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1.发明申请RADIO FREQUENCY PLASMA METHOD FOR UNIFORM SURFACE PROCESSING OF RF CAVITIES AND OTHER THREE-DIMENSIONAL STRUCTURES 有权用于均匀表面处理射频空间和其他三维结构的无线频率等离子体方法公开(公告)号：US20170040144A1
公开(公告)日：2017-02-09
申请号：US14688363
申请日：2015-04-16
Applicant: Svetozar Popovic , JANARDAN UPADHYAY , LEPOSAVA VUSKOVIC , H. Lawrence Phillips , ANNE-MARIE VALENTE-FELICIANO
Inventor： Svetozar Popovic , JANARDAN UPADHYAY , LEPOSAVA VUSKOVIC , H. Lawrence Phillips , ANNE-MARIE VALENTE-FELICIANO
IPC: H01J37/32
CPC classification number: H01J37/32192 , H01J37/32082 , H01J37/32394 , H01J37/32403 , H01J37/32449 , H01J37/32467 , H01J37/32541 , H01J37/32568 , H01J37/32596 , H01J37/32816 , H01J2237/334
Abstract: A method for efficient plasma etching of surfaces inside three-dimensional structures can include positioning an inner electrode within the chamber cavity; evacuating the chamber cavity; adding a first inert gas to the chamber cavity; regulating the pressure in the chamber; generating a plasma sheath along the inner wall of the chamber cavity; adjusting a positive D.C. bias on the inner electrode to establish an effective plasma sheath voltage; adding a first electronegative gas to the chamber cavity; optionally readjusting the positive D.C. bias on the inner electrode reestablish the effective plasma sheath voltage at the chamber cavity; etching the inner wall of the chamber cavity; and polishing the inner wall to a desired surface roughness.
Abstract translation: 用于对三维结构内的表面进行有效等离子体蚀刻的方法可以包括将内部电极定位在腔室内; 排空腔室; 向腔室内加入第一惰性气体; 调节室内的压力; 沿室腔的内壁产生等离子体护套; 调整内部电极上的正偏压以建立有效的等离子体鞘电压; 向腔室内加入第一电负性气体; 可选地重新调整内部电极上的正的直流偏压重新建立腔室上的有效等离子体鞘电压; 蚀刻室腔的内壁; 并将内壁抛光至所需的表面粗糙度。
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2.发明申请公开(公告)号：US20110083184A1
公开(公告)日：2011-04-07
申请号：US12573886
申请日：2009-10-06
Applicant: JANARDAN UPADHYAY
Inventor： JANARDAN UPADHYAY
CPC classification number: H04L63/145 , G06F21/564
Abstract: A method of anti-malware scanning includes providing, in a computing system including a central processor, a multimedia processor including a number of processors to operate in parallel with one another. The anti-malware scanning further includes executing an anti-malware algorithm using the multimedia processor to free the central processor for a non-anti-malware related task.
Abstract translation: 反恶意软件扫描的方法包括在包括中央处理器的计算系统中提供包括多个处理器的多媒体处理器以彼此并行操作。 反恶意软件扫描还包括执行使用多媒体处理器的反恶意软件算法来释放中央处理器用于非反恶意软件相关任务。
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公开(公告)号：US09852891B2
公开(公告)日：2017-12-26
申请号：US14688363
申请日：2015-04-16
Applicant: Svetozar Popovic , Janardan Upadhyay , Leposava Vuskovic , H. Lawrence Phillips , Anne-Marie Valente-Feliciano
Inventor： Svetozar Popovic , Janardan Upadhyay , Leposava Vuskovic , H. Lawrence Phillips , Anne-Marie Valente-Feliciano
CPC classification number: H01J37/32192 , H01J37/32082 , H01J37/32394 , H01J37/32403 , H01J37/32449 , H01J37/32467 , H01J37/32541 , H01J37/32568 , H01J37/32596 , H01J37/32816 , H01J2237/334
Abstract: A method for efficient plasma etching of surfaces inside three-dimensional structures can include positioning an inner electrode within the chamber cavity; evacuating the chamber cavity; adding a first inert gas to the chamber cavity; regulating the pressure in the chamber; generating a plasma sheath along the inner wall of the chamber cavity; adjusting a positive D.C. bias on the inner electrode to establish an effective plasma sheath voltage; adding a first electronegative gas to the chamber cavity; optionally readjusting the positive D.C. bias on the inner electrode reestablish the effective plasma sheath voltage at the chamber cavity; etching the inner wall of the chamber cavity; and polishing the inner wall to a desired surface roughness.
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4.发明授权Anti-malware scanning in parallel processors of a graphics processing unit 有权在图形处理单元的并行处理器中进行反恶意软件扫描公开(公告)号：US08392989B2
公开(公告)日：2013-03-05
申请号：US12573886
申请日：2009-10-06
Applicant: Janardan Upadhyay
Inventor： Janardan Upadhyay
IPC: G06F21/00
CPC classification number: H04L63/145 , G06F21/564
Abstract: A method of anti-malware scanning includes providing, in a computing system including a central processor, a multimedia processor including a number of processors to operate in parallel with one another. The anti-malware scanning further includes executing an anti-malware algorithm using the multimedia processor to free the central processor for a non-anti-malware related task.
Abstract translation: 反恶意软件扫描的方法包括在包括中央处理器的计算系统中提供包括多个处理器的多媒体处理器以彼此并行操作。 反恶意软件扫描还包括执行使用多媒体处理器的反恶意软件算法来释放中央处理器用于非反恶意软件相关任务。
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