METHOD FOR MANUFACTURING MICROCANTILEVER HAVING FUNCTIONAL PROBE

    公开(公告)号:US20180143222A1

    公开(公告)日:2018-05-24

    申请号:US15573420

    申请日:2016-04-01

    IPC分类号: G01Q60/42

    CPC分类号: G01Q60/42

    摘要: A method for manufacturing a microcantilever having a cantilever and a functional probe provided on the cantilever may include steps of: providing a probe mold which accommodates a liquid probe solution in which quantum dots for the functional probe are mixed, and has a groove corresponding to the shape of the functional probe; bringing a cantilever into contact with the probe mold on which the groove is formed to correspond to the location of the functional probe; forming the functional probe on the cantilever by curing the probe solution accommodated in the groove in a state where the cantilever contacts the probe mold; and separating the cantilever from the probe mold.

    MICROCHANNEL RESONATOR AND METHOD FOR MANUFACTURING SAME
    8.
    发明申请
    MICROCHANNEL RESONATOR AND METHOD FOR MANUFACTURING SAME 审中-公开
    微通道谐振器及其制造方法

    公开(公告)号:US20170022052A1

    公开(公告)日:2017-01-26

    申请号:US15125070

    申请日:2014-10-13

    摘要: Provided is a method for manufacturing a microchannel resonator capable of measuring a mass and characteristics of an object using a principle in which a resonance frequency is changed according to a mass of a moving material, the method including: providing a silicon substrate; forming a cavity channel inside the silicon substrate; forming a hollow silicon oxide structure on the inner wall surface of the cavity channel by oxidizing the inner wall surface of the cavity channel; and partially removing the periphery of the hollow silicon oxide structure such that the hollow silicon oxide structure can resonate with respect to the silicon substrate.

    摘要翻译: 提供一种用于制造能够使用根据移动材料的质量改变共振频率的原理来测量物体的质量和特性的微通道谐振器的方法,所述方法包括:提供硅衬底; 在硅衬底内形成空腔通道; 通过氧化空腔通道的内壁表面在空腔通道的内壁表面上形成中空氧化硅结构; 并且部分地去除中空氧化硅结构的周边,使得中空氧化硅结构可以相对于硅衬底共振。

    NANOGAP STRUCTURE HAVING ULTRASMALL VOID BETWEEN METAL CORES AND MOLECULAR SENSING APPARATUS AND METHOD USING THE SAME, AND METHOD FOR PREPARING THE NANOGAP STRUCTURE BY SELECTIVE ETCHING
    9.
    发明申请
    NANOGAP STRUCTURE HAVING ULTRASMALL VOID BETWEEN METAL CORES AND MOLECULAR SENSING APPARATUS AND METHOD USING THE SAME, AND METHOD FOR PREPARING THE NANOGAP STRUCTURE BY SELECTIVE ETCHING 审中-公开
    具有金属丝和分子感测装置之间的超声波的纳米结构以及使用其的方法以及通过选择性蚀刻制备纳米结构的方法

    公开(公告)号:US20160377549A1

    公开(公告)日:2016-12-29

    申请号:US15192327

    申请日:2016-06-24

    发明人: Taewook KANG Yuna SIN

    IPC分类号: G01N21/65 C23F1/00

    摘要: By forming a monolayer of metal core-shell nanoparticles, transferring the monolayer to various substrates and removing the shells surrounding the particles by way of selective etching, it is possible to form large-area uniform nanogap structures very easily. In addition, a nanogap is formed by an ultrasmall void having no limitation in diffusion between metal cores through Van der Waals interaction between the metal core particles, as the etching proceeds. It is possible to enhance a near-field significantly around the nanogap structure.

    摘要翻译: 通过形成单层金属核 - 壳纳米颗粒,将单层转移到各种基底上,并通过选择性蚀刻去除颗粒周围的壳,可以非常容易地形成大面积均匀的纳米隙结构。 此外,随着蚀刻进行,通过范德华相互作用在金属芯之间的扩散没有限制的超小空隙形成纳米隙。 可以在纳米隙结构周围显着增强近场。