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    Ellipsometry methods and apparatus using solid immersion tunneling
    1.
    发明授权
    Ellipsometry methods and apparatus using solid immersion tunneling 有权
    椭圆偏振方法和使用固体浸入隧道的设备

    公开(公告)号：US06934024B2

    公开(公告)日：2005-08-23

    申请号：US10388857

    申请日：2003-03-14

    申请人： Qiwen Zhan ,  James R. Leger

    发明人： Qiwen Zhan ,  James R. Leger

    IPC分类号： G01J4/00 ,  G01N21/21

    CPC分类号： G01N21/211 ,  G01J4/00

    摘要： A solid immersion tunneling ellipsometer and methods relating thereto may include a solid immersion apparatus (e.g., a prism or an objective lens in combination with a solid immersion lens) that facilitates optical tunneling and provide information that can be used in the determination of one or more characteristics (e.g., thickness, index of refraction, etc.) of samples (e.g., thin films, ultrathin films, etc.).

    摘要翻译： 固体浸入式隧道椭偏仪及其相关方法可以包括便于光学隧穿的固体浸没装置（例如，棱镜或物镜与固体浸没透镜组合），并提供可用于确定一个或多个 样品的特性（例如，厚度，折射率等）（例如，薄膜，超薄膜等）。

    Imaging ellipsometry
    2.
    发明授权
    Imaging ellipsometry 有权
    成像椭偏仪

    公开(公告)号：US06798511B1

    公开(公告)日：2004-09-28

    申请号：US09691006

    申请日：2000-10-18

    申请人： Qiwen Zhan ,  James R. Leger

    发明人： Qiwen Zhan ,  James R. Leger

    IPC分类号： G01J400

    CPC分类号： G01J4/00 ,  G01N21/211

    摘要： An ellipsometer apparatus and method for use in providing an image of at least a portion of a sample includes an objective lens having a focal plane at which a sample plane of a sample is positioned. Linearly polarized light normal to the sample plane incident on the objective lens is provided, and the incident linearly polarized light is focused onto the sample. At least a portion of the focused incident polarized light is reflected by the sample resulting in reflected light. Spatial filtering is used to modify at least a portion of the incident or the reflected light. An analyzer portion is operable to generate polarization information based on the reflected light.

    摘要翻译： 用于提供样品的至少一部分的图像的椭圆偏振仪装置和方法包括具有样品的样品平面所在的焦平面的物镜。 提供垂直于入射在物镜上的采样平面的线偏振光，并将入射的线偏振光聚焦到样品上。 聚焦的入射偏振光的至少一部分被样品反射，产生反射光。 空间滤波用于修改入射或反射光的至少一部分。 分析器部分可操作以基于反射光产生偏振信息。

    Ellipsometer using radial symmetry
    3.
    发明授权
    Ellipsometer using radial symmetry 有权
    椭圆计使用径向对称

    公开(公告)号：US06693711B1

    公开(公告)日：2004-02-17

    申请号：US09691346

    申请日：2000-10-18

    申请人： James R. Leger ,  Qiwen Zhan

    发明人： James R. Leger ,  Qiwen Zhan

    IPC分类号： G01J400

    CPC分类号： G01N21/211 ,  G01J4/00

    摘要： An ellipsometer and ellipsometry method uses radial symmetry. For example, circularly polarized light may be focused to a spot on a sample using an objective lens and reflected therefrom. A radially symmetric ellipsometric signal based on the reflected light and representative of at least one characteristic of the sample may be attained using a radially symmetric analyzer apparatus, e.g., a pure Polarization rotator such as two half wave plates and a radially symmetric analyzer such as a birefringent lens.

    摘要翻译： 椭偏仪和椭圆偏振法使用径向对称。 例如，可以使用物镜将圆偏振光聚焦到样品上的斑点并从其反射。 基于反射光并且代表样品的至少一个特征的径向对称椭偏信号可以使用径向对称的分析仪装置来获得，例如，诸如两个半波片的纯偏振旋转器和诸如 双折射透镜

    Binary phase-only optical correlation system
    5.
    发明授权
    Binary phase-only optical correlation system 失效
    二进制相位相关系统

    公开(公告)号：US4765714A

    公开(公告)日：1988-08-23

    申请号：US834092

    申请日：1986-02-27

    申请人： Joseph L. Horner ,  James R. Leger

    发明人： Joseph L. Horner ,  James R. Leger

    IPC分类号： G02B27/46 ,  G06K9/74 ,  G06K9/76 ,  G06G9/00

    CPC分类号： G06K9/745 ,  G02B27/46

    摘要： A binary phase-only optical correlation system incorporating therein a binary phase-only filter. The binary phase-only optical filter is made by mathematically generating preselected phase-only information by a fast Fourier Transform technique. This generated phase-only information is binarized into a function having two values. This binarized function is utilized to produce a mask which in turn is used in conjunction with an appropriate optical substrate to produce the binary phase-only filter. The manufacture of the binary phase-only filter is substantially easier than the production of a phase-only filter yet virtually the same correlation results when the binary phase-only filter when it is used in an optical correlation system.

    摘要翻译： 二进制相位相关系统，其中并入二进制相位滤波器。 二进制相位相位滤波器是通过快速傅立叶变换技术数学地产生预选的仅相位信息来制作的。 这样生成的相位相关信息被二值化为具有两个值的函数。 该二值化函数用于产生掩模，该掩模又与合适的光学基底一起使用以产生二相相位滤波器。 二相相位滤波器的制造比相位相关滤波器的制造要容易得多，但是当二值相位滤波器用于光学相关系统时，几乎相同的相关性产生相同的相关性。

    Phase grating and mode-selecting mirror for a laser
    6.
    发明授权
    Phase grating and mode-selecting mirror for a laser 失效
    用于激光的相位光栅和模式选择镜

    公开(公告)号：US5745511A

    公开(公告)日：1998-04-28

    申请号：US682918

    申请日：1996-07-16

    申请人： James R. Leger

    发明人： James R. Leger

    IPC分类号： G02B5/18 ,  G02B27/00 ,  H01S3/08 ,  H01S3/10 ,  H01S3/098

    CPC分类号： G02B5/1871 ,  G02B27/0037 ,  H01S3/10076 ,  H01S2301/206 ,  H01S3/08045 ,  H01S3/0805 ,  H01S3/08059 ,  H01S3/08068

    摘要： Method for making a custom phase-conjugating diffractive mirror for a laser resonator comprising the steps of: (a) choosing a specified beam mode profile a.sub.1 (x,y) that will suit need of said designer, (b) calculating the mode profile b(x',y') which is a value of the specified beam a.sub.1 (x,y) that is propagated to the reflection surface of the diffractive mirror and (c) calculating mirror reflectance t(x',y') which reflects phase conjugate of b(x',y'). A method for fabricating such a mirror is shown. Another aspect of the invention is the addition of a phase adjusting element into a laser resonator, and compensating for the addition of a phase adjusting element in the design of other phase-adjusting elements such as the mirrors.

    摘要翻译： 一种用于制造用于激光谐振器的定制相位共轭衍射镜的方法，包括以下步骤：（a）选择适合所述设计者需要的指定波束模式分布a1（x，y），（b）计算模式分布b （x'，y'），其是传播到衍射镜的反射面的指定光束a1（x，y）的值，（c）计算反射相位的镜面反射率t（x'，y'） b（x'，y'）的共轭。 示出了制造这种镜子的方法。 本发明的另一方面是将相位调整元件添加到激光谐振器中，并且在其他相位调整元件（例如反射镜）的设计中补偿相位调整元件的添加。

    Distortion-compensated phase grating and mode-selecting mirror for a laser
    7.
    发明授权
    Distortion-compensated phase grating and mode-selecting mirror for a laser 失效
    用于激光器的失真补偿相位光栅和模式选择镜

    公开(公告)号：US5627847A

    公开(公告)日：1997-05-06

    申请号：US433815

    申请日：1995-05-04

    申请人： James R. Leger

    发明人： James R. Leger

    IPC分类号： G02B5/18 ,  G02B27/00 ,  H01S3/08 ,  H01S3/10

    CPC分类号： H01S3/08068 ,  G02B27/0037 ,  G02B5/1871 ,  H01S3/10076 ,  H01S2301/206 ,  H01S3/0805

    摘要： Method for making a distortion-compensating phase-adjustment element for a laser. One type of distortion to be compensated for is heat distortion. Also described is a method for making a custom phase-conjugating diffractive mirror for a laser resonator comprising the steps of: (a) choosing a specified beam mode profile a.sub.1 (x,y), (b) calculating the mode profile b(x',y') which is a value of the specified beam a.sub.1 (x,y) that is propagated to the reflection surface of the diffractive mirror and (c) calculating mirror reflectance t(x',y') which reflects phase conjugate of b(x',y') and corrects for distortions such as heat. A method for fabricating such a mirror is shown. Another aspect of the invention is the addition of a phase adjusting element into a laser resonator, and compensating for the addition of a phase adjusting element in the design of other phase-adjusting elements such as the mirrors and correcting for distortions such as heat.

    摘要翻译： 制造用于激光的失真补偿相位调整元件的方法。 要补偿的一种失真是热变形。 还描述了一种用于制造用于激光谐振器的定制相位共轭衍射镜的方法，包括以下步骤：（a）选择指定的光束模式分布a1（x，y），（b）计算模式分布b（x' ，y'），其是传播到衍射镜的反射面的指定光束a1（x，y）的值，（c）计算反映b的相位共轭的镜面反射率t（x'，y'） （x'，y'），并纠正诸如热量的变形。 示出了制造这种镜子的方法。 本发明的另一方面是将相位调整元件添加到激光谐振器中，并补偿在诸如反射镜的其它相位调整元件的设计中添加相位调整元件并校正诸如热的变形。

    Apparatus and method for coherently adding laser beams
    8.
    发明授权
    Apparatus and method for coherently adding laser beams 失效
    用于相干加入激光束的装置和方法

    公开(公告)号：US4649351A

    公开(公告)日：1987-03-10

    申请号：US662609

    申请日：1984-10-19

    申请人： Wilfrid B. Veldkamp ,  James R. Leger ,  Gary J. Swanson

    发明人： Wilfrid B. Veldkamp ,  James R. Leger ,  Gary J. Swanson

    IPC分类号： H01S3/08 ,  H01S3/23 ,  H01S5/40 ,  H04B9/00

    CPC分类号： H01S3/10092 ,  H01S3/08009 ,  H01S5/4025 ,  H01S5/4006

    摘要： The disclosed apparatus includes a diffraction grating illuminated by a plurality of lasers. Apparatus is provided for summing the plurality of lasers coherently by, (a) phase locking the plurality of lasers and by, (b) diffracting the plurality of beams into a single beam. The diffraction grating has a configuration to generate upon illumination substantially equal intensities of diffraction orders corresponding to the number of lasers while suppressing higher unwanted orders. The phase locking can be accomplished by a single master laser, or by a cavity mirror to generate reference beams. Then, the output beams of the plurality of lasers propagating in the reverse direction are coherently superimposed by that grating. It is preferred that the diffraction grating be binary. Both one and two-dimensional diffraction grating arrays are disclosed. In one embodiment, the phase of the plurality of lasers is locked together by means of a separate injection lock laser, in another embodiment the grating is part of a multielement cavity. In a preferred embodiment, the binary grating is a periodic pattern, where the structure of the periodicity is determined by the number of laser beams. Then, an injection lock laser illuminates that grating and locks together the phases of the plurality of lasers whose beams are to be added. Or, alternatively, a mirror is substituted for the injection lock laser and it provides the illumination beam to the grating which then generates the plurality of beams.

    摘要翻译： 所公开的装置包括由多个激光器照射的衍射光栅。 提供了用于通过（a）锁定多个激光器并且（b）将多个光束衍射成单个光束来相干地对多个激光器相加的装置。 衍射光栅具有在照射时产生与激光器数量相对应的衍射级强度基本相等的构造，同时抑制较高的不希望的次数。 相位锁定可以通过单个主激光器或通过腔镜来实现，以产生参考光束。 然后，沿相反方向传播的多个激光器的输出光束被该光栅相干地叠加。 衍射光栅最好是二进制的。 公开了一维和二维衍射光栅阵列。 在一个实施例中，多个激光器的相位通过单独的注射锁定激光器锁定在一起，在另一个实施例中，光栅是多元件空腔的一部分。 在优选实施例中，二进制光栅是周期性图案，其中周期性的结构由激光束的数量确定。 然后，注射锁定激光器照射该光栅并将其所加入的多个激光器的相位锁定在一起。 或者，替代地，替代注射锁定激光器的反射镜，并且其向光栅提供照明光束，然后产生多个光束。

    Phase conjugating difractive elements and method
    9.
    发明授权
    Phase conjugating difractive elements and method 失效
    相位共轭折射元件和方法

    公开(公告)号：US5592505A

    公开(公告)日：1997-01-07

    申请号：US434788

    申请日：1995-05-04

    申请人： James R. Leger

    发明人： James R. Leger

    IPC分类号： G02B5/18 ,  G02B27/00 ,  H01S3/08 ,  H01S3/10

    CPC分类号： G02B5/1871 ,  G02B27/0037 ,  H01S3/10076 ,  H01S2301/206 ,  H01S3/08045 ,  H01S3/0805 ,  H01S3/08059 ,  H01S3/08068

    摘要： Method for making a custom phase-conjugating diffractive mirror for a laser resonator comprising the steps of: (a) choosing a specified beam mode profile a.sub.1 (x,y) that will suit need of said designer, (b) calculating the mode profile b(x',y') which is a value of the specified beam a.sub.1 (x,y) that is propagated to the reflection surface of the diffractive mirror and (c) calculating mirror reflectance t(x',y') which reflects phase conjugate of b(x',y'). A method for fabricating such a mirror is shown. Another aspect of the invention is the addition of a phase adjusting element into a laser resonator, and compensating for the addition of a phase adjusting element in the design of other phase-adjusting elements such as the mirrors.

    摘要翻译： 一种用于制造用于激光谐振器的定制相位共轭衍射镜的方法，包括以下步骤：（a）选择适合所述设计者需要的指定波束模式分布a1（x，y），（b）计算模式分布b （x'，y'），其是传播到衍射镜的反射面的指定光束a1（x，y）的值，（c）计算反射相位的镜面反射率t（x'，y'） b（x'，y'）的共轭。 示出了制造这种反射镜的方法。 本发明的另一方面是将相位调整元件添加到激光谐振器中，并且在其他相位调整元件（例如反射镜）的设计中补偿相位调整元件的添加。