Drawing surface adjusting mechanism for use with scanning pattern
drawing apparatus
    2.
    发明授权
    Drawing surface adjusting mechanism for use with scanning pattern drawing apparatus 失效
    用于扫描图案绘图装置的绘图表面调整机构

    公开(公告)号:US5027137A

    公开(公告)日:1991-06-25

    申请号:US444243

    申请日:1989-12-01

    CPC分类号: G03F7/20

    摘要: A drawing surface adjusting mechanism for use with a scanning pattern drawing apparatus capable of not only moving a drawing board in a vertical direction but also tilting it, whereby the chance of bringing the drawing surface within the depth of focus of a scanning lens is increased even if the drawing surface has waviness or other flaws within the width of a single storke of scanning. The drawing surface adjusting mechanism of the invention includes a drawing board for supporting a workpiece that is to be scanned with a scanning optical system by means of a unidirectionally tracing light beam, transport means for allowing the drawing board and the scanning optical system to slide relative to each other in a direction that crosses the direction of beam tracing at right angles, a first and a second drive mechanism which are spaced apart in the tracing direction and which move one side of the drawing board in a direction parallel to the direction of the beam, tilt control means for inclining the drawing board with respect to the transport means by making the drive amount of the first drive means different from that of the second drive means, and translation control means for effecting a translational movement of the drawing board with respect to the transport means by making the drive amount of the first drive means equal to that of the second drive means.

    摘要翻译: 一种与扫描图形绘图装置一起使用的绘图表面调节机构,其不仅可以在垂直方向上移动绘图板,而且可以倾斜它,由此使得在扫描透镜的深度范围内的绘图表面的机会甚至增加 如果绘图表面在单个扫描鹳的宽度内具有波纹或其他缺陷。 本发明的拉伸面调整机构包括:用于通过单向跟踪光束用扫描光学系统支撑待扫描的工件的绘图板,用于允许绘图板和扫描光学系统相对滑动的传送装置 彼此沿着与直角的光束跟踪方向交叉的方向;第一和第二驱动机构,其在跟踪方向上间隔开,并且沿平行于所述方向的方向移动所述绘图板的一侧; 横梁,倾斜控制装置,用于通过使第一驱动装置的驱动量与第二驱动装置的驱动量不同而使绘图板相对于输送装置倾斜;以及平移控制装置,用于对绘图板进行平移运动 通过使第一驱动装置的驱动量等于第二驱动装置的驱动量来传送到传送装置。

    Exposure apparatus
    4.
    发明授权
    Exposure apparatus 失效
    曝光装置

    公开(公告)号:US5168306A

    公开(公告)日:1992-12-01

    申请号:US863538

    申请日:1992-04-06

    IPC分类号: G03F7/20 G03F9/00

    摘要: An exposure apparatus where a mask table having an exposing pattern and a work to be exposed are relative to each other movable, wherein the moving amount of the mask table is detected by a scale image formed through a projection lens system, so that even if the projection lens system has a magnification error, by optically offsetting it, the moving amount of the mask table can be detected. Thus, a more accurate control can be obtained so that a mask image can be more precisely reproduced on a work.

    摘要翻译: 其中具有曝光图案和待曝光的工件的掩模台相对于彼此可移动的曝光装置,其中通过投影透镜系统形成的标尺图像来检测掩模台的移动量,使得即使 投影透镜系统通过光学偏移来具有放大误差,可以检测掩模台的移动量。 因此,可以获得更准确的控制,使得掩模图像可以在工件上更精确地再现。

    Fused thiophene derivatives, their production and use
    9.
    发明授权
    Fused thiophene derivatives, their production and use 失效
    稠合噻吩衍生物,其生产和使用

    公开(公告)号:US5284661A

    公开(公告)日:1994-02-08

    申请号:US47368

    申请日:1993-04-19

    IPC分类号: C07D495/04 A61K9/20

    CPC分类号: C07D495/04

    摘要: Novel fused thiophene derivatives of the formula (I): ##STR1## wherein W is ##STR2## R.sup.1 and R.sup.2 which may be same or different, are each independently hydrogen, halogen, cyano, nitro, acylamino, or a hydrocarbon residue which may be substituted; R.sup.3 is hydrogen, optionally substituted alkyl or alkenyl, or --COD wherein D is hydrogen, alkoxy, hydroxy, halogen, or optionally substituted amino; R.sup.4 is hydrogen, halogen or nitro; R.sup.5 is a residue capable of forming an anion or a residue convertible into an anion; R.sup.6 is hydrogen or optionally substituted alkyl or alkenyl; A is a direct bond or a spacer having atomic length of two or less between the phenylene group and the phenyl group; and n is an integer of 1 or 2; and the pharmaceutically acceptable salts thereof have potent angiotensin II antagonist activity and antihypertensive activity, thus being useful as therapeutic agents for treating circulatory system diseases such as hypertensive diseases, heart diseases, strokes, etc.

    摘要翻译: 式(I)的新型稠合噻吩衍生物:其中W为R 1和R 2可以相同或不同,各自独立地为氢,卤素,氰基,硝基,酰氨基或烃残基 可以替代; R3是氢,任选取代的烷基或烯基或-COD,其中D是氢,烷氧基,羟基,卤素或任选取代的氨基; R4是氢,卤素或硝基; R5是能够形成阴离子或可转化为阴离子的残基的残基; R6是氢或任选取代的烷基或链烯基; A是亚苯基和苯基之间的原子长度为2以下的直接键或间隔物; n为1或2的整数; 其药学上可接受的盐具有有效的血管紧张素II拮抗剂活性和抗高血压活性,因此可用作治疗循环系统疾病如高血压疾病,心脏病,中风等的治疗剂。