摘要:
A position control device has a piezoelectric actuator, a power supply for applying voltage to the piezoelectric actuator, a position control unit, and a reverse low voltage control unit. The position control unit identifies a position control state in which position control is performed by displacing the piezoelectric actuator and a standby state that does not require the position control, and controls the position. When the position control unit identifies the standby state, the reverse low voltage control unit sets a reverse low voltage that is directed opposite to the polarization direction of the piezoelectric film and is lower than a coercive voltage and a set time during which the reverse low voltage is applied, and transmits a power supply control signal for generating the set reverse low voltage and set time to the power supply. Thus, a large displacement amount is achieved and a long lifetime can be realized.
摘要:
A piezoelectric device includes a first electrode film, a second electrode film, and a piezoelectric thin film enclosed by the first electrode film and second electrode film, in which the piezoelectric thin film is an oxide piezoelectric thin film having an oxygen deficiency amount of more than 0% and not more than 10% of the stoichiometric composition. The piezoelectric device composed of the piezoelectric thin film having such oxygen deficiency has a greater piezoelectric performance as compared with the oxide piezoelectric thin film in an oxidized state of stoichiometric composition, and by manufacturing under such a condition, the film forming speed is increased, so that the mass producibility can be improved.
摘要:
A thin film piezoelectric element including a first structure having a sequential stack of layers, a first main electrode layer, a first opposed electrode layer and a first piezoelectric thin film having a first polarizing direction located between the first electrode layers, a second structure having as a sequential stack of layers, a second main electrode layer, a second opposed electrode layer and a second piezoelectric thin film having a second polarizing direction located between the second electrode layers, an insulating resin layer covering peripheral portions of the first and second structures, and at least one connecting electrode pad located at a side of one of the first and second structures, for connecting the main electrode layer and the opposed electrode layer of the structures to external equipment, wherein each first and second structures has a cross-sectional shape such that the piezoelectric thin film is tapered, diminishing in width, from a portion near the main electrode layer to a portion near the opposed electrode layer, and the first and second opposed electrode layers of adjacent structures are bonded to each other, and each polarizing direction of the piezoelectric thin films is identical to the direction of each opposed electrode layer.
摘要:
A method of manufacturing a thin film piezoelectric element, wherein main electrode layer, piezoelectric thin film, and opposed electrode layer respectively having specified shapes are first formed on first substrate and second substrate, and after that, the opposed electrodes are opposed and bonded to each other, and insulating resin layer is formed over the peripheral portion thereof, and then the second substrate is removed, the insulating resin layer is etched, and connecting electrode pad is formed, and finally, the first substrate is removed to obtain a completely separated thin film piezoelectric element. By this method, it is possible to improve the reproducibility of shapes and to prevent trouble such as shorting between the electrodes which hold the piezoelectric thin film, thereby making it possible to provide a thin film piezoelectric element that may assure high yield without variation in piezoelectric characteristics, and its manufacturing method.
摘要:
A video memory, for use with a video tape recorder, a television receiver of the like to process a picture, is simplified and can achieve the functions of a time base corrector, a noise reducer and a comb filter, so as to considerably improve the quality of a video picture. A frequency converting circuit for use with the video memory includes a comparator for comparing first and second address signals and an address correction circuit connected to receive an output signal from the comparator. When a crossing occurs between the first and second address signals, the sequential order in which an address signal is supplied to the memory is switched by the address correcting circuit, to thereby derive a continuous output signal from the memory.
摘要:
A piezoelectric film device has a piezoelectric film element and a power supply circuit. The piezoelectric film element is formed of a first electrode, a second electrode, and a piezoelectric film that is sandwiched between the first electrode and second electrode and has a polarization vector in the film thickness direction. The polarization vector is inverted by application of a predetermined voltage or higher through the first electrode and second electrode. The power supply circuit supplies voltage for inverting the polarization vector. The piezoelectric film has each different lattice constant depending on the direction of the polarization vector. The piezoelectric film device keeps a different displacement position corresponding to the direction of the polarization vector even when the voltage application is stopped.