Method of forming patterned thin film

    公开(公告)号:US06548412B2

    公开(公告)日:2003-04-15

    申请号:US10098316

    申请日:2002-03-18

    IPC分类号: H01L21311

    CPC分类号: C23C2/04 C23C26/00

    摘要: A novel patterned thin film forming method is capable of realizing formation of nanometer-scale patterned thin films with high controllability by an easy and low-cost process. To form a patterned thin film on an insulating substrate in a precursor solution containing a film-forming substance, an electric charge pattern is formed on the insulating substrate, and then the insulating substrate is dipped in the precursor solution to deposit the film-forming substance on the electric charge pattern formed on the insulating substrate.

    Method of thermo-mechanical-treatment for fe-mn-si shape-memory alloy doped with nbc
    5.
    发明申请
    Method of thermo-mechanical-treatment for fe-mn-si shape-memory alloy doped with nbc 审中-公开
    掺有nbc的Fe-mn-si形状记忆合金的热机械处理方法

    公开(公告)号:US20050236077A1

    公开(公告)日:2005-10-27

    申请号:US10519255

    申请日:2003-12-17

    摘要: The present invention provides a thermomechanical treatment means for a Fe—Mn—Si-based shape memory alloy having specified components with Nb, C addition with simple deformation prior to aging. Such deformation treatment prior to aging is carried out in the inventions of the prior applications in a temperature range of from 500° C. to 800° C. According to the present invention, however, the deformation treatment prior to the aging treatment can be successfully carried out not at high temperature but at room temperature, if the deformation ratio is in a specified range. The technical meaning of the present invention must be clearly understood as compared to the prior art and the inventions of the prior applications because the present invention allows the treatment at room temperature while the others require troublesome treatment at high temperature so that there is significant difference therebetween. That is, according to the present invention, the remarkable improvement in shape memory property is achieved first time by a combination of specified alloy components, specified deformation ratio at room temperature, and setting of aging condition to a certain range. With the development of the present invention, it is expected that the use of shape memory alloys will be accelerated toward the practical use in a wide variety of fields.

    摘要翻译: 本发明提供一种用于Fe-Mn-Si基形状记忆合金的热机械处理装置,其具有在老化之前具有简单变形的Nb,C添加的具有特定成分的组分。 老化前的这种变形处理在现有应用的发明中在500℃至800℃的温度范围内进行。然而,根据本发明,老化处理之前的变形处理可以成功 如果变形率在规定的范围内,则不在高温下进行,而是在室温下进行。 与现有技术和现有技术的发明相比,本发明的技术意义必须清楚地理解,因为本发明允许在室温下进行处理,而其它的则需要在高温下进行麻烦的处理,因此它们之间存在显着差异 。 也就是说,根据本发明,通过规定的合金成分,室温下的规定变形率和老化条件的设定到一定范围的组合,首先实现形状记忆性的显着改善。 随着本发明的发展,预期形状记忆合金的使用将被加速到各种领域中的实际应用。