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公开(公告)号：US09051659B2
公开(公告)日：2015-06-09
申请号：US13224019
申请日：2011-09-01
申请人： John P. DeLuca , Frank S. Delk, II , Bayard K. Johnson , William L. Luter , Neil D. Middendorf , Dick S. Williams , Nels Patrick Ostrom , James N. Highfill
发明人： John P. DeLuca , Frank S. Delk, II , Bayard K. Johnson , William L. Luter , Neil D. Middendorf , Dick S. Williams , Nels Patrick Ostrom , James N. Highfill
CPC分类号： C30B15/04 , C30B15/002 , C30B29/06
摘要： A doped silicon single crystal having a resistivity variation along a longitudinal and/or radial axis of less than 10% and a method of preparing one or a sequential series of doped silicon crystals is disclosed. The method includes providing a melt material comprising silicon into a continuous Czochralski crystal growth apparatus, delivering a dopant, such as gallium, indium, or aluminum, to the melt material, providing a seed crystal into the melt material when the melt material is in molten form, and growing a doped silicon single crystal by withdrawing the seed crystal from the melt material. Additional melt material is provided to the apparatus during the growing step. A doping model for calculating the amount of dopant to be delivered into the melt material during one or more doping events, methods for delivering the dopant, and vessels and containers used to deliver the dopant are also disclosed.
摘要翻译： 公开了具有小于10％的纵向和/或径向轴的电阻率变化的掺杂硅单晶以及制备一个或一系列顺序的掺杂硅晶体的方法。 该方法包括将包含硅的熔体材料提供到连续的切克劳斯基晶体生长装置中，将诸如镓，铟或铝的掺杂剂输送到熔体材料中，当熔体材料熔融时，将晶种提供到熔体材料中 形成并通过从熔体材料中取出晶种来生长掺杂的硅单晶。 在生长步骤期间将额外的熔体材料提供给设备。 还公开了一种用于计算在一个或多个掺杂事件期间输送到熔体材料中的掺杂剂的量的掺杂模型，用于输送掺杂剂的方法，以及用于输送掺杂剂的容器和容器的掺杂模型。
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2.发明授权公开(公告)号：US08434511B2
公开(公告)日：2013-05-07
申请号：US12786204
申请日：2010-05-24
申请人： Dick S. Williams , William L. Luter
发明人： Dick S. Williams , William L. Luter
IPC分类号： F16K3/06
CPC分类号： F16K3/06 , F01L2003/25 , F16K3/10 , F16K51/02 , Y10T137/6579
摘要： A pendulum gate valve including an expandable gate which pivots when unexpanded to selectively block a vacuum or other pressure-differential passage. The valve includes a valve plate sealing one side of the passage and a ring or barrier plate abutting an opposed side of the passage when the gate member is expanded. A compression spring biases apart the valve plate and ring to close the valve by means of respective two-stage hangers attached thereto, extending along the spring, and having distal ends capturing the spring. Pneumatic pressure applied to a pneumatic cavity formed between the middles of the two-stage hangers and accommodating the spring forces apart the valve plate and ring to open the valve in the blocking position. Thereby if pressure fails, the valve fails to a sealed state. The axially movable valve or barrier plate is advantageously water cooled to allow use with a heated processing chamber.
摘要翻译： 摆闸闸阀包括可膨胀闸门，该膨胀闸门在未膨胀时枢转以选择性地阻塞真空或其它压差通道。 阀门包括密封通道的一侧的阀板和当门构件膨胀时邻接通道的相对侧的环或阻挡板。 压缩弹簧偏压阀板和环，通过附接到其上的相应的两级悬挂器来弹性地关闭阀门，该悬挂器沿着弹簧延伸并且具有捕获弹簧的远端。 施加到形成在两级吊架的中间之间的气动空腔的气动压力并且将弹簧力容纳在阀板和环之间以将阀门打开在阻挡位置。 因此，如果压力失效，则阀门不能成为密封状态。 可轴向移动的阀或阻挡板有利地是水冷却以允许与加热的处理室一起使用。
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3.发明申请公开(公告)号：US20110006240A1
公开(公告)日：2011-01-13
申请号：US12786204
申请日：2010-05-24
申请人： Dick S. Williams , William L. Luter
发明人： Dick S. Williams , William L. Luter
IPC分类号： F01L3/10
CPC分类号： F16K3/06 , F01L2003/25 , F16K3/10 , F16K51/02 , Y10T137/6579
摘要： A pendulum gate valve including an expandable gate which pivots when unexpanded to selectively block a vacuum or other pressure-differential passage. The valve includes a valve plate sealing one side of the passage and a ring or barrier plate abutting an opposed side of the passage when the gate member is expanded. A compression spring biases apart the valve plate and ring to close the valve by means of respective two-stage hangers attached thereto, extending along the spring, and having distal ends capturing the spring. Pneumatic pressure applied to a pneumatic cavity formed between the middles of the two-stage hangers and accommodating the spring forces apart the valve plate and ring to open the valve in the blocking position. Thereby if pressure fails, the valve fails to a sealed state. The axially movable valve or barrier plate is advantageously water cooled to allow use with a heated processing chamber.
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公开(公告)号：US20120266808A1
公开(公告)日：2012-10-25
申请号：US13446414
申请日：2012-04-13
CPC分类号： C30B15/02 , C30B15/12 , C30B29/06 , Y10T117/1064
摘要： A Czochralski growth system comprising a growth chamber, an isolation valve, a feed chamber containing feedstock, and a feeder is described. The isolation valve is disposed in at least one side wall of the growth chamber, and the feed chamber is vacuum sealed to the growth chamber through the isolation valve. The feeder is insertable into the growth chamber through the isolation valve and supplies the feedstock into the growth chamber. Preferably this system can be used for producing silicon ingots using a continuous Czochralski method.
摘要翻译： 描述了包括生长室，隔离阀，含有原料的进料室和进料器的切克劳斯基生长系统。 隔离阀设置在生长室的至少一个侧壁中，并且进料室通过隔离阀被真空密封到生长室。 进料器可通过隔离阀插入生长室，并将原料供应到生长室中。 优选地，该系统可以用于使用连续的切克劳斯基（Czochralski）方法来生产硅锭。
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公开(公告)号：US06609870B2
公开(公告)日：2003-08-26
申请号：US10035456
申请日：2001-10-23
IPC分类号： E03D509
摘要： A granular semiconductor material transport system capable of continuous, non-contaminating transfer of granular semiconductor material from a large source vessel to a smaller and more manageable target vessel. Movement of the granular material is induced by flowing transfer fluid. The system includes a source vessel, a feed tube, a process vessel, a target vessel and a vacuum source, or mover. The source vessel contains a bulk supply of granular material to be transported. A feed tube received within the source vessel transfers the granular material entrained in a transfer fluid from the source vessel to the process vessel. The process vessel separates the granular material from any dust particles and deposits the granular material in the more manageable target vessel. The vacuum source sealably connects to the process vessel to evacuate the process vessel to set the granular polysilicon in motion within the system.
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公开(公告)号：US5762491A
公开(公告)日：1998-06-09
申请号：US551152
申请日：1995-10-31
申请人： Dick S. Williams , William L. Luter
发明人： Dick S. Williams , William L. Luter
CPC分类号： C30B15/02
摘要： A solid material delivery system for a furnace which melts the solid material has a delivery tube located at least partially within the furnace which is mounted by a rotor assembly for selective radial positioning in the furnace over a crucible in the furnace. The rotor assembly is constructed to compensate for thermal expansion and contraction caused by the furnace so that free movement of the delivery tube is achieved at all operating temperatures. The rotor assembly is also constructed to prevent jamming caused by particulate solid material in the rotor assembly. The delivery tube is formed so that flowable solid material will flow in a controlled fashion but without clogging to an outlet. The delivery tube and outlet are shaped to drop the material in a substantially columnar stream into the crucible.
摘要翻译： 用于熔化固体材料的炉子的固体材料输送系统具有至少部分位于炉内的输送管，该输送管由转子组件安装，用于在炉中的坩埚中选择性径向定位。 转子组件被构造成补偿由炉引起的热膨胀和收缩，从而在所有工作温度下实现输送管的自由运动。 转子组件也被构造成防止由转子组件中的固体物质引起的卡住。 输送管形成为使得可流动的固体材料以受控的方式流动，但是没有堵塞到出口。 输送管和出口成形为将材料以基本上柱状的流放入坩埚中。
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公开(公告)号：US20120056135A1
公开(公告)日：2012-03-08
申请号：US13224019
申请日：2011-09-01
申请人： John P. DeLuca , Frank S. Delk, II , Bayard K. Johnson , William L. Luter , Neil D. Middendorf , Dick S. Williams , Nels Patrick Ostrom , James N. Highfill
发明人： John P. DeLuca , Frank S. Delk, II , Bayard K. Johnson , William L. Luter , Neil D. Middendorf , Dick S. Williams , Nels Patrick Ostrom , James N. Highfill
CPC分类号： C30B15/04 , C30B15/002 , C30B29/06
摘要： A doped silicon single crystal having a resistivity variation along a longitudinal and/or radial axis of less than 10% and a method of preparing one or a sequential series of doped silicon crystals is disclosed. The method includes providing a melt material comprising silicon into a continuous Czochralski crystal growth apparatus, delivering a dopant, such as gallium, indium, or aluminum, to the melt material, providing a seed crystal into the melt material when the melt material is in molten form, and growing a doped silicon single crystal by withdrawing the seed crystal from the melt material. Additional melt material is provided to the apparatus during the growing step. A doping model for calculating the amount of dopant to be delivered into the melt material during one or more doping events, methods for delivering the dopant, and vessels and containers used to deliver the dopant are also disclosed.
摘要翻译： 公开了具有小于10％的纵向和/或径向轴的电阻率变化的掺杂硅单晶以及制备一个或一系列顺序的掺杂硅晶体的方法。 该方法包括将包含硅的熔体材料提供到连续的切克劳斯基晶体生长装置中，将诸如镓，铟或铝的掺杂剂输送到熔体材料中，当熔体材料熔融时，将晶种提供到熔体材料中 形成并通过从熔体材料中取出晶种来生长掺杂的硅单晶。 在生长步骤期间将额外的熔体材料提供给设备。 还公开了一种用于计算在一个或多个掺杂事件期间输送到熔体材料中的掺杂剂的量的掺杂模型，用于输送掺杂剂的方法，以及用于输送掺杂剂的容器和容器的掺杂模型。
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公开(公告)号：US20110006235A1
公开(公告)日：2011-01-13
申请号：US12499196
申请日：2009-07-08
申请人： Dick S. Williams , William L. Luter
发明人： Dick S. Williams , William L. Luter
CPC分类号： F16K51/02 , F01L2003/25 , F16K3/06 , F16K3/10
摘要： A pendulum gate valve including an expandable gate which pivots when unexpanded to selectively block a vacuum or other pressure-differential passage. The valve includes a valve plate sealing one side of the passage and a ring abutting an opposed side of the passage when the gate member is expanded. A compression spring biases apart the valve plate and ring to close the valve by means of respective two-stage hangers attached thereto, extending along the spring, and having distal ends capturing the spring. Pneumatic pressure applied to a pneumatic cavity formed between the middles of the two-stage hangers and accommodating the spring forces apart the valve plate and ring to open the valve in the blocking position. Thereby if pressure fails, the valve fails to a sealed state. The axially movable valve plate is advantageously water cooled to allow use with a heated processing chamber.
摘要翻译： 摆闸闸阀包括可膨胀闸门，该膨胀闸门在未膨胀时枢转以选择性地阻塞真空或其它压差通道。 阀门包括密封通道的一侧的阀板和当门构件膨胀时邻接通道的相对侧的环。 压缩弹簧偏压阀板和环，通过附接到其上的相应的两级悬挂器来弹性地关闭阀门，该悬挂器沿着弹簧延伸并且具有捕获弹簧的远端。 施加到形成在两级吊架的中间之间的气动空腔的气动压力并且将弹簧力容纳在阀板和环之间以将阀门打开在阻挡位置。 因此，如果压力失效，则阀门不能成为密封状态。 可轴向移动的阀板有利地被水冷却以允许与加热的处理室一起使用。
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公开(公告)号：US5935328A
公开(公告)日：1999-08-10
申请号：US978334
申请日：1997-11-25
CPC分类号： C30B15/30 , Y10S117/911 , Y10T117/1032 , Y10T117/1072
摘要： An apparatus for pulling a monocrystalline ingot from a semiconductor source material located within a growth chamber as the ingot is grown on a seed crystal according to the Czochralski method. The apparatus comprises a drum, a chuck constructed for holding the seed crystal and the ingot, and a cable having a first end connected to the drum, a second end connected to the chuck and a portion wound around the drum. The portion of the cable wound around the drum exerts a normal force on a circumferential surface of the drum corresponding to the tension in the cable. The drum and cable interact to produce a friction force resisting sliding movement of the cable relative to the drum in a direction lengthwise of the cable. The drum is capable of unwinding cable from the drum thereby to let out the cable and lower the chuck, and capable of winding the cable around the drum thereby to reel in the cable and draw the chuck upwardly. The chuck has a mass selected to exert a pre-tension on the cable prior to growing the ingot such that the increase in the friction on the portion of the cable wound around the drum as the cable is reeled in to pull the ingot from the source material is at least equal to the increase of the weight of the ingot as it grows on the seed crystal from the molten source material.
摘要翻译： 根据Czochralski方法，在晶种上生长晶锭时，从位于生长室内的半导体源材料拉出单晶锭的装置。 该装置包括一个滚筒，一个用于保持晶种和锭块的卡盘，以及一个连接到滚筒的第一端的电缆，连接到卡盘的第二端和缠绕在滚筒上的部分。 卷绕在滚筒周围的电缆的部分对应于电缆中的张力在鼓的圆周表面上施加法向力。 鼓和电缆相互作用以产生抵抗电缆相对于滚筒在电缆纵向方向上的滑动运动的摩擦力。 滚筒能够从滚筒中退绕电缆，从而排出电缆并降低卡盘，并且能够将电缆卷绕在滚筒周围，从而卷绕在电缆中并向上拉动卡盘。 卡盘具有选择的质量，以在生长锭之前在电缆上施加预张力，使得当电缆被卷入时绕线缠绕在电缆上的电缆的部分上的摩擦增加，以从源拉出锭 材料至少等于锭从熔融源材料在晶种上生长时其重量的增加。
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公开(公告)号：US4026606A
公开(公告)日：1977-05-31
申请号：US606707
申请日：1975-08-21
申请人： Dick S. Williams
发明人： Dick S. Williams
摘要： In conveying lightweight articles such as containers and the like along a tubular passage, improved apparatus is provided comprising a brush-like guide in the passage for scratchless article support during conveying. The process improvement involves cushionably supporting articles formed of an abrasion-sensitive material on the brush-like surface during conveying to substantially avoid surface scuffing.
摘要翻译： 在沿着管状通道输送诸如容器等的轻质制品时，提供了改进的装置，其包括通道中的刷状引导件，用于在输送过程中无刮擦物品支撑。 工艺改进涉及在输送期间缓冲地支撑由刷状表面上的耐磨材料形成的制品，以基本上避免表面磨损。
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