公开(公告)号：US20120235055A1

公开(公告)日：2012-09-20

申请号：US13513256

申请日：2010-11-15

申请人： Yuichi Madokoro ,  Hirokazu Kaneoya ,  Tsuyoshi Onishi ,  Isamu Sekihara

发明人： Yuichi Madokoro ,  Hirokazu Kaneoya ,  Tsuyoshi Onishi ,  Isamu Sekihara

IPC分类号： H01J3/28

CPC分类号： G21K1/00 ,  H01J37/1478 ,  H01J37/3056 ,  H01J2237/0458 ,  H01J2237/31745

摘要： Disclosed is an operation for an optical system which achieves observation of focused ion beam processing equivalent to that in a case wherein a sample stage is tilted mechanically. In a focused ion beam optical system, an aperture, a tilting deflector, a beam scanner, and an objective lens are controlled so as to irradiate an ion beam tilted to the optical axis of the optical system, thereby achieving thin film processing and a cross section processing without accompanying adjustment and operation for a sample stage. The thin film processing and the cross section processing with a focused ion beam can be automated, and yield can be improved. For example, by applying the present invention to a cross section monitor to detect an end point, the cross section processing can be easily automated.

摘要翻译： 公开了一种光学系统的操作，其实现了与样品台机械倾斜的情况相当的聚焦离子束处理的观察。 在聚焦离子束光学系统中，控制孔径，倾斜偏转器，光束扫描器和物镜，以照射倾斜到光学系统的光轴的离子束，由此实现薄膜处理和交叉 部分处理，而不需要对样品台进行调整和操作。 利用聚焦离子束的薄膜处理和横截面加工可以自动化，并且可以提高收率。 例如，通过将本发明应用于截面监视器来检测终点，可以容易地自动化横截面处理。

公开(公告)号：US08552397B2

公开(公告)日：2013-10-08

申请号：US13513256

申请日：2010-11-15

申请人： Yuichi Madokoro ,  Hirokazu Kaneoya ,  Tsuyoshi Onishi ,  Isamu Sekihara

发明人： Yuichi Madokoro ,  Hirokazu Kaneoya ,  Tsuyoshi Onishi ,  Isamu Sekihara

IPC分类号： H01J3/28 ,  G21K1/00

CPC分类号： G21K1/00 ,  H01J37/1478 ,  H01J37/3056 ,  H01J2237/0458 ,  H01J2237/31745

摘要： Disclosed is an operation for an optical system which achieves observation of focused ion beam processing equivalent to that in a case wherein a sample stage is tilted mechanically. In a focused ion beam optical system, an aperture, a tilting deflector, a beam scanner, and an objective lens are controlled so as to irradiate an ion beam tilted to the optical axis of the optical system, thereby achieving thin film processing and a cross section processing without accompanying adjustment and operation for a sample stage. The thin film processing and the cross section processing with a focused ion beam can be automated, and yield can be improved. For example, by applying the present invention to a cross section monitor to detect an end point, the cross section processing can be easily automated.

摘要翻译： 公开了一种光学系统的操作，其实现了与样品台机械倾斜的情况相当的聚焦离子束处理的观察。 在聚焦离子束光学系统中，控制孔径，倾斜偏转器，光束扫描器和物镜，以照射倾斜到光学系统的光轴的离子束，由此实现薄膜处理和交叉 部分处理，而不需要对样品台进行调整和操作。 利用聚焦离子束的薄膜处理和横截面加工可以自动化，并且可以提高收率。 例如，通过将本发明应用于截面监视器来检测终点，可以容易地自动化横截面处理。