-
公开(公告)号：US5683560A
公开(公告)日：1997-11-04
申请号：US676499
申请日：1996-07-08
CPC分类号： H01J37/3435
摘要： A magnetic yoke (22,23) carrying rows of permanent magnets (33,34) and a target (49,50) is connected to a top plate (41,42) by spring bolts (67) which urge the yoke toward the top plate. Rotatable cams (43,44) between the top plate and the yoke are used to adjust the distance between the top plate and the yoke. Clamping bars (37,38) having a claw-like edge parts (59-66) limit the maximum distance and, in a preferred embodiment, hold the target against the yoke.
摘要翻译： 承载行永磁体（33,34）和靶（49,50）的磁轭（22,23）通过弹簧螺栓（67）连接到顶板（41,42），弹簧螺栓（67）将磁轭推向顶部 盘子。 顶板和轭之间的可旋转凸轮（43,44）用于调节顶板和轭架之间的距离。 具有爪形边缘部分（59-66）的夹紧杆（37,38）限制最大距离，并且在一个优选实施例中将目标保持抵靠轭。
-
公开(公告)号：US20060096855A1
公开(公告)日：2006-05-11
申请号：US10983179
申请日：2004-11-05
申请人： Richard Newcomb , Scott Trube , Tom Riso , Ken Kawakami , Dietmar Marquardt , Andreas Sauer
发明人： Richard Newcomb , Scott Trube , Tom Riso , Ken Kawakami , Dietmar Marquardt , Andreas Sauer
IPC分类号： C23C14/00
CPC分类号： F03H1/00 , H01J37/3405
摘要： A quick attachment system for cathodes is described. One embodiment of the system comprises a laterally movable support shaft; a flange connected to the support shaft, the flange including a cavity locking element and a shoulder locking element; a bordering separator connectable to a target pipe, the bordering separator comprising ring extensions for engaging the cavity locking element of flange; and a straining ring configured to engage the bordering separator and the shoulder locking element of the flange to thereby secure the laterally movable shaft to the target pipe.
摘要翻译： 描述了用于阴极的快速附接系统。 该系统的一个实施例包括横向可移动的支撑轴; 连接到所述支撑轴的凸缘，所述凸缘包括腔锁定元件和肩部锁定元件; 可连接到目标管道上的接壤分离器，接合分离器包括用于接合凸缘的腔体锁定元件的环形延伸部分; 以及应变环，其构造成接合凸缘的边界分离器和肩部锁定元件，从而将横向可移动的轴固定到目标管。
-
公开(公告)号：US06511584B1
公开(公告)日：2003-01-28
申请号：US08813689
申请日：1997-03-07
IPC分类号： C23C1434
CPC分类号： H01J37/3444 , C23C14/0036 , H01J37/3402
摘要： A sputtering electrode is switched between two power values at a constant reactive gas flow rate which is selected so that the target of the sputtering electrode is in the metallic mode at the first power value while in the oxide mode at a second power value.
摘要翻译： 溅射电极以恒定的反应性气体流量在两个功率值之间切换，所述恒定反应气体流速选择为使得溅射电极的目标处于处于第一功率值的金属模式，而在氧化物模式下处于第二功率值。
-
公开(公告)号：US5944967A
公开(公告)日：1999-08-31
申请号：US554750
申请日：1995-11-07
CPC分类号： H01J37/3435 , C23C14/3407 , H01J37/3408
摘要： A dual magnetron cathode assembly includes a pair of elongate, parallel targets in coplanar relationship fixed to respective magnetic yokes with associated rows of permanent magnets for producing a magnetic field over the targets. A common back plate is provided for both cathodes, a center shield plate extending from the back plate to between the targets, side shield plates and end shield plates likewise extending from the back plate to form side-by-side rectangular shielding enclosures which expose only the sputtering surface of the targets. The yokes are fixed with respect to the vacuum chamber by insulative holders which extend through openings in the back plate.
摘要翻译： 双磁控管阴极组件包括一对共面关系的细长的平行靶，固定到相应的磁轭上，该磁轭具有相关的永磁体排，用于在靶上产生磁场。 为两个阴极提供常见的背板，中央屏蔽板从后板延伸到目标之间，侧面屏蔽板和端部屏蔽板，同样从背板延伸，形成仅仅暴露的并排矩形屏蔽外壳 靶的溅射表面。 轭体通过延伸穿过背板中的开口的绝缘保持器相对于真空室固定。
-
公开(公告)号：US5616226A
公开(公告)日：1997-04-01
申请号：US554751
申请日：1995-11-07
CPC分类号： H01J37/3435 , C23C14/3407 , H01J37/3408 , H01J37/3426 , H01J37/3497
摘要： A pair of parallel elongate targets are fixed with respect to respective plates mounted in a vacuum chamber by means of clamps arranged along the longitudinal sides of each target, and an expandable wedge system between the rear plate and magnetic yokes on the backs of the targets. The wedge system for each target includes a wedge block having ramped surfaces which face outward, a pair of wedge jaws having ramped surfaces which slide against the ramped surfaces of the block, and a screw which draws the jaws together against the ramped surfaces of the block to expand the system and force the plate away from the yoke and fix the entire assembly in the clamps.
摘要翻译： 一对平行的细长靶相对于安装在真空室中的相应板通过沿着每个靶的纵向侧面布置的夹具而固定，并且在后板和磁轭之间的可扩展的楔形系统位于靶的背部上。 用于每个目标的楔形系统包括楔形块，其具有面向外的斜面，一对具有斜面的楔形爪，其具有抵靠该块的倾斜表面滑动的斜面;以及将夹爪拉在一起抵靠该块的倾斜表面的螺钉 以扩展系统并迫使板远离轭并将整个组件固定在夹具中。
-
公开(公告)号：US5662784A
公开(公告)日：1997-09-02
申请号：US622443
申请日：1996-03-25
CPC分类号： H01J37/3244 , H01J37/34 , H01J37/3438
摘要： Hollow members having conduits for process gas and coolant are mounted in parallel on sidewall of a vacuum chamber with a sputtering cathode therebetween. Anode members having an L-shaped cross section are mounted over the hollow members and held in place by thumb screws in threaded bores of strips fixed to the chamber walls above the hollow members. Mask members having a Z-shaped cross section are mounted over the anodes and are also held in place by the thumb screws.
摘要翻译： 具有工艺气体和冷却剂导管的空心构件平行地安装在真空室的侧壁上，其间具有溅射阴极。 具有L形横截面的阳极部件安装在中空部件上，并通过翼形螺钉固定在固定到中空部件上方的室壁的螺纹孔中的适当位置。 具有Z形横截面的掩模构件安装在阳极上，并且还通过翼形螺钉保持就位。
-
-
-
-
-
搜索结果
6 条记录 (耗时 0.009 秒)