摘要:
A method for the removing of plasma etch residues on a substrate comprising the steps of: (i) contacting the substrate with a cleaning composition, and (ii) contacting the substrate with ozonated water. The preferred cleaning composition has a pH from 2 to 6 and comprises: (A) water; (B) at least one selected hydroxylammonium compound; and (C) at least one basic compound; and optionally (D) a chelating stabilizer; and optionally (E) a surfactant.
摘要:
A process for producing triaminoguanidine nitrate, and, more specifically, a process which involves reacting hydrazine, nitric acid and cyanamide in specified molar ratios. Also claimed is the high melting point product so produced.
摘要:
Disclosed are selected poly(oxyalkylated) 1,3,4-thiadiazoles of the formula: ##STR1## wherein each R is individually selected from hydrogen and methyl; and the sum of y and z is from 2 to about 30. These compounds are shown to be effective corrosion inhibitors in corrosive liquids such as acid metal-treating baths.
摘要:
Disclosed are 1-halo- and 1-lower alkoxy-4-trichloromethylphthalazines as novel compositions of matter and their use as fungicides or insecticides or both.
摘要:
Non-corrosive cleaning compositions that are aqueous based and useful for removing photoresist, plasma etch and CMP residues from a substrate. One preferred cleaning composition comprises: (i) a hydroxylamine or a hydroxylamine salt compound; (ii) at least one fluorine-containing compound; and (iii) water. Another cleaning composition comprises: (i) a compound selected from the group consisting of: an amine, a quatenary ammonium hydroxide, and ammonium hydroxide; (ii) at least one fluorine-containing compound; and (iii) water.
摘要:
The stability of HAN, HAN derivatives or hydroxylamine, and compositions comprising these is considerably enhanced by employing a stabilizing effective amount of a stabilizer selected from (a) a pyridine or pyridone salt, or an acid thereof; (b) a diphosphonate or methylenephosphonate salt, or an acid thereof; or (c) a mixture of two or more stabilizers, wherein at least one is selected from (a) and at least one is selected from (b). Stabilized HAN, HAN derivatives, or hydroxylamine or compositions comprising HAN, an HAN derivative or hydroxylamine, along with a process for providing these stabilized compositions is described. A stabilizer mixture having enhanced, synergistic stabilizing properties is described as well.
摘要:
A non-corrosive cleaning composition for removing plasma etching residues having a pH from 2 to 6 and comprising: (A) water; (B) at least one selected hydroxylammonium compound; and (C) at least one basic compound; and optionally (D) a chelating stabilizer; and optionally (E) a surfactant.
摘要:
The present invention relates to a liquid or gel propellant comprising an oxidizer and a fuel, said fuel preferably having a vapor pressure not exceeding 10 millimeters of mercury at 25.degree. C. and being selected from the group consisting of hydroxy-(lower alkyl)-hydrazine, dihydroxy-(lower alkyl)hydrazine, cyanoethylhydrazine, 1-methyl-1-cyanoethylhydrazine, 1,1-dimethyl-2-cyanoethylhydrazine, and combinations thereof. Also claimed is a method of making the propellant.
摘要:
In a process for the production of Alkyl substituted 5-amidotetrazole compounds represented by the formula: ##STR1## wherein A represents NHX or NRR'X represents a lower alkyl groupR represents a lower alkyl group, andR' represents a lower alkyl group.reacts 5-aminotetrazole with an alkyl isocyanate or a dialkyl carbamoyl halide in a polar solvent.