公开(公告)号：US07518300B2

公开(公告)日：2009-04-14

申请号：US10548243

申请日：2004-03-05

申请人： Eric Gerardus Theodoor Bosch ,  Jeroen Jonkers ,  Willi Neff ,  Günther Hans Derra

发明人： Eric Gerardus Theodoor Bosch ,  Jeroen Jonkers ,  Willi Neff ,  Günther Hans Derra

IPC分类号： H01J17/26

CPC分类号： H05G2/003 ,  H05G2/005 ,  H05H1/48

摘要： The invention relates to a method and a device for the generation of a plasma through electric discharge in a discharge space which contains at least two electrodes, at least one of which is constructed from a matrix material or carrier material, such that an erosion-susceptible region with an evaporation spot is formed at least by the current flow. To present a method or a device for the generation of a plasma by electric discharge, it is suggested that a sacrificial substrate (38) is provided at least at the evaporation spot, the boiling point of said sacrificial suvstrate (38) during discharge operation lying below the melting point of the carrier material (30), such that charge carriers arising in the current flow are mainly generated from the sacrificial substrate (38).

摘要翻译： 本发明涉及一种用于在放电空间中通过放电产生等离子体的方法和装置，其包含至少两个电极，其中至少一个电极由基质材料或载体材料构成，使得易受侵蚀 至少由电流形成具有蒸发点的区域。 为了呈现通过放电产生等离子体的方法或装置，建议至少在蒸发点处提供牺牲衬底（38），在放电操作期间所述牺牲衬套（38）的沸点位于 低于载体材料（30）的熔点，使得在电流中产生的电荷载体主要从牺牲衬底（38）产生。

公开(公告)号：US06586892B2

公开(公告)日：2003-07-01

申请号：US09840813

申请日：2001-04-24

申请人： Günther Hans Derra ,  Hanns Ernst Fischer ,  Thomas Krücken ,  Holger Moench ,  Xaver Riederer

发明人： Günther Hans Derra ,  Hanns Ernst Fischer ,  Thomas Krücken ,  Holger Moench ,  Xaver Riederer

IPC分类号： G05F100

CPC分类号： H05B41/2928

摘要： A method of and a device for operating a gas discharge lamp which is fed with an alternating voltage or an alternating current and wherein the instantaneous power of the lamp is increased at given time intervals are used to form the electrodes. The value of an operational datum of the lamp which varies in time is continuously or discontinuously measured and the frequency of the alternating voltage or the alternating current (operating frequency) is selected in dependence on the measured values.

公开(公告)号：US07809112B2

公开(公告)日：2010-10-05

申请号：US10596441

申请日：2004-12-13

申请人： Günther Hans Derra ,  Rolf Theo Anton Apetz ,  Willi Neff ,  Oliver Rosier ,  Peter Zink

发明人： Günther Hans Derra ,  Rolf Theo Anton Apetz ,  Willi Neff ,  Oliver Rosier ,  Peter Zink

IPC分类号： H01J35/06 ,  H05G2/00

CPC分类号： H05G2/003 ,  B82Y10/00 ,  G03F7/70033 ,  G03F7/70916

摘要： A method of generating in particular EUV radiation (12) and/or soft X-ray radiation (12a) emitted by a plasma (26) is described. The plasma (26) is formed by an operating gas (22) in a discharge space (14) which comprises at least one radiation emission window (16) and an electrode system with at least one anode (18) and at least one cathode (20). This electrode system transmits electrical energy to the plasma (26) by means of charge carriers (24) introduced into the discharge space (14). It is suggested for obtaining a reliable ignition of the plasma (26) at high repetition frequencies that a radiation (30) generated by at least one radiation source (28) is introduced into the discharge space (14) for making available the discharge carriers (24).

摘要翻译： 描述了由等离子体（26）发射的产生特别是EUV辐射（12）和/或软X射线辐射（12a）的方法。 等离子体（26）由放电空间（14）中的工作气体（22）形成，其包括至少一个辐射发射窗（16）和具有至少一个阳极（18）和至少一个阴极（18）的电极系统 20）。 该电极系统通过引入放电空间（14）的电荷载体（24）将电能传递到等离子体（26）。 建议以高重复频率获得等离子体（26）的可靠点燃，即由至少一个辐射源（28）产生的辐射（30）被引入放电空间（14）中以使得放电载体（ 24）。