公开(公告)号：US09660205B2

公开(公告)日：2017-05-23

申请号：US12664858

申请日：2008-06-22

Applicant: Steven M. George ,  Arrelaine Allen Dameron ,  Beau B. Burton ,  Markus D. Groner

Inventor： Steven M. George ,  Arrelaine Allen Dameron ,  Beau B. Burton ,  Markus D. Groner

IPC: B32B7/02 ,  C23C16/22 ,  B05D5/12 ,  H01L51/00 ,  C23C16/40 ,  C23C16/455 ,  C23C28/00 ,  C23C28/04 ,  H01L51/52

CPC classification number: H01L51/0097 ,  C23C16/402 ,  C23C16/403 ,  C23C16/45525 ,  C23C28/00 ,  C23C28/04 ,  C23C28/42 ,  H01L51/5237 ,  H01L51/5256 ,  H01L2251/5338 ,  Y02E10/549 ,  Y10T428/2495 ,  Y10T428/26

Abstract: Coatings are applied on a flexible substrate using atomic layer deposition and molecular layer deposition methods. The coatings have thickness of up to 100 nanometers. The coatings include layers of an inorganic material such as alumina, which are separated by flexibilizing layers that are deposited with covalent chemical linkage to the inorganic material and which are one or more of silica deposited by an atomic layer deposition process; an organic polymer that is deposited by a molecular layer deposition process, or a hybrid organic-inorganic polymer that is deposited by an molecular layer deposition process.

公开(公告)号：US20100178481A1

公开(公告)日：2010-07-15

申请号：US12664858

申请日：2008-06-22

Applicant: Steven M. George ,  Arrelaine Allen Dameron ,  Beau B. Burton ,  Markus D. Groner

Inventor： Steven M. George ,  Arrelaine Allen Dameron ,  Beau B. Burton ,  Markus D. Groner

IPC: B32B7/02 ,  C23C16/22 ,  B05D5/12

CPC classification number: H01L51/0097 ,  C23C16/402 ,  C23C16/403 ,  C23C16/45525 ,  C23C28/00 ,  C23C28/04 ,  C23C28/42 ,  H01L51/5237 ,  H01L51/5256 ,  H01L2251/5338 ,  Y02E10/549 ,  Y10T428/2495 ,  Y10T428/26

Abstract: Coatings are applied on a flexible substrate using atomic layer deposition and molecular layer deposition methods. The coatings have thickness of up to 100 nanometers. The coatings include layers of an inorganic material such as alumina, which are separated by flexibilizing layers that are deposited with covalent chemical linkage to the inorganic material and which are one or more of silica deposited by an atomic layer deposition process; an organic polymer that is deposited by a molecular layer deposition process, or a hybrid organic-inorganic polymer that is deposited by an molecular layer deposition process.

Abstract translation: 使用原子层沉积和分子层沉积方法将涂层施加在柔性基底上。 涂层的厚度可达100纳米。 涂层包括无机材料如氧化铝的层，它们由通过共价化学键沉积到无机材料并且是通过原子层沉积工艺沉积的二氧化硅中的一种或多种的柔性层分离; 通过分子层沉积工艺沉积的有机聚合物，或通过分子层沉积工艺沉积的杂化有机 - 无机聚合物。