10152 , G06T2207/30148
摘要： In a defect inspection apparatus for inspecting a wafer provided with a circuit pattern for defects, the illuminating direction of illuminating light rays is selectively determined such that an area containing a defect that scatters light of high intensity coincides with the aperture of a dark-field detecting system, and such that regularly reflected light regularly reflected by a pattern, which is noise to defect detection, does not coincide with the aperture of the dark field detecting system.
摘要翻译： 在用于检查具有缺陷的电路图案的晶片的缺陷检查装置中，选择性地确定照明光线的照明方向，使得包含散射高强度的光的缺陷的区域与暗场检测的孔径一致 系统，并且使得通过由缺陷检测的噪声的图案规则反射的规则反射光与暗视场检测系统的孔径不一致。
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公开(公告)号：US08303797B2
公开(公告)日：2012-11-06
申请号：US11763065
申请日：2007-06-14
申请人： Naoya Hayamizu , Yukihiro Shibata , Masaaki Kato , Hiroyuki Fukui
发明人： Naoya Hayamizu , Yukihiro Shibata , Masaaki Kato , Hiroyuki Fukui
摘要： A cleaning system includes: a sulfuric acid electrolytic portion configured to electrolyze a sulfuric acid solution to generate an oxidizing substance in an anode chamber, a concentrated sulfuric acid supply portion configured to supply a concentrated sulfuric acid solution to the anode chamber, and a cleaning treatment portion configured to carry out cleaning treatment of an object to be cleaned using an oxidizing solution comprising the oxidizing substance. The sulfuric acid electrolytic portion has an anode, a cathode, a diaphragm which is provided between the anode and the cathode, the anode chamber which is demarcated between the anode and the diaphragm and a cathode chamber which is demarcated between the cathode and the diaphragm.
摘要翻译： 清洗系统包括：硫酸电解部，其配置为在阳极室中电解硫酸溶液以产生氧化物质;浓硫酸供给部，其将浓硫酸溶液供给到所述阳极室;以及清洗处理 所述部分被构造成使用包含所述氧化物质的氧化溶液进行待清洁物体的清洁处理。 硫酸电解部分具有阳极，阴极，设置在阳极和阴极之间的隔膜，在阳极和隔膜之间划分的阳极室和在阴极和隔膜之间划分的阴极室。
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公开(公告)号：US08203706B2
公开(公告)日：2012-06-19
申请号：US12423902
申请日：2009-04-15
IPC分类号： G01N21/00
CPC分类号： G01N21/95623 , G01N2021/9563 , G03F7/7065
摘要： To provide a defect inspection apparatus for inspecting defects of a specimen without lowering resolution of a lens, without depending on a polarization characteristic of a defect scattered light, and with high detection sensitivity that is realized by the following. A detection optical path is branched by at least one of spectral splitting and polarization splitting, a spatial filter in the form of a two-dimensional array is disposed after the branch, and only diffracted light is shielded by the spatial filter in the form of a two-dimensional array.
摘要翻译： 提供一种用于检查样本缺陷的缺陷检查装置，而不会降低透镜的分辨率，而不依赖于缺陷散射光的偏振特性，并且具有通过以下实现的高检测灵敏度。 通过光谱分离和偏振分割中的至少一个来分支检测光路，在分支之后设置二维阵列形式的空间滤波器，只有衍射光被空间滤波器屏蔽 二维数组。
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公开(公告)号：US20120092484A1
公开(公告)日：2012-04-19
申请号：US13375239
申请日：2010-07-01
IPC分类号： H04N7/18
CPC分类号： G01N21/956 , G01N21/9501
摘要： To effectively utilize the polarization property of an inspection subject for obtaining higher inspection sensitivity, for the polarization of lighting, it is necessary to observe differences in the reflection, diffraction, and scattered light from the inspection subject because of polarization by applying light having the same elevation angle and wavelength in the same direction but different polarization. According to conventional techniques, a plurality of measurements by changing polarizations is required to cause a prolonged inspection time period that is an important specification of inspection apparatuses. In this invention, a plurality of polarization states are modulated in micro areas in the lighting beam cross section, images under a plurality of polarized lighting conditions are collectively acquired by separately and simultaneously forming the scattered light from the individual micro areas in the individual pixels of a sensor, whereby inspection sensitivity and sorting and sizing accuracy are improved without reducing throughput.
摘要翻译： 为了有效地利用检查对象的偏振特性以获得更高的检测灵敏度，对于照明的偏振，需要观察来自检查对象的反射，衍射和散射光的差异，因为通过施加具有相同的光的偏振 仰角和波长相同但偏振不同。 根据常规技术，需要通过改变极化的多个测量来引起作为检查设备的重要规格的延长的检查时间段。 在本发明中，在照明光束横截面的微小区域中调制多个偏振状态，通过分别并且同时形成来自各个像素中的各个微区域的散射光，共同地获得多个偏振光照条件下的图像 传感器，从而在不降低生产能力的情况下提高检测灵敏度和分选和尺寸精度。
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公开(公告)号：US08121398B2
公开(公告)日：2012-02-21
申请号：US12420932
申请日：2009-04-09
CPC分类号： G06K9/00 , G01N21/9501 , G06T7/0004 , G06T2207/30148 , H04N5/341 , H04N5/3743 , H04N5/378
摘要： A two-dimensional sensor is installed inclining at a predetermined angle to a moving direction of a stage on which an object to be inspected is mounted and, in synchronism with the movement of the stage, a picked up image is rearranged so that there can be obtained an image in high-density sampling with a picture-element size or less of the two-dimensional sensor with respect to a wafer. Thus, interpolation calculation during position alignment becomes unnecessary, and size calculation and classification of a defect can be performed with high accuracy.
摘要翻译： 将二维传感器安装成倾斜预定角度，使其与安装被检查物体的平台的移动方向倾斜，并且与舞台的移动同步，拾取图像被重新排列，使得可以 以相对于晶片的二维传感器的像素大小或更小的高密度采样获得图像。 因此，位置对准中的插补计算变得不必要，可以高精度地执行缺陷的尺寸计算和分类。
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公开(公告)号：US07916929B2
公开(公告)日：2011-03-29
申请号：US12359452
申请日：2009-01-26
申请人： Shunji Maeda , Kenji Oka , Yukihiro Shibata , Minoru Yoshida , Chie Shishido , Yuji Takagi , Atsushi Yoshida , Kazuo Yamaguchi
发明人： Shunji Maeda , Kenji Oka , Yukihiro Shibata , Minoru Yoshida , Chie Shishido , Yuji Takagi , Atsushi Yoshida , Kazuo Yamaguchi
IPC分类号： G06K9/00
CPC分类号： G06T7/001 , G01N21/9501 , G01N21/95607 , G06T7/0004 , G06T2207/30148
摘要： A method of inspecting patterns, including: adjusting a brightness of at least one of a first bright field image and a second bright field image detected from a specimen and directed to similar patterns on differing parts of the specimen, so as to more closely match a brightness; comparing the images which are adjusted in brightness to match with each other to detect dissimilarities indicative of a defect of the pattern, wherein in adjusting the brightness, the brightness between the first bright field image and the second bright field image is adjusted by performing a gradation conversion of at least one of the brightness between the first bright field image and the second bright field image; and wherein in the comparing, said defect of the pattern is detected by using information of a scattered diagram of brightness of the first bright field image and the second bright field image.
摘要翻译： 一种检查图案的方法，包括：调整从样本检测到的第一明视野图像和第二亮视场图像中的至少一个的亮度，并且针对样本的不同部分上的相似图案，以便更紧密地匹配 亮度; 将亮度调整后的图像进行比较以相互匹配，以检测表示图案缺陷的不相似性，其中在调整亮度时，通过执行渐变来调整第一亮场图像和第二亮视场图像之间的亮度 第一亮场图像和第二亮场图像之间的亮度中的至少一个的转换; 并且其中在所述比较中，通过使用所述第一亮场图像和所述第二亮视场图像的亮度的散射图的信息来检测所述图案的所述缺陷。
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公开(公告)号：US20090214102A1
公开(公告)日：2009-08-27
申请号：US12359452
申请日：2009-01-26
申请人： Shunji Maeda , Kenji Oka , Yukihiro Shibata , Minoru Yoshida , Chie Shishido , Yuji Takagi , Atsushi Yoshida , Kazuo Yamaguchi
发明人： Shunji Maeda , Kenji Oka , Yukihiro Shibata , Minoru Yoshida , Chie Shishido , Yuji Takagi , Atsushi Yoshida , Kazuo Yamaguchi
IPC分类号： G06K9/00
CPC分类号： G06T7/001 , G01N21/9501 , G01N21/95607 , G06T7/0004 , G06T2207/30148
摘要： A method of inspecting patterns, including: adjusting a brightness of at least one of a first bright field image and a second bright field image detected from a specimen and directed to similar patterns on differing parts of the specimen, so as to more closely match a brightness; comparing the images which are adjusted in brightness to match with each other to detect dissimilarities indicative of a defect of the pattern, wherein in adjusting the brightness, the brightness between the first bright field image and the second bright field image is adjusted by performing a gradation conversion of at least one of the brightness between the first bright field image and the second bright field image; and wherein in the comparing, said defect of the pattern is detected by using information of a scattered diagram of brightness of the first bright field image and the second bright field image.
摘要翻译： 一种检查图案的方法，包括：调整从样本检测到的第一明视野图像和第二亮视场图像中的至少一个的亮度，并指示到样本的不同部分上的相似图案，以便更紧密地匹配 亮度; 将亮度调整后的图像进行比较以相互匹配，以检测表示图案缺陷的不相似性，其中在调整亮度时，通过执行渐变来调整第一亮场图像和第二亮视场图像之间的亮度 第一亮场图像和第二亮场图像之间的亮度中的至少一个的转换; 并且其中在所述比较中，通过使用所述第一亮场图像和所述第二亮视场图像的亮度的散射图的信息来检测所述图案的所述缺陷。
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