Textured carbon surfaces on copper by sputtering
    1.
    发明授权
    Textured carbon surfaces on copper by sputtering 失效
    通过溅射在铜上纹理的碳表面

    公开(公告)号:US4607193A

    公开(公告)日:1986-08-19

    申请号:US659475

    申请日:1984-10-10

    CPC classification number: H01J23/02 H01J23/027

    Abstract: A very thin layer of highly textured carbon is applied to a copper surface by a triode sputtering process. A carbon target 10 and a copper substrate 12 are simultaneously exposed to an argon plasma 14 in a vacuum chamber.The resulting carbon surface is characterized by a dense, random array of needle-like spires or peaks which extend perpendicularly from the copper surface. The coated copper is especially useful for electrode plates in multistage depressed collectors.

    Abstract translation: 通过三极管溅射工艺将非常薄的高度纹理的碳施加到铜表面。 碳靶10和铜基板12同时暴露于真空室内的氩等离子体14。 所得到的碳表面的特征在于从铜表面垂直延伸的针状尖峰或峰的致密随机阵列。 涂覆的铜对于多级凹陷式收集器中的电极板特别有用。

    Ion sputter textured graphite electrode plates
    2.
    发明授权
    Ion sputter textured graphite electrode plates 失效
    离子溅射纹理石墨电极板

    公开(公告)号:US4417175A

    公开(公告)日:1983-11-22

    申请号:US364072

    申请日:1982-03-31

    CPC classification number: C04B41/0027 C04B41/80 H01J25/02

    Abstract: A specially textured surface of pyrolytic graphite exhibits extremely low yields of secondary electrons and reduced numbers of reflected primary electrons after impingement of high energy primary electrons. Electrode plates of this material are used in multistage depressed collectors.An ion flux having an energy between 500 eV and 1000 eV and a current density between 1.0 mA/cm.sup.2 and 6.0 mA/cm.sup.2 produces surface roughening or texturing which is in the form of needles or spires.Such textured surfaces are especially useful as anode collector plates in high efficiency electron tube devices.

    Abstract translation: 热解石墨的特殊纹理表面表现出非常低的二次电子产率,并且在高能量一次电子碰撞后反射的一次电子数量减少。 这种材料的电极板用于多级凹陷式收集器。 具有500eV至1000eV之间的能量和1.0mA / cm 2至6.0mA / cm 2之间的电流密度的离子通量产生呈针状或尖形的表面粗糙化或纹理化。 这种纹理表面在高效电子管装置中特别适用于阳极集电板。

    Ion sputter textured graphite
    5.
    发明授权
    Ion sputter textured graphite 失效
    离子溅射织构石墨

    公开(公告)号:US4349424A

    公开(公告)日:1982-09-14

    申请号:US264378

    申请日:1981-05-15

    CPC classification number: C04B41/009 C04B41/0027 C04B41/80 H01J25/02

    Abstract: A specially textured surface of pyrolytic graphite exhibits extremely low yields of secondary electrons and reduced numbers of reflected primary electrons after impingement of high energy primary electrons.An ion flux having an energy between 500 eV and 1000 eV and a current density between 1.0 mA/cm.sup.2 and 6.0 mA/cm.sup.2 produces surface roughening or texturing which is in the form of needles or spines.Such textured surfaces are especially useful as anode collector plates in high efficiency electron tube devices.

    Abstract translation: 热解石墨的特殊纹理表面表现出非常低的二次电子产率,并且在高能量一次电子碰撞后反射的一次电子数量减少。 具有500eV至1000eV之间的能量和1.0mA / cm 2至6.0mA / cm 2之间的电流密度的离子通量产生呈针状或棘形形式的表面粗糙化或纹理化。 这种纹理表面在高效电子管装置中特别适用于阳极集电板。

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