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1.发明授权Saw filter device and method employing normal temperature bonding for producing desirable filter production and performance characteristics 有权锯式过滤装置和采用常温接合的方法，用于产生理想的过滤器生产和性能特征公开(公告)号：US07105980B2
公开(公告)日：2006-09-12
申请号：US10454797
申请日：2003-06-04
IPC分类号： H01L41/08
CPC分类号： H03H3/10 , H03H3/08 , H03H9/02094 , H03H9/02559 , H03H9/02566 , H03H9/02574 , H03H9/02834 , H03H9/02897 , H03H9/02952 , H03H9/02984 , H03H9/6489 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/49155 , Y10T29/49156
摘要： A SAW filter includes a piezoelectric substrate of Lithium Niobate or optionally Lithium Tantalate having a thickness of at least twice an acoustic wavelength. The piezoelectric substrate is bonded to a surrogate substrate of a silicon material. The surrogate substrate is characterized by a resisitivity of at least 100 ohm-cm and an expansion coefficient compatible with the piezoelectric substrate. A catalytic bonding film between the piezoelectric substrate and the surrogate substrate is formed from a first catalytic bonding film deposited onto a surface of the piezoelectric substrate and a second catalytic bonding film deposited onto a surface of the surrogate substrate. The piezoelectric substrate is bonded to the surrogate substrate through a compression force sufficient for providing a bonding at a normal temperature.
摘要翻译： SAW滤波器包括铌酸锂的压电基片或任选的具有至少两倍声波长的厚度的钽酸锂。 压电基板被接合到硅材料的替代基板上。 代用衬底的特征在于至少100欧姆 - 厘米的电阻率和与压电基片相容的膨胀系数。 压电基片与替代基片之间的催化接合膜由沉积在压电基片的表面上的第一催化接合膜和沉积在代理基片的表面上的第二催化接合膜形成。 压电基板通过足以在常温下提供粘合的压缩力粘合到替代基板上。
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2.发明申请SAW Filter Device and Method Employing Normal Temperature Bonding for Producing Desirable Filter Production and Performance Characteristics 有权SAW滤波器装置和采用正常温度接合的方法，用于生产理想的滤波器生产和性能特征公开(公告)号：US20070028433A1
公开(公告)日：2007-02-08
申请号：US11428924
申请日：2006-07-06
申请人： Benjamin Abbott , Svetlana Malocha , Jack Chocola , Gary Monetti , Joshua Zepess
发明人： Benjamin Abbott , Svetlana Malocha , Jack Chocola , Gary Monetti , Joshua Zepess
IPC分类号： H04R17/00
CPC分类号： H03H3/10 , H03H3/08 , H03H9/02094 , H03H9/02559 , H03H9/02566 , H03H9/02574 , H03H9/02834 , H03H9/02897 , H03H9/02952 , H03H9/02984 , H03H9/6489 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/49155 , Y10T29/49156
摘要： A SAW filter includes a piezoelectric substrate of Lithium Niobate or optionally Lithium Tantalate having a thickness of at least twice an acoustic wavelength. The piezoelectric substrate is bonded to a surrogate substrate of a silicon material. The surrogate substrate is characterized by a resisitivity of at least 100 ohm-cm and an expansion coefficient compatible with the piezoelectric substrate. A catalytic bonding film between the piezoelectric substrate and the surrogate substrate is formed from a first catalytic bonding film deposited onto a surface of the piezoelectric substrate and a second catalytic bonding film deposited onto a surface of the surrogate substrate. The piezoelectric substrate is bonded to the surrogate substrate through a compression force sufficient for providing a bonding at a normal temperature.
摘要翻译： SAW滤波器包括铌酸锂的压电基片或任选的具有至少两倍声波长的厚度的钽酸锂。 压电基板被接合到硅材料的替代基板上。 代用衬底的特征在于至少100欧姆 - 厘米的电阻率和与压电基片相容的膨胀系数。 压电基片与替代基片之间的催化接合膜由沉积在压电基片的表面上的第一催化接合膜和沉积在代理基片的表面上的第二催化接合膜形成。 压电基板通过足以在常温下提供粘合的压缩力粘合到替代基板上。
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公开(公告)号：US07213314B2
公开(公告)日：2007-05-08
申请号：US11428924
申请日：2006-07-06
CPC分类号： H03H3/10 , H03H3/08 , H03H9/02094 , H03H9/02559 , H03H9/02566 , H03H9/02574 , H03H9/02834 , H03H9/02897 , H03H9/02952 , H03H9/02984 , H03H9/6489 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/49155 , Y10T29/49156
摘要： A SAW filter includes a piezoelectric substrate of Lithium Niobate or optionally Lithium Tantalate having a thickness of at least twice an acoustic wavelength. The piezoelectric substrate is bonded to a surrogate substrate of a silicon material. The surrogate substrate is characterized by a resisitivity of at least 100 ohm-cm and an expansion coefficient compatible with the piezoelectric substrate. A catalytic bonding film between the piezoelectric substrate and the surrogate substrate is formed from a first catalytic bonding film deposited onto a surface of the piezoelectric substrate and a second catalytic bonding film deposited onto a surface of the surrogate substrate. The piezoelectric substrate is bonded to the surrogate substrate through a compression force sufficient for providing a bonding at a normal temperature.
摘要翻译： SAW滤波器包括铌酸锂的压电基片或任选的具有至少两倍声波长的厚度的钽酸锂。 压电基板被接合到硅材料的替代基板上。 代用衬底的特征在于至少100欧姆 - 厘米的电阻率和与压电基片相容的膨胀系数。 压电基片与替代基片之间的催化接合膜由沉积在压电基片的表面上的第一催化接合膜和沉积在代理基片的表面上的第二催化接合膜形成。 压电基板通过足以在常温下提供粘合的压缩力粘合到替代基板上。
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