公开(公告)号：US08552819B2

公开(公告)日：2013-10-08

申请号：US13282371

申请日：2011-10-26

申请人： Benjamin P. Abbott ,  Alan Chen ,  Taeho Kook ,  Kurt Steiner ,  Robert Aigner ,  Suzanne Combe ,  Timothy Daniel ,  Natalya F. Naumenko ,  Julien Gratier

发明人： Benjamin P. Abbott ,  Alan Chen ,  Taeho Kook ,  Kurt Steiner ,  Robert Aigner ,  Suzanne Combe ,  Timothy Daniel ,  Natalya F. Naumenko ,  Julien Gratier

IPC分类号： H03H9/00

CPC分类号： H03H9/25 ,  H03H9/02157 ,  H03H9/02559 ,  H03H9/02834

摘要： Disclosed embodiments include a surface acoustic wave device having electrode period, electrode width, and/or ratio of electrode width to electrode period varied in a prescribed manner.

摘要翻译： 公开的实施例包括具有电极周期，电极宽度和/或电极宽度与电极周期的比例以规定方式变化的弹性表面波器件。

公开(公告)号：US08294330B1

公开(公告)日：2012-10-23

申请号：US12414706

申请日：2009-03-31

申请人： Benjamin P. Abbott ,  Natalya F. Naumenko

发明人： Benjamin P. Abbott ,  Natalya F. Naumenko

IPC分类号： H03H9/25

CPC分类号： H03H9/02834

摘要： A surface acoustic wave device with improved temperature characteristics includes a piezoelectric substrate of a single crystal of symmetry 3m, providing propagation of a SAW having an electromechanical coupling factor exceeding 5%, an electrode pattern on a substrate surface forming a resonator, and a SiOx overlay covering the electrode pattern. An optimized thickness of the electrodes combined with an SiOx overlay provide improved performance in RF applications with improved temperature characteristics. To suppress spurious responses the SiOx thickness is varied depending upon the relative thickness and period of the electrodes. The electrode pattern forms resonators with the silicon oxide thickness over the electrodes inversely related to the period of the electrodes of the resonators.

摘要翻译： 具有改善的温度特性的表面声波装置包括具有对称性3m的单晶的压电基片，提供机电耦合系数超过5％的SAW的传播，形成谐振器的基板表面上的电极图案，和SiOx覆盖层 覆盖电极图案。 与SiOx覆盖层结合的电极的优化厚度在具有改进的温度特性的RF应用中提供改进的性能。 为了抑制杂散响应，SiO x厚度根据电极的相对厚度和周期而变化。 电极图案形成在电极上的氧化硅厚度与谐振器的电极的周期成反比的谐振器。

公开(公告)号：US20120161577A1

公开(公告)日：2012-06-28

申请号：US13041653

申请日：2011-03-07

申请人： Benjamin P. Abbott ,  Robert Aigner ,  Alan S. Chen ,  Kevin Gamble ,  Julien Gratier ,  Taeho Kook ,  Marc Solal ,  Kurt G. Steiner

发明人： Benjamin P. Abbott ,  Robert Aigner ,  Alan S. Chen ,  Kevin Gamble ,  Julien Gratier ,  Taeho Kook ,  Marc Solal ,  Kurt G. Steiner

IPC分类号： H03H9/25 ,  H02K15/00 ,  H01L41/18

CPC分类号： H03H9/02858 ,  H03H9/1452 ,  H03H9/1457 ,  Y10T29/42 ,  Y10T29/49009

摘要： An acoustic wave device operable as a piston mode wave guide includes electrodes forming an interdigital transducer on a surface of the piezoelectric substrate, wherein each of the plurality of electrodes is defined as having a transversely extending center region and transversely opposing edge regions for guiding an acoustic wave longitudinally through the transducer. A Silicon Oxide overcoat covers the transducer and a Silicon Nitride layer covers the Silicon Oxide overcoat within only the center and edge regions. The thickness of the Silicon Nitride layer is sufficient for providing a frequency modification to the acoustic wave within the center region and is optimized with a positioning of a Titanium strip within each of the opposing edge regions. The Titanium strip reduces the acoustic wave velocity within the edge regions with the velocity in the edge regions being less than the wave velocity within the transducer center region.

摘要翻译： 可用作活塞模式波导的声波装置包括在压电基板的表面上形成叉指式换能器的电极，其中多个电极中的每一个被限定为具有横向延伸的中心区域和横向相对的边缘区域，用于引导声学 通过传感器纵向波动。 氧化硅外涂层覆盖换能器，氮化硅层仅覆盖中心和边缘区域内的氧化硅外涂层。 氮化硅层的厚度足以对中心区域内的声波提供频率修正，并且通过在每个相对的边缘区域内定位钛带来优化。 钛带减少了边缘区域内的声波速度，边缘区域中的速度小于换能器中心区域内的波速。

公开(公告)号：US08085117B1

公开(公告)日：2011-12-27

申请号：US12511181

申请日：2009-07-29

申请人： Benjamin P. Abbott ,  Marc Solal ,  Michael Wang ,  Kenya Hashimoto

发明人： Benjamin P. Abbott ,  Marc Solal ,  Michael Wang ,  Kenya Hashimoto

IPC分类号： H03H9/25 ,  H01L41/083

CPC分类号： H03H9/25 ,  H03H9/0222

摘要： A piezoelectric boundary acoustic wave (PBAW) device includes a slotted dielectric body disposed over one surface of a piezoelectric body and electrodes forming an IDT at the interface between the piezoelectric body and the dielectric body. The thickness of the electrode is set so that the acoustic velocity of the boundary acoustic waves is less than acoustic waves propagating in the piezoelectric body.

摘要翻译： 压电弹性波（PBAW）装置包括设置在压电体的一个表面上的开槽电介质体和在压电体和电介质体之间的界面处形成IDT的电极。 电极的厚度被设定为使得声界面声波的声速小于在压电体中传播的声波。

公开(公告)号：US07939987B1

公开(公告)日：2011-05-10

申请号：US12256494

申请日：2008-10-23

申请人： Marc Solal ,  Robert Aigner ,  Julien Gratier ,  Taeho Kook ,  Benjamin P. Abbott

发明人： Marc Solal ,  Robert Aigner ,  Julien Gratier ,  Taeho Kook ,  Benjamin P. Abbott

IPC分类号： H03H9/145 ,  H03H9/25

CPC分类号： H03H9/02866 ,  H03H9/02118 ,  H03H9/02645

摘要： An acoustic wave device includes electrodes carried on a surface of a piezoelectric material and an array of reflective obstacles such that elastic energy resulting from a piezoelectric effect is preferentially directed along a primary wave propagation path. The array of reflective obstacles are positioned generally parallel to the surface of the piezoelectric material and redirect acoustic waves typically reflected in other than a desirable direction to along a desired direction generally along the primary propagation path. The obstacles improve performance for SAW and BAW devices by effecting reflected energy and suppressing spurious modes.

摘要翻译： 声波装置包括承载在压电材料的表面上的电极和反射障碍物的阵列，使得由压电效应产生的弹性能量优先沿着主波传播路径引导。 反射障碍物的阵列大致平行于压电材料的表面定位，并且通常沿着主要传播路径重定向通常沿期望方向反射的声波沿期望的方向。 障碍通过实现反射能量和抑制杂散模式来改善SAW和BAW器件的性能。

公开(公告)号：US07446453B1

公开(公告)日：2008-11-04

申请号：US11773151

申请日：2007-07-03

申请人： Natalya F. Naumenko ,  Benjamin P. Abbott

发明人： Natalya F. Naumenko ,  Benjamin P. Abbott

IPC分类号： H03H9/25

CPC分类号： H03H9/02559 ,  H03H9/14538

摘要： A SAW device includes a LiNbO3 single crystal piezoelectric substrate having an orientation defined by Euler angles (λ,μ,θ), with angle λ ranging from −5° to +5°, angle μ ranging from about −74° to about −65°, and angle θ ranging from −5° to +5°. Electrode patterns on a surface of the substrate form element resonators having a metallization ratio ranging from about 0.3 to about 0.8 and electrode thicknesses ranging from about 12% to about 17.5% of an acoustic wavelength of a strongly coupled non-leaky surface acoustic wave, excited on the surface of the substrate, if Al is used as electrode material, and in a range from about 6% to about 10% of an acoustic wavelength, if Cu is used as electrode material. Such orientations simultaneously combined with an optimized electromechanical coupling of spurious surface acoustic mode provide for improved performance in RF applications with a widened passband.

摘要翻译： SAW器件包括具有由欧拉角（λ，μ，θ）限定的取向，角度λ为-5°至+ 5°的取向的LiNbO 3单晶压电基片， 约-74°至约-65°，角度θ为-5°至+ 5°。 衬底表面上的电极图案形成金属化率范围为约0.3至约0.8的元件谐振器和强耦合的非泄漏表面声波的声波的约12％至约17.5％的电极厚度，激发 如果使用Cu作为电极材料，则在基板的表面上，如果使用Al作为电极材料，并且在约6％至约10％的声波长的范围内。 这种取向同时与优化的机电耦合的杂散表面声学模式相结合，提供了具有加宽通带的RF应用中的改进的性能。

公开(公告)号：US06798318B1

公开(公告)日：2004-09-28

申请号：US10132055

申请日：2002-04-25

申请人： Benjamin P. Abbott ,  Joshua J. Caron ,  Kamran S. Cheema

发明人： Benjamin P. Abbott ,  Joshua J. Caron ,  Kamran S. Cheema

IPC分类号： H03H964

CPC分类号： H03H9/14582 ,  H03H9/14555 ,  H03H9/6469 ,  H03H9/6483 ,  H03H9/6489 ,  H03H9/6493

摘要： A hybrid leaky surface acoustic wave (LSAW) resonator filter has a wide bandwidth, low insertion loss and return loss, and excellent rejection of frequencies outside the passband, and includes one or more longitudinally coupled LSAW resonator filter tracks with chirp-type resonant cavities, reflective gratings, and a plurality of interdigital transducers (IDTs) disposed end-to-end therebetween. An acoustic resonant cavity is formed between each of the IDTs and its neighboring IDTs or gratings by chirping the fingers of the IDTs in the vicinity of the cavity. A one or more LSAW impedance element filters are disposed upon the same substrate and connected in series and/or shunt with the longitudinally coupled LSAW resonator tracks. The frequencies of the LSAW impedance-element filters are chosen such that their combination with the longitudinally coupled LSAW resonator filter tracks results in the formation of deep nulls in the overall transfer function at frequencies just outside of the passband.

摘要翻译： 混合泄漏表面声波（LSAW）谐振滤波器具有宽带宽，低插入损耗和回波损耗，以及在通带外的频率的优异抑制，并且包括具有啁啾型谐振腔的一个或多个纵向耦合的LSAW谐振器滤波器轨道， 反射光栅以及在它们之间端对端设置的多个叉指式换能器（IDT）。 通过在空腔附近啁啾IDT的手指，在每个IDT及其相邻的IDT或光栅之间形成声谐振腔。 一个或多个LSAW阻抗元件滤波器设置在相同的衬底上并且与纵向耦合的LSAW谐振器轨迹串联和/或分流连接。 选择LSAW阻抗元件滤波器的频率使得它们与纵向耦合的LSAW谐振器滤波器轨道的组合导致在通带正前方的频率处的总传递函数中形成深零点。

公开(公告)号：US06556104B2

公开(公告)日：2003-04-29

申请号：US09848714

申请日：2001-05-03

申请人： Natalya F. Naumenko ,  Benjamin P. Abbott

发明人： Natalya F. Naumenko ,  Benjamin P. Abbott

IPC分类号： H03H964

CPC分类号： H03H9/6483 ,  H03H9/02559

摘要： A surface acoustic wave device includes a piezoelectric substrate of a single crystal LiTaO3 and an electrode pattern provided on a surface of the piezoelectric substrate which forms a resonator having an electrode thickness in a range of about 1% to about 15% of an acoustic wavelength of a surface acoustic wave excited on the surface of the substrate. The piezoelectric substrate has an orientation defined by Euler angles (&lgr;, &mgr;, &thgr;), with angle &lgr; in a range from −4° to +4°, angle &mgr; in a range from about −52° to about −36°, and angle &thgr; in a range from about (−1.365 &lgr;−4)° to (−1.365 &lgr;+4)°. Such orientations simultaneously combined with an optimized propagation loss at resonant and anti-resonant frequencies provide for improved performance in RF applications.

摘要翻译： 表面声波装置包括单晶LiTaO 3的压电衬底和设置在压电衬底的表面上的电极图案，该电极图形成电极厚度在声波波长的约1％至约15％的范围内的谐振器 在衬底的表面上激发表面声波。 压电衬底具有由欧拉角（兰德，mu，θ）限定的取向，角度范围在-4°至+ 4°之间，角度μ在约-52°至约-36°的范围内;以及 角度θ在约（-1.365 lambd-4）°至（-1.365 lambd + 4）°的范围内。 同时与谐振和反谐振频率下的优化传播损耗相结合的这种取向提供了射频应用中改进的性能。

公开(公告)号：US07105980B2

公开(公告)日：2006-09-12

申请号：US10454797

申请日：2003-06-04

申请人： Benjamin P. Abbott ,  Svetlana Malocha ,  Jack Chocola ,  Gary Monetti ,  Josh Zepress

发明人： Benjamin P. Abbott ,  Svetlana Malocha ,  Jack Chocola ,  Gary Monetti ,  Josh Zepress

IPC分类号： H01L41/08

CPC分类号： H03H3/10 ,  H03H3/08 ,  H03H9/02094 ,  H03H9/02559 ,  H03H9/02566 ,  H03H9/02574 ,  H03H9/02834 ,  H03H9/02897 ,  H03H9/02952 ,  H03H9/02984 ,  H03H9/6489 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/49155 ,  Y10T29/49156

摘要： A SAW filter includes a piezoelectric substrate of Lithium Niobate or optionally Lithium Tantalate having a thickness of at least twice an acoustic wavelength. The piezoelectric substrate is bonded to a surrogate substrate of a silicon material. The surrogate substrate is characterized by a resisitivity of at least 100 ohm-cm and an expansion coefficient compatible with the piezoelectric substrate. A catalytic bonding film between the piezoelectric substrate and the surrogate substrate is formed from a first catalytic bonding film deposited onto a surface of the piezoelectric substrate and a second catalytic bonding film deposited onto a surface of the surrogate substrate. The piezoelectric substrate is bonded to the surrogate substrate through a compression force sufficient for providing a bonding at a normal temperature.

摘要翻译： SAW滤波器包括铌酸锂的压电基片或任选的具有至少两倍声波长的厚度的钽酸锂。 压电基板被接合到硅材料的替代基板上。 代用衬底的特征在于至少100欧姆 - 厘米的电阻率和与压电基片相容的膨胀系数。 压电基片与替代基片之间的催化接合膜由沉积在压电基片的表面上的第一催化接合膜和沉积在代理基片的表面上的第二催化接合膜形成。 压电基板通过足以在常温下提供粘合的压缩力粘合到替代基板上。

公开(公告)号：US06661313B2

公开(公告)日：2003-12-09

申请号：US10003060

申请日：2001-10-25

申请人： Natalya F. Naumenko ,  Benjamin P. Abbott

发明人： Natalya F. Naumenko ,  Benjamin P. Abbott

IPC分类号： H03H964

CPC分类号： H03H9/02559

摘要： A surface acoustic wave device includes a piezoelectric substrate of a single crystal LiNbO3 and an electrode pattern provided on a surface of the piezoelectric substrate which forms a resonator having an electrode thickness in a range of about 0.1% to about 8% of an acoustic wavelength of a surface acoustic wave excited on the surface of the substrate. The piezoelectric substrate has an orientation defined by Euler angles (&lgr;,&mgr;,&thgr;), with angle &lgr; in a range from −20° to +20°, angle &mgr; in a range from about −45° to about −10°, and angle &thgr; in a range from about (−1.16&lgr;−1.5)° to (−1.16&lgr;+1.5)°, wherein one of angle &lgr; and &thgr; is not equal to zero degrees. Such orientations simultaneously combined with an optimized propagation loss at resonant and anti-resonant frequencies provide for improved performance in RF applications.

摘要翻译： 表面声波装置包括单晶LiNbO 3的压电基片和设置在压电基片的表面上的电极图案，该电极图形成电极厚度在声波波长的约0.1％至约8％的范围内的谐振器 在衬底的表面上激发表面声波。 压电衬底具有由欧拉角（λ，μ，θ）限定的取向，角度λ在-20°至+ 20°的范围内，角度μ在约-45°至约-10°的范围内;以及 角度θ在约（-1.16λ-1.5）°至（-1.16λ+ 1.5）°的范围内，其中角度λ和θ之一不等于零度。 同时与谐振和反谐振频率下的优化传播损耗相结合的这种取向提供了射频应用中改进的性能。