Gas sensor
    1.
    发明授权
    Gas sensor 有权
    气体传感器

    公开(公告)号:US09017612B2

    公开(公告)日:2015-04-28

    申请号:US13463188

    申请日:2012-05-03

    摘要: Provided is a gas sensor that needs no temperature sensor for detecting a temperature of a heater for preventing dew condensation. The gas sensor comprises a hydrogen sensor 1 including: an element housing 13 having a detection chamber 13a to which hydrogen is introduced; a detection element 31 arranged in the detection chamber 13a and detecting hydrogen; a heater 21 for heating the detection chamber 13a by heat generation via passing an electric current through the heater 21, a resistance value of the heater 21 being changed corresponding to a temperature of the detection chamber 13a; and a microcomputer 51 and a heater operation circuit 52 for controlling the heater 21. Herein, the microcomputer 51 controls a temperature of the detection chamber 13a by adjusting the electric current passing through the heater 21 based on the resistance value of the heater 21.

    摘要翻译: 提供了一种气体传感器,其不需要用于检测用于防止结露的加热器的温度的温度传感器。 气体传感器包括氢传感器1,其包括:具有引入氢的检测室13a的元件壳体13; 布置在检测室13a中并检测氢的检测元件31; 用于通过使电流通过加热器21通过发热而加热检测室13a的加热器21,加热器21的电阻值根据检测室13a的温度而变化; 以及用于控制加热器21的微计算机51和加热器操作电路52.这里,微型计算机51通过基于加热器21的电阻值调节通过加热器21的电流来控制检测室13a的温度。

    MASK PATTERN DESIGN METHOD AND SEMICONDUCTOR MANUFACTURING METHOD AND SEMICONDUCTOR DESIGN PROGRAM
    2.
    发明申请
    MASK PATTERN DESIGN METHOD AND SEMICONDUCTOR MANUFACTURING METHOD AND SEMICONDUCTOR DESIGN PROGRAM 有权
    掩模图案设计方法和半导体制造方法及半导体设计方案

    公开(公告)号:US20080256504A1

    公开(公告)日:2008-10-16

    申请号:US12099928

    申请日:2008-04-09

    IPC分类号: G06F17/50

    CPC分类号: G03F1/144 G03F1/36 G03F7/705

    摘要: A mask pattern design method includes: dividing design layout data for a pattern into multiple regions and extracting any region wherein transfer dimensions obtained from a transfer simulation of the pattern from the plurality of regions exceeds a predetermined allowance range; setting a process window of which multiple transfer conditions of the pattern data from the region extracted by the process are each changed, and computing transfer dimensions obtained from a transfer simulation with each transfer condition with the process window; and extracting the transfer conditions wherein the transfer dimension obtained from the transfer simulation with each transfer condition with the process window exceeds a predetermined allowance range, and computing yield from an occurrence probability regarding the transfer condition.

    摘要翻译: 掩模图案设计方法包括:将图案的设计布局数据划分为多个区域,并提取从多个区域的图案的传输模拟获得的传送尺寸超过预定容许范围的任何区域; 设置从该处理提取的区域的图形数据的多个传送条件各自变化的处理窗口,以及利用处理窗口对每个传送条件的传送模拟计算传送尺寸; 并且提取转移条件,其中利用处理窗口的每个转移条件从转移模拟获得的转移维度超过预定允许范围,并且根据关于转移条件的发生概率计算收益率。

    Gas sensor and control method therefor
    3.
    发明授权
    Gas sensor and control method therefor 失效
    气体传感器及其控制方法

    公开(公告)号:US07418855B2

    公开(公告)日:2008-09-02

    申请号:US11212553

    申请日:2005-08-25

    IPC分类号: G01N25/18

    摘要: A gas sensor includes a gas detection chamber into which a detection gas is introduced, a detecting element and a compensating element each disposed in the gas detection chamber, a detection device which detects the concentration of a detection target gas contained in the detection gas, in accordance with a difference in electrical resistance values between the detecting element and the compensating element, and a dehumidifying element which is provided in the gas detection chamber, and reversibly absorbs water contained in the detection gas and drains off the water absorbed in the dehumidifying element.

    摘要翻译: 气体传感器包括:气体检测室,其中引入检测气体;检测元件和补偿元件,每个设置在气体检测室中;检测装置,其检测检测气体中包含的检测目标气体的浓度; 根据检测元件和补偿元件之间的电阻值的差异,以及设置在气体检测室中的除湿元件,并且可逆地吸收检测气体中包含的水并排出除湿元件中吸收的水。

    Gas detecting apparatus, gas detecting method and fuel cell vehicle
    5.
    发明授权
    Gas detecting apparatus, gas detecting method and fuel cell vehicle 失效
    气体检测装置,气体检测方法和燃料电池车辆

    公开(公告)号:US07269993B2

    公开(公告)日:2007-09-18

    申请号:US11165714

    申请日:2005-06-23

    IPC分类号: G01N7/00

    摘要: The gas detecting system of the present invention is equipped with a catalytic combustion type gas sensor 1a and a semiconductor type gas sensor 1b, in a gas detecting system 1 having an operating sate in which generation of electricity is performed, and an idling state, at the time of the operating state, detection of the detection target gas is performed by the catalytic combustion type gas sensor 1a, whereas at the time of the idling state, detection of the detection target gas is performed by the semiconductor type gas sensor 1b.

    摘要翻译: 本发明的气体检测系统配备有催化燃烧式气体传感器1a和半导体型气体传感器1b,该气体检测系统1具有进行发电的操作状态和空转状态 在操作状态下,由催化燃烧式气体传感器1a进行检测对象气体的检测,而在空转状态下,由半导体型气体传感器进行检测对象气体的检测 1 b。

    GAS SENSOR
    8.
    发明申请
    GAS SENSOR 有权
    气体传感器

    公开(公告)号:US20110023580A1

    公开(公告)日:2011-02-03

    申请号:US12937646

    申请日:2009-04-15

    IPC分类号: G01N7/00

    摘要: The gas sensor includes: a cylindrical member which includes a gas detection chamber therein and extends along an axial thereof; a base member which closes an opening of a first axial end of the cylindrical member; a status sensor which is disposed at a substantially central portion of the base member, and detects at least the temperature or the humidity in the gas detection chamber; a gas detection element disposed around the status sensor on the base member; a lid member which closes an opening of a second axial end of the cylindrical member; and a gas inlet port which penetrates the lid member at a location not coinciding with the status sensor and the gas detection element when seen from the axial direction, and enables the introduction of an inspection target gas from an outside into the gas detection chamber.

    摘要翻译: 气体传感器包括:圆柱形构件,其中包括气体检测室并沿其轴向延伸; 封闭所述圆筒形构件的第一轴向端部的开口的基座构件; 状态传感器,其设置在所述基部构件的大致中央部,并且至少检测所述气体检测室中的温度或湿度; 设置在所述基座部件上的所述状态传感器周围的气体检测元件; 封闭所述圆筒形构件的第二轴向端部的开口的盖构件; 以及气体导入口,其从轴向观察时,在与状态传感器和气体检测元件不一致的位置处贯通盖构件,并且能够将来自外部的检查对象气体引入到气体检测室。

    Mask pattern correction program and system
    9.
    发明授权
    Mask pattern correction program and system 有权
    掩模图案校正程序和系统

    公开(公告)号:US07844939B2

    公开(公告)日:2010-11-30

    申请号:US11939223

    申请日:2007-11-13

    CPC分类号: G03F1/36

    摘要: The present invention provides a mask pattern correction program for correcting a design pattern which serves as a source to form a mask pattern so that, by exposure of a mask with a pattern formed thereon onto a substrate, the mask pattern is transferred as designed, the mask pattern correction program including performing, on a computer, the steps of: determining, before simulation of the dimension of the pattern transferred by exposure, whether the simulation result will converge; and classifying design pattern edges into first and second target edges, correct the first target edges and perform simulation thereon if it is determined that the simulation result will not converge.

    摘要翻译: 本发明提供一种掩模图案校正程序,用于校正用作源的设计图案以形成掩模图案,使得通过将其上形成有图案的掩模曝光在基板上,掩模图案按照设计传送, 掩模图案校正程序,包括在计算机上执行以下步骤:在模拟通过曝光传送的图案的尺寸之前,确定模拟结果是否会收敛; 并且将设计图案边缘分类为第一和第二目标边缘,如果确定模拟结果不会收敛,则校正第一目标边缘并对其进行仿真。