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公开(公告)号：US3949131A
公开(公告)日：1976-04-06
申请号：US480618
申请日：1974-06-19
申请人： David Bruce Fraser
发明人： David Bruce Fraser
IPC分类号： H01L21/027 , C23F1/00 , G03F1/40 , G03F1/48 , B05D5/12
CPC分类号： G03F1/40 , G03F1/48 , Y10T428/24851
摘要： In high resolution lithography, resolution impairment sometimes occurs due to dust collecting on the mask. The dust is often attracted to the mask by static electricity. The solution proposed is to coat the entire photomask with a transparent, electrically conductive coating. The coating is electrically grounded to drain static charge. Conductive materials are often used for lithographic masks, but the patterns cannot be grounded effectively because there are island regions in the pattern.If the pattern is itself conducting, there is the added option of applying the antistatic layer under the pattern.If the pattern is formed of a photographic emulsion of a patterned photoresist, it is protected from damage and wear in handling by the harder conductive coating.
摘要翻译： 在高分辨率光刻中，由于掩模上的灰尘收集，有时会发生分辨率损伤。 灰尘常常被静电吸引到面具上。 所提出的解决方案是用透明的导电涂层涂覆整个光掩模。 涂层电接地以排出静电。 导电材料通常用于光刻掩模，但是由于图案中存在岛状区域，所以图案不能有效地接地。
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公开(公告)号：US4078781A
公开(公告)日：1978-03-14
申请号：US748320
申请日：1976-12-07
CPC分类号： B25B5/102
摘要： An adjustable clamp has its main bar formed from flat metal strip with serrations in one edge and a fixed arm may be formed by a bent-around end of this strip. The moving arm can be formed from two flat stampings from strip and a fine adjustment is provided by a screw on this arm, engaging the non-serrated edge of the bar, while the coarse adjustment is provided by a bush or pin between the stampings engaging the serrated edge.
摘要翻译： 可调节的夹具的主杆由平坦的金属条形成，在一个边缘具有锯齿状，并且固定的臂可以由该条的弯曲端形成。 移动臂可以由两个来自条带的平面冲压件形成，并且通过该臂上的螺钉提供精细调节，与杆的非锯齿形边缘接合，而粗调由冲压件接合之间的衬套或销钉 锯齿状边缘。
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公开(公告)号：US4039698A
公开(公告)日：1977-08-02
申请号：US651641
申请日：1976-01-23
CPC分类号： H05K3/105 , Y10S430/143 , Y10S430/168
摘要： A method is disclosed for making precisely patterned platinum films in the manufacture of integrated circuit devices. The method calls for the deposition of a film of a platinum compound, whose heat of formation is in the range of from -100 to +10 Kcal/mole, patterning the film, and thermally reducing the patterned film to platinum metal.
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公开(公告)号：US4022930A
公开(公告)日：1977-05-10
申请号：US582142
申请日：1975-05-30
申请人： David Bruce Fraser
发明人： David Bruce Fraser
IPC分类号： H01L21/3213 , H01L21/768 , B05D5/12
CPC分类号： H01L21/32131 , H01L21/7684 , Y10S438/978
摘要： The specification describes a procedure for multilevel metallization of semiconductor integrated circuits in which the severity of the step formed by the edges of the first level pattern and the intermediate insulator over which the second level metallization pattern extends is reduced by beveling the edge. The bevel occurs during selective etching of the first level metal as a consequence of depositing the first level metal over a range of diminishing temperatures. Metal layers, notably aluminum, deposited in this way exhibit a differential etch rate such that the layer etches more slowly as etching proceeds through the thickness of the layer. Bevels of the order of 30.degree. to the horizontal can be produced in this way.
摘要翻译： 本说明书描述了一种用于半导体集成电路的多层金属化的步骤，其中由第一电平图案的边缘和第二电平金属化图案延伸的中间绝缘体形成的台阶的严重性通过使边缘倾斜而减小。 在第一级金属的选择性蚀刻期间，由于在一定范围的降低的温度下沉积第一级金属而发生斜面。 以这种方式沉积的金属层，特别是铝，表现出差别蚀刻速率，使得当蚀刻通过层的厚度时，蚀刻层更缓慢地蚀刻。 可以以这种方式生产30°到水平的斜面。
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公开(公告)号：US3975252A
公开(公告)日：1976-08-17
申请号：US558489
申请日：1975-03-14
IPC分类号： H01L21/302 , G03F1/22 , G03F7/09 , H01L21/3065 , H01L21/3213 , C23C15/00
CPC分类号： G03F1/22 , G03F7/094 , H01L21/32139
摘要： High-resolution sputter etching of a relatively thick layer (of, for example, gold) by directly utilizing a relatively thin layer of resist as a sputter-etching mask is often not feasible. In such a case, it is known to use a sputter-etching mask made of an etch-resistant material such as titanium interposed between the resist and the relatively thick layer. In accordance with the invention, patterning of the titanium is achieved by a technique of sputter etching in a halocarbon atmosphere.
摘要翻译： 通过直接利用相对薄的抗蚀剂层作为溅射蚀刻掩模，相对较厚的层（例如金）的高分辨率溅射蚀刻通常是不可行的。 在这种情况下，已知使用由抗蚀剂和相对厚的层之间的耐蚀刻材料（例如钛）制成的溅射蚀刻掩模。 根据本发明，通过在卤代烃气氛中溅射蚀刻的技术来实现钛的图案化。
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6.发明申请Scroll compressor with wrap walls provided with an abradable coating and a load-bearing surface at radially outer locations 有权涡旋压缩机具有在径向外部位置设置有耐磨涂层和承载表面的隔离壁公开(公告)号：US20050152793A1
公开(公告)日：2005-07-14
申请号：US10756019
申请日：2004-01-13
申请人： James Bush , Robert Wilson , Bruce Fraser
发明人： James Bush , Robert Wilson , Bruce Fraser
CPC分类号： F04C27/001 , F04C18/0269 , F04C2230/602 , F04C2230/91
摘要： An abradable coating is formed on portions of the flank wall of the wraps of a scroll compressor. The radially outer portions of the flank wall are left uncoated, and can bear a force between the scroll wraps. In this manner, the load is not transferred through a coated portion, but rather through the uncoated portion. As the scroll wraps move relative to each other at run-in, the abradable coating wears away leaving a tight fit between the flank walls at the radially inner locations.
摘要翻译： 在涡旋压缩机的涡卷的侧壁的部分上形成可磨损的涂层。 侧壁的径向外部部分保持未涂覆，并且能够在涡卷之间承受力。 以这种方式，负载不通过涂覆部分而是通过未涂覆部分传递。 当涡卷在接合时相对于彼此移动时，可磨损涂层磨损，留下在径向内部位置处的侧壁之间的紧密配合。
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公开(公告)号：US4046660A
公开(公告)日：1977-09-06
申请号：US645087
申请日：1975-12-29
申请人： David Bruce Fraser
发明人： David Bruce Fraser
CPC分类号： C23C14/205 , C23C14/35 , C23C14/541
摘要： Substrate heating during sputter coating, due to charged particles, is controlled by the use of an auxiliary magnet in the vicinity of the substrate. The magnet is arranged to either increase this charge particle flux, in situations in which additional heating is desired, or reducing this charge particle flux in situations in which heating is detrimental (e.g., the sputter coating of heat sensitive substrates such as polymer films).
摘要翻译： 通过在基板附近使用辅助磁体来控制由于带电粒子而在溅射涂覆期间的基板加热。 在需要附加加热的情况下或者在加热有害的情况下（例如，热敏基材例如聚合物膜的溅射涂覆），磁体被设置成增加该电荷粒子通量。
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8.发明申请公开(公告)号：US20060269431A1
公开(公告)日：2006-11-30
申请号：US11140721
申请日：2005-05-31
申请人： Alexander Lifson , Bruce Fraser
发明人： Alexander Lifson , Bruce Fraser
CPC分类号： F25B1/04 , F04C18/0215 , F04C23/008 , F04C29/126
摘要： A unique positioning of a discharge tube relative to a pivot axis of a check valve in a compressor reduces the wear and fatigue stresses on the pivoting check valve components. The tube is centered on an axis that is non-perpendicular to an axis that is parallel to the pivot axis of the check valve, and in one embodiment was at 45°. With the inventive positioning of the discharge tube relative to the pivot axis, the flow streamlines heading from the discharge port to the discharge tube are no loner normal to the flapper valve surface, and the amount of wear between moving valve components and fatigue stresses are reduced.
摘要翻译： 放电管相对于压缩机中的止回阀的枢转轴线的独特定位减少了枢转止回阀部件上的磨损和疲劳应力。 该管以与垂直于止回阀的枢转轴线的轴线不垂直的轴为中心，在一个实施例中为45°。 通过排放管相对于枢转轴线的本发明的定位，从排出口到排放管的流动流线不会偏离挡板阀表面，并且移动阀部件和疲劳应力之间的磨损量减小 。
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