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公开(公告)号：US07374391B2
公开(公告)日：2008-05-20
申请号：US11315873
申请日：2005-12-22
申请人： Michael Rice , Jeffrey Hudgens , Charles Carlson , William Tyler Weaver , Robert Lowrance , Eric Englhardt , Dean C. Hruzek , Mario David Silvetti , Michael Kuchar , Kirk Van Katwyk , Van Hoskins , Vinay Shah
发明人： Michael Rice , Jeffrey Hudgens , Charles Carlson , William Tyler Weaver , Robert Lowrance , Eric Englhardt , Dean C. Hruzek , Mario David Silvetti , Michael Kuchar , Kirk Van Katwyk , Van Hoskins , Vinay Shah
IPC分类号： B25J15/00
CPC分类号： H01L21/67178 , H01L21/67173 , H01L21/67276 , H01L21/67742 , H01L21/67745 , H01L21/67748 , H01L21/68707
摘要： A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint. The various embodiments of the cluster tool may utilize two or more robots that are configured in a parallel processing configuration to transfer substrates between the various processing chambers retained in the processing racks so that a desired processing sequence can be performed on the substrates. In one aspect, the parallel processing configuration contains two or more robot assemblies that are adapted to move in a vertical and horizontal directions, to access the various processing chambers retained in generally adjacently positioned processing racks. Generally, the various embodiments described herein are advantageous since each row or group of substrate processing chambers are serviced by two or more robots to allow for increased throughput and increased system reliability. Also, the various embodiments described herein are generally configured to minimize and control the particles generated by the substrate transferring mechanisms, to prevent device yield and substrate scrap problems that can affect the cost of ownership of the cluster tool. The flexible and modular architecture allows the user to configure the number of processing chambers, processing racks, and processing robots required to meet the throughput needs of the user.
摘要翻译： 一种使用多室处理系统或集群工具处理衬底的方法和装置，其具有增加的系统吞吐量，增加的系统可靠性，改进的器件产量性能，更可重复的晶片处理历史（或晶片历史）以及减少的 脚印。 群集工具的各种实施例可以使用以并行处理配置配置的两个或更多个机器人，以在保留在处理机架中的各种处理室之间传送衬底，使得可以在衬底上执行期望的处理顺序。 在一个方面，并行处理配置包括两个或更多个机器人组件，其适于在垂直和水平方向上移动，以访问保持在通常相邻定位的处理机架中的各种处理室。 通常，这里描述的各种实施例是有利的，因为每行或一组衬底处理室由两个或更多个机器人来维护，以允许增加的生产量和增加的系统可靠性。 此外，本文所述的各种实施例通常被配置为最小化和控制由衬底传送机构产生的颗粒，以防止可能影响群集工具的所有权成本的装置产量和衬底废料问题。 灵活和模块化的架构允许用户配置满足用户吞吐量需求所需的处理室，处理机架和处理机器人的数量。
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公开(公告)号：US20080051929A1
公开(公告)日：2008-02-28
申请号：US11775365
申请日：2007-07-10
申请人： Steve Hongkham , Eric Englhardt , Michael Rice , Helen Armer , Chongyang Wang
发明人： Steve Hongkham , Eric Englhardt , Michael Rice , Helen Armer , Chongyang Wang
IPC分类号： G06F17/00
CPC分类号： H01L21/67276
摘要： Methods and apparatus for increasing the processing throughput of multiple lots of semiconductor wafers through a cluster tool while maintaining a constant wafer history for each lot are provided. A first lot of wafers containing one through n-th wafers is introduced into a cluster tool containing one or more processing chambers. The first lot of wafers is processed for a first time period. A second lot of wafers containing one through n-th wafers is introduced into the cluster tool prior to completion of the first time period, wherein the second lot is introduced so as to minimize a time gap between the n-th wafer of the first lot of wafers and the first wafer of the second lot of wafers while maintaining a first constant wafer history for each wafer within the first lot and maintaining a second constant wafer history for each wafer in the second lot.
摘要翻译： 提供了通过集群工具增加多批半导体晶片的处理能力的方法和装置，同时保持每批的恒定的晶片历史。 包含一个至第n个晶片的第一批晶片被引入到包含一个或多个处理室的簇工具中。 第一批晶圆首次处理。 在第一时间段完成之前，将包含一个至第n个晶片的第二批晶片引入到该簇工具中，其中引入第二批以最小化第一批第n个晶片之间的时间间隔 的晶片和第二批晶片的第一晶片，同时保持第一批内的每个晶片的第一恒定晶片历史，并为第二批中的每个晶片保持第二恒定的晶片历史。
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公开(公告)号：US20070147982A1
公开(公告)日：2007-06-28
申请号：US11398218
申请日：2006-04-05
申请人： Mike Rice , Jeffrey Hudgens , Charles Carlson , William Tyler Weaver , Robert Lowrance , Eric Englhardt , Dean Hruzek , Mario Silvetti , Michael Kuchar , Kirk Van Katwyk , Van Hoskins , Vinay Shah
发明人： Mike Rice , Jeffrey Hudgens , Charles Carlson , William Tyler Weaver , Robert Lowrance , Eric Englhardt , Dean Hruzek , Mario Silvetti , Michael Kuchar , Kirk Van Katwyk , Van Hoskins , Vinay Shah
IPC分类号： H01L21/677
CPC分类号： H01L21/67178 , H01L21/67173 , H01L21/67276 , H01L21/67742 , H01L21/67745 , H01L21/67748 , H01L21/68707
摘要： A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint. The various embodiments of the cluster tool may utilize two or more robots that are configured in a parallel processing configuration to transfer substrates between the various processing chambers retained in the processing racks so that a desired processing sequence can be performed on the substrates. In one aspect, the parallel processing configuration contains two or more robot assemblies that are adapted to move in a vertical and horizontal directions, to access the various processing chambers retained in generally adjacently positioned processing racks. Generally, the various embodiments described herein are advantageous since each row or group of substrate processing chambers are serviced by two or more robots to allow for increased throughput and increased system reliability. Also, the various embodiments described herein are generally configured to minimize and control the particles generated by the substrate transferring mechanisms, to prevent device yield and substrate scrap problems that can affect the cost of ownership of the cluster tool. The flexible and modular architecture allows the user to configure the number of processing chambers, processing racks, and processing robots required to meet the throughput needs of the user.
摘要翻译： 一种使用多室处理系统或集群工具处理衬底的方法和设备，其具有增加的系统吞吐量，增加的系统可靠性，改进的器件产量性能，更可重复的晶片处理历史（或晶片历史）以及减少的 脚印。 群集工具的各种实施例可以使用以并行处理配置配置的两个或更多个机器人，以在保留在处理机架中的各种处理室之间传送衬底，使得可以在衬底上执行期望的处理顺序。 在一个方面，并行处理配置包括两个或更多个机器人组件，其适于在垂直和水平方向上移动，以访问保持在通常相邻定位的处理机架中的各种处理室。 通常，这里描述的各种实施例是有利的，因为每行或一组衬底处理室由两个或更多个机器人来维护，以允许增加的生产量和增加的系统可靠性。 此外，本文所述的各种实施例通常被配置为最小化和控制由衬底传送机构产生的颗粒，以防止可能影响群集工具的所有权成本的装置产量和衬底废料问题。 灵活和模块化的架构允许用户配置满足用户吞吐量需求所需的处理室，处理机架和处理机器人的数量。
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4.发明申请公开(公告)号：US20070108020A1
公开(公告)日：2007-05-17
申请号：US11619183
申请日：2007-01-02
IPC分类号： B65G29/00
CPC分类号： H01L21/68707 , H01L21/6773 , H01L21/67733
摘要： A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.
摘要翻译： 公开了一种用于连续运动的高速位置输送机系统的分离安装系统。 支撑托架可以从传送带悬挂，使得支撑托架相对于传送带上的至少一个点保持固定的位置和方向，而不会在传送带，支撑架或传送带之间的联接中引起明显的应力 皮带和支撑架。 安装件可以包括附接到支撑架的前导可旋转轴承，其可释放地接合附接到传送带的第一键，该旋转轴承适于容纳由传送带施加到支撑支架的旋转力。 安装件还可以包括附接到支撑支架的滑动轴承，其可以可释放地接合附接到传送带的第二键，滑动轴承适于容纳由传送带施加到支撑支架的纵向力。
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公开(公告)号：US20070061031A1
公开(公告)日：2007-03-15
申请号：US11521070
申请日：2006-09-13
申请人： Robert Lowrance , Eric Englhardt , Michael Rice , Vinay Shah , Sushant Koshti , Jeffrey Hudgens
发明人： Robert Lowrance , Eric Englhardt , Michael Rice , Vinay Shah , Sushant Koshti , Jeffrey Hudgens
IPC分类号： G06F19/00
CPC分类号： B65G47/52 , B65G29/00 , B65G47/28 , B65G2203/025 , H01L21/67706 , H01L21/67715 , Y10S414/135 , Y10S414/14
摘要： A band to band transfer module according to the present invention may be used with a substrate carrier transport system, or other systems, to transfer substrate carriers (e.g., small lot substrate carriers) from one conveyor to another conveyor or between two points on the same conveyor. The transfers (e.g., pick and place) of the substrate carriers may be made between conveyors traveling at different speeds. Numerous other aspects and features are disclosed.
摘要翻译： 根据本发明的带带传输模块可以与衬底载体传输系统或其他系统一起使用，以将衬底载体（例如，小批量衬底载体）从一个传送器转移到另一个传送器或在相同的两个点之间 输送带。 可以在以不同速度行进的输送机之间形成基板载体的传送（例如拾取和放置）。 公开了许多其他方面和特征。
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公开(公告)号：US20060260916A1
公开(公告)日：2006-11-23
申请号：US11494904
申请日：2006-07-28
IPC分类号： B65G15/30
CPC分类号： H01L21/67706 , B65G17/20 , B65G37/02 , B65G2201/0297 , H01L21/67727 , H01L21/6773 , H01L21/67769 , H01L21/67778 , Y10S414/135
摘要： According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing facility. The ribbon is adapted to (1) be flexible in a horizontal plane and rigid in a vertical plane; and (2) transport a plurality of substrate carriers within at least a portion of the semiconductor device manufacturing facility. Numerous other aspects are provided, as are systems, methods and computer program products in accordance with these and other aspects.
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公开(公告)号：US20060260910A1
公开(公告)日：2006-11-23
申请号：US11495055
申请日：2006-07-28
IPC分类号： B65G29/00
CPC分类号： H01L21/68707 , H01L21/6773 , H01L21/67733
摘要： A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.
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公开(公告)号：US20060072992A1
公开(公告)日：2006-04-06
申请号：US11210199
申请日：2005-08-23
IPC分类号： B65B69/00
CPC分类号： H01L21/67353 , H01L21/67373 , H01L21/67383 , H01L21/67386 , H01L21/67775 , H01L21/67778 , Y10S414/14
摘要： In a first aspect, an automatic door opener is provided that includes (1) a platform adapted to support a substrate carrier; (2) a door opening mechanism adapted to open a door of the substrate carrier while the substrate carrier is supported by the platform; and (3) a tunnel. The tunnel is adapted to extend from an opening in a clean room wall toward the platform and at least partially surround the platform. The tunnel is further adapted to direct a flow of air from the clean room wall toward the platform and out of the tunnel. Numerous other aspects are provided.
摘要翻译： 在第一方面，提供了一种自动开门器，其包括：（1）适于支撑衬底载体的平台; （2）门打开机构，其适于在基板载体由平台支撑的同时打开基板载体的门; 和（3）隧道。 隧道适于从洁净室壁中的开口延伸到平台并且至少部分地围绕平台。 隧道还适于将来自洁净室壁的空气流引向平台并且离开隧道。 提供了许多其他方面。
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公开(公告)号：US20050224315A1
公开(公告)日：2005-10-13
申请号：US10988190
申请日：2004-11-12
IPC分类号： C23G1/02 , H01L21/677
CPC分类号： H01L21/67733 , H01J37/32743 , H01L21/67736 , H01L21/67766 , H01L21/67775
摘要： In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. A balancing mass is coupled directly or indirectly to a frame on which the substrate carrier handler is mounted and is adapted to accelerate in a direction opposite to the direction of end effector acceleration, as the end effector accelerates. Thus, inertial loads may be substantially balanced, and frame vibration reduced, despite potentially high rates of acceleration. Numerous other aspects are provided.
摘要翻译： 在第一方面中，基板装载站由连续输送基板载体的输送机供给。 作为基板装载站的一部分的基板载体处理器在输送机运动的同时与输送机交换基板载体。 载体交换过程可以包括以基本匹配输送机速度的速度移动基底载体处理器的端部执行器。 平衡块直接或间接地耦合到其上安装有基底载体处理器的框架上，并且适于在端部执行器加速时沿与端部执行器加速度的方向相反的方向加速。 因此，惯性负载可以基本平衡，并且框架振动减小，尽管潜在的高加速率。 提供了许多其他方面。
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公开(公告)号：US20050145464A1
公开(公告)日：2005-07-07
申请号：US10988168
申请日：2004-11-12
IPC分类号： H01L21/68 , B24B37/04 , B65G49/07 , H01L21/687 , B24B5/00
CPC分类号： B24B37/345 , H01L21/68707
摘要： In a first aspect, a first apparatus is provided for inter-station overhead transport of a substrate carrier. The first apparatus includes (1) an overhead transport mechanism; (2) a substrate carrier support suspended from the overhead transport mechanism and adapted to receive and support a substrate carrier; and (3) a stabilization apparatus adapted to limit rocking of the substrate carrier and substrate carrier support relative to the overhead transport mechanism. Numerous other aspects are provided.
摘要翻译： 在第一方面，提供了一种用于衬底载体的站间架空输送的第一装置。 第一装置包括（1）架空运输机构; （2）悬架在架空运输机构上并适于接收和支撑衬底载体的衬底载体支撑件; 以及（3）稳定装置，其适于限制衬底载体和衬底载体支撑件相对于架空输送机构的摆动。 提供了许多其他方面。
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