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公开(公告)号：US07288877B2
公开(公告)日：2007-10-30
申请号：US11013994
申请日：2004-12-16
CPC分类号： H01L41/0933 , B25J7/00 , B25J15/12 , G02B6/3512 , G02B6/352 , G02B6/3578 , G02B6/359 , G02B26/0825 , G02B26/0858 , H01L41/094 , H01L41/0986
摘要： A piezoelectric film device has a piezoelectric film element and a power supply circuit. The piezoelectric film element is formed of a first electrode, a second electrode, and a piezoelectric film that is sandwiched between the first electrode and second electrode and has a polarization vector in the film thickness direction. The polarization vector is inverted by application of a predetermined voltage or higher through the first electrode and second electrode. The power supply circuit supplies voltage for inverting the polarization vector. The piezoelectric film has each different lattice constant depending on the direction of the polarization vector. The piezoelectric film device keeps a different displacement position corresponding to the direction of the polarization vector even when the voltage application is stopped.
摘要翻译： 压电薄膜器件具有压电薄膜元件和电源电路。 压电膜元件由夹在第一电极和第二电极之间并具有膜厚度方向的偏振矢量的第一电极，第二电极和压电膜形成。 通过施加通过第一电极和第二电极的预定电压而使极化矢量反转。 电源电路提供用于反转偏振矢量的电压。 压电膜根据极化矢量的方向具有不同的晶格常数。 即使在施加电压停止时，压电膜装置保持与极化矢量的方向对应的不同位移位置。
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公开(公告)号：US20050140249A1
公开(公告)日：2005-06-30
申请号：US11013994
申请日：2004-12-16
CPC分类号： H01L41/0933 , B25J7/00 , B25J15/12 , G02B6/3512 , G02B6/352 , G02B6/3578 , G02B6/359 , G02B26/0825 , G02B26/0858 , H01L41/094 , H01L41/0986
摘要： A piezoelectric film device has a piezoelectric film element and a power supply circuit. The piezoelectric film element is formed of a first electrode, a second electrode, and a piezoelectric film that is sandwiched between the first electrode and second electrode and has a polarization vector in the film thickness direction. The polarization vector is inverted by application of a predetermined voltage or higher through the first electrode and second electrode. The power supply circuit supplies voltage for inverting the polarization vector. The piezoelectric film has each different lattice constant depending on the direction of the polarization vector. The piezoelectric film device keeps a different displacement position corresponding to the direction of the polarization vector even when the voltage application is stopped.
摘要翻译： 压电薄膜器件具有压电薄膜元件和电源电路。 压电膜元件由夹在第一电极和第二电极之间并具有膜厚度方向的偏振矢量的第一电极，第二电极和压电膜形成。 通过施加通过第一电极和第二电极的预定电压而使极化矢量反转。 电源电路提供用于反转偏振矢量的电压。 压电膜根据极化矢量的方向具有不同的晶格常数。 即使在施加电压停止时，压电膜装置保持与极化矢量的方向对应的不同位移位置。
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