Heat treatment apparatus and method of forming a thin film using the
apparatus
    2.
    发明授权
    Heat treatment apparatus and method of forming a thin film using the apparatus 失效
    热处理装置及使用该装置形成薄膜的方法

    公开(公告)号:US5164012A

    公开(公告)日:1992-11-17

    申请号:US635209

    申请日:1990-12-28

    申请人: Hisashi Hattori

    发明人: Hisashi Hattori

    摘要: A heat treatment apparatus having a reaction furnace including a reaction chamber for accommodating a plurality of objects, major surfaces of which are faced to each other at intervals, and a heater provided outside the reaction chamber, gas supply tube for introducing a gas into the reaction chamber therethrough, flow-directing unit for directing gas flow in a first direction substantially parallel to the surfaces of the objects, gas exhaust tube for exhausting a gas outside the reaction chamber, and moving unit for moving the gas flow in a second direction different from the first direction. A method of forming thin films on objects of heat treatment having the steps of causing a first gas flow introduced from a first gas supply tube and a second gas flow introduced from a second gas supply tube to meet each other, thereby producing a third gas flow flowing in a direction substantially parallel to the surfaces of the objects, major surfaces of which are faced to each other at intervals, disposed in a reaction chamber, and controlling flow rate of the first and second gas flows, thereby moving the position of the third gas flow in a second direction different from the first direction.

    摘要翻译: 一种具有反应炉的热处理装置,该反应炉包括用于容纳多个物体的反应室,主反应室的主表面间隔地彼此相对;以及设置在反应室外部的加热器,用于将气体引入反应器的气体供给管 通过其流动引导单元,用于引导基本上平行于物体表面的第一方向的气流,用于排出反应室外的气体的排气管,以及用于沿不同于第二方向的第二方向移动气流的移动单元 第一个方向。 一种在热处理对象上形成薄膜的方法,其特征在于,使从第一气体供给管引入的第一气流和从第二气体供给管引入的第二气流彼此相遇,从而产生第三气流 在基本平行于物体的表面的方向上流动,其主表面间隔设置在反应室中,并且控制第一和第二气体流动的流量,从而移动第三和第二气体的位置 气体沿与第一方向不同的第二方向流动。

    Gas dispersion nozzle apparatus for fluidized bed furnace
    4.
    发明授权
    Gas dispersion nozzle apparatus for fluidized bed furnace 失效
    流化床炉用气体分散喷嘴装置

    公开(公告)号:US5354039A

    公开(公告)日:1994-10-11

    申请号:US159936

    申请日:1993-12-01

    摘要: A gas diffusing nozzle device for a fluidized bed furnace having high thermal resistance and durability especially, in a high-temperature environment and capable of being manufactured at a low cost, fluidizing a fluid layer uniformly using a fluidized gas jet with a low pressure loss and controlling the flow rate of the fluidized gas jet at the outer circumferential and central portions of the interior of a retort (11) in an arbitrary and individual manner. This device is provided with a circumferential gas supply pipe (19), a central gas supply pipe (24), and a circumferential gas diffusing nozzle section (14) and a central gas diffusing nozzle section (15) respectively connected to these two gas supply pipes. Each of the gas diffusing nozzle sections has a plurality of nozzle pipes (16b, 22) with a plurality of downwardly directed fluid gas ejection ports (17) formed in the lower surfaces thereof, and at least one ring-shaped nozzle pipe (16a, 21) joined to the free ends of these nozzle pipes.

    摘要翻译: 一种用于流化床炉的气体扩散喷嘴装置,具有高耐热性和耐久性,特别是在高温环境下,能够以低成本制造,使用低压损失的流化气体射流均匀地流化流体层, 以任意和个别的方式控制蒸馏器(11)内部的外圆周和中心部分的流化气体射流的流速。 该装置设置有分别连接到这两个气体供给管(19),中心气体供给管(24)和周向气体扩散喷嘴部(14)和中心气体扩散喷嘴部(15) 管道。 每个气体扩散喷嘴部分具有多个在其下表面中形成有多个向下指向的流体气体喷射口(17)的喷嘴管(16b,22),并且至少一个环形喷嘴管(16a, 21)连接到这些喷嘴管的自由端。

    Vertical wafer heat treatment apparatus having dual load lock chambers
    5.
    发明授权
    Vertical wafer heat treatment apparatus having dual load lock chambers 失效
    具有双负荷锁栓的立式水热处理装置

    公开(公告)号:US5217501A

    公开(公告)日:1993-06-08

    申请号:US729836

    申请日:1991-07-12

    摘要: A vertical wafer heat treatment apparatus for for forming a film on and dry etching a plurality of wafers stored in a wafer boat. The apparatus has at least first and second load lock chambers connected by a gate. Each load lock has an inert gas independently introduced therein and exhausted therefrom. The load lock chambers are vertically connected between two separate process containers. An elevator is provided in the first load lock chamber to transfer a wafer boat into and out of the first container. A transfer means is provided in the second load lock to transfer wafers into and out of a wafer boat.

    摘要翻译: 一种垂直晶片热处理设备,用于在存储在晶片舟皿中的多个晶片上形成膜并干蚀刻。 该装置具有至少通过门连接的第一和第二负载锁定室。 每个负载锁具有独立地引入其中并从其中排出的惰性气体。 负载锁定室垂直连接在两个分开的处理容器之间。 电梯设置在第一负载锁定室中以将晶片舟皿转入和移出第一容器。 在第二加载锁中提供转移装置以将晶片转入和离开晶片舟皿。

    Sealing device
    6.
    发明授权
    Sealing device 失效
    密封装置

    公开(公告)号:US5133561A

    公开(公告)日:1992-07-28

    申请号:US661109

    申请日:1991-02-26

    摘要: A sealing device of this invention is designed to prevent entering of the open air through a coupling of a process tube of a CVD apparatus. The sealing device includes a first flange having a mirror-finished face, a second flange having a face which is brought into contact with the face of the first flange, at least one gas guide which is open to at least one of the faces of the first and second flanges and an evacuation system for evacuating a region, in which the first and second flanges are brought into contact with each other, through the gas guide.

    摘要翻译: 本发明的密封装置被设计成防止通过CVD装置的处理管的联接进入露天空气。 所述密封装置包括具有镜面的第一凸缘,具有与所述第一凸缘的表面接触的面的第二凸缘,至少一个气体导向件,所述至少一个气体导向件 第一和第二法兰以及用于排出第一和第二凸缘彼此接触的区域的排气系统。

    Fluidized-bed type carburizing furnace means for use as bright
heat-treating furnace
    7.
    发明授权
    Fluidized-bed type carburizing furnace means for use as bright heat-treating furnace 失效
    流化床式渗碳炉用作光亮热处理炉

    公开(公告)号:US4754952A

    公开(公告)日:1988-07-05

    申请号:US814435

    申请日:1985-12-30

    CPC分类号: C21D1/53 C23C8/20

    摘要: Fluidized-bed type carburizing furnace means of the class provided with a path for circulation of the furnace gas of a fluidized-bed type carburizing furnace is improved by incorporation therein of ejector means for spouting compressed gas into the circulation path. The circulation path comprises an outlet pipe emanating from the furnace gas outlet of the fluidized-bed type carburizing furnace, a cyclone connected through the medium of the outlet pipe to the fluidized-bed type carburizing furnace, and a discharge pipe emanating from the cyclone and joined to the furnace gas inlet of the fluidized-bed type carburizing furnace. The ejector means comprises a constriction formed in the discharge pipe and a feed pipe for compressed gas having the leading end thereof inserted into the constriction.

    摘要翻译: 提供流化床式渗碳炉的炉气循环路径的流化床式渗碳炉通过在其中结合有用于将压缩气体喷射到循环路径中的喷射装置而得到改善。 循环路径包括从流化床型渗碳炉的炉煤气出口排出的出口管,通过出口管的介质连接到流化床型渗碳炉的旋风分离器,以及从旋流器发出的排出管和 连接到流化床型渗碳炉的炉内气体入口。 排出装置包括形成在排出管中的收缩部和用于压缩气体的供给管,其前端插入收缩部。

    Heat treatment apparatus with a fluidized-bed furnace
    8.
    发明授权
    Heat treatment apparatus with a fluidized-bed furnace 失效
    带流化床炉的热处理设备

    公开(公告)号:US4730811A

    公开(公告)日:1988-03-15

    申请号:US896783

    申请日:1986-08-15

    摘要: A heat treatment apparatus for metals or metal articles has a fluidized-bed furnace for heating the metals and a cooling chamber disposed above the furnace so as to communicate with a heating chamber of the furnace through a partition capable of being opened and closed, so that the metals can be cooled immediately after heated. The apparatus further includes a circulating circuit arrangement with a heat-resisting fan for circulating together or separately heated furnace gas and cooling fluid. Flow rate of the circulating furnace gas and/or cooling fluid is controlled by a flow rate control device provided in the circulating circuit.

    摘要翻译: 用于金属或金属制品的热处理装置具有用于加热金属的流化床炉和设置在炉上方的冷却室,以便通过能够打开和关闭的隔板与炉的加热室连通,使得 金属可以在加热后立即冷却。 该装置还包括具有用于循环在一起或单独加热的炉气和冷却流体的耐热风扇的循环回路装置。 循环炉气体和/或冷却流体的流量由设置在循环回路中的流量控制装置控制。

    Fluidized-bed incineration equipment for removing organic substances
    9.
    发明授权
    Fluidized-bed incineration equipment for removing organic substances 失效
    用于去除有机物质的流化床焚烧设备

    公开(公告)号:US4708068A

    公开(公告)日:1987-11-24

    申请号:US897969

    申请日:1986-08-20

    IPC分类号: F23G5/30

    摘要: An incineration equipment for removing organic substances from various parts of an extruder in a plastics forming machine, has a combustion chamber formed in the upper portion of a heating furnace accommodating a fluidized-bed consisting of refractory particles therein, into which furnace the various parts are to be thrown, and a burning system for heating the fluidized-bed and also for causing gaseous decomposed polymers produced by thermal decomposition of the organic substances and mixed with air fed from the bottom of the furnace through a porous dispersion plate to burn in the combustion chamber. This burning system connects through a single directional control valve with a fuel tank and an air tank, and it comprises a burner having its tip end opened in the combustion chamber, and a temperature sensor for sensing the temperature in the furnace and outputting an operation signal for actuating the directional control valve in accordance with the sensed furnace temperature.

    摘要翻译: 在塑料成形机中从挤出机的各个部分除去有机物质的焚烧装置具有形成在容纳由其中的耐火材料颗粒组成的流化床的加热炉的上部的燃烧室,各个部件 以及用于加热流化床的燃烧系统,以及用于引起通过有机物质的热分解产生的气态分解聚合物,并与通过多孔分散板从炉底进料的空气混合燃烧以在燃烧中燃烧 房间。 该燃烧系统通过单个方向控制阀与燃料箱和空气罐连接,并且其包括其末端在燃烧室中打开的燃烧器和用于感测炉中的温度并输出操作信号的温度传感器 用于根据所感测的炉温驱动方向控制阀。