Method of forming patterned thin film

    公开(公告)号:US06548412B2

    公开(公告)日:2003-04-15

    申请号:US10098316

    申请日:2002-03-18

    IPC分类号: H01L21311

    CPC分类号: C23C2/04 C23C26/00

    摘要: A novel patterned thin film forming method is capable of realizing formation of nanometer-scale patterned thin films with high controllability by an easy and low-cost process. To form a patterned thin film on an insulating substrate in a precursor solution containing a film-forming substance, an electric charge pattern is formed on the insulating substrate, and then the insulating substrate is dipped in the precursor solution to deposit the film-forming substance on the electric charge pattern formed on the insulating substrate.

    APPARATUS AND PROCESS FOR FABRICATING ARTIFICIAL OPAL FILMS
    4.
    发明申请
    APPARATUS AND PROCESS FOR FABRICATING ARTIFICIAL OPAL FILMS 审中-公开
    制造人造OPAL膜的设备和工艺

    公开(公告)号:US20110014380A1

    公开(公告)日:2011-01-20

    申请号:US12736275

    申请日:2009-03-25

    IPC分类号: B05D3/12 B05C11/02 B05C11/00

    摘要: The invention has for its object to provide an apparatus and process for fabricating an artificial opal film having a uniform thickness yet a large area, and provides an artificial opal film fabrication apparatus, in which a substrate (S1) coated with a suspension film (S2) having fine particles dispersed in it is located in a stage (10), and a dispersive medium of the suspension is evaporated off thereby crystallizing the fine particles to fabricate an artificial opal film, characterized by comprising a scraper (20) for adjusting the thickness of the suspension film, and a stage (10) that is movable relative thereto in a constant horizontal direction, wherein the substrate attached to that stage is positioned such that when the stage (10) moves horizontally, the thickness of the suspension film (S2) coated on that substrate (S1) and in an uncrystalliation state is controlled by the scraper (20), and crystallization by evaporation of the dispersive medium of the suspension is set off after the suspension film (S2) has passed the scraper (20). See FIG. 8.

    摘要翻译: 本发明的目的是提供一种制造均匀厚度大面积的人造蛋白石薄膜的装置和方法,并提供一种人造蛋白石制造装置,其中涂覆有悬浮膜(S2 )分散在阶段(10)中,并将悬浮液的分散介质蒸发掉,从而使微细颗粒结晶以制造人造蛋白石膜,其特征在于包括用于调节厚度的刮刀(20) 和能够沿恒定水平方向相对于其移动的台架(10),其中安装在该台架上的基板定位成使得当台架(10)水平移动时,悬挂膜(S2 )并且处于非结晶状态的刮刀由刮刀(20)控制,通过蒸发悬浮液的分散介质而结晶 使悬挂膜(S2)通过刮刀(20)。 参见图。 8。