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公开(公告)号:US06548412B2
公开(公告)日:2003-04-15
申请号:US10098316
申请日:2002-03-18
申请人: Hiroshi Fudoji , Mikihiko Kobayashi , Norio Shinya
发明人: Hiroshi Fudoji , Mikihiko Kobayashi , Norio Shinya
IPC分类号: H01L21311
摘要: A novel patterned thin film forming method is capable of realizing formation of nanometer-scale patterned thin films with high controllability by an easy and low-cost process. To form a patterned thin film on an insulating substrate in a precursor solution containing a film-forming substance, an electric charge pattern is formed on the insulating substrate, and then the insulating substrate is dipped in the precursor solution to deposit the film-forming substance on the electric charge pattern formed on the insulating substrate.
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公开(公告)号:US07323227B2
公开(公告)日:2008-01-29
申请号:US11349985
申请日:2006-02-09
IPC分类号: B05D1/04
CPC分类号: H01L24/95 , H01L21/4853 , H01L25/50 , H01L2224/95145 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/0102 , H01L2924/01033 , H01L2924/01074 , H01L2924/01082 , H01L2924/12042 , H05K3/3478 , H01L2924/00
摘要: A process for arranging a number of micro-bodies efficiently and precisely as one on one spot on a substrate.Charged spots are formed by a converging ion beam or the like on a substrate having an insulating property or the like, and micro-bodies having a size of 200 microns or less are attracted and stuck to the charged spots.
摘要翻译: 一种用于在基板上一个一个地高效且精确地布置多个微体的方法。 带电点由具有绝缘性等的基板上的会聚离子束等形成,并且具有200微米或更小尺寸的微体被吸引并粘附到带电点。
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公开(公告)号:US20050056793A1
公开(公告)日:2005-03-17
申请号:US10793896
申请日:2004-03-08
IPC分类号: H05K3/34 , B01J19/08 , G01N37/00 , G02F1/1339 , H01L21/48 , H01L21/98 , H01L23/12 , A61N5/00 , G21G5/00
CPC分类号: H01L24/95 , H01L21/4853 , H01L25/50 , H01L2224/95145 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/0102 , H01L2924/01033 , H01L2924/01074 , H01L2924/01082 , H01L2924/12042 , H05K3/3478 , H01L2924/00
摘要: A process for arranging a number of micro-bodies efficiently and precisely as one on one spot on a substrate. Charged spots are formed by a converging ion beam or the like on a substrate having an insulating property or the like, and micro-bodies having a size of 200 microns or less are attracted and stuck to the charged spots.
摘要翻译: 一种用于在基板上一个一个地高效且精确地布置多个微体的方法。 带电点由具有绝缘性等的基板上的会聚离子束等形成,并且具有200微米或更小尺寸的微体被吸引并粘附到带电点。
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公开(公告)号:US20110014380A1
公开(公告)日:2011-01-20
申请号:US12736275
申请日:2009-03-25
申请人: Hiroshi Fudoji , Tsutomu Sawada , Kenji Kitamura
发明人: Hiroshi Fudoji , Tsutomu Sawada , Kenji Kitamura
CPC分类号: G02B6/13 , B82Y20/00 , B82Y40/00 , G02B1/005 , G02B6/1225
摘要: The invention has for its object to provide an apparatus and process for fabricating an artificial opal film having a uniform thickness yet a large area, and provides an artificial opal film fabrication apparatus, in which a substrate (S1) coated with a suspension film (S2) having fine particles dispersed in it is located in a stage (10), and a dispersive medium of the suspension is evaporated off thereby crystallizing the fine particles to fabricate an artificial opal film, characterized by comprising a scraper (20) for adjusting the thickness of the suspension film, and a stage (10) that is movable relative thereto in a constant horizontal direction, wherein the substrate attached to that stage is positioned such that when the stage (10) moves horizontally, the thickness of the suspension film (S2) coated on that substrate (S1) and in an uncrystalliation state is controlled by the scraper (20), and crystallization by evaporation of the dispersive medium of the suspension is set off after the suspension film (S2) has passed the scraper (20). See FIG. 8.
摘要翻译: 本发明的目的是提供一种制造均匀厚度大面积的人造蛋白石薄膜的装置和方法,并提供一种人造蛋白石制造装置,其中涂覆有悬浮膜(S2 )分散在阶段(10)中,并将悬浮液的分散介质蒸发掉,从而使微细颗粒结晶以制造人造蛋白石膜,其特征在于包括用于调节厚度的刮刀(20) 和能够沿恒定水平方向相对于其移动的台架(10),其中安装在该台架上的基板定位成使得当台架(10)水平移动时,悬挂膜(S2 )并且处于非结晶状态的刮刀由刮刀(20)控制,通过蒸发悬浮液的分散介质而结晶 使悬挂膜(S2)通过刮刀(20)。 参见图。 8。
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公开(公告)号:US20060231755A1
公开(公告)日:2006-10-19
申请号:US11349985
申请日:2006-02-09
IPC分类号: G21K7/00
CPC分类号: H01L24/95 , H01L21/4853 , H01L25/50 , H01L2224/95145 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/0102 , H01L2924/01033 , H01L2924/01074 , H01L2924/01082 , H01L2924/12042 , H05K3/3478 , H01L2924/00
摘要: A process for arranging a number of micro-bodies efficiently and precisely as one on one spot on a substrate. Charged spots are formed by a converging ion beam or the like on a substrate having an insulating property or the like, and micro-bodies having a size of 200 microns or less are attracted and stuck to the charged spots.
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