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公开(公告)号：US20050140249A1
公开(公告)日：2005-06-30
申请号：US11013994
申请日：2004-12-16
CPC分类号： H01L41/0933 , B25J7/00 , B25J15/12 , G02B6/3512 , G02B6/352 , G02B6/3578 , G02B6/359 , G02B26/0825 , G02B26/0858 , H01L41/094 , H01L41/0986
摘要： A piezoelectric film device has a piezoelectric film element and a power supply circuit. The piezoelectric film element is formed of a first electrode, a second electrode, and a piezoelectric film that is sandwiched between the first electrode and second electrode and has a polarization vector in the film thickness direction. The polarization vector is inverted by application of a predetermined voltage or higher through the first electrode and second electrode. The power supply circuit supplies voltage for inverting the polarization vector. The piezoelectric film has each different lattice constant depending on the direction of the polarization vector. The piezoelectric film device keeps a different displacement position corresponding to the direction of the polarization vector even when the voltage application is stopped.
摘要翻译： 压电薄膜器件具有压电薄膜元件和电源电路。 压电膜元件由夹在第一电极和第二电极之间并具有膜厚度方向的偏振矢量的第一电极，第二电极和压电膜形成。 通过施加通过第一电极和第二电极的预定电压而使极化矢量反转。 电源电路提供用于反转偏振矢量的电压。 压电膜根据极化矢量的方向具有不同的晶格常数。 即使在施加电压停止时，压电膜装置保持与极化矢量的方向对应的不同位移位置。
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公开(公告)号：US07288877B2
公开(公告)日：2007-10-30
申请号：US11013994
申请日：2004-12-16
CPC分类号： H01L41/0933 , B25J7/00 , B25J15/12 , G02B6/3512 , G02B6/352 , G02B6/3578 , G02B6/359 , G02B26/0825 , G02B26/0858 , H01L41/094 , H01L41/0986
摘要： A piezoelectric film device has a piezoelectric film element and a power supply circuit. The piezoelectric film element is formed of a first electrode, a second electrode, and a piezoelectric film that is sandwiched between the first electrode and second electrode and has a polarization vector in the film thickness direction. The polarization vector is inverted by application of a predetermined voltage or higher through the first electrode and second electrode. The power supply circuit supplies voltage for inverting the polarization vector. The piezoelectric film has each different lattice constant depending on the direction of the polarization vector. The piezoelectric film device keeps a different displacement position corresponding to the direction of the polarization vector even when the voltage application is stopped.
摘要翻译： 压电薄膜器件具有压电薄膜元件和电源电路。 压电膜元件由夹在第一电极和第二电极之间并具有膜厚度方向的偏振矢量的第一电极，第二电极和压电膜形成。 通过施加通过第一电极和第二电极的预定电压而使极化矢量反转。 电源电路提供用于反转偏振矢量的电压。 压电膜根据极化矢量的方向具有不同的晶格常数。 即使在施加电压停止时，压电膜装置保持与极化矢量的方向对应的不同位移位置。
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公开(公告)号：US20050099100A1
公开(公告)日：2005-05-12
申请号：US11014988
申请日：2004-12-20
申请人： Hiroyuki Kita , Hirokazu Uchiyama
发明人： Hiroyuki Kita , Hirokazu Uchiyama
IPC分类号： H01L41/047 , H01L41/09 , H01L41/332 , H01L41/08
CPC分类号： H01L41/332 , G11B5/4873 , G11B5/5552 , H01L41/0805 , H01L41/0986
摘要： To provide a piezoelectric thin-film element small in leak current between electrode metal films and its manufacturing method are presented, the piezoelectric thin-film element includes at least one unit laminated body composed of a piezoelectric thin-film having a mutually facing first surface and second surface, a first electrode metal film on the first surface, and a second electrode metal film on the second surface, in which an electrode separation surface composed of a piezoelectric thin-film surface parallel to the first surface is provided between the first electrode metal film and second electrode metal film.
摘要翻译： 为了提供电极金属膜之间漏电流小的压电薄膜元件及其制造方法，压电薄膜元件包括至少一个由具有相互面对的第一表面的压电薄膜和 第二表面，第一表面上的第一电极金属膜和第二表面上的第二电极金属膜，其中由平行于第一表面的压电薄膜表面组成的电极分离表面设置在第一电极金属 薄膜和第二电极金属薄膜。
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公开(公告)号：US07042136B2
公开(公告)日：2006-05-09
申请号：US11014988
申请日：2004-12-20
申请人： Hiroyuki Kita , Hirokazu Uchiyama
发明人： Hiroyuki Kita , Hirokazu Uchiyama
IPC分类号： H01L41/83
CPC分类号： H01L41/332 , G11B5/4873 , G11B5/5552 , H01L41/0805 , H01L41/0986
摘要： To provide a piezoelectric thin-film element small in leak current between electrode metal films and its manufacturing method are presented, the piezoelectric thin-film element includes at least one unit laminated body composed of a piezoelectric thin-film having a mutually facing first surface and second surface, a first electrode metal film on the first surface, and a second electrode metal film on the second surface, in which an electrode separation surface composed of a piezoelectric thin-film surface parallel to the first surface is provided between the first electrode metal film and second electrode metal film.
摘要翻译： 为了提供电极金属膜之间漏电流小的压电薄膜元件及其制造方法，压电薄膜元件包括至少一个由具有相互面对的第一表面的压电薄膜和 第二表面，第一表面上的第一电极金属膜和第二表面上的第二电极金属膜，其中由平行于第一表面的压电薄膜表面组成的电极分离表面设置在第一电极金属 薄膜和第二电极金属薄膜。
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公开(公告)号：US20050029907A1
公开(公告)日：2005-02-10
申请号：US10933879
申请日：2004-09-02
申请人： Hirokazu Uchiyama , Yuko Ogawa , Hiroyuki Kita
发明人： Hirokazu Uchiyama , Yuko Ogawa , Hiroyuki Kita
IPC分类号： G11B5/596 , G11B21/10 , G11B21/21 , H01L41/09 , H01L41/18 , H01L41/22 , H01L41/23 , H01L41/313 , H01L41/08
CPC分类号： H01L41/332 , H01L41/314 , Y10S29/001 , Y10S29/016 , Y10T29/42 , Y10T29/49128 , Y10T29/49155 , Y10T29/4981
摘要： A thin film piezoelectric element including a first structure having a sequential stack of layers, a first main electrode layer, a first opposed electrode layer and a first piezoelectric thin film having a first polarizing direction located between the first electrode layers, a second structure having as a sequential stack of layers, a second main electrode layer, a second opposed electrode layer and a second piezoelectric thin film having a second polarizing direction located between the second electrode layers, an insulating resin layer covering peripheral portions of the first and second structures, and at least one connecting electrode pad located at a side of one of the first and second structures, for connecting the main electrode layer and the opposed electrode layer of the structures to external equipment, wherein each first and second structures has a cross-sectional shape such that the piezoelectric thin film is tapered, diminishing in width, from a portion near the main electrode layer to a portion near the opposed electrode layer, and the first and second opposed electrode layers of adjacent structures are bonded to each other, and each polarizing direction of the piezoelectric thin films is identical to the direction of each opposed electrode layer.
摘要翻译： 一种薄膜压电元件，包括具有顺序叠层的第一结构，第一主电极层，第一相对电极层和具有位于第一电极层之间的第一偏振方向的第一压电薄膜，第二结构具有如 层叠顺序堆叠，第二主电极层，第二相对电极层和具有位于第二电极层之间的第二偏振方向的第二压电薄膜，覆盖第一和第二结构的周边部分的绝缘树脂层，以及 至少一个连接电极焊盘，位于所述第一和第二结构之一的一侧，用于将所述主电极层和所述结构的相对电极层连接到外部设备，其中每个第一和第二结构具有如下的横截面形状： 压电薄膜与主电极附近的部分呈锥形，宽度减小 并且相邻结构的第一和第二相对电极层彼此接合，并且压电薄膜的每个偏振方向与每个相对电极层的方向相同。
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公开(公告)号：US06903497B2
公开(公告)日：2005-06-07
申请号：US10933879
申请日：2004-09-02
申请人： Hirokazu Uchiyama , Yuko Ogawa , Hiroyuki Kita
发明人： Hirokazu Uchiyama , Yuko Ogawa , Hiroyuki Kita
IPC分类号： G11B5/596 , G11B21/10 , G11B21/21 , H01L41/09 , H01L41/18 , H01L41/22 , H01L41/23 , H01L41/313 , H01L41/08
CPC分类号： H01L41/332 , H01L41/314 , Y10S29/001 , Y10S29/016 , Y10T29/42 , Y10T29/49128 , Y10T29/49155 , Y10T29/4981
摘要： A thin film piezoelectric element including a first structure having a sequential stack of layers, a first main electrode layer, a first opposed electrode layer and a first piezoelectric thin film having a first polarizing direction located between the first electrode layers, a second structure having as a sequential stack of layers, a second main electrode layer, a second opposed electrode layer and a second piezoelectric thin film having a second polarizing direction located between the second electrode layers, an insulating resin layer covering peripheral portions of the first and second structures, and at least one connecting electrode pad located at a side of one of the first and second structures, for connecting the main electrode layer and the opposed electrode layer of the structures to external equipment, wherein each first and second structures has a cross-sectional shape such that the piezoelectric thin film is tapered, diminishing in width, from a portion near the main electrode layer to a portion near the opposed electrode layer, and the first and second opposed electrode layers of adjacent structures are bonded to each other, and each polarizing direction of the piezoelectric thin films is identical to the direction of each opposed electrode layer.
摘要翻译： 一种薄膜压电元件，包括具有顺序叠层的第一结构，第一主电极层，第一相对电极层和具有位于第一电极层之间的第一偏振方向的第一压电薄膜，第二结构具有如 层叠顺序堆叠，第二主电极层，第二相对电极层和具有位于第二电极层之间的第二偏振方向的第二压电薄膜，覆盖第一和第二结构的周边部分的绝缘树脂层，以及 至少一个连接电极焊盘，位于所述第一和第二结构之一的一侧，用于将所述主电极层和所述结构的相对电极层连接到外部设备，其中每个第一和第二结构具有如下的横截面形状： 压电薄膜与主电极附近的部分呈锥形，宽度减小 并且相邻结构的第一和第二相对电极层彼此接合，并且压电薄膜的每个偏振方向与每个相对电极层的方向相同。
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公开(公告)号：US06817073B2
公开(公告)日：2004-11-16
申请号：US10287797
申请日：2002-11-05
申请人： Hirokazu Uchiyama , Yuko Ogawa , Hiroyuki Kita
发明人： Hirokazu Uchiyama , Yuko Ogawa , Hiroyuki Kita
IPC分类号： H04R1700
CPC分类号： H01L41/332 , H01L41/314 , Y10S29/001 , Y10S29/016 , Y10T29/42 , Y10T29/49128 , Y10T29/49155 , Y10T29/4981
摘要： A method of manufacturing a thin film piezoelectric element, wherein main electrode layer, piezoelectric thin film, and opposed electrode layer respectively having specified shapes are first formed on first substrate and second substrate, and after that, the opposed electrodes are opposed and bonded to each other, and insulating resin layer is formed over the peripheral portion thereof, and then the second substrate is removed, the insulating resin layer is etched, and connecting electrode pad is formed, and finally, the first substrate is removed to obtain a completely separated thin film piezoelectric element. By this method, it is possible to improve the reproducibility of shapes and to prevent trouble such as shorting between the electrodes which hold the piezoelectric thin film, thereby making it possible to provide a thin film piezoelectric element that may assure high yield without variation in piezoelectric characteristics, and its manufacturing method.
摘要翻译： 首先，在第一基板和第二基板上首先形成分别具有特定形状的主电极层，压电薄膜和相对电极层的薄膜压电元件的制造方法，然后将相对的电极相对并贴合 其它绝缘树脂层形成在其周边部分上，然后除去第二基板，蚀刻绝缘树脂层，形成连接电极焊盘，最后移除第一基板以获得完全分离的薄片 薄膜压电元件。 通过这种方法，可以提高形状的再现性，并且可以防止保持压电薄膜的电极之间的短路等故障，从而可以提供可以保证高产率而不会在压电变化的情况下提供的薄膜压电元件 特点及其制造方法。
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8.发明授权Piezoelectric actuator, disk drive using the same and manufacturing method thereof 有权压电致动器，使用其的磁盘驱动器及其制造方法公开(公告)号：US07046485B2
公开(公告)日：2006-05-16
申请号：US10628558
申请日：2003-07-29
IPC分类号： G11B5/56
CPC分类号： G11B5/5552
摘要： A piezoelectric actuator, the manufacturing method of the same and the head suspension assembly using the same are disclosed, wherein the piezoelectric actuator can be disposed easily without any breakage in mounting and can provide a magnetic head with fine displacements efficiently. More specifically, a first coupling portion and a second coupling portion are provided to couple the first piezoelectric element unit in parallel with the second piezoelectric element unit without being influenced each other by respective displacements. The configuration can provide a head suspension assembly with a high head positioning accuracy.
摘要翻译： 公开了一种压电致动器及其制造方法以及使用该压电致动器的头悬挂组件，其中压电致动器可以容易地设置，而不会有任何的安装断裂，并且可以有效地提供具有精细位移的磁头。 更具体地，提供第一耦合部分和第二耦合部分以将第一压电元件单元与第二压电元件单元并联，而不会由于相应的位移而彼此影响。 该配置可以提供具有高头定位精度的头悬挂组件。
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公开(公告)号：US06781286B2
公开(公告)日：2004-08-24
申请号：US10285409
申请日：2002-11-01
申请人： Yuko Ogawa , Hirokazu Uchiyama
发明人： Yuko Ogawa , Hirokazu Uchiyama
IPC分类号： H01L4108
CPC分类号： G11B5/5552 , H01L41/0986 , H01L41/313
摘要： A piezoelectric driving device of the present invention prevents a short circuit from occurring between electrode metallic films even if bonding-wire is performed. The piezoelectric driving device is a piezoelectric driving device in which a piezoelectric thin plate is joined to one side of a substrate, and a terminal electrode for applying a signal for expanding or contracting the piezoelectric thin plate is further formed on the plane. The terminal electrode is formed on one side of the substrate via a piezoelectric-member pedestal separated from the piezoelectric thin plate.
摘要翻译： 本发明的压电驱动装置即使进行接合线也能够防止在电极金属膜之间发生短路。 压电驱动装置是压电薄板连接到基板的一侧的压电驱动装置，并且在该平面上进一步形成用于施加膨胀或收缩压电薄板的信号的端子电极。 端子电极经由与压电薄板分离的压电体基座形成在基板的一侧。
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公开(公告)号：US06931700B2
公开(公告)日：2005-08-23
申请号：US10256229
申请日：2002-09-27
申请人： Hirokazu Uchiyama
发明人： Hirokazu Uchiyama
IPC分类号： G11B5/55 , H01L41/22 , H01L41/313 , H04R17/00
CPC分类号： G11B5/5552 , H01L41/313 , Y10T29/42 , Y10T29/49155 , Y10T156/1059
摘要： A method for making thin film piezoelectric elements including forming a flat-plate laminate by laminating a first electrode layer, a piezoelectric thin film, and a second electrode layer, on one surface of an element forming substrate, and forming on the one surface a plurality of thin film piezoelectric elements including connecting electrodes for electrically connecting the first electrode layer and the second electrode layer to external equipment, including forming the element holding layer including resin over the one surface of the substrate including the thin film piezoelectric elements; bonding the one surface of the substrate, opposed to a temporary fixing substrate and covered with the element holding layer, on the temporary fixing substrate by using a fixing resin; covering a peripheral area with a specified width; and removing the element forming substrate by etching in an area other than the area covered with the fixing resin, and separating the thin film piezoelectric elements held by the element holding layer, into individually separate elements or groups of elements.
摘要翻译： 一种制造薄膜压电元件的方法，包括在元件形成基板的一个表面上层叠第一电极层，压电薄膜和第二电极层而形成平板层叠体，并且在一个表面上形成多个 包括用于将第一电极层和第二电极层电连接到外部设备的连接电极的薄膜压电元件，包括在包括薄膜压电元件的基板的一个表面上形成包括树脂的元件保持层; 通过使用固定树脂将临时固定基板相对的基板的一个表面与元件保持层接合在临时固定基板上; 覆盖指定宽度的周边区域; 以及通过在除了由固定树脂覆盖的区域之外的区域中的蚀刻去除元件形成衬底，以及将由元件保持层保持的薄膜压电元件分离成单独分离的元件或元件组。
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