公开(公告)号：US20120009713A1

公开(公告)日：2012-01-12

申请号：US13257756

申请日：2010-03-26

Applicant: Eric Ollier ,  Audrey Berthelot

Inventor： Eric Ollier ,  Audrey Berthelot

IPC: H01L21/8234

CPC classification number: B81C1/00246 ,  B81C2203/0735

Abstract: A method for making a microelectronic device including, on a same substrate, at least one electro-mechanical component including a mobile structure of a monocrystalline semi-conductor material and a mechanism actuating and/or detecting the mobile structure, and with at least one transistor. The method a) provides a substrate including at least one first semi-conducting layer including at least one region in which a channel area of the transistor is provided, b) etches a second semi-conducting layer based on a given semi-conductor material, lying on an insulating layer placed on the first semi-conducting layer, to form at least one pattern of the mobile structure of the component in an area of monocrystalline semi-conductor material of the second semi-conducting layer, and at least one pattern of gate of the transistor on a gate dielectric area located facing the given region.

Abstract translation: 一种制造微电子器件的方法，该微电子器件包括在同一衬底上的至少一个机电元件，其包括单晶半导体材料的移动结构和致动和/或检测该移动结构的机构，以及至少一个晶体管 。 方法a）提供包括至少一个第一半导电层的衬底，所述至少一个第一半导体层包括至少一个其中提供了晶体管的沟道面积的区域，b）基于给定的半导体材料蚀刻第二半导体层， 位于设置在第一半导体层上的绝缘层上，以在第二半导体层的单晶半导体材料的区域中形成至少一种图案的部件的移动结构，以及至少一种图案 位于面向给定区域的栅极电介质区域上的晶体管的栅极。

公开(公告)号：US20100219895A1

公开(公告)日：2010-09-02

申请号：US12710817

申请日：2010-02-23

Applicant: Laurent DURAFFOURG ,  Philippe ANDREUCCI ,  Eric COLINET ,  Sébastien HENTZ ,  Eric OLLIER

Inventor： Laurent DURAFFOURG ,  Philippe ANDREUCCI ,  Eric COLINET ,  Sébastien HENTZ ,  Eric OLLIER

IPC: H03B5/02

CPC classification number: H03B5/323 ,  H03H9/02259

Abstract: The resonant device comprises an electromechanical resonator of nanometric or micrometric size that comprises a mobile element and a fixed element. Detection means provide detection signals representative of movement of the mobile element with respect to the fixed element to a feedback loop that is connected to an excitation input of the resonator. The resonator is formed on the same substrate as the detection means and feedback loop. The feedback loop comprises at most first and second transistors connected in series between a reference voltage and the excitation terminal. A capacitive load is connected between the excitation terminal and reference voltage. The detection signals control the conductivity of the first transistor.

Abstract translation: 谐振装置包括纳米级或微米尺寸的机电谐振器，其包括移动元件和固定元件。 检测装置将表示移动元件相对于固定元件的移动的检测信号提供给连接到谐振器的激励输入的反馈环路。 谐振器形成在与检测装置和反馈回路相同的基板上。 反馈回路包括至多第一和第二晶体管串联连接在参考电压和激励端子之间。 电容性负载连接在励磁端子和参考电压之间。 检测信号控制第一晶体管的电导率。

公开(公告)号：US20100219893A1

公开(公告)日：2010-09-02

申请号：US12710678

申请日：2010-02-23

Applicant: Laurent DURAFFOURG ,  Philippe ANDREUCCI ,  Eric COLINET ,  Sébastien HENTZ ,  Eric OLLIER

Inventor： Laurent DURAFFOURG ,  Philippe ANDREUCCI ,  Eric COLINET ,  Sébastien HENTZ ,  Eric OLLIER

IPC: H03L7/00 ,  H03B5/30

CPC classification number: H03B5/323

Abstract: The device resonant comprises a plurality of synchronized oscillators. Each oscillator comprises a resonator which comprises detection means providing detection signals representative of oscillation of the resonator to a feedback loop connected to an excitation input of the resonator. The detection signals control the conductivity of the feedback loop of the oscillator. The excitation inputs of all the resonators are connected to a common point which constitutes the output of the resonant device. A capacitive load is connected between said common point and a reference voltage.

Abstract translation: 器件谐振包括多个同步振荡器。 每个振荡器包括谐振器，该谐振器包括检测装置，其将表示谐振器的振荡的检测信号提供给连接到谐振器的激励输入的反馈环路。 检测信号控制振荡器的反馈回路的电导率。 所有谐振器的激励输入连接到构成谐振装置的输出的公共点。 电容性负载连接在所述公共点和参考电压之间。

公开(公告)号：US20100314668A1

公开(公告)日：2010-12-16

申请号：US12744827

申请日：2008-12-03

Applicant: Eric Ollier ,  Thomas Baron

Inventor： Eric Ollier ,  Thomas Baron

IPC: H01L23/02 ,  H01L21/50

CPC classification number: B81C1/00246 ,  B81C2203/0728 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method for producing a device including at least one integrated circuit and at least one N/MEMS. The method produces the N/MEMS in at least one upper layer arranged at least above a first section of a substrate, produces the integrated circuit in a second section of the substrate and/or in a semiconductor layer arranged at least above the second section of the substrate, and further produces a cover encapsulating the N/MEMS from at least one layer used for production of a gate in the integrated circuit and/or for producing at least one electrical contact of the integrated circuit.

Abstract translation: 一种用于制造包括至少一个集成电路和至少一个N / MEMS的器件的方法。 该方法在至少布置在衬底的第一部分上方的至少一个上层中产生N / MEMS，在衬底的第二部分中和/或在至少在第二部分的第二部分上方布置的半导体层中产生集成电路 并且进一步从用于在集成电路中生产栅极的至少一个层和/或用于产生集成电路的至少一个电接触件产生封装N / MEMS的覆盖层。

公开(公告)号：US5848206A

公开(公告)日：1998-12-08

申请号：US549970

申请日：1995-10-30

Applicant: Pierre Labeye ,  Eric Ollier

Inventor： Pierre Labeye ,  Eric Ollier

IPC: G01L1/24 ,  G01P15/093 ,  G02B6/35 ,  G02B6/26 ,  G01P15/00

CPC classification number: G02B6/3508 ,  G01L1/24 ,  G01P15/093 ,  G01P2015/0817 ,  G02B6/355 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/3596

Abstract: Device for compensating deformations of a part of an optomechanical or micromechanical system. This device compensates deformations, in a first direction (z), of a mobile part (26) of an apparatus, e.g. of a micromechanical and optomechanical nature, said mobile part being displaceable in a second direction (y), and having at least one arm (50, 52) connecting on the one hand a free end of the mobile part and a fixed part (16) of the apparatus, said arm having an adequate flexibility in the second direction (y), so as not to impede the displacement of the mobile part in said second direction (y), and an adequate rigidity in the first direction (z), so as to limit the deformations of the mobile part in said first direction.

Abstract translation: 用于补偿机械或微机械系统的一部分变形的装置。 该装置补偿装置的可移动部件（26）在第一方向（z）上的变形，例如， 所述移动部件可以在第二方向（y）上移动，并且具有至少一个臂（50,52），一个臂连接在所述可移动部件的自由端和固定部分（16）之间， 所述臂在所述第二方向（y）上具有足够的柔性，以便不妨碍所述可移动部件在所述第二方向（y）上的位移和所述第一方向（z）上的足够的刚性，因此 以限制移动部件在所述第一方向上的变形。

公开(公告)号：US08018291B2

公开(公告)日：2011-09-13

申请号：US12710817

申请日：2010-02-23

Applicant: Laurent Duraffourg ,  Philippe Andreucci ,  Eric Colinet ,  Sebastien Hentz ,  Eric Ollier

Inventor： Laurent Duraffourg ,  Philippe Andreucci ,  Eric Colinet ,  Sebastien Hentz ,  Eric Ollier

IPC: H03B5/30

CPC classification number: H03B5/323 ,  H03H9/02259

Abstract: The resonant device comprises an electromechanical resonator of nanometric or micrometric size that comprises a mobile element and a fixed element. Detection means provide detection signals representative of movement of the mobile element with respect to the fixed element to a feedback loop that is connected to an excitation input of the resonator. The resonator is formed on the same substrate as the detection means and feedback loop. The feedback loop comprises at most first and second transistors connected in series between a reference voltage and the excitation terminal. A capacitive load is connected between the excitation terminal and reference voltage. The detection signals control the conductivity of the first transistor.

Abstract translation: 谐振装置包括纳米级或微米尺寸的机电谐振器，其包括移动元件和固定元件。 检测装置将表示移动元件相对于固定元件的移动的检测信号提供给连接到谐振器的激励输入的反馈环路。 谐振器形成在与检测装置和反馈回路相同的基板上。 反馈回路包括至多第一和第二晶体管串联连接在参考电压和激励端子之间。 电容性负载连接在励磁端子和参考电压之间。 检测信号控制第一晶体管的电导率。

公开(公告)号：US5734490A

公开(公告)日：1998-03-31

申请号：US636961

申请日：1996-04-24

Applicant: Marc Rabarot ,  Engin Molva ,  Eric Ollier

Inventor： Marc Rabarot ,  Engin Molva ,  Eric Ollier

IPC: G02B26/08 ,  G02B7/02 ,  G02B27/10

CPC classification number: G02B26/0875

Abstract: A microoptical component including a microlens having a focal axis and a microbeam to which said microlens, is integrally fixed said microbeam extending along an axis substantially perpendicular to the focal axis of the microlens and undergoing elastic deformations along an axis substantially perpendicular to the focal axis of the microlens and to the axis along which the microbeam extends.

Abstract translation: 微光学部件包括具有焦轴和微束的微透镜，所述微透镜与所述微透镜一体地固定，所述微束沿着基本上垂直于微透镜的焦点轴线的轴延伸并且沿着基本上垂直于微透镜的焦点轴线的轴线进行弹性变形 微透镜和微束延伸的轴线。

公开(公告)号：US08183078B2

公开(公告)日：2012-05-22

申请号：US12744827

申请日：2008-12-03

Applicant: Eric Ollier ,  Thomas Baron

Inventor： Eric Ollier ,  Thomas Baron

IPC: H01L21/00

CPC classification number: B81C1/00246 ,  B81C2203/0728 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method for producing a device including at least one integrated circuit and at least one N/MEMS. The method produces the N/MEMS in at least one upper layer arranged at least above a first section of a substrate, produces the integrated circuit in a second section of the substrate and/or in a semiconductor layer arranged at least above the second section of the substrate, and further produces a cover encapsulating the N/MEMS from at least one layer used for production of a gate in the integrated circuit and/or for producing at least one electrical contact of the integrated circuit.

Abstract translation: 一种用于制造包括至少一个集成电路和至少一个N / MEMS的器件的方法。 该方法在至少布置在衬底的第一部分上方的至少一个上层中产生N / MEMS，在衬底的第二部分中和/或在至少在第二部分的第二部分上方布置的半导体层中产生集成电路 并且进一步从用于在集成电路中生产栅极的至少一个层和/或用于产生集成电路的至少一个电接触件产生封装N / MEMS的覆盖层。

公开(公告)号：US08115556B2

公开(公告)日：2012-02-14

申请号：US12710678

申请日：2010-02-23

Applicant: Laurent Duraffourg ,  Philippe Andreucci ,  Eric Colinet ,  Sebastien Hentz ,  Eric Ollier

Inventor： Laurent Duraffourg ,  Philippe Andreucci ,  Eric Colinet ,  Sebastien Hentz ,  Eric Ollier

IPC: H03L7/00

CPC classification number: H03B5/323

Abstract: The device resonant comprises a plurality of synchronized oscillators. Each oscillator comprises a resonator which comprises detection means providing detection signals representative of oscillation of the resonator to a feedback loop connected to an excitation input of the resonator. The detection signals control the conductivity of the feedback loop of the oscillator. The excitation inputs of all the resonators are connected to a common point which constitutes the output of the resonant device. A capacitive load is connected between said common point and a reference voltage.

Abstract translation: 器件谐振包括多个同步振荡器。 每个振荡器包括谐振器，该谐振器包括检测装置，其将表示谐振器的振荡的检测信号提供给连接到谐振器的激励输入的反馈环路。 检测信号控制振荡器的反馈回路的电导率。 所有谐振器的激励输入连接到构成谐振装置的输出的公共点。 电容性负载连接在所述公共点和参考电压之间。

公开(公告)号：US08030690B2

公开(公告)日：2011-10-04

申请号：US12300715

申请日：2007-05-16

Applicant: Eric Ollier ,  Laurent Duraffourg ,  Philippe Andreucci

Inventor： Eric Ollier ,  Laurent Duraffourg ,  Philippe Andreucci

IPC: H01L29/84

CPC classification number: G01P15/124 ,  G01P15/0802 ,  G01P15/097 ,  G01P15/131 ,  G01P15/18 ,  G01P2015/0814 ,  G01P2015/0817 ,  G01P2015/082

Abstract: The invention relates to a detection device using at least one transistor (2) with a vertical channel, comprising a mechanical structure (14), free to move relative to the transistor, in a plane containing the transistor drain (10), source (8) and channel (12).

Abstract translation: 本发明涉及一种使用具有垂直通道的至少一个晶体管（2）的检测装置，包括在包含晶体管漏极（10），源极（8）的平面中相对于晶体管自由移动的机械结构（14） ）和通道（12）。