公开(公告)号：US20130328483A1

公开(公告)日：2013-12-12

申请号：US13884973

申请日：2011-11-15

申请人： Roland Gesche ,  Horia-Eugen Porteanu ,  Silvio Kühn

发明人： Roland Gesche ,  Horia-Eugen Porteanu ,  Silvio Kühn

IPC分类号： H05H1/46

CPC分类号： H05H1/46 ,  H01J37/32192 ,  H01J37/32247

摘要： A microwave resonator for inductively generating a plasma (5) is introduced. The microwave resonator comprises a first tube (4) and a conductive, preferably metal, plate (1). The tube (4) is designed for connection to a supply device for a process gas and for conveying the process gas and comprises a dielectric material. The conductive plate (1) has a first, preferably cylindrical, hole (2), which extends from a first opening on a first side of the conductive plate (1) to a second opening on a second side, opposite the first side, of the conductive plate (1). The first tube (4) is arranged in the first hole (2). The conductive plate (1) also has a first slit (3), which is open towards the first and the second side of the conductive plate (1) and towards the first hole (2).The invention also introduces a plasma generator with such a microwave resonator.

摘要翻译： 引入用于感应地产生等离子体（5）的微波谐振器。 微波谐振器包括第一管（4）和导电的，优选为金属的板（1）。 管（4）被设计用于连接到用于处理气体的供应装置并且用于输送处理气体并且包括电介质材料。 导电板（1）具有第一优选为圆柱形的孔（2），其从导电板（1）的第一侧上的第一开口延伸到与第一侧相对的第二侧上的第二开口 导电板（1）。 第一管（4）布置在第一孔（2）中。 导电板（1）还具有朝向导电板（1）的第一侧和第二侧开口并朝向第一孔（2）的第一狭缝（3）。 本发明还引入了具有这种微波谐振器的等离子体发生器。

公开(公告)号：US20120285934A1

公开(公告)日：2012-11-15

申请号：US13508607

申请日：2010-11-19

申请人： Horia-Eugen Porteanu ,  Roland Gesche ,  Silvio Kuehn

发明人： Horia-Eugen Porteanu ,  Roland Gesche ,  Silvio Kuehn

IPC分类号： B23K9/00

CPC分类号： H05H1/46 ,  H05H1/24 ,  H05H2001/466

摘要： A device for generating a plasma, comprises an alternating voltage source, a travelling wave resonator and coupling means that are designed to couple the alternating voltage generated by the alternating voltage source into the travelling wave resonator in such a manner that travelling electromagnetic waves are produced, wherein the travelling wave resonator is designed to increase the electric field strength of the travelling electromagnetic waves in such a manner that a plasma is ignited in a gas. The invention further relates to a method for generating a plasma, comprising the steps of: generating an alternating voltage; generating travelling electromagnetic waves in a travelling wave resonator by coupling said alternating voltage into the travelling wave resonator; and increasing the electric field strength of the travelling electromagnetic waves in the travelling wave resonator in order to ignite a plasma in a gas.

摘要翻译： 用于产生等离子体的装置包括交流电压源，行波谐振器和耦合装置，其被设计成以产生行进电磁波的方式将由交流电压源产生的交流电耦合到行波谐振器中， 其特征在于，所述行波谐振器被设计成以等离子体在气体中点燃的方式增加所述行进电磁波的电场强度。 本发明还涉及一种用于产生等离子体的方法，包括以下步骤：产生交流电压; 通过将所述交流电压耦合到行波谐振器中，在行波谐振器中产生行波电磁波; 并且增加行波谐振器中的行进电磁波的电场强度，以点燃气体中的等离子体。

公开(公告)号：US20130213576A1

公开(公告)日：2013-08-22

申请号：US13817537

申请日：2011-08-16

申请人： Roland Gesche ,  Horia-Eugen Porteanu ,  Silvio Kühn

发明人： Roland Gesche ,  Horia-Eugen Porteanu ,  Silvio Kühn

IPC分类号： H01J37/32 ,  H05H1/42

CPC分类号： H01J37/32 ,  H01J37/32706 ,  H01J37/32825 ,  H05H1/42 ,  H05H1/48

摘要： The invention relates to an apparatus for the treatment of surfaces of a substrate by means of plasma. Said apparatus comprises a plasma source designed to generate plasma and to eject it into a plasma space with a longitudinal plasma extent, said extent extending along a main motion component of the plasma, an at least partially conductive first holding apparatus designed to hold a first workpiece, and a voltage source connected to the first holding apparatus, said voltage source being designed to generate a first acceleration voltage and to apply it to the first holding apparatus. The first holding apparatus is arranged and designed relative to the plasma source in such a manner that it places the first workpiece in such a manner that the plasma reaches the first workpiece when the first acceleration voltage is applied.

摘要翻译： 本发明涉及一种借助于等离子体处理衬底表面的设备。 所述装置包括设计成产生等离子体并将其喷射到具有纵向等离子体范围的等离子体空间中的等离子体源，所述等离子体区域沿着等离子体的主运动分量延伸，至少部分地传导的第一保持装置，设计成夹持第一工件 以及连接到第一保持装置的电压源，所述电压源被设计成产生第一加速电压并将其施加到第一保持装置。 第一保持装置相对于等离子体源被布置和设计，使得它以这样的方式放置第一工件，使得当施加第一加速电压时等离子体到达第一工件。

公开(公告)号：US20120313524A1

公开(公告)日：2012-12-13

申请号：US13575981

申请日：2011-01-28

申请人： Silvio Kuehn ,  Roland Gesche ,  Horia-Eugen Porteanu

发明人： Silvio Kuehn ,  Roland Gesche ,  Horia-Eugen Porteanu

IPC分类号： H05H1/24

CPC分类号： H05H1/46 ,  H05H2001/4667 ,  H05H2240/10 ,  H05H2245/125

摘要： The invention relates to a plasma source with an oscillator having an active element and a resonator connected to the active element. The resonator has a hollow body, a gas inlet, a gas outlet arranged at a distal end of the hollow body about a longitudinal axis of the hollow body, and a coil arranged along the longitudinal axis of the hollow body, said coil having an effective length of one quarter of a wavelength at a resonant frequency of the resonator. A distal end of the coil is arranged relative to the gas outlet such that a plasma section can form between the distal end of the coil serving as a first plasma electrode and the gas outlet of the hollow body serving as a second plasma electrode. At a proximal end of the hollow body, the coil is lead out of the interior of the hollow body through an electrically contact-free feed-through, and a proximal end of the coil contacts the hollow body at its external side. At a first contact region located between the proximal end of the coil and the feed-through, the coil is coupled to a first gate of the active element, and at a second contact region located between the proximal end of the coil and the feed-through, the coil is coupled to a second gate of the active element.

摘要翻译： 本发明涉及一种具有振荡器的等离子体源，该振荡器具有连接到有源元件的有源元件和谐振器。 谐振器具有中空体，气体入口，排出在空心体的远端周围的中空体的纵向轴线的气体出口以及沿着中空体的纵向轴线布置的线圈，所述线圈具有有效的 在谐振器的谐振频率处的四分之一波长的长度。 线圈的远端相对于气体出口布置，使得等离子体部分可以在用作第一等离子体电极的线圈的远端和用作第二等离子体电极的中空体的气体出口之间形成。 在空心体的近端处，线圈通过无电接触的引入而从中空体的内部引出，并且线圈的近端在其外侧与中空体接触。 在位于线圈的近端和馈通之间的第一接触区域处，线圈耦合到有源元件的第一栅极，并且在位于线圈的近端和馈电线圈之间的第二接触区域处， 线圈耦合到有源元件的第二栅极。

公开(公告)号：US09210789B2

公开(公告)日：2015-12-08

申请号：US13508607

申请日：2010-11-19

申请人： Horia-Eugen Porteanu ,  Roland Gesche ,  Silvio Kuehn

发明人： Horia-Eugen Porteanu ,  Roland Gesche ,  Silvio Kuehn

IPC分类号： B23K9/00 ,  B23K9/02 ,  H05H1/46 ,  H05H1/24

CPC分类号： H05H1/46 ,  H05H1/24 ,  H05H2001/466

摘要： A device for generating a plasma, comprises an alternating voltage source, a travelling wave resonator and coupling means that are designed to couple the alternating voltage generated by the alternating voltage source into the travelling wave resonator in such a manner that travelling electromagnetic waves are produced, wherein the travelling wave resonator is designed to increase the electric field strength of the travelling electromagnetic waves in such a manner that a plasma is ignited in a gas. The invention further relates to a method for generating a plasma, comprising the steps of: generating an alternating voltage; generating travelling electromagnetic waves in a travelling wave resonator by coupling said alternating voltage into the travelling wave resonator; and increasing the electric field strength of the travelling electromagnetic waves in the travelling wave resonator in order to ignite a plasma in a gas.

摘要翻译： 一种用于产生等离子体的装置，包括交流电压源，行波谐振器和耦合装置，其被设计成以产生行进电磁波的方式将由交流电压源产生的交流电耦合到行波谐振器中， 其特征在于，所述行波谐振器被设计成以等离子体在气体中点燃的方式增加所述行进电磁波的电场强度。 本发明还涉及一种用于产生等离子体的方法，包括以下步骤：产生交流电压; 通过将所述交流电压耦合到行波谐振器中，在行波谐振器中产生行波电磁波; 并且增加行波谐振器中的行进电磁波的电场强度，以点燃气体中的等离子体。

公开(公告)号：US08796934B2

公开(公告)日：2014-08-05

申请号：US13575981

申请日：2011-01-28

申请人： Silvio Kuehn ,  Roland Gesche ,  Horia-Eugen Porteanu

发明人： Silvio Kuehn ,  Roland Gesche ,  Horia-Eugen Porteanu

IPC分类号： H01J7/24

CPC分类号： H05H1/46 ,  H05H2001/4667 ,  H05H2240/10 ,  H05H2245/125

摘要： The invention relates to a plasma source with an oscillator having an active element and a resonator connected to the active element. The resonator has a hollow body, a gas inlet, a gas outlet arranged at a distal end of the hollow body about a longitudinal axis of the hollow body, and a coil arranged along the longitudinal axis of the hollow body, said coil having an effective length of one quarter of a wavelength at a resonant frequency of the resonator. A distal end of the coil is arranged relative to the gas outlet such that a plasma section can form between the distal end of the coil serving as a first plasma electrode and the gas outlet of the hollow body serving as a second plasma electrode. At a proximal end of the hollow body, the coil is lead out of the interior of the hollow body through an electrically contact-free feed-through, and a proximal end of the coil contacts the hollow body at its external side. At a first contact region located between the proximal end of the coil and the feed-through, the coil is coupled to a first gate of the active element, and at a second contact region located between the proximal end of the coil and the feed-through, the coil is coupled to a second gate of the active element.

摘要翻译： 本发明涉及一种具有振荡器的等离子体源，该振荡器具有连接到有源元件的有源元件和谐振器。 谐振器具有中空体，气体入口，排出在空心体的远端周围的中空体的纵向轴线的气体出口以及沿着中空体的纵向轴线布置的线圈，所述线圈具有有效的 在谐振器的谐振频率处的四分之一波长的长度。 线圈的远端相对于气体出口布置，使得等离子体部分可以在用作第一等离子体电极的线圈的远端和用作第二等离子体电极的中空体的气体出口之间形成。 在空心体的近端处，线圈通过无电接触的引入而从中空体的内部引出，并且线圈的近端在其外侧与中空体接触。 在位于线圈的近端和馈通之间的第一接触区域处，线圈耦合到有源元件的第一栅极，并且在位于线圈的近端和馈电线圈之间的第二接触区域处， 线圈耦合到有源元件的第二栅极。