公开(公告)号：US11587960B2

公开(公告)日：2023-02-21

申请号：US17100339

申请日：2020-11-20

Applicant: ActLight SA

Inventor： Serguei Okhonin ,  Maxim Gureev ,  Denis Sallin

IPC: H01L31/02 ,  H01L27/146

Abstract: A photodetector device comprising n-type and p-type light absorbing regions arranged to form a pn-junction and n+ and p+ contact regions connected to respective contacts. The light absorbing regions and the contact regions are arranged in a sequence n+ p n p+ so that, after a voltage applied between the n+ and p+ contacts is switched from a reverse bias to a forward bias, electrons and holes which are generated in the light absorbing regions in response to photon absorption drift towards the p+ and n+ contact regions respectively, which causes current to start to flow between the contacts after a time delay which is inversely proportional to the incident light intensity.

公开(公告)号：US10964837B2

公开(公告)日：2021-03-30

申请号：US16387011

申请日：2019-04-17

Applicant: ActLight SA

Inventor： Denis Sallin ,  Maxim Gureev ,  Serguei Okhonin

IPC: H01L27/146 ,  H01L31/113 ,  H01L31/18 ,  H01L31/0224 ,  H01L31/0352

Abstract: According to embodiments of the present disclosure, a dynamic photodiode may include a substrate including a major surface; a hedge formation extruding perpendicularly from the major surface; a first resettable region disposed on a top surface the hedge formation; a second resettable region disposed on the top surface of the hedge formation; a first doped region disposed on the top surface of the hedge formation between the first resettable region and the second resettable region, the first doped region including a first contact configured to receive a first voltage; and a second doped region disposed on a top surface of the hedge formation, the second doped region including a second contact configured to receive a second voltage. Exposed portions of the substrate form light absorbing regions configured to generate electron-hole pairs in the substrate.

公开(公告)号：US20230378386A1

公开(公告)日：2023-11-23

申请号：US18358817

申请日：2023-07-25

Applicant: ActLight SA

Inventor： Maxim GUREEV ,  Denis SALLIN ,  Serguei OKHONIN

IPC: H01L31/0352 ,  G01J1/42 ,  H01L25/18 ,  H01L27/146 ,  H01L31/103

CPC classification number: H01L31/035272 ,  G01J1/42 ,  H01L25/18 ,  H01L27/1463 ,  H01L27/14643 ,  H01L31/1037

Abstract: A dynamic photodiode detector or detector array having a light absorbing region of doped semiconductor material for absorbing photons. Electrons or holes generated by photon absorption are detected with a construction of oppositely heavily doped anode and cathode regions and a heavily doped ground region of the same doping type as the anode region. Photon detection involves switching the device from reverse bias to forward bias to create a depletion region enclosing the anode region. When a photon is then absorbed the electron or hole thereby generated drifts under the electric field induced by the biasing to the depletion region where it causes the anode-to-ground current to increase. Furthermore, the detector is configured such that anode-to-cathode current starts to flow once a threshold number of electrons or holes reaches the depletion region, where the threshold may be one to provide single photon detection.

公开(公告)号：US10509113B2

公开(公告)日：2019-12-17

申请号：US15481784

申请日：2017-04-07

Applicant: ActLight SA

Inventor： Denis Sallin ,  Maxim Gureev ,  Alexander Kvasov ,  Serguei Okhonin

IPC: G01S7/48 ,  G01S7/295 ,  G01S13/08 ,  G01S17/10

Abstract: In some embodiments, a measurement system may include a time to digital converter (TDC) configured to determine a first digitized time at which it receives a command signal and a second digitized time at which it receives an alert signal. The first digitized time and the second digitized time may be determined for N number of iterations. The command signal may be delayed by a delay time, and the delay time may be varied for each of the N number of iterations. The measurement system may include a first dynamic photodiode (DPD) configured to switch from a reverse bias mode to an active mode based on the command signal. The TDC may calculate a difference between the first digitized time and the second digitized time for each of the N number of iterations, and the difference may vary as the delay time is varied.

公开(公告)号：US11139333B2

公开(公告)日：2021-10-05

申请号：US16776572

申请日：2020-01-30

Applicant: Actlight SA

Inventor： Serguei Okhonin ,  Maxim Gureev ,  Denis Sallin

IPC: H01L31/109 ,  H01L27/146

Abstract: A photodetector sensor array device as usable for camera chips comprises upper and lower contact layers of n+ and p+ semiconductor material either side of a light absorbing region made of either one layer, or two oppositely doped layers, of semiconductor material. Insulating trenches of dielectric material extending through the layers to form the individual pixels. Respective contacts are connected to the upper and lower contact layers so that each pixel can be reverse biased or forward biased. In operation, the device is reset with a reverse bias, and then switched to forward bias for sensing. After switching, carriers generated in response to photon absorption accumulate in potential wells in the light absorbing region and so reduce the potential barriers to the contact layers, which causes current to start to flow between the contacts after a time delay which is inversely proportional to the incident light intensity.

公开(公告)号：US11114480B2

公开(公告)日：2021-09-07

申请号：US16429158

申请日：2019-06-03

Applicant: Actlight SA

Inventor： Serguei Okhonin ,  Maxim Gureev ,  Denis Sallin

IPC: H01L31/0352 ,  H01L27/146

Abstract: A photodetector device comprising n-type and p-type light absorbing regions arranged to form a pn-junction and n+ and p+ contact regions connected to respective contacts. The light absorbing regions and the contact regions are arranged in a sequence n+ p n p+ so that, after a voltage applied between the n+ and p+ contacts is switched from a reverse bias to a forward bias, electrons and holes which are generated in the light absorbing regions in response to photon absorption drift towards the p+ and n+ contact regions respectively, which causes current to start to flow between the contacts after a time delay which is inversely proportional to the incident light intensity.

公开(公告)号：US11837669B2

公开(公告)日：2023-12-05

申请号：US17216139

申请日：2021-03-29

Applicant: ActLight SA

Inventor： Denis Sallin ,  Maxim Gureev ,  Serguei Okhonin

IPC: H01L27/146 ,  H01L31/02 ,  H01L31/103

CPC classification number: H01L31/02019 ,  H01L31/103

Abstract: A dynamic photodiode may comprise a substrate comprising a first surface opposite a second surface, the substrate being of a first doping type; a substrate region disposed on the first surface, the substrate region comprising a substrate contact configured to be grounded; a first doped region disposed on the first surface, the first doped region being of the first doping type and comprising a first contact configured to receive a first voltage; a second doped region disposed on the first surface, the second doped region being of a second doping type opposite to the first doping type and comprising a second contact configured to receive a second voltage. The substrate region may surround the second doped region, the second doped region may surround the first doped region, and exposed portions of the substrate form light absorbing regions may be configured to generate electron-hole pairs in the substrate.

公开(公告)号：US20200373338A1

公开(公告)日：2020-11-26

申请号：US16429158

申请日：2019-06-03

Applicant: Actlight SA

Inventor： Serguei OKHONIN ,  Maxim GUREEV ,  Denis SALLIN

IPC: H01L27/146

Abstract: A photodetector device comprising n-type and p-type light absorbing regions arranged to form a pn-junction and n+ and p+ contact regions connected to respective contacts. The light absorbing regions and the contact regions are arranged in a sequence n+ p n p+ so that, after a voltage applied between the n+ and p+ contacts is switched from a reverse bias to a forward bias, electrons and holes which are generated in the light absorbing regions in response to photon absorption drift towards the p+ and n+ contact regions respectively, which causes current to start to flow between the contacts after a time delay which is inversely proportional to the incident light intensity.

公开(公告)号：US20190252570A1

公开(公告)日：2019-08-15

申请号：US16387011

申请日：2019-04-17

Applicant: ActLight SA

Inventor： Denis SALLIN ,  Maxim GUREEV ,  Serguei OKHONIN

IPC: H01L31/113 ,  H01L31/0352 ,  H01L31/0224 ,  H01L31/18

CPC classification number: H01L31/1136 ,  H01L31/022408 ,  H01L31/035281 ,  H01L31/1804

Abstract: According to embodiments of the present disclosure, a dynamic photodiode may include a substrate including a major surface; a hedge formation extruding perpendicularly from the major surface; a first resettable region disposed on a top surface the hedge formation; a second resettable region disposed on the top surface of the hedge formation; a first doped region disposed on the top surface of the hedge formation between the first resettable region and the second resettable region, the first doped region including a first contact configured to receive a first voltage; and a second doped region disposed on a top surface of the hedge formation, the second doped region including a second contact configured to receive a second voltage. Exposed portions of the substrate form light absorbing regions configured to generate electron-hole pairs in the substrate.

公开(公告)号：US10269855B2

公开(公告)日：2019-04-23

申请号：US15461645

申请日：2017-03-17

Applicant: ActLight SA

Inventor： Denis Sallin ,  Maxim Gureev ,  Alexander Kvasov ,  Serguei Okhonin

IPC: H01L31/0352 ,  H01L27/146 ,  H01L31/113 ,  H04N5/374

Abstract: According to embodiments of the present disclosure, a dynamic photodiode may include a substrate, a first doped region, a second doped region, a first resettable doped region between the first doped region and the second doped region, and a first light absorbing region between the first doped region and the second doped region. The first doped region may include a first contact that receives a first voltage. The second doped region may include a second contact that receives a second voltage. The first resettable doped region may include a first resettable contact that receives a reset voltage or is set as an open circuit. The first light absorbing region may generate first electron-hole pairs in the substrate when the first resettable contact is set as an open circuit, and the first electron-hole pairs may be removed from the substrate when the first resettable contact receives the reset voltage.