Differential wavelength photoluminescence for non-contact measuring of contaminants and defects located below the surface of a wafer or other workpiece
    1.
    发明授权
    Differential wavelength photoluminescence for non-contact measuring of contaminants and defects located below the surface of a wafer or other workpiece 有权
    用于非接触式测量污染物和位于晶片或其他工件表面下方的缺陷的差分光致发光

    公开(公告)号:US07446321B2

    公开(公告)日:2008-11-04

    申请号:US11427080

    申请日:2006-06-28

    IPC分类号: G01N21/64 G01J1/58

    摘要: A method for using photoluminescence to identify defects in a sub-surface region of a sample includes performing a first probe of the sample. A first data set, based on the first probe, is produced indicating defects located primarily in a surface layer of the sample. A second data set, based on a second probe, is produced indicating defects located in both the surface layer and a sub-surface region of the sample. The first data set is subtracted from the second data set to produce a third data set indicating defects located primarily in the sub-surface region of the sample. The first data set may optionally be normalized relative to the second data set before performing the subtraction. The first and second probes may advantageously be performed using a first laser and a second laser, respectively, having different wavelengths from each other.

    摘要翻译: 使用光致发光来鉴定样品的子表面区域中的缺陷的方法包括执行样品的第一探针。 产生基于第一探针的第一数据集,指示主要位于样品的表面层中的缺陷。 产生基于第二探针的第二数据集,其指示位于样品的表面层和次表面区域中的缺陷。 从第二数据组中减去第一数据集以产生指示主要位于样本的子表面区域中的缺陷的第三数据集。 在执行减法之前,第一数据集可以可选地相对于第二数据集进行归一化。 第一和第二探针可以有利地使用分别具有不同波长的第一激光器和第二激光器来执行。

    Diagnostic System for the Detection of Skin Cancer
    3.
    发明申请
    Diagnostic System for the Detection of Skin Cancer 审中-公开
    诊断系统检测皮肤癌

    公开(公告)号:US20170049380A1

    公开(公告)日:2017-02-23

    申请号:US15345378

    申请日:2016-11-07

    IPC分类号: A61B5/00 A61K49/00

    摘要: Methods and compositions are provided for the analysis of skin surfaces to determine the presence of neoplastic tissue. In the methods of the invention, a composition comprising a florescent probe that binds to a specific neoplasia associated marker is applied topically to the area of interest. After topical administration, the probe preferentially binds to markers associated in neoplastic lesions in situ, which binding is detected with a compact illumination unit that provides illumination at a wavelength appropriate for image acquisition. The illumination unit comprises a light source and fiber optic bundle to direct the light towards the area of examination. A detection unit is used to capture and record an image of the area of investigation. The detection unit may be a digital camera, film camera, etc. A mapping module may also be provided to catalogue the site of examination.

    摘要翻译: 提供方法和组合物用于分析皮肤表面以确定肿瘤组织的存在。 在本发明的方法中,将包含结合特定瘤形成相关标志的荧光探针的组合物局部施用于感兴趣区域。 局部给药后,探针优先与原位肿瘤病变相关的标志物结合,用紧凑的照明单元检测结合,该照明单元以适合于图像采集的波长提供照明。 照明单元包括光源和光纤束,以将光引向检查区域。 检测单元用于捕获和记录调查区域的图像。 检测单元可以是数码相机,胶卷相机等。还可以提供映射模块以对检查地点进行编目。

    Diagnostic system for the detection of skin cancer
    4.
    发明授权
    Diagnostic system for the detection of skin cancer 有权
    诊断系统用于检测皮肤癌

    公开(公告)号:US08642009B2

    公开(公告)日:2014-02-04

    申请号:US12097509

    申请日:2006-12-18

    IPC分类号: A61K49/00

    摘要: Methods and compositions are provided for the analysis of skin surfaces to determine the presence of neoplastic tissue. In the methods of the invention, a composition comprising a florescent probe that binds to a specific neoplasia associated marker is applied topically to the area of interest. After topical administration, the probe preferentially binds to markers associated in neoplastic lesions in situ, which binding is detected with a compact illumination unit that provides illumination at a wavelength appropriate for image acquisition. The illumination unit comprises a light source and fiber optic bundle to direct the light towards the area of examination. A detection unit is used to capture and record an image of the area of investigation. The detection unit may be a digital camera, film camera, etc. A mapping module may also be provided to catalogue the site of examination.

    摘要翻译: 提供方法和组合物用于分析皮肤表面以确定肿瘤组织的存在。 在本发明的方法中,将包含结合特定瘤形成相关标志的荧光探针的组合物局部施用于感兴趣区域。 局部给药后,探针优先与原位肿瘤病变相关的标志物结合,用紧凑的照明单元检测结合,该照明单元以适合于图像采集的波长提供照明。 照明单元包括光源和光纤束,以将光引向检查区域。 检测单元用于捕获和记录调查区域的图像。 检测单元可以是数码相机,胶卷相机等。还可以提供映射模块以对检查地点进行编目。

    Ellipsometer focusing system
    5.
    发明授权
    Ellipsometer focusing system 有权
    椭偏仪聚焦系统

    公开(公告)号:US08559008B2

    公开(公告)日:2013-10-15

    申请号:US13082300

    申请日:2011-04-07

    IPC分类号: G01J4/00

    CPC分类号: G01N21/211 G02B7/28

    摘要: An ellipsometer includes an integrated focusing system with a beam splitter between the sample and the ellipsometer detector. The beam splitter provides a portion of the radiation to a lens system that magnifies any deviation from a best focus position by at least 2×. The focusing system includes a 2D sensor, where the spot of light focused on the sensor is 50 percent or smaller than the sensor. The focusing system may further include a compensator to correct optical aberrations caused by the beam splitter. A processor receives an image signal and finds the location of the spot from which focus error can be determined and used to correct the focal position of the ellipsometer. The processor compensates for movement of the spot caused by rotating optics. Additionally, a proportional-integral-derivative controller may be used to control exposure time and/or gain of the camera.

    摘要翻译: 椭偏仪包括在样品和椭偏仪检测器之间具有分束器的集成聚焦系统。 分束器将一部分辐射器提供给透镜系统,该透镜系统将与最佳对焦位置的任何偏差放大至少2×。 聚焦系统包括一个2D传感器,其中聚焦在传感器上的光斑比传感器小50%或更小。 聚焦系统还可以包括补偿器,以校正由分束器引起的光学像差。 处理器接收图像信号并找到可以确定聚焦误差的点的位置,并用于校正椭偏仪的焦点位置。 处理器补偿由旋转光学元件引起的光斑移动。 此外,可以使用比例积分微分控制器来控制照相机的曝光时间和/或增益。

    Ellipsometer Focusing System
    6.
    发明申请
    Ellipsometer Focusing System 有权
    椭偏仪聚焦系统

    公开(公告)号:US20120257200A1

    公开(公告)日:2012-10-11

    申请号:US13082300

    申请日:2011-04-07

    IPC分类号: G01J4/00

    CPC分类号: G01N21/211 G02B7/28

    摘要: An ellipsometer includes an integrated focusing system with a beam splitter between the sample and the ellipsometer detector. The beam splitter provides a portion of the radiation to a lens system that magnifies any deviation from a best focus position by at least 2×. The focusing system includes a 2D sensor, where the spot of light focused on the sensor is 50 percent or smaller than the sensor. The focusing system may further include a compensator to correct optical aberrations caused by the beam splitter. A processor receives an image signal and finds the location of the spot from which focus error can be determined and used to correct the focal position of the ellipsometer. The processor compensates for movement of the spot caused by rotating optics. Additionally, a proportional-integral-derivative controller may be used to control exposure time and/or gain of the camera.

    摘要翻译: 椭偏仪包括在样品和椭偏仪检测器之间具有分束器的集成聚焦系统。 分束器将一部分辐射器提供给透镜系统,该透镜系统将与最佳对焦位置的任何偏差放大至少2×。 聚焦系统包括一个2D传感器,其中聚焦在传感器上的光斑比传感器小50%或更小。 聚焦系统还可以包括补偿器,以校正由分束器引起的光学像差。 处理器接收图像信号并找到可以确定聚焦误差的点的位置,并用于校正椭偏仪的焦点位置。 处理器补偿由旋转光学元件引起的光斑移动。 此外,可以使用比例积分微分控制器来控制照相机的曝光时间和/或增益。

    DIAGNOSTIC SYSTEM FOR THE DETECTION OF SKIN CANCER
    7.
    发明申请
    DIAGNOSTIC SYSTEM FOR THE DETECTION OF SKIN CANCER 有权
    用于检测皮肤癌的诊断系统

    公开(公告)号:US20090220415A1

    公开(公告)日:2009-09-03

    申请号:US12097509

    申请日:2006-12-18

    IPC分类号: A61K51/00 A61B5/00

    摘要: Methods and compositions are provided for the analysis of skin surfaces to determine the presence of neoplastic tissue. In the methods of the invention, a composition comprising a florescent probe that binds to a specific neoplasia associated marker is applied topically to the area of interest. After topical administration, the probe preferentially binds to markers associated in neoplastic lesions in situ, which binding is detected with a compact illumination unit that provides illumination at a wavelength appropriate for image acquisition. The illumination unit comprises a light source and fiber optic bundle to direct the light towards the area of examination. A detection unit is used to capture and record an image of the area of investigation. The detection unit may be a digital camera, film camera, etc. A mapping module may also be provided to catalogue the site of examination.

    摘要翻译: 提供方法和组合物用于分析皮肤表面以确定肿瘤组织的存在。 在本发明的方法中,将包含结合特定瘤形成相关标志的荧光探针的组合物局部施用于感兴趣区域。 局部给药后,探针优先与原位肿瘤病变相关的标志物结合,用紧凑的照明单元检测结合,该照明单元以适合于图像采集的波长提供照明。 照明单元包括光源和光纤束,以将光引向检查区域。 检测单元用于捕获和记录调查区域的图像。 检测单元可以是数码相机,胶卷相机等。还可以提供映射模块以对检查地点进行编目。

    Diagnostic system for the detection of skin cancer

    公开(公告)号:US10531824B2

    公开(公告)日:2020-01-14

    申请号:US15345378

    申请日:2016-11-07

    摘要: Methods and compositions are provided for the analysis of skin surfaces to determine the presence of neoplastic tissue. In the methods of the invention, a composition comprising a florescent probe that binds to a specific neoplasia associated marker is applied topically to the area of interest. After topical administration, the probe preferentially binds to markers associated in neoplastic lesions in situ, which binding is detected with a compact illumination unit that provides illumination at a wavelength appropriate for image acquisition. The illumination unit comprises a light source and fiber optic bundle to direct the light towards the area of examination. A detection unit is used to capture and record an image of the area of investigation. The detection unit may be a digital camera, film camera, etc. A mapping module may also be provided to catalogue the site of examination.

    Diagnostic System for the Detection of Skin Cancer
    10.
    发明申请
    Diagnostic System for the Detection of Skin Cancer 审中-公开
    诊断系统检测皮肤癌

    公开(公告)号:US20140314661A1

    公开(公告)日:2014-10-23

    申请号:US14161533

    申请日:2014-01-22

    IPC分类号: A61B5/00 A61K49/00 A61K51/00

    摘要: Methods and compositions are provided for the analysis of skin surfaces to determine the presence of neoplastic tissue. In the methods of the invention, a composition comprising a florescent probe that binds to a specific neoplasia associated marker is applied topically to the area of interest. After topical administration, the probe preferentially binds to markers associated in neoplastic lesions in situ, which binding is detected with a compact illumination unit that provides illumination at a wavelength appropriate for image acquisition. The illumination unit comprises a light source and fiber optic bundle to direct the light towards the area of examination. A detection unit is used to capture and record an image of the area of investigation. The detection unit may be a digital camera, film camera, etc. A mapping module may also be provided to catalogue the site of examination.

    摘要翻译: 提供方法和组合物用于分析皮肤表面以确定肿瘤组织的存在。 在本发明的方法中,将包含结合特定瘤形成相关标志的荧光探针的组合物局部施用于感兴趣区域。 局部给药后,探针优先与原位肿瘤病变相关的标志物结合,用紧凑的照明单元检测结合,该照明单元以适合于图像采集的波长提供照明。 照明单元包括光源和光纤束,以将光引向检查区域。 检测单元用于捕获和记录调查区域的图像。 检测单元可以是数码相机,胶卷相机等。还可以提供映射模块以对检查地点进行编目。