-
公开(公告)号:US20120235055A1
公开(公告)日:2012-09-20
申请号:US13513256
申请日:2010-11-15
IPC分类号: H01J3/28
CPC分类号: G21K1/00 , H01J37/1478 , H01J37/3056 , H01J2237/0458 , H01J2237/31745
摘要: Disclosed is an operation for an optical system which achieves observation of focused ion beam processing equivalent to that in a case wherein a sample stage is tilted mechanically. In a focused ion beam optical system, an aperture, a tilting deflector, a beam scanner, and an objective lens are controlled so as to irradiate an ion beam tilted to the optical axis of the optical system, thereby achieving thin film processing and a cross section processing without accompanying adjustment and operation for a sample stage. The thin film processing and the cross section processing with a focused ion beam can be automated, and yield can be improved. For example, by applying the present invention to a cross section monitor to detect an end point, the cross section processing can be easily automated.
摘要翻译: 公开了一种光学系统的操作,其实现了与样品台机械倾斜的情况相当的聚焦离子束处理的观察。 在聚焦离子束光学系统中,控制孔径,倾斜偏转器,光束扫描器和物镜,以照射倾斜到光学系统的光轴的离子束,由此实现薄膜处理和交叉 部分处理,而不需要对样品台进行调整和操作。 利用聚焦离子束的薄膜处理和横截面加工可以自动化,并且可以提高收率。 例如,通过将本发明应用于截面监视器来检测终点,可以容易地自动化横截面处理。
-
公开(公告)号:US08552397B2
公开(公告)日:2013-10-08
申请号:US13513256
申请日:2010-11-15
CPC分类号: G21K1/00 , H01J37/1478 , H01J37/3056 , H01J2237/0458 , H01J2237/31745
摘要: Disclosed is an operation for an optical system which achieves observation of focused ion beam processing equivalent to that in a case wherein a sample stage is tilted mechanically. In a focused ion beam optical system, an aperture, a tilting deflector, a beam scanner, and an objective lens are controlled so as to irradiate an ion beam tilted to the optical axis of the optical system, thereby achieving thin film processing and a cross section processing without accompanying adjustment and operation for a sample stage. The thin film processing and the cross section processing with a focused ion beam can be automated, and yield can be improved. For example, by applying the present invention to a cross section monitor to detect an end point, the cross section processing can be easily automated.
摘要翻译: 公开了一种光学系统的操作,其实现了与样品台机械倾斜的情况相当的聚焦离子束处理的观察。 在聚焦离子束光学系统中,控制孔径,倾斜偏转器,光束扫描器和物镜,以照射倾斜到光学系统的光轴的离子束,由此实现薄膜处理和交叉 部分处理,而不需要对样品台进行调整和操作。 利用聚焦离子束的薄膜处理和横截面加工可以自动化,并且可以提高收率。 例如,通过将本发明应用于截面监视器来检测终点,可以容易地自动化横截面处理。
-