摘要:
Provided is a gas sensor that needs no temperature sensor for detecting a temperature of a heater for preventing dew condensation. The gas sensor comprises a hydrogen sensor 1 including: an element housing 13 having a detection chamber 13a to which hydrogen is introduced; a detection element 31 arranged in the detection chamber 13a and detecting hydrogen; a heater 21 for heating the detection chamber 13a by heat generation via passing an electric current through the heater 21, a resistance value of the heater 21 being changed corresponding to a temperature of the detection chamber 13a; and a microcomputer 51 and a heater operation circuit 52 for controlling the heater 21. Herein, the microcomputer 51 controls a temperature of the detection chamber 13a by adjusting the electric current passing through the heater 21 based on the resistance value of the heater 21.
摘要:
A mask pattern design method includes: dividing design layout data for a pattern into multiple regions and extracting any region wherein transfer dimensions obtained from a transfer simulation of the pattern from the plurality of regions exceeds a predetermined allowance range; setting a process window of which multiple transfer conditions of the pattern data from the region extracted by the process are each changed, and computing transfer dimensions obtained from a transfer simulation with each transfer condition with the process window; and extracting the transfer conditions wherein the transfer dimension obtained from the transfer simulation with each transfer condition with the process window exceeds a predetermined allowance range, and computing yield from an occurrence probability regarding the transfer condition.
摘要:
A gas sensor includes a gas detection chamber into which a detection gas is introduced, a detecting element and a compensating element each disposed in the gas detection chamber, a detection device which detects the concentration of a detection target gas contained in the detection gas, in accordance with a difference in electrical resistance values between the detecting element and the compensating element, and a dehumidifying element which is provided in the gas detection chamber, and reversibly absorbs water contained in the detection gas and drains off the water absorbed in the dehumidifying element.
摘要:
This gas sensor is provided with: a detection element that measures a gas concentration of a detection target gas contained in an examination gas; a substrate having a heating element; and a supporting member that is fixed to the substrate, protrudes from the heating element, and supports the detection element.
摘要:
The gas detecting system of the present invention is equipped with a catalytic combustion type gas sensor 1a and a semiconductor type gas sensor 1b, in a gas detecting system 1 having an operating sate in which generation of electricity is performed, and an idling state, at the time of the operating state, detection of the detection target gas is performed by the catalytic combustion type gas sensor 1a, whereas at the time of the idling state, detection of the detection target gas is performed by the semiconductor type gas sensor 1b.
摘要:
In order to reduce the bulk and weight of the upper igniter case division of an armor case, and to lower the center of gravity of the total apparatus so as to provide an igniter which is tough to oscillate, the igniter for the internal combustion engine has the armor case equipped with a coil compartment and igniter unit. The armor case has the igniter case having the coil case and connector. Furthermore, the coil compartment case is inserted in the plug hole of the internal combustion engine. The igniter unit is mounted in the igniter case. Furthermore, the igniter unit has a semiconductor device of a single substance silicon chip having integrated therein a semi-conductor for switching and a current limiting circuitry. The semi-conductor for switching consists of an insulated bipolar transistor (IGBT) or a power transistor.
摘要:
A simple gas sensor for detecting a concentration of a detected gas with high accuracy, in which a thermal interference can hardly occur between a normal detection element pair and a reference detection element pair, is provided.
摘要:
The gas sensor includes: a cylindrical member which includes a gas detection chamber therein and extends along an axial thereof; a base member which closes an opening of a first axial end of the cylindrical member; a status sensor which is disposed at a substantially central portion of the base member, and detects at least the temperature or the humidity in the gas detection chamber; a gas detection element disposed around the status sensor on the base member; a lid member which closes an opening of a second axial end of the cylindrical member; and a gas inlet port which penetrates the lid member at a location not coinciding with the status sensor and the gas detection element when seen from the axial direction, and enables the introduction of an inspection target gas from an outside into the gas detection chamber.
摘要:
The present invention provides a mask pattern correction program for correcting a design pattern which serves as a source to form a mask pattern so that, by exposure of a mask with a pattern formed thereon onto a substrate, the mask pattern is transferred as designed, the mask pattern correction program including performing, on a computer, the steps of: determining, before simulation of the dimension of the pattern transferred by exposure, whether the simulation result will converge; and classifying design pattern edges into first and second target edges, correct the first target edges and perform simulation thereon if it is determined that the simulation result will not converge.
摘要:
This gas sensor is provided with: a detection element that measures a gas concentration of a detection target gas contained in an examination gas; a substrate having a heating element; and a supporting member that is fixed to the substrate, protrudes from the heating element, and supports the detection element.