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    PROTECTION MODULE FOR EUV LITHOGRAPHY APPARATUS, AND EUV LITHOGRAPHY APPARATUS
    2.
    发明申请
    PROTECTION MODULE FOR EUV LITHOGRAPHY APPARATUS, AND EUV LITHOGRAPHY APPARATUS 有权
    EUV光刻设备的保护模块和EUV光刻设备

    公开(公告)号：US20110216298A1

    公开(公告)日：2011-09-08

    申请号：US13041989

    申请日：2011-03-07

    申请人： Dirk Heinrich EHM ,  Timo LAUFER ,  Ben BANNEY ,  Jens KUGLER ,  Ulrich NIEKEN ,  Franz KELLER

    发明人： Dirk Heinrich EHM ,  Timo LAUFER ,  Ben BANNEY ,  Jens KUGLER ,  Ulrich NIEKEN ,  Franz KELLER

    IPC分类号： G03B27/54

    CPC分类号： G03F7/70933 ,  G03F7/70883 ,  G03F7/70916 ,  G03F7/70983

    摘要： In EUV lithography apparatuses (10), it is proposed, in order to lengthen the lifetime of contamination-sensitive components, to arrange them in a protection module. The protection module comprises a housing (23-29) having at least one opening (37-47), in which at least one component (13a, 13b, 15, 16, 18, 19) is arranged and at which one or more gas feeds (30-36) are provided in order to introduce a gas flow into the housing (23-29), which emerges through the at least one opening (37-47). In order to effectively prevent contaminating substances from penetrating into the protection module, a light source (48-56) is arranged at the at least one opening (37-47), which light source illuminates the opening (37-47) with one or more wavelengths by which the contaminating substances can be dissociated before they penetrate through the opening (37-47).

    摘要翻译： 在EUV光刻设备（10）中，为了延长污染敏感元件的寿命，提出将它们安置在保护模块中。 保护模块包括具有至少一个开口（37-47）的壳体（23-29），其中布置有至少一个部件（13a，13b，15,16,18,19），并且一个或多个气体 提供进料（30-36）以便将气流引入通过至少一个开口（37-47）出现的壳体（23-29）中。 为了有效地防止污染物质渗透到保护模块中，光源（48-56）布置在至少一个开口（37-47）处，该光源照射开口（37-47），其中一个或 污染物质在穿透开口（37-47）之前可以分解的更多波长。

    Process for detecting pathogens
    3.
    发明授权
    Process for detecting pathogens 失效
    检测病原体的方法

    公开(公告)号：US4543328A

    公开(公告)日：1985-09-24

    申请号：US190540

    申请日：1980-09-24

    申请人： Franz Keller ,  Hans Hennemann

    发明人： Franz Keller ,  Hans Hennemann

    IPC分类号： C12M1/34 ,  A61M1/36 ,  C12Q1/04 ,  C12Q1/24 ,  C12Q1/54 ,  C12Q1/70 ,  C12M1/00

    CPC分类号： C12Q1/70 ,  C12Q1/04 ,  Y10S435/80 ,  Y10S435/803

    摘要： Process and device for the detection of pathogens, such as bacteria, fungi and viruses, in blood in the presence of an anticoagulant agent. The pathogen is separated in an extracorporeal circulation of the blood with a biocompatible adsorbent which selectively binds the pathogen and thereafter detects by bacteriological, mycological, virological or electron microscopic methods.

    摘要翻译： 用于在抗凝血剂存在下检测血液中病原体如细菌，真菌和病毒的方法和装置。 病原体在血液的体外循环中与选择性结合病原体的生物相容性吸附剂分离，然后通过细菌，真菌学，病毒学或电子显微镜方法进行检测。

    Mold forming apparatus with mold flask stabilizing means
    4.
    发明授权
    Mold forming apparatus with mold flask stabilizing means 失效
    具有模具瓶稳定装置的成型装置

    公开(公告)号：US4063586A

    公开(公告)日：1977-12-20

    申请号：US764954

    申请日：1977-02-02

    申请人： Franz Keller

    发明人： Franz Keller

    IPC分类号： B22C15/12 ,  B22C15/08

    CPC分类号： B22C15/12

    摘要： A mold forming machine for the production of casting molds wherein molding sand is compressed within mold flasks is provided with stabilizing means for counteracting the effects of the compressive forces generated within the mold flask during compression of the molding sand tending to cause distortion of the flask. The stabilizing means include a movable frame which is adapted to extend about a molding flask placed in the machine with the frame being positioned relative to the flask by lifting gears which move the frame in accordance with the various stages of operation of the machine. A plurality of fluid pressure actuated tensioning elements are mounted on the frame to be movable therewith. The tensioning elements are adapted to apply compressive forces inwardly of the mold flasks during application of the molding sand compressing forces. Pressure devices for applying fluid pressure to the tensioning elements in order to effect application of the compressive forces against the mold flask operate to control the compressive forces applied by the tensioning elements so that the magnitude of these forces will be determined in relation to the magnitude of the forces applied by the molding sand compressing mechanism.

    摘要翻译： 一种用于生产铸模的模具成型机，其中型砂在模具烧瓶内被压缩，设置有稳定装置，用于抵抗模型砂箱压缩期间产生的压缩力的影响，倾向于引起烧瓶变形。 稳定装置包括可移动框架，该可移动框架适于围绕设置在机器中的模型瓶延伸，其中框架通过根据机器的各种操作阶段移动框架的提升齿轮相对于砂箱定位。 多个流体压力致动张紧元件安装在框架上以与其一起移动。 张紧元件适于在施加模型砂压缩力期间向模具烧瓶内部施加压缩力。 用于向张紧元件施加流体压力以将压力施加到模具烧瓶上的压力装置用于控制由张紧元件施加的压缩力，使得这些力的大小将相对于 造型砂压机构施加的力。

    Protection module for EUV lithography apparatus, and EUV lithography apparatus
    5.
    发明授权
    Protection module for EUV lithography apparatus, and EUV lithography apparatus 有权
    EUV光刻设备的保护模块和EUV光刻设备

    公开(公告)号：US08698999B2

    公开(公告)日：2014-04-15

    申请号：US13041989

    申请日：2011-03-07

    申请人： Dirk Heinrich Ehm ,  Timo Laufer ,  Ben Banney ,  Jens Kugler ,  Ulrich Nieken ,  Franz Keller

    发明人： Dirk Heinrich Ehm ,  Timo Laufer ,  Ben Banney ,  Jens Kugler ,  Ulrich Nieken ,  Franz Keller

    IPC分类号： B60R1/06 ,  G03B27/52 ,  G03B27/54

    CPC分类号： G03F7/70933 ,  G03F7/70883 ,  G03F7/70916 ,  G03F7/70983

    摘要： In EUV lithography apparatuses (10), it is proposed, in order to lengthen the lifetime of contamination-sensitive components, to arrange them in a protection module. The protection module comprises a housing (23-29) having at least one opening (37-47), in which at least one component (13a, 13b, 15, 16, 18, 19) is arranged and at which one or more gas feeds (30-36) are provided in order to introduce a gas flow into the housing (23-29), which emerges through the at least one opening (37-47). In order to effectively prevent contaminating substances from penetrating into the protection module, a light source (48-56) is arranged at the at least one opening (37-47), which light source illuminates the opening (37-47) with one or more wavelengths by which the contaminating substances can be dissociated before they penetrate through the opening (37-47).

    摘要翻译： 在EUV光刻设备（10）中，为了延长污染敏感元件的寿命，提出将它们安置在保护模块中。 保护模块包括具有至少一个开口（37-47）的壳体（23-29），其中布置有至少一个部件（13a，13b，15,16,18,19），并且一个或多个气体 提供进料（30-36）以便将气流引入通过至少一个开口（37-47）出现的壳体（23-29）中。 为了有效地防止污染物质渗透到保护模块中，光源（48-56）布置在至少一个开口（37-47）处，该光源照射开口（37-47），其中一个或 污染物质在穿透开口（37-47）之前可以分解的更多波长。

    Meter transponder hybrid
    8.
    发明授权
    Meter transponder hybrid 失效
    米转发器混合

    公开(公告)号：US4638314A

    公开(公告)日：1987-01-20

    申请号：US570118

    申请日：1984-01-12

    申请人： Franz Keller

    发明人： Franz Keller

    IPC分类号： G01R21/00 ,  G08C9/06

    CPC分类号： G01R21/00

    摘要： A remotely-read energy metering product comprises a conventional watt-hour meter to which an electronics package has been added, the package comprising a thin, annular, printed circuit board mounted for support on an annular adaptor ring and disposed in surrounding relation to the annular watt-hour meter. Electrical components mounted on the printed circuit board provide an electronic read-out circuit for a pulse initiator, and further provide the transponder electronics for effecting bidirectional communication between the watt-hour meter and a remote location.

    摘要翻译： 远程读取的能量计量产品包括已经添加了电子封装的常规电度表，该封装包括薄的环形印刷电路板，其被安装用于支撑在环形适配器环上并围绕环形 电度表。 安装在印刷电路板上的电气部件提供用于脉冲启动器的电子读出电路，并进一步提供应答器电子装置，用于实现瓦特计和远程位置之间的双向通信。