Refractory metal substrate with improved thermal conductivity
    1.
    发明申请
    Refractory metal substrate with improved thermal conductivity 有权
    具有改善导热性的耐火金属基材

    公开(公告)号:US20060091552A1

    公开(公告)日:2006-05-04

    申请号:US10978940

    申请日:2004-11-01

    IPC分类号: H01L23/48

    摘要: A substrate for semiconductor and integrated circuit components including: a core plate containing a Group VIB metal from the periodic table of the elements and/or an anisotropic material, having a first major surface and a second major surface and a plurality of openings extending, at least partially, from the first major surface to the second major surface; and a Group IB metal from the periodic table of the elements or other high thermally conductive material filling at least a portion of the space encompassed by at least some of the openings; and optionally, a layer containing a Group IB metal from the periodic table or other high thermally conductive material disposed over at least a portion of the first major surface and at least a portion of the second major surface. The substrate can be used in electronic devices, which can also include one or more semiconductor components.

    摘要翻译: 一种用于半导体和集成电路部件的衬底,包括:含有来自元件的周期表的VIB族金属和/或各向异性材料的芯板,具有第一主表面和第二主表面,以及多个开口, 最少部分地从第一主表面到第二主表面; 和来自元件周期表的IB族金属或其它高导​​热材料填充由至少一些开口包围的空间的至少一部分; 以及任选地,包含来自周期表的IB族金属或设置在第一主表面的至少一部分和第二主表面的至少一部分上的其它高导热材料的层。 该基板可用于电子设备中,其也可包括一个或多个半导体部件。