Nanoscale arrays, robust nanostructures, and related devices
    6.
    发明申请
    Nanoscale arrays, robust nanostructures, and related devices 审中-公开
    纳米阵列,强大的纳米结构和相关器件

    公开(公告)号:US20050253137A1

    公开(公告)日:2005-11-17

    申请号:US10995075

    申请日:2004-11-22

    IPC分类号: H01L29/06 H01L51/00

    摘要: The present invention relates generally to nanotechnology and sub-microelectronic circuitry, and more particularly to nanoelectronics. One aspect of the invention is directed to nanostructures on substrates. In some cases, the substrate may be or comprise glass and/or polymers, and in some cases, the substrate may be flexible and/or transparent. The present invention is also directed, according to another aspect, to techniques for fabricating nanostructures on substrates. For example, monolayers of nanoscale semiconductors may be etched, e.g. photolithographically, to yield discrete and/or predetermined arrays of nanoscale semiconductors and other articles on a substrate. In one embodiment, the array may include hundreds, thousands, or more of electronic components such as field-effect transistors. Such arrays may be connected to electrodes using photolithographic techniques, and in some cases, without the need for registering individual semiconductor-metal contacts.

    摘要翻译: 本发明一般涉及纳米技术和亚微电子电路,更具体地涉及纳米电子学。 本发明的一个方面涉及衬底上的纳米结构。 在一些情况下,基底可以是或包括玻璃和/或聚合物,并且在一些情况下,基底可以是柔性的和/或透明的。 根据另一方面,本发明还涉及用于在基底上制造纳米结构的技术。 例如,可以蚀刻纳米尺度半导体的单层。 光刻,以产生在衬底上的纳米尺度半导体和其它制品的离散和/或预定阵列。 在一个实施例中,阵列可以包括数百个,数千个或更多个诸如场效应晶体管的电子部件。 这样的阵列可以使用光刻技术连接到电极,并且在一些情况下,不需要注册各个半导体 - 金属触点。