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公开(公告)号：US20180095306A1
公开(公告)日：2018-04-05
申请号：US15812149
申请日：2017-11-14
IPC分类号： G02F1/13 , H04N5/33 , G01J5/58 , G02F1/1337 , G02F1/13363
CPC分类号： G02F1/132 , G01J5/58 , G02F1/1337 , G02F2001/133638 , G02F2203/11 , H04N5/33
摘要： The high-pixel-count uncooled thermal imaging arrays disclosed herein have liquid crystal (LC) microcavity transducers separate from the read-out integrated circuit (ROIC). The transducer converts incident infrared (IR) radiation in birefringence changes that can be measured with visible light. In other words, the system uses the temperature sensitivity of the LC birefringence to convert the IR scene to a visible image. Measurements on sample arrays indicate that the LC material quality is similar to that of bulk samples and has good noise performance. Additionally, high-fill-factor arrays on fused-silica substrates may be processed to enable optimization of conditions for greatly improved temperature sensitivity. An additional IR absorber layer may be integrated into the process to tune the structure for the infrared.
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公开(公告)号：US09835885B2
公开(公告)日：2017-12-05
申请号：US14845941
申请日：2015-09-04
IPC分类号： G02F1/13 , H04N5/33 , G01J5/58 , G02F1/1337 , G02F1/13363
CPC分类号： G02F1/132 , G01J5/58 , G02F1/1337 , G02F2001/133638 , G02F2203/11 , H04N5/33
摘要： The high-pixel-count uncooled thermal imaging arrays disclosed herein have liquid crystal (LC) microcavity transducers separate from the read-out integrated circuit (ROIC). The transducer converts incident infrared (IR) radiation in birefringence changes that can be measured with visible light. In other words, the system uses the temperature sensitivity of the LC birefringence to convert the IR scene to a visible image. Measurements on sample arrays indicate that the LC material quality is similar to that of bulk samples and has good noise performance. Additionally, high-fill-factor arrays on fused-silica substrates may be processed to enable optimization of conditions for greatly improved temperature sensitivity. An additional IR absorber layer may be integrated into the process to tune the structure for the infrared.
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公开(公告)号：US20160070125A1
公开(公告)日：2016-03-10
申请号：US14845941
申请日：2015-09-04
IPC分类号： G02F1/13 , G02F1/13363 , G02F1/1337 , H04N5/33 , G01J5/08 , H04N5/374 , H04N5/378 , G02F1/1339 , G02F1/1341 , G02F1/1335 , H04N5/372
CPC分类号： G02F1/132 , G01J5/58 , G02F1/1337 , G02F2001/133638 , G02F2203/11 , H04N5/33
摘要： The high-pixel-count uncooled thermal imaging arrays disclosed herein have liquid crystal (LC) microcavity transducers separate from the read-out integrated circuit (ROIC). The transducer converts incident infrared (IR) radiation in birefringence changes that can be measured with visible light. In other words, the system uses the temperature sensitivity of the LC birefringence to convert the IR scene to a visible image. Measurements on sample arrays indicate that the LC material quality is similar to that of bulk samples and has good noise performance. Additionally, high-fill-factor arrays on fused-silica substrates may be processed to enable optimization of conditions for greatly improved temperature sensitivity. An additional IR absorber layer may be integrated into the process to tune the structure for the infrared.
摘要翻译： 本文公开的高像素数未冷却的热成像阵列具有与读出的集成电路（ROIC）分离的液晶（LC）微腔换能器。 传感器将入射红外（IR）辐射转换成可用可见光测量的双折射变化。 换句话说，该系统使用LC双折射的温度敏感度将IR场景转换成可见图像。 样品阵列上的测量表明，LC材料质量与散装样品相似，具有良好的噪声性能。 另外，可以处理熔融二氧化硅衬底上的高填充因子阵列，以实现极大改善的温度敏感性的条件的优化。 可以在该过程中集成另外的IR吸收层以调谐红外线的结构。
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公开(公告)号：US07484857B2
公开(公告)日：2009-02-03
申请号：US11000427
申请日：2004-11-30
CPC分类号： G02B26/0841 , G02B5/122
摘要： A deformable reflector includes a plurality of MEMS devices, each having an electrode membrane having a reflective surface thereon, a flat surface, and a pulldown electrode formed in the flat substrate. The electrode membrane has substantially a same flatness of the flat substrate when the electrode membrane comes into contact with the flat substrate across a majority of its surface area in response to a voltage being applied to the pulldown electrode. The electrode membrane has a two-dimensional curvature when no voltage is applied to the pulldown electrode.
摘要翻译： 可变形反射器包括多个MEMS器件，每个MEMS器件具有其上具有反射表面的电极膜，平坦表面和形成在平坦衬底中的下拉电极。 当电极膜响应于施加到下拉电极的电压而在其大部分表面区域与平坦基板接触时，电极膜具有基本相同的平坦基板的平坦度。 当没有电压施加到下拉电极时，电极膜具有二维曲率。
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