Method of stacking chips with a removable connecting layer
    2.
    发明授权
    Method of stacking chips with a removable connecting layer 失效
    用可拆卸连接层堆叠芯片的方法

    公开(公告)号:US6040204A

    公开(公告)日:2000-03-21

    申请号:US143309

    申请日:1998-08-28

    CPC分类号: H01L25/50 H01L2924/0002

    摘要: A method for manufacturing chip stacks in which wafers are stacked one on top of the other. The wafer is provided with an adhesive foil on its bottom, and is subsequently cut into chips so that the adhesive foil remains intact and the chips adhering to the adhesive foil are stacked one on top of the other. A first layer of chips is reversibly attached to a baseplate, the adhesive foil is removed, the next layer of chips is attached to the bottom side of the chips already fastened to the baseplate, the adhesive foil is removed, and the last two steps are repeated until the desired number of chips is stacked one on top of the other.

    摘要翻译: 一种制造芯片堆叠的方法,其中晶片彼此层叠。 晶片在其底部设置有粘合剂箔,随后被切割成芯片,使得粘合箔保持完整,并且粘附到粘合剂箔的芯片一个堆叠在另一个之上。 第一层芯片可逆地连接到基板上,去除粘合箔,下一层芯片附着到已经固定在基板上的芯片的底部,去除粘合箔,最后两个步骤是 重复直到所需数量的芯片堆叠在另一个之上。