公开(公告)号：US10435898B2

公开(公告)日：2019-10-08

申请号：US14757044

申请日：2015-11-11

申请人： Douglas Arthur Webb

发明人： Douglas Arthur Webb

IPC分类号： E04H1/04 ,  E04H1/02 ,  E04H1/00 ,  E04H17/00

摘要： A structure and its adjacent group-segregated outdoor spaces or an arrangement of structures and their adjacent group-segregated outdoor spaces includes at least one structure comprising at least one a unit and at least one b unit. The areas adjacent to the structure or structures are physically separated into a first group-segregated outdoor space and a second group-segregated outdoor space. The first group-segregated outdoor space is associated with the at least one a unit. The second group-segregated outdoor space is associated with the at least one b unit. The areas adjacent to the structure or structures are physically separated by a barrier, whereby the barrier at least partly limits visibility and access between the first and second segregated outdoor areas.

公开(公告)号：US6161500A

公开(公告)日：2000-12-19

申请号：US940779

申请日：1997-09-30

申请人： Stanislaw Kopacz ,  Douglas Arthur Webb ,  Gerrit Jan Leusink ,  Rene Emile LeBlanc ,  Michael S. Ameen ,  Joseph Todd Hillman ,  Robert F. Foster ,  Robert Clark Rowan, Jr.

发明人： Stanislaw Kopacz ,  Douglas Arthur Webb ,  Gerrit Jan Leusink ,  Rene Emile LeBlanc ,  Michael S. Ameen ,  Joseph Todd Hillman ,  Robert F. Foster ,  Robert Clark Rowan, Jr.

IPC分类号： C23C16/44 ,  C23C16/455 ,  C23C16/50 ,  C23C16/505 ,  C23C16/509 ,  C23C16/01

CPC分类号： C23C16/45574 ,  C23C16/45514 ,  C23C16/45565 ,  C23C16/5096

摘要： A method and apparatus for depositing a film by chemical vapor deposition comprises a showerhead for dispersing reactant gases into the processing space wherein the showerhead has a first space therein operable for receiving and dispersing the first reacting gas, and has a second space therein, generally isolated from the first space, and operable for receiving and dispersing the second reactant gas separate from the first gas dispersion for maintaining segregation of reactant gases and generally preventing premature mixture of the gases prior to their introduction into the processing space to prevent premature deposition in the system.

公开(公告)号：US20160138286A1

公开(公告)日：2016-05-19

申请号：US14757044

申请日：2015-11-11

申请人： Douglas Arthur Webb

发明人： Douglas Arthur Webb

IPC分类号： E04H1/04 ,  E04H17/00 ,  E04H1/00

CPC分类号： E04H1/04 ,  E04H1/005 ,  E04H1/02 ,  E04H17/00

摘要： A structure and its adjacent group-segregated outdoor spaces or an arrangement of structures and their adjacent group-segregated outdoor spaces includes at least one structure comprising at least one a unit and at least one b unit. The areas adjacent to the structure or structures are physically separated into a first group-segregated outdoor space and a second group-segregated outdoor space. The first group-segregated outdoor space is associated with the at least one a unit. The second group-segregated outdoor space is associated with the at least one b unit. The areas adjacent to the structure or structures are physically separated by a barrier, whereby the barrier at least partly limits visibility and access between the first and second segregated outdoor areas.

公开(公告)号：US06368987B1

公开(公告)日：2002-04-09

申请号：US09587916

申请日：2000-06-06

申请人： Stanislaw Kopacz ,  Douglas Arthur Webb ,  Gerrit Jan Leusink ,  Rene Emile LeBlanc ,  Michael S. Ameen ,  Joseph Todd Hillman ,  Robert F. Foster ,  Robert Clark Rowan, Jr.

发明人： Stanislaw Kopacz ,  Douglas Arthur Webb ,  Gerrit Jan Leusink ,  Rene Emile LeBlanc ,  Michael S. Ameen ,  Joseph Todd Hillman ,  Robert F. Foster ,  Robert Clark Rowan, Jr.

IPC分类号： H01L2131

CPC分类号： C23C16/45574 ,  C23C16/45514 ,  C23C16/45565 ,  C23C16/5096

摘要： A method and apparatus for depositing a film by chemical vapor deposition comprises a showerhead for dispersing reactant gases into the processing space wherein the showerhead has a first space therein operable for receiving and dispersing the first reacting gas, and has a second space therein, generally isolated from the first space, and operable for receiving and dispersing the second reactant gas separate from the first gas dispersion for maintaining segregation of reactant gases and generally preventing premature mixture of the gases prior to their introduction into the processing space to prevent premature deposition in the system.

摘要翻译： 用于通过化学气相沉积沉积膜的方法和装置包括用于将反应物气体分散到处理空间中的喷头，其中喷淋头具有可操作的第一空间，用于接收和分散第一反应气体，并且其中具有通常隔离的第二空间 并且可操作以接收和分散与第一气体分散体分离的第二反应物气体，以保持反应气体的分离，并且通常防止气体在其引入处理空间之前过早混合，以防止在系统中过早沉积 。