HIGH RESOLUTION OBJECT INSPECTION APPARATUS USING TERAHERTZ WAVE
    1.
    发明申请
    HIGH RESOLUTION OBJECT INSPECTION APPARATUS USING TERAHERTZ WAVE 有权
    使用TERAHERTZ波的高分辨率对象检查装置

    公开(公告)号:US20150041658A1

    公开(公告)日:2015-02-12

    申请号:US14385033

    申请日:2012-04-10

    IPC分类号: G01N21/35 G02B3/00

    摘要: An object inspection apparatus includes a terahertz wave supplying unit for generating a terahertz wave and moving a path of the terahertz wave according to time so that the terahertz wave is supplied to an object to be inspected, a focusing lens located between the terahertz wave supplying unit and the object to be inspected to focus the terahertz wave supplied by the terahertz wave supplying unit, a rotating plate having a plate shape and including a plurality of the focusing lenses with different distances from the center thereof, the rotating plate rotating in the circumferential direction so that one of the focusing lenses is located at a path of the terahertz wave according to the path movement of the terahertz wave, and a terahertz wave detecting unit for collecting and detecting a terahertz wave incident to the object to be inspected.

    摘要翻译: 物体检查装置包括:太赫兹波提供单元,用于产生太赫兹波,并根据时间移动太赫兹波的路径,使得太赫兹波被提供给被检测物体;聚焦透镜,位于太赫波提供单元 以及要被检查的物体聚焦太赫兹波供给单元提供的太赫兹波,具有板形的旋转板,并且包括多个离其中心距离不同的聚焦透镜,旋转板沿圆周方向旋转 使得一个聚焦透镜根据太赫兹波的路径移动位于太赫兹波的路径,以及用于收集和检测入射到待检查对象的太赫兹波的太赫兹波检测单元。

    High resolution object inspection apparatus using terahertz wave
    2.
    发明授权
    High resolution object inspection apparatus using terahertz wave 有权
    使用太赫兹波的高分辨率物体检测装置

    公开(公告)号:US09239287B2

    公开(公告)日:2016-01-19

    申请号:US14385033

    申请日:2012-04-10

    摘要: An object inspection apparatus includes a terahertz wave supplying unit for generating a terahertz wave and moving a path of the terahertz wave according to time so that the terahertz wave is supplied to an object to be inspected, a focusing lens located between the terahertz wave supplying unit and the object to be inspected to focus the terahertz wave supplied by the terahertz wave supplying unit, a rotating plate having a plate shape and including a plurality of the focusing lenses with different distances from the center thereof, the rotating plate rotating in the circumferential direction so that one of the focusing lenses is located at a path of the terahertz wave according to the path movement of the terahertz wave, and a terahertz wave detecting unit for collecting and detecting a terahertz wave incident to the object to be inspected.

    摘要翻译: 物体检查装置包括:太赫兹波提供单元,用于产生太赫兹波,并根据时间移动太赫兹波的路径,使得太赫兹波被提供给被检测物体;聚焦透镜,位于太赫波提供单元 以及要被检查的物体聚焦太赫兹波供给单元提供的太赫兹波,具有板形的旋转板,并且包括多个离其中心距离不同的聚焦透镜,旋转板沿圆周方向旋转 使得一个聚焦透镜根据太赫兹波的路径移动位于太赫兹波的路径,以及用于收集和检测入射到待检查对象的太赫兹波的太赫兹波检测单元。