公开(公告)号：US06967491B2

公开(公告)日：2005-11-22

申请号：US10888840

申请日：2004-07-09

申请人： Philippe Perdu ,  Romain Desplats ,  Felix Beaudoin ,  Praveen Vedagarbha ,  Martin Leibowitz ,  Kenneth R. Wilsher

发明人： Philippe Perdu ,  Romain Desplats ,  Felix Beaudoin ,  Praveen Vedagarbha ,  Martin Leibowitz ,  Kenneth R. Wilsher

IPC分类号： G01R31/26 ,  G01R31/302 ,  G01R31/311 ,  G03C5/00 ,  G06F17/50 ,  G21K5/10 ,  H01J37/08 ,  H01S20060101

CPC分类号： G01R31/31816 ,  G01R31/311

摘要： A method and apparatus for laser-assisted fault mapping which synchronizes the laser control with the tester unit. The inventive method provides for laser-assisted pseudo-static fault mapping to localize defects in a device whose inputs are being stimulated dynamically by a tester. It further provides for laser-assisted dynamic soft error mapping, to localize in terms of location and to correlate with respect to a specific test vector, sensitive areas in a device by utilizing device performance criteria such as pass-fail status outputs. The apparatus includes a fully controllable dynamic laser stimulation apparatus connected to a control unit that provides complete synchronization with a tester unit.

摘要翻译： 一种用于激光辅助故障映射的方法和装置，其将激光控制与测试器单元同步。 本发明的方法提供了激光辅助伪静态故障映射以定位其输入被测试仪动态地刺激的设备中的缺陷。 它进一步提供激光辅助动态软误差映射，通过利用诸如通过失败状态输出的设备性能标准来定位位置方面并且相对于特定测试矢量，设备中的敏感区域相关。 该装置包括连接到与测试器单元完全同步的控制单元的完全可控的动态激光刺激装置。

公开(公告)号：US20130320423A1

公开(公告)日：2013-12-05

申请号：US13484739

申请日：2012-05-31

申请人： Felix Beaudoin ,  Stephen M. Lucarini ,  Xinhui Wang ,  Xinlin Wang

发明人： Felix Beaudoin ,  Stephen M. Lucarini ,  Xinhui Wang ,  Xinlin Wang

IPC分类号： H01L27/108 ,  H01L21/8242

CPC分类号： H01L27/10867 ,  H01L27/10826 ,  H01L27/10829 ,  H01L27/10879 ,  H01L27/1207 ,  H01L27/1211

摘要： A conductive strap structure in lateral contact with a top semiconductor layer is formed on an inner electrode of a deep trench capacitor. A cavity overlying the conductive strap structure is filled a dielectric material to form a dielectric capacitor cap having a top surface that is coplanar with a topmost surface of an upper pad layer. A semiconductor mandrel in lateral contact with the dielectric capacitor cap is formed. The combination of the dielectric capacitor cap and the semiconductor mandrel is employed as a protruding structure around which a fin-defining spacer is formed. The semiconductor mandrel is removed, and the fin-defining spacer is employed as an etch mask in an etch process that etches a lower pad layer and the top semiconductor layer to form a semiconductor fin that laterally wraps around the conductive strap structure. An access finFET is formed employing two parallel portions of the semiconductor fin.

公开(公告)号：US20070108975A1

公开(公告)日：2007-05-17

申请号：US10575012

申请日：2004-10-08

申请人： Romain Desplats ,  Olivier Crepel ,  Felix Beaudoin ,  Philippe Perdu

发明人： Romain Desplats ,  Olivier Crepel ,  Felix Beaudoin ,  Philippe Perdu

IPC分类号： G01R33/02

CPC分类号： G01R33/02

摘要： The invention relates to a magnetic-field-measuring probe comprising at least one magnetoresistive sensor (102, 104, 106) which is sensitive to the magnetic field along a determined privileged measurement axis. The inventive probe comprises: at least two magnetoresistive sensors (102, 104, 106) which are rigidly connected to one another in a position such that the privileged measurement axes thereof are offset angularly; and output terminals specific to each magnetoresistive sensor (102, 104, 106), in order to supply a signal that is representative of the field measured by each sensor along the privileged measurement axis thereof.

摘要翻译： 本发明涉及一种磁场测量探头，其包括沿着确定的特权测量轴对磁场敏感的至少一个磁阻传感器（102,104,106）。 本发明的探针包括：至少两个磁阻传感器（102,104,106），它们彼此刚性连接，使其特权的测量轴线成角度偏移; 以及特定于每个磁阻传感器（102,104,106）的输出端子，以便提供表示由每个传感器沿其特权测量轴测量的场的信号。

公开(公告)号：US20070052412A1

公开(公告)日：2007-03-08

申请号：US10575231

申请日：2004-10-08

申请人： Romain Desplats ,  Olivier Crepel ,  Felix Beaudoin ,  Philippe Perdu

发明人： Romain Desplats ,  Olivier Crepel ,  Felix Beaudoin ,  Philippe Perdu

IPC分类号： G01R33/02

CPC分类号： G01R33/02 ,  G01R31/002 ,  G01R33/09

摘要： A device (16) used to measure at least one component of a magnetic field, includes a magnetoresistive sensor (102) and a measuring chain (28). The input of the measuring chain is connected to the magnetoresistive sensor (102), while the output thereof is intended to supply information that is representative of the magnetic field in the region of the sensor. In addition, the measuring chain (28) includes elements (136) for isolating a frequency component of the signal from the sensor representative of the magnetic field for a unique pre-determined frequency (FI).

摘要翻译： 用于测量磁场的至少一个分量的装置（16）包括磁阻传感器（102）和测量链（28）。 测量链的输入连接到磁阻传感器（102），而其输出旨在提供表示传感器区域中的磁场的信息。 此外，测量链（28）包括元件（136），用于隔离用于唯一预定频率（FI）的表示磁场的传感器的信号的频率分量。

公开(公告)号：US09385131B2

公开(公告)日：2016-07-05

申请号：US13484739

申请日：2012-05-31

申请人： Felix Beaudoin ,  Stephen M. Lucarini ,  Xinhui Wang ,  Xinlin Wang

发明人： Felix Beaudoin ,  Stephen M. Lucarini ,  Xinhui Wang ,  Xinlin Wang

IPC分类号： H01L27/108 ,  H01L27/12 ,  H01L21/8242

CPC分类号： H01L27/10867 ,  H01L27/10826 ,  H01L27/10829 ,  H01L27/10879 ,  H01L27/1207 ,  H01L27/1211

摘要： A conductive strap structure in lateral contact with a top semiconductor layer is formed on an inner electrode of a deep trench capacitor. A cavity overlying the conductive strap structure is filled a dielectric material to form a dielectric capacitor cap having a top surface that is coplanar with a topmost surface of an upper pad layer. A semiconductor mandrel in lateral contact with the dielectric capacitor cap is formed. The combination of the dielectric capacitor cap and the semiconductor mandrel is employed as a protruding structure around which a fin-defining spacer is formed. The semiconductor mandrel is removed, and the fin-defining spacer is employed as an etch mask in an etch process that etches a lower pad layer and the top semiconductor layer to form a semiconductor fin that laterally wraps around the conductive strap structure. An access finFET is formed employing two parallel portions of the semiconductor fin.

摘要翻译： 在深沟槽电容器的内部电极上形成与顶部半导体层横向接触的导电带结构。 覆盖导电带结构的空腔填充介电材料以形成具有顶表面的介电电容器盖，该顶表面与上焊盘层的最上表面共面。 形成与介质电容器盖侧向接触的半导体芯棒。 使用介质电容器盖和半导体芯棒的组合作为突出结构，在其周围形成有翅片限定的间隔物。 去除半导体芯棒，并且在蚀刻蚀刻下部焊盘层和顶部半导体层以形成横向缠绕导电带结构的半导体鳍片的蚀刻工艺中，将鳍状限定衬垫用作蚀刻掩模。 使用半导体鳍片的两个平行部分形成访问finFET。

公开(公告)号：US20080088324A1

公开(公告)日：2008-04-17

申请号：US11664120

申请日：2005-09-30

申请人： Romain Desplats ,  Kevin Sanchez ,  Felix Beaudoin

发明人： Romain Desplats ,  Kevin Sanchez ,  Felix Beaudoin

IPC分类号： G01R31/311

CPC分类号： G01R31/311

摘要： The invention concerns a method for analyzing an integrated circuit. The method includes, for a plurality of surface points of the integrated circuit, following steps: applying (102) a laser radiation, in one point of the surface of the integrated circuit; exciting (106) the circuit; collecting (108) the response of the circuit to the excitation; calculating (114) the propagation time intervening between the excitation time and the response-collecting time; and creating (116) an image of the integrated circuit showing a value representing the propagation time at each point of laser radiation application. The invention also concerns an installation for analyzing an integrated circuit.

摘要翻译： 本发明涉及一种用于分析集成电路的方法。 该方法包括对于集成电路的多个表面点，接下来的步骤：在集成电路的表面的一个点中施加（102）激光辐射; 励磁（106）电路; 收集（108）电路对励磁的响应; 计算（114）介于激发时间和响应收集时间之间的传播时间; 以及创建（116）表示在激光辐射应用的每个点处表示传播时间的值的集成电路的图像。 本发明还涉及用于分析集成电路的安装。

公开(公告)号：US07417424B2

公开(公告)日：2008-08-26

申请号：US10575231

申请日：2004-10-08

申请人： Romain Desplats ,  Olivier Crepel ,  Felix Beaudoin ,  Philippe Perdu

发明人： Romain Desplats ,  Olivier Crepel ,  Felix Beaudoin ,  Philippe Perdu

IPC分类号： G01R33/12

CPC分类号： G01R33/02 ,  G01R31/002 ,  G01R33/09

摘要： A device (16) used to measure at least one component of a magnetic field, includes a magnetoresistive sensor (102) and a measuring chain (28). The input of the measuring chain is connected to the magnetoresistive sensor (102), while the output thereof is intended to supply information that is representative of the magnetic field in the region of the sensor. In addition, the measuring chain (28) includes elements (136) for isolating a frequency component of the signal from the sensor representative of the magnetic field for a unique pre-determined frequency (FI).

摘要翻译： 用于测量磁场的至少一个分量的装置（16）包括磁阻传感器（102）和测量链（28）。 测量链的输入连接到磁阻传感器（102），而其输出旨在提供表示传感器区域中的磁场的信息。 此外，测量链（28）包括元件（136），用于隔离用于唯一预定频率（FI）的表示磁场的传感器的信号的频率分量。

公开(公告)号：US07408342B2

公开(公告)日：2008-08-05

申请号：US10575012

申请日：2004-10-08

申请人： Romain Desplats ,  Olivier Crepel ,  Felix Beaudoin ,  Philippe Perdu

发明人： Romain Desplats ,  Olivier Crepel ,  Felix Beaudoin ,  Philippe Perdu

IPC分类号： G01R33/02

CPC分类号： G01R33/02

摘要： A magnetic-field-measuring probe includes at least two magnetoresistive sensors which are sensitive to respective magnetic fields along a determined measurement axis. The at least two magnetoresistive sensors are rigidly connected to one another in a position such that the measurement axes thereof are at an angle other than zero. Output terminals specific to each magnetoresistive sensor are used to supply a signal that is representative of the field measured by each sensor along the measurement axis thereof. The difference between the derivative of a first magnetic field relative to a second direction and the derivative of a second magnetic field relative to a first direction is calculated to determine a component of current to be measured.

摘要翻译： 磁场测量探头包括至少两个磁敏传感器，它们沿着确定的测量轴对相应的磁场敏感。 至少两个磁阻传感器在彼此的测量轴处于不为零的角度的位置处彼此刚性地连接。 用于每个磁阻传感器专用的输出端子用于提供表示由每个传感器沿其测量轴测量的场的信号。 计算第一磁场相对于第二方向的导数与相对于第一方向的第二磁场的导数之间的差异，以确定待测电流的分量。

公开(公告)号：US20070132464A1

公开(公告)日：2007-06-14

申请号：US10575234

申请日：2004-10-08

申请人： Romain Desplats ,  Olivier Crepel ,  Felix Beaudoin ,  Philippe Perdu

发明人： Romain Desplats ,  Olivier Crepel ,  Felix Beaudoin ,  Philippe Perdu

IPC分类号： G01R31/02

CPC分类号： G01R33/02

摘要： A magnetic-field-measuring probe includes at least one magnetoresistive or magnetoinductive sensor which is sensitive to the magnetic field along a privileged measurement axis. The probe includes: at least two magnetoresistive or magnetoinductive sensors (14, 16) which are rigidly connected to one another in a position such that the privileged measurement axes thereof are parallel and offset in relation to one another in a direction that is transverse to the privileged measurement axes; and output terminals specific to each magnetoresistive or magnetoinductive sensor, in order to supply a signal that is representative of the magnetic field measured by each sensor along the privileged measurement axis thereof.

摘要翻译： 磁场测量探头包括至少一个沿特权测量轴对磁场敏感的磁阻或磁感应传感器。 该探针包括：至少两个磁阻或磁感应传感器（14,16），其彼此刚性地连接，使得它们的特权测量轴线在横向于该方向的方向上彼此平行和偏移 特权测量轴; 以及特定于每个磁阻或磁感应传感器的输出端子，以便提供表示由每个传感器沿其特权测量轴测量的磁场的信号。

公开(公告)号：US20050006602A1

公开(公告)日：2005-01-13

申请号：US10888840

申请日：2004-07-09

申请人： Philippe Perdu ,  Romain Desplats ,  Felix Beaudoin ,  Praveen Vedagarbha ,  Martin Leibowitz ,  Kenneth Wilsher

发明人： Philippe Perdu ,  Romain Desplats ,  Felix Beaudoin ,  Praveen Vedagarbha ,  Martin Leibowitz ,  Kenneth Wilsher

IPC分类号： G01R31/26 ,  G01R31/302 ,  G01R31/311 ,  G03C5/00 ,  G06F17/50 ,  G21K5/10 ,  H01J37/08 ,  H01S20060101

CPC分类号： G01R31/31816 ,  G01R31/311

摘要： A method and apparatus for laser-assisted fault mapping which synchronizes the laser control with the tester unit. The inventive method provides for laser-assisted pseudo-static fault mapping to localize defects in a device whose inputs are being stimulated dynamically by a tester. It further provides for laser-assisted dynamic soft error mapping, to localize in terms of location and to correlate with respect to a specific test vector, sensitive areas in a device by utilizing device performance criteria such as pass-fail status outputs. The apparatus includes a fully controllable dynamic laser stimulation apparatus connected to a control unit that provides complete synchronization with a tester unit.