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1.发明授权Method and device for generating EUV radiation and/or soft X-ray radiation 有权用于产生EUV辐射和/或软X射线辐射的方法和装置公开(公告)号：US07809112B2
公开(公告)日：2010-10-05
申请号：US10596441
申请日：2004-12-13
CPC分类号： H05G2/003 , B82Y10/00 , G03F7/70033 , G03F7/70916
摘要： A method of generating in particular EUV radiation (12) and/or soft X-ray radiation (12a) emitted by a plasma (26) is described. The plasma (26) is formed by an operating gas (22) in a discharge space (14) which comprises at least one radiation emission window (16) and an electrode system with at least one anode (18) and at least one cathode (20). This electrode system transmits electrical energy to the plasma (26) by means of charge carriers (24) introduced into the discharge space (14). It is suggested for obtaining a reliable ignition of the plasma (26) at high repetition frequencies that a radiation (30) generated by at least one radiation source (28) is introduced into the discharge space (14) for making available the discharge carriers (24).
摘要翻译： 描述了由等离子体（26）发射的产生特别是EUV辐射（12）和/或软X射线辐射（12a）的方法。 等离子体（26）由放电空间（14）中的工作气体（22）形成，其包括至少一个辐射发射窗（16）和具有至少一个阳极（18）和至少一个阴极（18）的电极系统 20）。 该电极系统通过引入放电空间（14）的电荷载体（24）将电能传递到等离子体（26）。 建议以高重复频率获得等离子体（26）的可靠点燃，即由至少一个辐射源（28）产生的辐射（30）被引入放电空间（14）中以使得放电载体（ 24）。
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2.发明申请Method and Device for Generating in Particular Euv Radiation And/or Soft X-Ray Radiation 有权在特定的Euv辐射和/或软X射线辐射中产生的方法和装置公开(公告)号：US20080298552A1
公开(公告)日：2008-12-04
申请号：US10596441
申请日：2004-12-13
IPC分类号： H01J35/06
CPC分类号： H05G2/003 , B82Y10/00 , G03F7/70033 , G03F7/70916
摘要： A method of generating in particular EUV radiation (12) and/or soft X-ray radiation (12a) emitted by a plasma (26) is described. The plasma (26) is formed by an operating gas (22) in a discharge space (14) which comprises at least one radiation emission window (16) and an electrode system with at least one anode (18) and at least one cathode (20). This electrode system transmits electrical energy to the plasma (26) by means of charge carriers (24) introduced into the discharge space (14). It is suggested for obtaining a reliable ignition of the plasma (26) at high repetition frequencies that a radiation (30) generated by at least one radiation source (28) is introduced into the discharge space (14) for making available the discharge carriers (24).
摘要翻译： 描述了由等离子体（26）发射的产生特别是EUV辐射（12）和/或软X射线辐射（12a）的方法。 等离子体（26）由放电空间（14）中的工作气体（22）形成，其包括至少一个辐射发射窗（16）和具有至少一个阳极（18）和至少一个阴极（18）的电极系统 20）。 该电极系统通过引入放电空间（14）的电荷载体（24）将电能传递到等离子体（26）。 建议以高重复频率获得等离子体（26）的可靠点燃，使得由至少一个辐射源（28）产生的辐射（30）被引入放电空间（14）中以使得放电载体（ 24）。
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3.发明授权Method and device for the generation of far ultraviolet or soft x-ray radiation 有权用于产生远紫外或软X射线辐射的方法和装置公开(公告)号：US06967341B2
公开(公告)日：2005-11-22
申请号：US10473906
申请日：2002-03-21
申请人： Willi Neff , Klaus Bergmann , Oliver Rosier , Joseph Pankert
发明人： Willi Neff , Klaus Bergmann , Oliver Rosier , Joseph Pankert
CPC分类号： H05G2/003 , G03F7/70033
摘要： In a method for generating extreme ultraviolet radiation or soft x-ray radiation by means of gas discharge, in particular, for EUV lithography, a discharge vessel is provided with two electrodes that are connected to high voltage. Between the electrodes, in an area of two electrode recesses that are coaxial to one another, a gas fill with predetermined gas pressure in accordance with a discharge operation realized on the left branch of the Paschen curve is provided. In this area, a plasma emitting the radiation is generated when supplying energy. The plasma is displaced or deformed by a pressure change of the gas fill in the area of the electrode recesses.
摘要翻译： 在通过气体放电产生极紫外辐射或软X射线辐射的方法中，特别是对于EUV光刻技术，放电容器具有连接到高电压的两个电极。 在电极之间，在彼此同轴的两个电极凹部的区域中，提供根据在Paschen曲线的左分支上实现的放电操作的预定气体压力的气体填充。 在该区域，在供给能量时产生发射辐射的等离子体。 等离子体通过气体填充物在电极凹部的区域中的压力变化而移位或变形。
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公开(公告)号：US20050040347A1
公开(公告)日：2005-02-24
申请号：US10473906
申请日：2002-03-21
申请人： Willi Neff , Klaus Bergmann , Oliver Rosier , Joseph Pankert
发明人： Willi Neff , Klaus Bergmann , Oliver Rosier , Joseph Pankert
CPC分类号： H05G2/003 , G03F7/70033
摘要： In a method for generating extreme ultraviolet radiation or soft x-ray radiation by means of gas discharge, in particular, for EUV lithography, a discharge vessel is provided with two electrodes that are connected to high voltage. Between the electrodes, in an area of two electrode recesses that are coaxial to one another, a gas fill with predetermined gas pressure in accordance with a discharge operation realized on the left branch of the Paschen curve is provided. In this area, a plasma emitting the radiation is generated when supplying energy. The plasma is displaced or deformed by a pressure change of the gas fill in the area of the electrode recesses.
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5.发明授权Device for producing an extreme ultraviolet and soft x radiation from a gaseous discharge 有权用于从气体放电产生极端紫外线和软x辐射的装置公开(公告)号：US06788763B1
公开(公告)日：2004-09-07
申请号：US10019475
申请日：2002-08-09
申请人： Willi Neff , Rainer Lebert , Klaus Bergmann , Oliver Rosier
发明人： Willi Neff , Rainer Lebert , Klaus Bergmann , Oliver Rosier
IPC分类号： G21G400
CPC分类号： H05G2/003 , G03F7/70033
摘要： The invention relates to a device for generating extreme ultraviolet and soft x-rays from a gas discharge, operated on the left-hand branch of the Paschen curve. There are two main electrodes, between which there is a gas-filled space, and each main electrode exhibits an opening, by means of which an axis of symmetry [(5)] is defined; and there are means to increase the conversion efficiency. Preferred fields of application are those requiring extreme ultraviolet (EUV) radiation or soft x-rays at a wavelength ranging from approximately 1 to 20 nm, and in particular around 13 nm, such as in EUV lithography.
摘要翻译： 本发明涉及一种用于从气体放电产生极紫外和软X射线的装置，其在帕邢曲线的左手分支上操作。 存在两个主电极，其间有气体填充的空间，并且每个主电极具有开口，通过该开口定义对称轴[（5）]; 并且有提高转换效率的方法。 优选的应用领域是那些需要极紫外（EUV）辐射或在约1至20nm，特别是约13nm的波长范围内的软x射线，例如在EUV光刻中。
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6.发明授权UV luminaire having a plurality of UV lamps, particularly for technical product processing 有权UV灯具具有多个UV灯，特别用于技术产品处理公开(公告)号：US08399869B2
公开(公告)日：2013-03-19
申请号：US13133999
申请日：2008-12-11
IPC分类号： F26B3/28
CPC分类号： F26B3/28
摘要： In various embodiments, a UV luminaire may include a housing which is designed for accommodating a plurality of UV lamps and a protective atmosphere, wherein the housing is subdivided in such a manner into chambers respectively containing some of the UV lamps and can be opened in such a manner that each of the UV lamps can be replaced with detriment to the protective atmosphere only of the respective chamber.
摘要翻译： 在各种实施例中，UV灯具可以包括被设计用于容纳多个UV灯和保护气氛的外壳，其中壳体以这样的方式被细分为分别包含一些UV灯的腔室，并且可以在其中打开 每个UV灯可以被替换而不仅仅损害相应室的保护气氛的方式。
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7.发明授权Dielectric barrier discharge lamp configured as a coaxial double tube having a getter 有权介电阻挡放电灯，其配置为具有吸气剂的同轴双管公开(公告)号：US08174191B2
公开(公告)日：2012-05-08
申请号：US12737405
申请日：2008-07-15
申请人： Axel Hombach , Oliver Rosier
发明人： Axel Hombach , Oliver Rosier
CPC分类号： H01J65/046 , H01J61/26
摘要： A dielectric barrier discharge lamp (1) configured as a coaxial double tube comprises an inner tube (3), which is disposed coaxially inside an outer tube (2). The inner tube (3) comprises an inner electrode tube (8) provided for receiving the inner electrode (7) and a getter tube (10) provided for receiving getter material (9). The inner electrode tube (8) and getter tube (10) are separated from each other in a gastight manner by a partition (11).
摘要翻译： 构造为同轴双管的电介质阻挡放电灯（1）包括同轴地设置在外管（2）内的内管（3）。 内管（3）包括设置用于容纳内电极（7）的内电极管（8）和用于接收吸气材料（9）的吸气管（10）。 内部电极管（8）和吸气管（10）通过隔板（11）以气密方式彼此分离。
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公开(公告)号：US20110001426A1
公开(公告)日：2011-01-06
申请号：US12918979
申请日：2008-02-21
申请人： Axel Hombach , Oliver Rosier
发明人： Axel Hombach , Oliver Rosier
IPC分类号： H01J65/04
CPC分类号： H01J65/046 , H01J9/247 , H01J61/30
摘要： A dielectric barrier discharge lamp (1) with a discharge vessel, which has an outer tube (2), which surrounds a discharge space (4) filled with a discharge medium, an outer electrode (6), which is arranged on the outer side of the outer tube (2), an elongate inner electrode (7), which is arranged axially within the outer tube (2), at least one retaining disk (8) with an axial bore, through which the elongate inner electrode (7) runs, the retaining disk (8) extending substantially from the inner electrode (7) up to the inner side of the outer tube (2), as a result of which the inner electrode (7) is centered at least indirectly within the discharge vessel. The retaining disk (8) is supported on both sides loosely in the direction of the longitudinal axis by means of a supporting means (9a-9c) on the left-hand side and a supporting means (10a-10c) on the right-hand side.
摘要翻译： 一种具有放电容器的介质阻挡放电灯（1），其具有外管（2），该外管围绕填充有放电介质的放电空间（4），外电极（6）设置在外侧 （2）的轴向设置有至少一个具有轴向孔的保持盘（8）的细长内部电极（7），所述细长内部电极（7）穿过所述外部管（2） 保持盘（8）从内部电极（7）基本上延伸到外部管（2）的内侧，结果内部电极（7）至少间接地位于放电容器 。 保持盘（8）通过左侧的支撑装置（9a-9c）在右侧的支撑装置（10a-10c）上沿纵向方向松动地支撑在两侧 侧。
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公开(公告)号：US20100253246A1
公开(公告)日：2010-10-07
申请号：US12734402
申请日：2007-11-26
申请人： Axel Hombach , Oliver Rosier , Markus Roth , Siegmar Rudakowski
发明人： Axel Hombach , Oliver Rosier , Markus Roth , Siegmar Rudakowski
CPC分类号： H01J65/046 , H01J61/06 , H01J61/0672 , H01J61/0675
摘要： The invention relates to a dielectric barrier discharge lamp in a coaxial double-tube arrangement, comprising an exterior electrode (6), and interior electrode (7), and an auxiliary electrode (8). The interior electrode (7) is designed as an electrically conductive layer placed inside the interior tube (3) of the double-tube arrangement. The auxiliary electrode (8) is designed, for example, as a metal tube or pipe and is also disposed inside the interior tube (3), specifically in direct contact with the layer. In this manner, the conductivity of the interior electrode (S) is improved.
摘要翻译： 本发明涉及同轴双管装置中的介质阻挡放电灯，其包括外电极（6）和内电极（7）以及辅助电极（8）。 内部电极（7）被设计为位于双管装置的内管（3）内部的导电层。 辅助电极（8）例如设计为金属管或管，并且还设置在内管（3）的内部，特别是与层直接接触。 以这种方式，内部电极（S）的导电性提高。
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公开(公告)号：US08314538B2
公开(公告)日：2012-11-20
申请号：US12918979
申请日：2008-02-21
申请人： Axel Hombach , Oliver Rosier
发明人： Axel Hombach , Oliver Rosier
IPC分类号： H01J1/18
CPC分类号： H01J65/046 , H01J9/247 , H01J61/30
摘要： A dielectric barrier discharge lamp (1) with a discharge vessel, which has an outer tube (2), which surrounds a discharge space (4) filled with a discharge medium, an outer electrode (6), which is arranged on the outer side of the outer tube (2), an elongate inner electrode (7), which is arranged axially within the outer tube (2), at least one retaining disk (8) with an axial bore, through which the elongate inner electrode (7) runs, the retaining disk (8) extending substantially from the inner electrode (7) up to the inner side of the outer tube (2), as a result of which the inner electrode (7) is centered at least indirectly within the discharge vessel. The retaining disk (8) is supported on both sides loosely in the direction of the longitudinal axis by means of a supporting means (9a-9c) on the left-hand side and a supporting means (10a-10c) on the right-hand side.
摘要翻译： 一种具有放电容器的介质阻挡放电灯（1），其具有外管（2），该外管围绕填充有放电介质的放电空间（4），外电极（6）设置在外侧 （2）的轴向设置有至少一个具有轴向孔的保持盘（8）的细长内部电极（7），所述细长内部电极（7）穿过所述外部管（2） 保持盘（8）从内部电极（7）基本上延伸到外部管（2）的内侧，结果内部电极（7）至少间接地位于放电容器 。 保持盘（8）通过左侧的支撑装置（9a-9c）在右侧的支撑装置（10a-10c）上沿纵向方向松动地支撑在两侧 侧。
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