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31 条记录 (耗时 0.022 秒)

    Piezoelectric device and liquid-ejecting head
    1.
    发明申请
    Piezoelectric device and liquid-ejecting head 有权
    压电装置和喷液头

    公开(公告)号：US20090085443A1

    公开(公告)日：2009-04-02

    申请号：US12232983

    申请日：2008-09-26

    申请人： Yoshikazu Hishinuma ,  Fumihiko Mochizuki

    发明人： Yoshikazu Hishinuma ,  Fumihiko Mochizuki

    IPC分类号： H01L41/047 ,  B41J2/045

    CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2002/1425 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/316

    摘要： The piezoelectric device includes a substrate, a first electrode deposited on the substrate, a piezoelectric film deposited on top of at least a part of the first electrode by vapor phase deposition, a second electrode deposited on the piezoelectric film and having a water vapor transmission rate of not more than 1 g/m2/day, and at least one protective film that covers at least peripheries of the second electrode and the piezoelectric film and which has an opening in a position corresponding to the piezoelectric film except the periphery thereof. The piezoelectric device has satisfactory moisture resistance and is capable of effectively preventing the ingress of moisture into the piezoelectric film.

    摘要翻译： 所述压电元件包括​​基板，沉积在所述基板上的第一电极，通过气相沉积沉积在所述第一电极的至少一部分的顶部上的压电膜，沉积在所述压电膜上的第二电极，并具有水蒸汽透过率 以及至少覆盖第二电极和压电膜的周围的至少一个保护膜，并且在与除了其外围的压电膜相对应的位置具有开口。 该压电元件具有令人满意的耐湿性，能够有效地防止湿气进入压电膜。

    Piezoelectric device and liquid-ejecting head
    2.
    发明授权
    Piezoelectric device and liquid-ejecting head 有权
    压电装置和喷液头

    公开(公告)号：US07948155B2

    公开(公告)日：2011-05-24

    申请号：US12232983

    申请日：2008-09-26

    申请人： Yoshikazu Hishinuma ,  Fumihiko Mochizuki

    发明人： Yoshikazu Hishinuma ,  Fumihiko Mochizuki

    IPC分类号： H01L41/047

    CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2002/1425 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/316

    摘要： The piezoelectric device includes a substrate, a first electrode deposited on the substrate, a piezoelectric film deposited on top of at least a part of the first electrode by vapor phase deposition, a second electrode deposited on the piezoelectric film and having a water vapor transmission rate of not more than 1 g/m2/day, and at least one protective film that covers at least peripheries of the second electrode and the piezoelectric film and which has an opening in a position corresponding to the piezoelectric film except the periphery thereof. The piezoelectric device has satisfactory moisture resistance and is capable of effectively preventing the ingress of moisture into the piezoelectric film.

    摘要翻译： 所述压电元件包括​​基板，沉积在所述基板上的第一电极，通过气相沉积沉积在所述第一电极的至少一部分的顶部上的压电膜，沉积在所述压电膜上的第二电极，并具有水蒸汽透过率 以及至少覆盖第二电极和压电膜的周围的至少一个保护膜，并且在与除了其外围的压电膜相对应的位置具有开口。 该压电元件具有令人满意的耐湿性，能够有效地防止湿气进入压电膜。

    Piezoelectric device, process for producing the same, and liquid discharge device
    3.
    发明授权
    Piezoelectric device, process for producing the same, and liquid discharge device 有权
    压电元件及其制造方法以及液体排出装置

    公开(公告)号：US08733905B2

    公开(公告)日：2014-05-27

    申请号：US13347333

    申请日：2012-01-10

    申请人： Takamichi Fujii ,  Takayuki Naono ,  Yoshikazu Hishinuma

    发明人： Takamichi Fujii ,  Takayuki Naono ,  Yoshikazu Hishinuma

    IPC分类号： B41J2/045

    CPC分类号： B41J2/14233 ,  B41J2202/03 ,  H01L41/0475 ,  H01L41/0477 ,  H01L41/0478 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/316 ,  Y10T29/42

    摘要： A piezoelectric device includes a substrate; and a laminated film formed above the substrate. The laminated film includes a lower electrode layer, a piezoelectric layer, and an upper electrode layer formed in this order, and the lower electrode layer is a metal electrode layer containing as one or more main components one or more nonnoble metals and/or one or more nonnoble alloys. Preferably, the one or more main components are one or more of the metals Cr, W, Ti, Al, Fe, Mo, In, Sn, Ni, Cu, Co, and Ta, and alloys of the metals.

    摘要翻译： 压电装置包括基板; 以及形成在基板上方的层叠膜。 层叠膜包括依次形成的下电极层，压电层和上电极层，下电极层是含有作为一种或多种主要成分的一种或多种非金属和/或一种或多种非金属的金属电极层， 更多的nonnoble合金。 优选地，一种或多种主要组分是金属Cr，W，Ti，Al，Fe，Mo，In，Sn，Ni，Cu，Co和Ta中的一种或多种，​​以及金属的合金。

    PIEZOELECTRIC DEVICE, INK-JET HEAD USING THE SAME, AND PROCESS FOR PRODUCING THE SAME
    6.
    发明申请
    PIEZOELECTRIC DEVICE, INK-JET HEAD USING THE SAME, AND PROCESS FOR PRODUCING THE SAME 有权
    压电装置，使用其的喷嘴头及其制造方法

    公开(公告)号：US20090066763A1

    公开(公告)日：2009-03-12

    申请号：US12206518

    申请日：2008-09-08

    申请人： Takamichi Fujii ,  Yasukazu Nihei ,  Yoshikazu Hishinuma ,  Tsuyoshi Mita

    发明人： Takamichi Fujii ,  Yasukazu Nihei ,  Yoshikazu Hishinuma ,  Tsuyoshi Mita

    IPC分类号： B41J2/045 ,  H01L41/00

    CPC分类号： B41J2/1612 ,  B41J2/14274 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1645 ,  B41J2/1646 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/316 ,  Y10S29/016 ,  Y10T29/42 ,  Y10T29/49156

    摘要： The piezoelectric device includes a substrate, a first electrode formed on the substrate, a piezoelectric film formed on the first electrode and a second electrode formed on a second side of the piezoelectric film which is away from a first side where the first electrode is formed. The first electrode is composed of a first layer in contact with the substrate and a second layer in contact with the piezoelectric film. The first layer is formed of a material that is wet etched at a different rate than the substrate. The in %-jet head includes the piezoelectric device, a liquid droplet storing/ejecting member for ejecting ink droplets through a ink spout and provided on the piezoelectric device and a diaphragm for vibrating in response to expansion or contraction of the piezoelectric device and provided between the piezoelectric device and the liquid droplet storing/ejecting member.

    摘要翻译： 压电元件包括​​基板，形成在基板上的第一电极，形成在第一电极上的压电膜和形成在压电膜的第二侧上的第二电极，该第二电极远离形成第一电极的第一侧。 第一电极由与基板接触的第一层和与压电膜接触的第二层构成。 第一层由与衬底不同的速率进行湿蚀刻的材料形成。 in-jet头包括压电装置，用于通过墨水口喷射墨滴并设置在压电装置上的液滴存储/排出构件和用于响应于压电装置的膨胀或收缩振动的隔膜，并且设置在 压电装置和液滴存储/排出构件。

    Method of forming pattern of inorganic material film and structure containing the pattern
    7.
    发明申请
    Method of forming pattern of inorganic material film and structure containing the pattern 有权
    形成无机材料膜图案的方法和包含图案的结构

    公开(公告)号：US20080048278A1

    公开(公告)日：2008-02-28

    申请号：US11889646

    申请日：2007-08-15

    申请人： Yoshikazu Hishinuma ,  Takamichi Fujii

    发明人： Yoshikazu Hishinuma ,  Takamichi Fujii

    IPC分类号： H01L29/84 ,  H01L21/00

    CPC分类号： H03H3/02 ,  B81B2201/0271 ,  B81C1/00396 ,  H03H2003/023

    摘要： A method of forming a pattern of an inorganic material film, which method is more versatile, easy, and practical. The method includes the steps of: (a) forming a sacrifice layer having a pattern on a substrate by employing a material having a different thermal expansion coefficient from that of an inorganic material of the inorganic material film; (b) forming an inorganic material layer on the substrate, on which the sacrifice layer has been formed, at a predetermined deposition temperature by employing the inorganic material; (c) lowering a temperature of at least the inorganic material layer to produce cracks in the inorganic material layer formed on the sacrifice layer; and (d) removing the sacrifice layer and the inorganic material layer formed thereon.

    摘要翻译： 形成无机材料膜的图案的方法，该方法更通用，容易和实用。 该方法包括以下步骤：（a）通过使用具有与无机材料膜的无机材料不同的热膨胀系数的材料，在基板上形成具有图案的牺牲层; （b）通过使用无机材料在预定的沉积温度下在已经形成有牺牲层的基板上形成无机材料层; （c）降低至少所述无机材料层的温度，以在所述牺牲层上形成的无机材料层中产生裂纹; 和（d）除去在其上形成的牺牲层和无机材料层。