公开(公告)号：US20200096873A1

公开(公告)日：2020-03-26

申请号：US16143206

申请日：2018-09-26

申请人： Vahidreza PARICHEHREH ,  Keith J. MARTIN ,  Changhua LIU ,  Leonel ARANA

发明人： Vahidreza PARICHEHREH ,  Keith J. MARTIN ,  Changhua LIU ,  Leonel ARANA

IPC分类号： G03F7/20 ,  G02B5/04 ,  H01L21/027

摘要： Embodiments disclosed herein include a lithographic patterning system and methods of using such a system to form a microelectronic device. The lithographic patterning system includes an actinic radiation source, a stage having a surface for supporting a substrate with a resist layer, and a prism with a first surface over the stage, where the first surface has a masked layer and is substantially parallel to the surface of the stage. The prism may have a second surface that is substantially parallel to the first surface. The first and second surfaces are flat surfaces. The prism is a monolithic prism-mask, where an optical path passes through the system and exits the first surface of the prism through the mask layer. The system may include a layer disposed between the mask and resist layers. The mask layer of the prism may pattern the resist layer without an isolated mask layer.

公开(公告)号：US06462221B1

公开(公告)日：2002-10-08

申请号：US09574620

申请日：2000-05-19

申请人： Richard L. Gabriel ,  Adel M. Moussa ,  Sharon Fitzhenry ,  Changhua Liu ,  David A. Swanson ,  Brittany La ,  Salah Zahr ,  Yesh P. Sachdeva ,  Jurjus Jurayj

发明人： Richard L. Gabriel ,  Adel M. Moussa ,  Sharon Fitzhenry ,  Changhua Liu ,  David A. Swanson ,  Brittany La ,  Salah Zahr ,  Yesh P. Sachdeva ,  Jurjus Jurayj

IPC分类号： C07C20502

CPC分类号： C07C213/00 ,  C07B2200/07 ,  Y02P20/55 ,  C07C215/08

摘要： The present invention relates to a method of preparing a 1-nitro-3-substituted-3-amino-2-propanol diastereomer represented by Structural Formula I: In Structural Formula I, R is an amine protecting group, and R1 is an amino acid side-chain, a protected amino acid side-chain, a substituted or unsubstituted aliphatic group, a substituted or unsubstituted aromatic group, a substituted or unsubstituted heteroaromatic group, a substituted or unsubstituted aralkyl or a substituted or unsubstituted heteroaralkyl group. The method involves contacting a 1-nitro-3-substituted-3-amino-2-propanone with a reducing agent to form a mixture of 1-nitro-3-substituted-3-amino-2-propanol diastereomers. The 1-nitro-3-substituted-3-amino-2-propanol diastereomers are then separated by simulated moving bed chromatography to obtain one or more 1-nitro-3-substituted-3-amino-2-propanol diastereomer.

摘要翻译： 本发明涉及由结构式I表示的1-硝基-3-取代-3-氨基-2-丙醇非对映体的制备方法：在结构式I中，R是胺保护基，R 1是氨基酸 取代或未取代的芳族基团，取代或未取代的杂芳族基团，取代或未取代的芳烷基或取代或未取代的杂芳烷基。 该方法包括使1-硝基-3-取代-3-氨基-2-丙酮与还原剂接触以形成1-硝基-3-取代-3-氨基-2-丙醇非对映异构体的混合物。 然后通过模拟移动床层析分离1-硝基-3-取代-3-氨基-2-丙醇非对映异构体，得到一种或多种1-硝基-3-取代-3-氨基-2-丙醇非对映异构体。

公开(公告)号：US20230077939A1

公开(公告)日：2023-03-16

申请号：US17476120

申请日：2021-09-15

申请人： Changhua Liu ,  Pooya Tadayon ,  John Heck ,  Srikant Nekkanty

发明人： Changhua Liu ,  Pooya Tadayon ,  John Heck ,  Srikant Nekkanty

IPC分类号： G02B6/42

摘要： An electronic device comprises a photonic integrated circuit (PIC) including at least one optical signal source, an emitting lens disposed on the PIC to steer light emitted by the at least one optical signal source in a direction substantially parallel to a first surface of the PIC, and an optical element disposed on the PIC and having a curved surface in a shape of a quarter cylinder that is configured to steer light emitted from the emitting lens in a direction substantially orthogonal to the first surface of the PIC.

公开(公告)号：US20230090133A1

公开(公告)日：2023-03-23

申请号：US17481027

申请日：2021-09-21

申请人： Bai Nie ,  Pooya Tadayon ,  Leonel R. Arana ,  Yonggang Li ,  Changhua Liu ,  Kristof Darmawikarta ,  Srinivas Venkata Ramanuja Pietambaram ,  Tarek A. Ibrahim ,  Hari Mahalingam ,  Benjamin Duong

发明人： Bai Nie ,  Pooya Tadayon ,  Leonel R. Arana ,  Yonggang Li ,  Changhua Liu ,  Kristof Darmawikarta ,  Srinivas Venkata Ramanuja Pietambaram ,  Tarek A. Ibrahim ,  Hari Mahalingam ,  Benjamin Duong

IPC分类号： G02B6/42 ,  H01L25/18 ,  H01L23/00 ,  H01L25/00

摘要： An electronic device and associated methods are disclosed. In one example, the electronic device includes a photonic integrated circuit and an in situ formed waveguide. In selected examples, the electronic device includes a photonic integrated circuit coupled to an electronic integrated circuit, in a glass layer, where a waveguide is formed in the glass layer.

公开(公告)号：US20230087124A1

公开(公告)日：2023-03-23

申请号：US17483013

申请日：2021-09-23

申请人： Bai Nie ,  Pooya Tadayon ,  Leonel R. Arana ,  Yonggang Li ,  Changhua Liu ,  Kristof Darmawikarta ,  Srinivas Venkata Ramanuja Pietambaram ,  Tarek A. Ibrahim ,  Hari Mahalingam ,  Benjamin Duong

发明人： Bai Nie ,  Pooya Tadayon ,  Leonel R. Arana ,  Yonggang Li ,  Changhua Liu ,  Kristof Darmawikarta ,  Srinivas Venkata Ramanuja Pietambaram ,  Tarek A. Ibrahim ,  Hari Mahalingam ,  Benjamin Duong

IPC分类号： G02B6/42

摘要： Various embodiments disclosed relate to photonic assemblies. The present disclosure includes methods for packaging a photonic assembly, including attaching a bridge die to a glass substrate, attaching an electronic integrated circuit die to the glass substrate and the bridge die, attaching a photonic integrated circuit die to the glass substrate and the bridge die, bonding a coupling adapter to the glass substrate and in situ forming a waveguide in the coupling adapted, the waveguide aligning with the photonic integrated circuit die.

公开(公告)号：US20150276480A1

公开(公告)日：2015-10-01

申请号：US14229909

申请日：2014-03-29

申请人： Nilanjan GHOSH ,  Kevin T. MCCARTHY ,  Zhiyong WANG ,  Deepak GOYAL ,  Changhua LIU ,  Leonel R. ARANA

发明人： Nilanjan GHOSH ,  Kevin T. MCCARTHY ,  Zhiyong WANG ,  Deepak GOYAL ,  Changhua LIU ,  Leonel R. ARANA

IPC分类号： G01J3/28 ,  G01J3/04 ,  G01J3/44

CPC分类号： G02B21/008 ,  G01J3/44 ,  G01N21/21 ,  G01N21/65 ,  G01N21/8422 ,  G01N21/9501 ,  G01N2021/656 ,  G02B21/0064

摘要： Embodiments include devices, systems and processes for using a combined confocal Raman microscope for inspecting a photo resist film material layer formed on the top surface of a layer of a substrate package, to detect border defects between regions of light exposed (e.g., cured) and unexposed (e.g., uncured) resist film material. Use of the confocal Raman microscope may provide a 3D photo-resist chemical imaging and characterization technique based on combining (1) Raman spectroscopy to identify the borders between regions of light exposed and unexposed resist along XY planes, with (2) Confocal imaging to select a Z-height of the XY planes scanned. Such detection provides fast, high resolution, non-destructive in-line inspection, and improves technical development of polymerization profiles of the resist film material.

摘要翻译： 实施例包括使用组合共聚焦拉曼显微镜来检查形成在衬底封装层的顶表面上的光致抗蚀剂膜材料层的装置，系统和方法，以检测暴露（例如，固化）和 未曝光（例如未固化）抗蚀膜材料。 共焦拉曼显微镜的使用可以提供基于（1）拉曼光谱法的3D光刻抗蚀剂化学成像和表征技术，以识别沿XY平面的曝光和未曝光抗蚀剂区域之间的边界，（2）共聚焦成像选择 扫描XY平面的Z高。 这种检测提供了快速，高分辨率，无损的在线检测，并且改进了抗蚀剂膜材料的聚合曲线的技术发展。