公开(公告)号：US20120081132A1

公开(公告)日：2012-04-05

申请号：US13080451

申请日：2011-04-05

申请人： Francisco Machuca ,  Ronald Chiarello ,  G. Lorimer Miller ,  Joseph W. Foster ,  David C. Tigwell

发明人： Francisco Machuca ,  Ronald Chiarello ,  G. Lorimer Miller ,  Joseph W. Foster ,  David C. Tigwell

IPC分类号： G01R27/28 ,  H01F17/06

CPC分类号： G01R31/318511 ,  G01R31/2648 ,  G01R31/265 ,  H01L22/14 ,  H01L2924/0002 ,  H01L2924/00

摘要： An apparatus includes a member including a ferromagnetic material, an inductance-capacitance resonant circuit, a substrate disposed relative to the member, and a plurality of radiation sources. The member includes a post disposed at its center and a surface extending to an outer wall. The member defines a gap between the post and the outer wall. The inductance-capacitance resonant circuit is configured to resonate at a measurement frequency. The circuit includes an inductor disposed relative to the post. The substrate is disposed relative to the member. The substrate is electromagnetically coupled to the inductor. The plurality of radiation sources is disposed radially outward from and circumferentially around the post of the member. The apparatus can be used to simultaneously measure conductance (inverse sheet resistance), steady state photoconductance, true steady state minority carrier lifetime, photoconductance build-up and photoconductance decay lifetime.

摘要翻译： 一种装置包括包括铁磁材料，电感 - 电容谐振电路，相对于该构件设置的衬底和多个辐射源的构件。 该构件包括设置在其中心处的柱和延伸到外壁的表面。 构件限定了柱和外壁之间的间隙。 电感 - 电容谐振电路被配置为以测量频率谐振。 电路包括相对于柱设置的电感器。 衬底相对于构件设置。 衬底电感耦合到电感器。 多个辐射源从构件的柱体周向地周向地设置。 该装置可以同时测量电导（反薄片电阻），稳态光电导，真实的稳态少数载流子寿命，光电导积累和光电导衰减寿命。

公开(公告)号：US20120286806A1

公开(公告)日：2012-11-15

申请号：US13292850

申请日：2011-11-09

申请人： Francisco Machuca ,  Ronald Chiarello ,  G. Lorimer Miller ,  Joseph W. Foster ,  David C. Tigwell ,  David Cornwell

发明人： Francisco Machuca ,  Ronald Chiarello ,  G. Lorimer Miller ,  Joseph W. Foster ,  David C. Tigwell ,  David Cornwell

IPC分类号： G01N27/02

CPC分类号： G01R31/2648 ,  G01R31/2656 ,  G01R31/318511 ,  H01L22/14

摘要： A substrate is electromagnetically coupled into an inductance-capacitance resonant circuit formed from (i) a member comprising a ferromagnetic material, (ii) an inductor and (iii) the substrate. The substrate is illuminated for a first time period X to cause photoconduction in the substrate. Decay in conductivity of the substrate is monitored for a second time period Y. The ratio of X to Y is greater than 1:10. Bulk lifetime of the substrate is determined from the decay.

摘要翻译： 基板电磁耦合到由（i）包括铁磁材料，（ii）电感器和（iii）基板）的构件形成的电感 - 电容谐振电路。 衬底被照射第一时间段X以在衬底中引起光电导。 在第二时间段Y中监测衬底的电导率的衰减.X与Y的比例大于1:10。 从衰变确定基材的体积寿命。

公开(公告)号：US20110169520A1

公开(公告)日：2011-07-14

申请号：US12687855

申请日：2010-01-14

申请人： G. Lorimer MILLER ,  Joseph W. FOSTER ,  David C. TIGWELL

发明人： G. Lorimer MILLER ,  Joseph W. FOSTER ,  David C. TIGWELL

IPC分类号： G01R31/26 ,  G01R31/00 ,  H01F17/06

CPC分类号： G01R31/318511 ,  G01R31/2648 ,  G01R31/265 ,  H01L22/14 ,  H01L2924/0002 ,  H01L2924/00

摘要： An apparatus for measuring minority carrier lifetime is provided. The apparatus includes a resonant circuit having an inductor and a capacitor and configured to resonate at a measurement frequency. The apparatus also includes a ferromagnetic core having a first portion and a second portion. The first portion defines a gap and can be configured to direct therealong a magnetic field established by the inductor, such that lateral spreading of the magnetic field outside of the first portion is inhibited, and to direct the magnetic field generally uniformly across the gap. The second portion can be configured to direct the magnetic field therealong and, in conjunction with the first portion, into a closed loop. A radiation source can be configured to irradiate an area proximal to the gap defined by the first portion of the ferromagnetic core.

摘要翻译： 提供了一种用于测量少数载流子寿命的装置。 该装置包括具有电感器和电容器并被配置为以测量频率谐振的谐振电路。 该装置还包括具有第一部分和第二部分的铁磁芯。 第一部分限定了间隙，并且可以被配置为沿着由电感器建立的磁场引导，使得抑制第一部分之外的磁场的横向扩展，并且将磁场大致均匀地引导穿过间隙。 第二部分可以被配置为引导其周围的磁场，并且与第一部分一起形成闭环。 辐射源可以被配置为照射由铁磁芯的第一部分限定的间隙附近的区域。

公开(公告)号：US07355394B2

公开(公告)日：2008-04-08

申请号：US11522416

申请日：2006-09-18

申请人： Lawrence C. Lei ,  Siqing Lu ,  Yu Chang ,  Cecilia Martner ,  Quyen Pham ,  Yu P. Gu ,  Joel Huston ,  Paul Smith ,  G. Lorimer Miller

发明人： Lawrence C. Lei ,  Siqing Lu ,  Yu Chang ,  Cecilia Martner ,  Quyen Pham ,  Yu P. Gu ,  Joel Huston ,  Paul Smith ,  G. Lorimer Miller

IPC分类号： G01B7/06 ,  G01N27/72

CPC分类号： G01B7/105

摘要： A method and apparatus are provided for measuring the thickness of a test object. The apparatus includes an eddy current sensor having first and second sensor heads. The sensor heads are positioned to have a predetermined gap therebetween for passage by at least a portion of the test object through the gap. The sensor heads make measurements at given sampling locations on the test object as the test object is moved through the gap. The apparatus also includes a position sensing mechanism to determine positions of the sampling locations on the test object. The apparatus also includes an evaluation circuit in communication with the eddy current sensor and to the position sensing mechanism for determining the thickness of the test object at the sampling locations.

摘要翻译： 提供了一种用于测量被测物体的厚度的方法和装置。 该装置包括具有第一和第二传感器头的涡流传感器。 传感器头被定位成在其间具有预定的间隙，以通过该测试对象的至少一部分通过间隙。 当测试对象移动通过间隙时，传感器头在测试对象上的给定采样位置进行测量。 该装置还包括位置检测机构，用于确定测试对象上的采样位置的位置。 该装置还包括与涡流传感器和位置感测机构通信的评估电路，用于确定采样位置处的测试对象的厚度。