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1.发明授权
公开(公告)号：US5763007A
公开(公告)日：1998-06-09
申请号：US673703
申请日：1996-06-25
申请人： Bruce H. Weiller
发明人： Bruce H. Weiller
IPC分类号： C23C16/34 , H01L21/768
CPC分类号： H01L21/76843 , C23C16/34
摘要： Chemical vapor deposition of titanium nitride thin films is based upon the gas phase kinetics of the reaction of a metal-amido precursors, e.g. tetrakis dimethylamido titanium (Ti(NMe.sub.2).sub.4), which when reacted with a reagent, for example, NH.sub.3 produces in a transamination reaction, an amine, e.g. HNMe.sub.2, as a direct product, which when added to the reaction in excess, inhibits the reversible transamination reaction so as to slow and control the rate of reaction to produce titanium nitride films having conformal step coverage over sub-micron integrated circuit features.
摘要翻译： 氮化钛薄膜的化学气相沉积基于金属 - 酰胺前体的反应的气相动力学，例如， 当与试剂反应时，例如NH 3在氨基转移反应中生成四胺二甲基氨基钛（Ti（NMe 2）4）。 HNMe2作为直接产物，其在过量添加到反应中时，抑制可逆的氨基转移反应，以缓慢并控制反应速率，以产生具有亚微米集成电路特征的保形阶跃覆盖的氮化钛膜。
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公开(公告)号：US20110287551A1
公开(公告)日：2011-11-24
申请号：US13192397
申请日：2011-07-27
IPC分类号： G01N27/00
CPC分类号： G01N27/06 , G01N33/0044 , Y10T436/16 , Y10T436/172307 , Y10T436/184
摘要： A sensor made from a metal salt film, formed on a set of monitoring electrodes, by evaporation of a metal salt aqueous solution disposed on the electrodes, is used for detecting a weak acid. Low concentrations of the weak acid, such as ten ppm, are indicated as the conductivity of the film changes by several orders of magnitude, as a result of reaction of the weak acid with the metal salt, as the metal salt converts to a metal reaction product upon exposure to the weak acid.
摘要翻译： 使用由金属盐膜制成的传感器，通过蒸发设置在电极上的金属盐水溶液形成在一组监测电极上，用于检测弱酸。 由于金属盐转化为金属反应，弱酸（如10 ppm）的低浓度表示为膜的电导率变化几个数量级，作为弱酸与金属盐的反应的结果 产品暴露于弱酸。
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3.发明申请SYSTEMS AND METHODS FOR PREVENTING OR REDUCING CONTAMINATION ENHANCED LASER INDUCED DAMAGE (C-LID) TO OPTICAL COMPONENTS USING GAS PHASE ADDITIVES 有权使用气相添加剂防止或减少污染增强激光诱导的损伤（C-LID）到光学部件的系统和方法公开(公告)号：US20110236569A1
公开(公告)日：2011-09-29
申请号：US12749410
申请日：2010-03-29
CPC分类号： B23K26/12 , B23K26/123 , B23K26/127 , H01S3/2222 , H01S3/2391 , Y10T137/0318 , Y10T137/8593
摘要： Systems and methods for preventing or reducing contamination enhanced laser induced damage (C-LID) to optical components are provided including a housing enclosing an optical component, a container configured to hold a gas phase additive and operatively coupled to the housing; and a delivery system configured to introduce the gas phase additive from the container into the housing and to maintain the gas phase additive at a pre-selected partial pressure within the housing. The gas phase additive may have a greater affinity for the optical component than does a contaminant and may be present in an amount sufficient to inhibit laser induced damage resulting from contact between the contaminant and the optical component. The housing may be configured to maintain a sealed gas environment or vacuum.
摘要翻译： 提供了用于防止或减少污染的系统和方法，增强了对光学部件的激光诱导损伤（C-LID），包括封装光学部件的壳体，被配置为保持气相添加剂并可操作地耦合到壳体的容器; 以及配置成将气相添加剂从容器引入壳体并将气相添加剂维持在壳体内预先选择的分压的输送系统。 气相添加剂可以比污染物对光学组件具有更大的亲合力，并且可以以足以抑制由污染物和光学部件之间的接触引起的激光诱导的损伤的量存在。 壳体可以构造成保持密封的气体环境或真空。
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公开(公告)号：US07226530B2
公开(公告)日：2007-06-05
申请号：US10735078
申请日：2003-12-11
IPC分类号： G01N27/04
CPC分类号： G01N27/127 , G01N27/126 , Y10S977/953 , Y10S977/957
摘要： Polymer nanofibers, such as polyaniline nanofibers, with uniform diameters less than 500 nm can be made in bulk quantities through a facile aqueous and organic interfacial polymerization method at ambient conditions. The nanofibers have lengths varying from 500 nm to 10 μm and form interconnected networks in a thin film. Thin film nanofiber sensors can be made of the polyaniline nanofibers having superior performance in both sensitivity and time response to a variety of gas vapors including, acids, bases, redox active vapors, alcohols and volatile organic chemicals.
摘要翻译： 具有均匀直径小于500nm的聚苯胺纳米纤维的聚合物纳米纤维可以通过在环境条件下的容易的水和有机界面聚合方法以大量方式制备。 纳米纤维具有从500nm到10um的长度，并且在薄膜中形成互连的网络。 薄膜纳米纤维传感器可以由聚苯胺纳米纤维制成，其对包括酸，碱，氧化还原活性蒸气，醇和挥发性有机化学品的各种气体蒸气的灵敏度和时间响应都具有优异的性能。
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公开(公告)号：US08012326B2
公开(公告)日：2011-09-06
申请号：US11701218
申请日：2007-02-01
IPC分类号： G01N27/04
CPC分类号： G01N27/127 , G01N27/126 , Y10S977/953 , Y10S977/957
摘要： Polymer nanofibers, such as polyaniline nanofibers, with uniform diameters less than 500 nm can be made in bulk quantities through a facile aqueous and organic interfacial polymerization method at ambient conditions. The nanofibers have lengths varying from 500 nm to 10 μm and form interconnected networks in a thin film. Thin film nanofiber sensors can be made of the polyaniline nanofibers having superior performance in both sensitivity and time response to a variety of gas vapors including, acids, bases, redox active vapors, alcohols and volatile organic chemicals.
摘要翻译： 具有均匀直径小于500nm的聚苯胺纳米纤维的聚合物纳米纤维可以通过在环境条件下的容易的水和有机界面聚合方法以大量方式制备。 纳米纤维具有从500nm到10μm的长度，并且在薄膜中形成互连的网络。 薄膜纳米纤维传感器可以由聚苯胺纳米纤维制成，其对包括酸，碱，氧化还原活性蒸气，醇和挥发性有机化学品的各种气体蒸气的灵敏度和时间响应都具有优异的性能。
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公开(公告)号：US20100059375A1
公开(公告)日：2010-03-11
申请号：US11594515
申请日：2006-11-08
IPC分类号： G01F1/64
CPC分类号： G01N27/06 , G01N33/0044 , Y10T436/16 , Y10T436/172307 , Y10T436/184
摘要： A hydrogen sulfide sensor is made from a metal acetate film, such as a thin film of copper acetate, formed on a set of monitoring electrodes, by evaporation of a metal acetate aqueous solution disposed on the electrodes, for detecting a weak gas, such as hydrogen sulfide, carried in a gas carrier, such as a nitrogen carrier, for detecting low concentration of the weak gas, such as ten ppm, when the conductivity of the film changes by several orders of magnitude, that produces a metal sulfide, such as copper sulfide, that is a good electrical conductor at room temperature, for example, as the metal acetate is converted directly to a metal sulfide upon exposure to hydrogen sulfide.
摘要翻译： 硫化氢传感器通过蒸发设置在电极上的金属乙酸盐水溶液来形成在一组监测电极上的乙酸铜薄膜等金属乙酸盐膜，以检测弱气体，例如 在气体载体（例如氮气载体）中携带的硫化氢，用于检测低浓度的弱气体，例如当薄膜的电导率改变几个数量级时，例如10ppm，产生金属硫化物，例如 例如，当在暴露于硫化氢时金属乙酸盐直接转化为金属硫化物时，例如在室温下是良好导电体的硫化铜。
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7.发明申请公开(公告)号：US20100006434A1
公开(公告)日：2010-01-14
申请号：US12173008
申请日：2008-07-14
IPC分类号： G01N27/407
CPC分类号： G01N27/04 , G01N27/127 , Y10S977/953 , Y10S977/957
摘要： A sensor for detecting phosgene includes a pair of electrodes separated by an electrode gap, and a layer of conducting polymer material positioned over and making electrical contact with the pair of electrodes, the layer of conducting polymer material being modified with an amine such that the electrical resistance of the conducting polymer material measured across the electrodes is responsive to changes in an amount of phosgene to which the conducting polymer material is exposed.
摘要翻译： 用于检测光气的传感器包括由电极间隔分开的一对电极和位于该对电极之上并与该电极形成电接触的导电聚合物材料层，该导电聚合物材料层被胺改性，使得电 在电极上测量的导电聚合物材料的电阻响应于导电聚合物材料暴露于其中的光气量的变化。
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公开(公告)号：US20080101994A1
公开(公告)日：2008-05-01
申请号：US11554009
申请日：2006-10-28
IPC分类号： G01N31/12
CPC分类号： G01N27/127 , B82Y15/00 , G01N27/126 , G01N33/005 , Y10T436/22
摘要： An apparatus for sensing hydrogen includes a transduction device with a sensing layer, and means for measuring a mass and/or conductivity change caused by an interaction of a gas with the sensing layer to provide a measure of an amount of hydrogen in the gas. The sensing layer includes polyaniline nanofiber material.
摘要翻译： 用于感测氢的装置包括具有感测层的换能装置，以及用于测量由气体与感测层的相互作用引起的质量和/或电导率变化的装置，以提供气体中氢的量的量度。 传感层包括聚苯胺纳米纤维材料。
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9.发明授权Systems and methods for preventing or reducing contamination enhanced laser induced damage (C-LID) to optical components using gas phase additives 有权用于防止或减少污染的系统和方法增强了使用气相添加剂的光学部件的激光诱导损伤（C-LID）公开(公告)号：US09498846B2
公开(公告)日：2016-11-22
申请号：US12749410
申请日：2010-03-29
CPC分类号： B23K26/12 , B23K26/123 , B23K26/127 , H01S3/2222 , H01S3/2391 , Y10T137/0318 , Y10T137/8593
摘要： Systems and methods for preventing or reducing contamination enhanced laser induced damage (C-LID) to optical components are provided including a housing enclosing an optical component, a container configured to hold a gas phase additive and operatively coupled to the housing; and a delivery system configured to introduce the gas phase additive from the container into the housing and to maintain the gas phase additive at a pre-selected partial pressure within the housing. The gas phase additive may have a greater affinity for the optical component than does a contaminant and may be present in an amount sufficient to inhibit laser induced damage resulting from contact between the contaminant and the optical component. The housing may be configured to maintain a sealed gas environment or vacuum.
摘要翻译： 提供了用于防止或减少污染的系统和方法，增强了对光学部件的激光诱导损伤（C-LID），包括封装光学部件的壳体，被配置为保持气相添加剂并可操作地耦合到壳体的容器; 以及配置成将气相添加剂从容器引入壳体并将气相添加剂维持在壳体内预先选择的分压的输送系统。 气相添加剂可以比污染物对光学组件具有更大的亲合力，并且可以以足以抑制由污染物和光学部件之间的接触引起的激光诱导的损伤的量存在。 壳体可以构造成保持密封的气体环境或真空。
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公开(公告)号：US09034266B2
公开(公告)日：2015-05-19
申请号：US13196011
申请日：2011-08-02
CPC分类号： G01N27/127 , B82Y15/00 , G01N27/126 , G01N33/005 , Y10T436/22
摘要： A method for sensing hydrogen includes the use of a transduction device with a sensing layer, and means for measuring a mass and/or conductivity change caused by an interaction of a gas with the sensing layer to provide a measure of an amount of hydrogen in the gas. The sensing layer includes polyaniline nanofiber material.
摘要翻译： 用于感测氢的方法包括使用具有感测层的换能装置，以及用于测量由气体与感测层的相互作用引起的质量和/或电导率变化的装置，以提供测量氢的量 加油站。 传感层包括聚苯胺纳米纤维材料。
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