公开(公告)号：US20080111095A1

公开(公告)日：2008-05-15

申请号：US11907222

申请日：2007-10-10

Applicant: Masahiro Naitoh ,  Michinori Ikuji ,  Shin Ito ,  Makoto Iwata

Inventor： Masahiro Naitoh ,  Michinori Ikuji ,  Shin Ito ,  Makoto Iwata

IPC: F16K31/126

CPC classification number: F16K51/02 ,  F16K31/1221

Abstract: To provide a vacuum valve with an improved endurance of a bellows, a vacuum valve comprises: a valve section including a first port, a second port, a valve seat provided between the first and second ports, and a valve element movable into or out of contact with the valve seat; an actuator section including an orifice through which an operating fluid is supplied to the actuator section, and a piston coupled to the valve element, the piston being allowed to operate according to changes of pressure of the operating fluid to apply a driving force to the valve section; and a bellows which can be contracted and elongated as the valve element vertically moves upward and downward. The orifice is designed to have an effective sectional area determined so that an operating speed of the valve element and the piston is controlled to a predetermined speed for preventing damage of the bellows.

Abstract translation: 为了提供具有改进的波纹管耐久性的真空阀，真空阀包括：阀部分，其包括第一端口，第二端口，设置在第一和第二端口之间的阀座和可移入或移出 与阀座接触; 致动器部分，其包括孔口，工作流体通过该孔口供应到致动器部分;以及活塞，其联接到阀元件，活塞被允许根据工作流体的压力变化来操作以向阀门施加驱动力 部分; 以及当阀元件垂直向上和向下移动时可以收缩和伸长的波纹管。 孔口被设计成具有确定的有效截面面积，使得阀元件和活塞的操作速度被控制到预定速度以防止损坏波纹管。

公开(公告)号：US20070295405A1

公开(公告)日：2007-12-27

申请号：US11812051

申请日：2007-06-14

Applicant: Tsuneyuki Okabe ,  Shigeyuki Okura ,  Hiroki Doi ,  Minoru Ito ,  Yoji Mori ,  Yasunori Nishimura

Inventor： Tsuneyuki Okabe ,  Shigeyuki Okura ,  Hiroki Doi ,  Minoru Ito ,  Yoji Mori ,  Yasunori Nishimura

IPC: F16K3/36

CPC classification number: F16K27/003 ,  F16K7/14 ,  F16K31/06 ,  H01L21/31691 ,  Y10T137/4259 ,  Y10T137/87885

Abstract: A liquid raw material supply unit for a vaporizer is adapted to supply a liquid raw material to the vaporizer that vaporizes the liquid raw material. The unit comprises: a manifold internally formed with a flow passage; and a plurality of fluid control valves mounted on the manifold, wherein the plurality of fluid control valves includes: a liquid raw material control valve for controlling supply of the liquid raw material to the flow passage; a cleaning solution control valve for controlling supply of a cleaning solution to the flow passage; a purge gas control valve for controlling supply of a purge gas to the flow passage; and a first introducing control valve connectable to the vaporizer for controlling supply of a fluid from the flow passage to the vaporizer, the purge gas control valve, the cleaning solution control valve, the liquid raw material control valve, and the first introducing control valve being mounted on the manifold in this order from an upstream side of the manifold, wherein the flow passage is connected to valve ports of the plurality of control valves respectively, the valve ports communicating with valve openings of the respective control valves, and the flow passage is configured to allow the purge gas supplied from the purge gas control valve to directly flow in the valve ports of the cleaning solution control valve and the liquid raw material control valve placed downstream from the purge gas control valve.

Abstract translation: 用于蒸发器的液体原料供应单元适于将液体原料供应到蒸发液体原料的蒸发器。 该单元包括：内部形成有流动通道的歧管; 以及安装在所述歧管上的多个流体控制阀，其中，所述多个流体控制阀包括：液体原料控制阀，用于控制所述液体原料供给所述流路; 清洗液控制阀，用于控制向所述流路供给清洗液; 吹扫气体控制阀，用于控制向所述流动通道供应净化气体; 以及可连接到蒸发器的第一引入控制阀，用于控制从流动通道到蒸发器的流体供应，吹扫气体控制阀，清洗溶液控制阀，液体原料控制阀和第一引入控制阀是 从歧管的上游侧依次安装在歧管上，其中流路分别连接到多个控制阀的阀口，与各个控制阀的阀口连通的阀口，流路是 被配置为允许从净化气体控制阀提供的净化气体直接流入清洗液控制阀的阀口和设置在净化气体控制阀下游的液体原料控制阀。

公开(公告)号：USD549077S1

公开(公告)日：2007-08-21

申请号：US29258281

申请日：2006-04-20

Applicant: Takashi Yajima ,  Katsunori Hirose

Designer： Takashi Yajima ,  Katsunori Hirose

公开(公告)号：US20070177998A1

公开(公告)日：2007-08-02

申请号：US11655081

申请日：2007-01-19

Applicant: Takashi Kato

Inventor： Takashi Kato

IPC: F04B43/06 ,  F04B11/00

CPC classification number: F04B43/113 ,  F04B7/02 ,  F04B43/0081 ,  F04B43/084 ,  F04B49/065 ,  F04B2201/0201

Abstract: A liquid chemical supply system includes a liquid chemical pump having a pump chamber for supplying a liquid chemical and a volume variation member that will vary the volume of the pump chamber, and will intake or discharge the liquid chemical based upon a change in the volume of the pump chamber in accordance with the volume variation member. The system also comprises an operation means for causing the volume variation member to operate, an operation amount detection means for detecting the operation amount of the volume variation member, a displacement control means for performing displacement control so that the volume variation member will be displaced by the operation means when liquid chemical ports that lead to the pump chamber are in the closed state, and a determination means for determining the presence or absence of gas inside the pump chamber based upon the operation amount detection results from the operation amount detection means during displacement control.

Abstract translation: 液体化学品供给系统包括液体化学泵，其具有用于供应液体化学品的泵室和将改变泵室的体积的体积变化构件，并且将基于容积变化的体积的变化来吸入或排出液体化学品 泵室根据体积变化构件。 该系统还包括用于使体积变化构件运行的操作装置，用于检测体积变化构件的操作量的操作量检测装置，用于进行位移控制的位移控制装置，使得体积变化构件将被移位 所述操作装置是指通过所述泵室的液体化学品口处于关闭状态，以及确定装置，用于根据来自所述操作量检测装置的位移期间的操作量检测结果来确定所述泵室内的气体的存在或不存在 控制。

公开(公告)号：US20060196577A1

公开(公告)日：2006-09-07

申请号：US11417133

申请日：2006-05-04

Applicant: Toshiyuki Nagao ,  Shigeru Osugi ,  Hiroshi Tomita

Inventor： Toshiyuki Nagao ,  Shigeru Osugi ,  Hiroshi Tomita

IPC: B65B1/04

CPC classification number: F16K27/02 ,  F16K1/42

Abstract: A chemical liquid control valve is provided with a barrier on an outer circumferential end portion of a protruding part (an outer circumferential bottom portion of a valve seat). The barrier is placed so that an angle between the center line of an outlet passage and the line extending between the center of a valve port and each end of the barrier. The barrier is designed to have a height relative to a contact surface of the valve seat with a valve element is substantially half of the travel distance of a diaphragm valve element.

Abstract translation: 化学液体控制阀在突出部（阀座的外周底部）的外周端部设置有阻挡物。 隔离物被放置成使得出口通道的中心线与在阀口的中心与屏障的每个端部之间延伸的线之间的角度。 阻挡件被设计为具有相对于阀座的接触表面的高度，阀元件基本上是隔膜阀元件的移动距离的一半。

公开(公告)号：US06913031B2

公开(公告)日：2005-07-05

申请号：US10491955

申请日：2002-10-16

Applicant: Tokuhide Nawata ,  Yoshihisa Sudoh ,  Masayuki Kouketsu ,  Masayuki Watanabe ,  Hiroki Doi

Inventor： Tokuhide Nawata ,  Yoshihisa Sudoh ,  Masayuki Kouketsu ,  Masayuki Watanabe ,  Hiroki Doi

IPC: G05D7/06

CPC classification number: G05D7/0647 ,  G05D7/0635 ,  Y10T137/0379 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/86421

Abstract: A flow controller and a flow controlling method are adapted to be released from conventional restrictions by using a novel type called a pulse shot type. A pulse shot (opening/closing operation of a first cutoff valve (12) and, after that, opening/closing operation of a second cutoff valve (17)) is repeated. Simultaneously, a volume flow Q of process gas exhausted from the second cutoff valve (17) per unit time on the basis of after-filling pressure and after-exhaust pressure of the process gas in a gas filling capacity (13) measure by a pressure sensor (14). Furthermore, a mode of the pulse shot is changed to control the volume flow Q of the process gas exhausted from the second cutoff valve (17) per unit time.

Abstract translation: 流量控制器和流量控制方法适用于通过使用称为脉冲射击型的新颖型式从常规限制中解除。 重复脉冲（第一截止阀（12）的打开/关闭操作），之后，重新开启第二截止阀（17）的打开/关闭操作。 同时，基于填充气体（13）中的处理气体的补充压力和排气后压力，单位时间内从第二截止阀（17）排出的处理气体的体积流量Q通过压力 传感器（14）。 此外，改变脉冲射击的模式，以控制每单位时间从第二截止阀（17）排出的处理气体的体积流量Q。

公开(公告)号：US06837919B2

公开(公告)日：2005-01-04

申请号：US10259329

申请日：2002-09-30

Applicant: Yoshinobu Asako ,  Satoru Ono ,  Kazutoshi Ito ,  Eiji Uematu

Inventor： Yoshinobu Asako ,  Satoru Ono ,  Kazutoshi Ito ,  Eiji Uematu

IPC: B01D19/00

CPC classification number: B01D19/0036

Abstract: According to the present invention, electrorheological fluid is deaerated after it is sealed in a closed device which is operated by the electrorheological fluid. Thus, it is possible to control the operation of the closed device in accordance with an electric field. Additionally, the control of viscosity is not affected by repetitive operations of the closed device, thereby obtaining a closed device having a smooth operation and good repeatability. The deaeration is achieved under a predetermined reduced pressure, for example, of not more than 100 torr. In addition thereto, a suitable heating process is carried out as required.

公开(公告)号：US20040195534A1

公开(公告)日：2004-10-07

申请号：US10833026

申请日：2004-04-28

Applicant: CKD CORPORATION

Inventor： Eitaro Ijichi ,  Shigeru Osugi

IPC: F16K031/143 ,  F16K039/02

CPC classification number: F16K31/1266 ,  F16K31/1268

Abstract: A diaphragm valve capable of increasing durability of a diaphragm comprises a valve body internally formed with a valve chamber having an open upper end and a suck-back chamber having an open lower end, between an inlet passage and an outlet passage, and a through hole which provides communication between the valve chamber and the suck-back chamber. The open end of the valve chamber is closed by a first diaphragm which is brought into and out of contact with a valve seat. The open end of the suck-back chamber is closed by a second diaphragm. The first and second diaphragms are substantially identical in shape. Each circumferential edge portion of the first and second diaphragms is tightly retained by a retaining member mountable to the valve body so that the diaphragms are curved outwardly with respect to the valve chamber and the suck-back chamber respectively. The first and second diaphragms are connected by a connecting rod passing through the through hole so that the diaphragms are deformed synchronously by operation of an actuator.

Abstract translation: 能够提高隔膜的耐久性的隔膜阀具有内部形成有阀室的阀体，该阀体具有开口的上端和具有敞开的下端的吸入室，位于入口通道和出口通道之间，通孔 其提供阀室和吸回室之间的连通。 阀室的开口端由与阀座进入和脱离接触的第一隔膜封闭。 吸回室的开口端由第二隔膜封闭。 第一和第二隔膜的形状基本相同。 第一和第二隔膜的每个圆周边缘部分被可安装到阀体的保持构件紧密地保持，使得隔膜相对于阀室和吸回室分别向外弯曲。 第一和第二隔膜通过穿过通孔的连杆连接，使得隔膜通过致动器的操作而同步变形。

公开(公告)号：US20040163463A1

公开(公告)日：2004-08-26

申请号：US10372861

申请日：2003-02-26

Applicant: CKD CORPORATION

Inventor： Akihiro Ito ,  Yoshihiko Kawai

IPC: G01F001/68

CPC classification number: G01F1/6845 ,  G01F1/6842

Abstract: A board mounting thereon a measuring chip is fixed to a body in close contact relation to form a main passage and a sensor passage inside of the body, while a hot wire for a temp. sensor and a hot wire for a flow velocity sensor, both being provided on the measuring chip, are bridged across the sensor passage, to measure the flow rate of a gas flowing in the inside of the body by means of an electric circuit on the back side of the board. In a state where an electrode for a hot wire on the measuring chip is joined to an electrode for the electric circuit on the board, the temp. sensor hot wire and the flow velocity sensor hot wire both provided on the measuring chip are connected to the electric circuit on the back side of the board.

公开(公告)号：US6152175A

公开(公告)日：2000-11-28

申请号：US89346

申请日：1998-06-03

Applicant: Masahito Itoh ,  Toshiyasu Inagaki ,  Minoru Ueta ,  Masahiko Yada ,  Hiroshi Itafuji

Inventor： Masahito Itoh ,  Toshiyasu Inagaki ,  Minoru Ueta ,  Masahiko Yada ,  Hiroshi Itafuji

IPC: F16K27/00 ,  F17D1/04 ,  F16K51/00

CPC classification number: F16K27/003 ,  F17D1/04 ,  Y10T137/87571 ,  Y10T137/87684 ,  Y10T137/87885

Abstract: A process gas supply unit without conventional pipes. The process gas supply unit may include the components of a mass flow controller, an input valve, an output valve, a purge valve, a vacuum valve, a check valve, a regulator, and a filter. Module blocks are attached to at least one of the components with bolts from a predetermined direction. The module blocks are mounted on base plates with bolts from the same predetermined direction, and the base plates are mounted on a mounting panel with bolts from the same predetermined direction.

Abstract translation: 没有常规管道的工艺气体供应单元。 过程气体供应单元可以包括质量流量控制器，输入阀，输出阀，净化阀，真空阀，止回阀，调节器和过滤器的组件。 模块通过螺栓从预定方向附接至至少一个部件。 模块通过螺栓从相同的预定方向安装在基板上，并且用相同的预定方向的螺栓将基板安装在安装面板上。