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    Method and system for high-speed precise laser trimming, scan lens system for use therein and electrical device produced thereby
    2.
    发明授权
    Method and system for high-speed precise laser trimming, scan lens system for use therein and electrical device produced thereby 有权
    用于高速精密激光修整的方法和系统，用于其中的扫描透镜系统以及由此产生的电气装置

    公开(公告)号：US07358157B2

    公开(公告)日：2008-04-15

    申请号：US11245282

    申请日：2005-10-06

    申请人： Bo Gu ,  Joseph V. Lento ,  Jonathan S. Ehrmann ,  Bruce L. Couch ,  Yun Fee Chu ,  Shepard D. Johnson

    发明人： Bo Gu ,  Joseph V. Lento ,  Jonathan S. Ehrmann ,  Bruce L. Couch ,  Yun Fee Chu ,  Shepard D. Johnson

    IPC分类号： H01L21/00

    CPC分类号： H01C17/242 ,  B23K26/0622 ,  B23K26/082

    摘要： A method, system and scan lens system are provided for high-speed, laser-based, precise laser trimming at least one electrical element. The method includes generating a pulsed laser output having one or more laser pulses at a repetition rate. Each laser pulse has a pulse energy, a laser wavelength within a range of laser wavelengths, and a pulse duration. The method further includes selectively irradiating the at least one electrical element with the one or more laser pulses focused into at least one spot having a non-uniform intensity profile along a direction and a spot diameter as small as about 6 microns to about 15 microns so as to cause the one or more laser pulses to selectively remove material from the at least one element and laser trim the at least one element while avoiding substantial microcracking within the at least one element. The wavelength is short enough to produce desired short-wavelength benefits of small spot size, tight tolerance and high absorption, but not so short so as to cause microcracking.

    摘要翻译： 提供了一种方法，系统和扫描透镜系统，用于高速，基于激光的，精确的激光修剪至少一个电气元件。 该方法包括以重复率产生具有一个或多个激光脉冲的脉冲激光输出。 每个激光脉冲具有脉冲能量，激光波长范围内的激光波长和脉冲持续时间。 所述方法还包括选择性地照射所述至少一个电气元件，所述一个或多个激光脉冲聚焦在沿着方向具有不均匀强度分布的至少一个点和小至约6微米至约15微米的光点直径上 以使所述一个或多个激光脉冲从所述至少一个元件中选择性地去除材料，并激光修整所述至少一个元件，同时避免所述至少一个元件内的实质微裂纹。 波长足够短以产生小斑点尺寸，紧度公差和高吸收性能所需的短波长益处，但不会如此短，从而导致微裂纹。

    Method and system for high-speed precise laser trimming and scan lens for use therein
    4.
    发明授权
    Method and system for high-speed precise laser trimming and scan lens for use therein 有权
    用于高速精密激光修整和扫描镜片的方法和系统

    公开(公告)号：US08329600B2

    公开(公告)日：2012-12-11

    申请号：US12499123

    申请日：2009-07-08

    申请人： Bo Gu ,  Jonathan S. Ehrmann ,  Joseph V. Lento ,  Bruce L. Couch ,  Yun Fee Chu ,  Shepard D. Johnson

    发明人： Bo Gu ,  Jonathan S. Ehrmann ,  Joseph V. Lento ,  Bruce L. Couch ,  Yun Fee Chu ,  Shepard D. Johnson

    IPC分类号： H01L21/26

    CPC分类号： H01C17/242 ,  B23K26/0622 ,  B23K26/351 ,  B23K26/361

    摘要： A method, system and scan lens for use therein are provided for high-speed, laser-based, precise laser trimming at least one electrical element along a trim path. The method includes generating a pulsed laser output with a laser, the output having one or more laser pulses at a repetition rate. A fast rise/fall time, pulse-shaped q-switched laser or an ultra-fast laser may be used. Beam shaping optics may be used to generate a flat-top beam profile. Each laser pulse has a pulse energy, a laser wavelength within a range of laser wavelengths, and a pulse duration. The wavelength is short enough to produce desired short-wavelength benefits of small spot size, tight tolerance, high absorption and reduced or eliminated heat-affected zone (HAZ) along the trim path, but not so short so as to cause microcracking. In this way, resistance drift after the trimming process is reduced.

    摘要翻译： 提供了一种用于其中的方法，系统和扫描透镜，用于沿着修剪路径的高速，基于激光的，精确的激光修整至少一个电气元件。 该方法包括用激光产生脉冲激光输出，该输出具有一个或多个重复频率的激光脉冲。 可以使用快速上升/下降时间，脉冲形q切换激光器或超快速激光器。 光束成形光学元件可用于产生平顶光束轮廓。 每个激光脉冲具有脉冲能量，激光波长范围内的激光波长和脉冲持续时间。 波长足够短以产生所需的小光斑尺寸，紧密公差，高吸收以及沿着修剪路径减少或消除的热影响区（HAZ）的短波长益处，但不会如此短以致于引起微裂纹。 以这种方式，减少了修整过程之后的电阻漂移。

    Method And System For High-Speed Precise Laser Trimming And Scan Lens For Use Therein
    6.
    发明申请
    Method And System For High-Speed Precise Laser Trimming And Scan Lens For Use Therein 有权
    用于高速精密激光修整和扫描镜头的方法和系统

    公开(公告)号：US20090321396A1

    公开(公告)日：2009-12-31

    申请号：US12499123

    申请日：2009-07-08

    申请人： Bo Gu ,  Jonathan S. Ehrmann ,  Joseph V. Lento ,  Bruce L. Couch ,  Yun Fee Chu ,  Shepard D. Johnson

    发明人： Bo Gu ,  Jonathan S. Ehrmann ,  Joseph V. Lento ,  Bruce L. Couch ,  Yun Fee Chu ,  Shepard D. Johnson

    IPC分类号： B23K26/38 ,  G02B9/64

    CPC分类号： H01C17/242 ,  B23K26/0622 ,  B23K26/351 ,  B23K26/361

    摘要： A method, system and scan lens for use therein are provided for high-speed, laser-based, precise laser trimming at least one electrical element along a trim path. The method includes generating a pulsed laser output with a laser, the output having one or more laser pulses at a repetition rate. A fast rise/fall time, pulse-shaped q-switched laser or an ultra-fast laser may be used. Beam shaping optics may be used to generate a flat-top beam profile. Each laser pulse has a pulse energy, a laser wavelength within a range of laser wavelengths, and a pulse duration. The wavelength is short enough to produce desired short-wavelength benefits of small spot size, tight tolerance, high absorption and reduced or eliminated heat-affected zone (HAZ) along the trim path, but not so short so as to cause microcracking. In this way, resistance drift after the trimming process is reduced.

    摘要翻译： 提供了一种用于其中的方法，系统和扫描透镜，用于沿着修剪路径的高速，基于激光的，精确的激光修整至少一个电气元件。 该方法包括用激光产生脉冲激光输出，该输出具有一个或多个重复频率的激光脉冲。 可以使用快速上升/下降时间，脉冲形q切换激光器或超快速激光器。 光束成形光学元件可用于产生平顶光束轮廓。 每个激光脉冲具有脉冲能量，激光波长范围内的激光波长和脉冲持续时间。 波长足够短以产生所需的小光斑尺寸，紧密公差，高吸收以及沿着修剪路径减少或消除的热影响区（HAZ）的短波长益处，但不会如此短以致于引起微裂纹。 以这种方式，减少了修整过程之后的电阻漂移。

    Method and system for high-speed precise laser trimming and scan lens for use therein
    9.
    发明授权
    Method and system for high-speed precise laser trimming and scan lens for use therein 失效
    用于高速精密激光修整和扫描镜片的方法和系统

    公开(公告)号：US07563695B2

    公开(公告)日：2009-07-21

    申请号：US11657810

    申请日：2007-01-25

    申请人： Bo Gu ,  Jonathan S. Ehrmann ,  Joseph V. Lento ,  Bruce L. Couch ,  Yun Fee Chu ,  Shepard D. Johnson

    发明人： Bo Gu ,  Jonathan S. Ehrmann ,  Joseph V. Lento ,  Bruce L. Couch ,  Yun Fee Chu ,  Shepard D. Johnson

    IPC分类号： H01L21/00

    CPC分类号： H01C17/242 ,  B23K26/0622 ,  B23K26/351 ,  B23K26/361

    摘要： A method, system and scan lens for use therein are provided for high-speed, laser-based, precise laser trimming at least one electrical element along a trim path. The method includes generating a pulsed laser output with a laser, the output having one or more laser pulses at a repetition rate. A fast rise/fall time, pulse-shaped q-switched laser or an ultra-fast laser may be used. Beam shaping optics may be used to generate a flat-top beam profile. Each laser pulse has a pulse energy, a laser wavelength within a range of laser wavelengths, and a pulse duration. The wavelength is short enough to produce desired short-wavelength benefits of small spot size, tight tolerance, high absorption and reduced or eliminated heat-affected zone (HAZ) along the trim path, but not so short so as to cause microcracking. In this way, resistance drift after the trimming process is reduced.

    摘要翻译： 提供了一种用于其中的方法，系统和扫描透镜，用于沿着修剪路径的高速，基于激光的，精确的激光修整至少一个电气元件。 该方法包括用激光产生脉冲激光输出，该输出具有一个或多个重复频率的激光脉冲。 可以使用快速上升/下降时间，脉冲形q切换激光器或超快速激光器。 光束成形光学元件可用于产生平顶光束轮廓。 每个激光脉冲具有脉冲能量，激光波长范围内的激光波长和脉冲持续时间。 波长足够短以产生所需的小光斑尺寸，紧密公差，高吸收以及沿着修剪路径减少或消除的热影响区（HAZ）的短波长益处，但不会如此短以致于引起微裂纹。 以这种方式，减少了修整过程之后的电阻漂移。