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公开(公告)号：US20120235055A1
公开(公告)日：2012-09-20
申请号：US13513256
申请日：2010-11-15
IPC分类号： H01J3/28
CPC分类号： G21K1/00 , H01J37/1478 , H01J37/3056 , H01J2237/0458 , H01J2237/31745
摘要： Disclosed is an operation for an optical system which achieves observation of focused ion beam processing equivalent to that in a case wherein a sample stage is tilted mechanically. In a focused ion beam optical system, an aperture, a tilting deflector, a beam scanner, and an objective lens are controlled so as to irradiate an ion beam tilted to the optical axis of the optical system, thereby achieving thin film processing and a cross section processing without accompanying adjustment and operation for a sample stage. The thin film processing and the cross section processing with a focused ion beam can be automated, and yield can be improved. For example, by applying the present invention to a cross section monitor to detect an end point, the cross section processing can be easily automated.
摘要翻译： 公开了一种光学系统的操作，其实现了与样品台机械倾斜的情况相当的聚焦离子束处理的观察。 在聚焦离子束光学系统中，控制孔径，倾斜偏转器，光束扫描器和物镜，以照射倾斜到光学系统的光轴的离子束，由此实现薄膜处理和交叉 部分处理，而不需要对样品台进行调整和操作。 利用聚焦离子束的薄膜处理和横截面加工可以自动化，并且可以提高收率。 例如，通过将本发明应用于截面监视器来检测终点，可以容易地自动化横截面处理。
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公开(公告)号：US08552397B2
公开(公告)日：2013-10-08
申请号：US13513256
申请日：2010-11-15
CPC分类号： G21K1/00 , H01J37/1478 , H01J37/3056 , H01J2237/0458 , H01J2237/31745
摘要： Disclosed is an operation for an optical system which achieves observation of focused ion beam processing equivalent to that in a case wherein a sample stage is tilted mechanically. In a focused ion beam optical system, an aperture, a tilting deflector, a beam scanner, and an objective lens are controlled so as to irradiate an ion beam tilted to the optical axis of the optical system, thereby achieving thin film processing and a cross section processing without accompanying adjustment and operation for a sample stage. The thin film processing and the cross section processing with a focused ion beam can be automated, and yield can be improved. For example, by applying the present invention to a cross section monitor to detect an end point, the cross section processing can be easily automated.
摘要翻译： 公开了一种光学系统的操作，其实现了与样品台机械倾斜的情况相当的聚焦离子束处理的观察。 在聚焦离子束光学系统中，控制孔径，倾斜偏转器，光束扫描器和物镜，以照射倾斜到光学系统的光轴的离子束，由此实现薄膜处理和交叉 部分处理，而不需要对样品台进行调整和操作。 利用聚焦离子束的薄膜处理和横截面加工可以自动化，并且可以提高收率。 例如，通过将本发明应用于截面监视器来检测终点，可以容易地自动化横截面处理。
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3.发明申请SPECIMEN PREPARATION DEVICE, AND CONTROL METHOD IN SPECIMEN PREPARATION DEVICE 失效样品制备装置，以及样品制备装置中的控制方法公开(公告)号：US20110309245A1
公开(公告)日：2011-12-22
申请号：US13203807
申请日：2009-10-23
CPC分类号： G01N1/286
摘要： Separation and the like of an excised specimen from a specimen are automatically performed. Marks for improving image recognition accuracy are provided in a region that becomes an excised specimen in a specimen and a region other than said region, or in a transfer means for transferring the excised specimen and a specimen holder capable of holding the excised specimen, and the relative movement of the excised specimen and the specimen, and the like are recognized with high accuracy by image recognition. In the sampling of a minute specimen using a focused ion beam, the detection of an end point of processing for separation of the excised specimen from the specimen, and the like are automatically performed. Thus, for example, unmanned specimen excision becomes possible, and preparation of a lot of specimens becomes possible.
摘要翻译： 自动进行切片样品与试样的分离等。 在成为试样和除了所述区域以外的区域的切除试样的区域中，或者在用于转移切除的试样的转移装置和能够保持切除的试样的试样保持器的区域中提供用于提高图像识别精度的标记， 通过图像识别以高精度识别切除的样本和样本的相对运动等。 在使用聚焦离子束对分钟标本的取样中，自动执行用于将切出的样品与试样分离的处理终点的检测等。 因此，例如，无人标本切除成为可能，并且可以制备大量标本。
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4.发明授权Specimen preparation device, and control method in specimen preparation device 失效样品制备装置及样品制备装置的控制方法公开(公告)号：US08710464B2
公开(公告)日：2014-04-29
申请号：US13203807
申请日：2009-10-23
IPC分类号： G21K5/08
CPC分类号： G01N1/286
摘要： Separation and the like of an excised specimen from a specimen are automatically performed. Marks for improving image recognition accuracy are provided in a region that becomes an excised specimen in a specimen and a region other than said region, or in a transfer means for transferring the excised specimen and a specimen holder capable of holding the excised specimen, and the relative movement of the excised specimen and the specimen, and the like are recognized with high accuracy by image recognition. In the sampling of a minute specimen using a focused ion beam, the detection of an end point of processing for separation of the excised specimen from the specimen, and the like are automatically performed. Thus, for example, unmanned specimen excision becomes possible, and preparation of a lot of specimens becomes possible.
摘要翻译： 自动进行切片样品与试样的分离等。 在成为试样和除了所述区域以外的区域的切除试样的区域中，或者在用于转移切除的试样的转移装置和能够保持切除的试样的试样保持器的区域中提供用于提高图像识别精度的标记， 通过图像识别以高精度识别切除的样本和样本的相对运动等。 在使用聚焦离子束对分钟标本的取样中，自动执行用于将切出的样品与试样分离的处理终点的检测等。 因此，例如，无人标本切除成为可能，并且可以制备大量标本。
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公开(公告)号：US08610060B2
公开(公告)日：2013-12-17
申请号：US13202554
申请日：2009-10-23
申请人： Suyo Asai , Tsuyoshi Onishi , Toshihide Agemura
发明人： Suyo Asai , Tsuyoshi Onishi , Toshihide Agemura
CPC分类号： H01J37/244 , H01J37/265 , H01J37/28 , H01J2237/024 , H01J2237/24455 , H01J2237/24475
摘要： An object of the present invention is related to detecting of a detection signal at an optimum position in such a case that a sample plane is inclined with respect to a charged particle beam.The present invention is related to a charged particle beam apparatus for irradiating a charged particle beam to a sample, in which a detector is moved to a plurality of desirable positions around the sample so as to optimize positions of the detector. In accordance with the present invention, since it is possible to obtain an optimum detection signal in response to an attitude and a shape of the sample, a highly accurate sample observation, for instance, an SEM observation, an STEM observation, and an FIB observation can be carried out. Moreover, in an FIB-SEM apparatus, it is possible to highly accurately detect an end point of an FIB process.
摘要翻译： 本发明的目的是在样品平面相对于带电粒子束倾斜的情况下，在最佳位置检测检测信号。 本发明涉及一种用于将带电粒子束照射到样品的带电粒子束装置，其中检测器移动到样品周围的多个期望位置，以便优化检测器的位置。 根据本发明，由于可以根据样品的姿态和形状获得最佳检测信号，所以可以进行高精度的样本观察，例如SEM观察，STEM观察和FIB观察 可以进行 此外，在FIB-SEM装置中，可以高精度地检测FIB处理的终点。
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公开(公告)号：US20110297827A1
公开(公告)日：2011-12-08
申请号：US13202554
申请日：2009-10-23
申请人： Suyo Asai , Tsuyoshi Onishi , Toshihide Agemura
发明人： Suyo Asai , Tsuyoshi Onishi , Toshihide Agemura
CPC分类号： H01J37/244 , H01J37/265 , H01J37/28 , H01J2237/024 , H01J2237/24455 , H01J2237/24475
摘要： An object of the present invention is related to detecting of a detection signal at an optimum position in such a case that a sample plane is inclined with respect to a charged particle beam.The present invention is related to a charged particle beam apparatus for irradiating a charged particle beam to a sample, in which a detector is moved to a plurality of desirable positions around the sample so as to optimize positions of the detector. In accordance with the present invention, since it is possible to obtain an optimum detection signal in response to an attitude and a shape of the sample, a highly accurate sample observation, for instance, an SEM observation, an STEM observation, and an FIB observation can be carried out. Moreover, in an FIB-SEM apparatus, it is possible to highly accurately detect an end point of an FIB process.
摘要翻译： 本发明的目的是在样品平面相对于带电粒子束倾斜的情况下，在最佳位置检测检测信号。 本发明涉及一种用于将带电粒子束照射到样品的带电粒子束装置，其中检测器移动到样品周围的多个期望位置，以便优化检测器的位置。 根据本发明，由于可以根据样品的姿态和形状获得最佳检测信号，所以可以进行高精度的样本观察，例如SEM观察，STEM观察和FIB观察 可以进行 此外，在FIB-SEM装置中，可以高精度地检测FIB处理的终点。
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公开(公告)号：US07058271B2
公开(公告)日：2006-06-06
申请号：US11075441
申请日：2005-03-09
IPC分类号： G02B6/028
CPC分类号： G02B6/02038 , G02B6/03627
摘要： A plastic optical fiber low in attenuation in a high order mode and small in mode dispersion, is presented. The plastic optical fiber comprises at least a core and a clad surrounding the core, characterized in that the core has a refractive index which gradually decreases from the core center towards the outside in the radial direction of the plastic optical fiber, and the refractive index of the clad is lower than the refractive index of the core center and higher than the refractive index of the core periphery.
摘要翻译： 提出了一种高阶模式衰减量小，模式色散小的塑料光纤。 所述塑料光纤至少包括芯和围绕所述芯的包层，其特征在于，所述芯的折射率在塑料光纤的径向方向上从芯心中心向外逐渐减小，折射率 包层低于芯心的折射率，高于芯周的折射率。
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公开(公告)号：US08680465B2
公开(公告)日：2014-03-25
申请号：US13498994
申请日：2010-10-12
IPC分类号： H01J37/26
CPC分类号： H01J37/3005 , H01J37/244 , H01J37/28 , H01J37/3056 , H01J2237/24475 , H01J2237/24578 , H01J2237/3174
摘要： A charged particle beam apparatus of the present invention comprises a transmission electron detector (113; 206) having a detection portion divided into multiple regions (201 to 205; 301 to 305), wherein a film thickness of a sample is calculated by detecting a transmission electron beam (112) generated from the sample when the sample is irradiated with an electron beam (109), as a signal of each of the regions in accordance with scattering angles of the transmission electron beam, and thereafter calculating the intensities of the individual signals. According to the above, there is provided a charged particle beam apparatus capable of performing accurate film thickness monitoring while suppressing an error due to an external condition and also capable of processing a thin film sample into a sample having an accurate film thickness, which makes it possible to improve the accuracy in structure observations, element analyses and the like.
摘要翻译： 本发明的带电粒子束装置包括具有分成多个区域（201〜205; 301〜305）的检测部的透射电子检测器（113; 206），其中通过检测透射率来计算样品的膜厚度 当用电子束（109）照射样品时从样品产生的电子束（112）作为根据透射电子束的散射角的每个区域的信号，然后计算各个信号的强度 。 根据上述，提供了一种能够在抑制由于外部条件引起的误差的同时进行精确的膜厚度监测并且还能够将薄膜样品加工成具有精确膜厚度的样品的带电粒子束装置，这使得它 可能提高结构观察，元素分析等方面的准确性。
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公开(公告)号：US20130032714A1
公开(公告)日：2013-02-07
申请号：US13641211
申请日：2011-04-12
IPC分类号： H01J37/02
CPC分类号： H01J37/3056 , H01J37/304 , H01J2237/208 , H01J2237/31745
摘要： There is provided an apparatus and a method capable of preparing a standardized probe without need for working skill of probe processing. According to the present invention, a probe shape generation process of detecting a probe shape based on the probe incoming current detected by a probe current detection unit, a probe tip coordinate extraction process of detecting a tip position of the probe from the probe shape, a probe contour line extraction process of generating a probe contour line obtained by approximating a contour of the probe from the tip position of the probe and the probe shape, a probe center line extraction process of generating a center line and a vertical line of the probe from the probe contour line, a processing pattern generation process of generating a processing pattern based on the probe tip position, the probe center line, the probe vertical line, and a preset shape and dimension of a probe acute part, and an ion beam termination process of performing, based on the processing pattern, termination of ion-beam processing are performed.
摘要翻译： 提供了一种能够准备标准化探针而不需要探头处理工作技能的装置和方法。 根据本发明，根据由探针电流检测单元检测到的探针入射电流来检测探针形状的探针形状生成处理，从探针形状检测探针的末端位置的探针尖端坐标提取处理， 探针轮廓线提取处理，其生成通过从探针的尖端位置和探针形状近似探针的轮廓而获得的探针轮廓线;探针中心线提取处理，用于产生探针的中心线和垂直线 探针轮廓线，基于探针尖端位置，探针中心线，探针垂直线以及探针尖锐部分的预设形状和尺寸产生处理图案的处理图案生成处理以及离子束终止处理 基于处理模式执行离子束处理的终止。
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公开(公告)号：US20050207714A1
公开(公告)日：2005-09-22
申请号：US11075441
申请日：2005-03-09
CPC分类号： G02B6/02038 , G02B6/03627
摘要： A plastic optical fiber low in attenuation in a high order mode and small in mode dispersion, is presented. The plastic optical fiber comprises at least a core and a clad surrounding the core, characterized in that the core has a refractive index which gradually decreases from the core center towards the outside in the radial direction of the plastic optical fiber, and the refractive index of the clad is lower than the refractive index of the core center and higher than the refractive index of the core periphery.
摘要翻译： 提出了一种高阶模式衰减量小，模式色散小的塑料光纤。 所述塑料光纤至少包括芯和围绕所述芯的包层，其特征在于，所述芯具有从所述芯中心向所述塑料光纤的径向方向逐渐减小的折射率，并且所述折射率 包层低于芯心的折射率，高于芯周的折射率。
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