公开(公告)号：US20240347356A1

公开(公告)日：2024-10-17

申请号：US18756672

申请日：2024-06-27

Applicant: Beijing E-Town Semiconductor Technology Co., Ltd. ,  Mattson Technology, Inc.

Inventor： Rolf Bremensdorfer ,  Dieter Hezler

IPC: H01L21/67 ,  F27B17/00 ,  F27D7/02 ,  G01J5/10 ,  G01J5/58 ,  H05B1/02 ,  H05B3/00 ,  G01J5/00

CPC classification number: H01L21/67115 ,  F27B17/0025 ,  F27D7/02 ,  G01J5/10 ,  G01J5/58 ,  H01L21/67248 ,  H05B1/0233 ,  H05B3/0047 ,  G01J5/0007

Abstract: A processing apparatus for a thermal treatment of a workpiece is presented. The processing apparatus includes a processing chamber, a workpiece support disposed within the processing chamber, a gas delivery system configured to flow one or more process gases into the processing chamber from the a first side of the processing chamber, one or more radiative heating sources disposed on the second side of the processing chamber, one or more dielectric windows disposed between the workpiece support and the one or more radiative heating sources, a rotation system configured to rotate the one or more radiative heating sources, and a workpiece temperature measurement system configured at a temperature measurement wavelength range to obtain a measurement indicative of a temperature of a back side of the workpiece.

公开(公告)号：US20230213390A1

公开(公告)日：2023-07-06

申请号：US17836568

申请日：2022-06-09

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jinmyoung KIM ,  Byonggwon SONG ,  Yooseong YANG ,  Duhyun LEE ,  Byungkyu LEE

IPC: G01J5/20 ,  G01J5/58

CPC classification number: G01J5/20 ,  G01J5/58 ,  G01J2005/202

Abstract: A long wavelength infrared sensor includes a first magnetoresistive unit; a second magnetoresistive unit; and a light absorption layer that absorbs light and emits heat, wherein the first magnetoresistive unit includes a first magnetoresistive element and a second magnetoresistive element electrically connected to each other, the second magnetoresistive unit includes a third magnetoresistive element and a fourth magnetoresistive element electrically connected to each other, the first and third magnetoresistive elements each have an antiparallel state of magnetization direction, the second and fourth magnetoresistive elements each have a parallel state of magnetization direction, and the first magnetoresistive element is electrically connected to the third magnetoresistive element by way of the second magnetoresistive element.

公开(公告)号：US11652119B2

公开(公告)日：2023-05-16

申请号：US17131994

申请日：2020-12-23

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

Inventor： Jérôme Le Perchec ,  Giacomo Badano

IPC: H01L27/146 ,  G01J5/58 ,  G01J5/0802 ,  H01L31/0216 ,  G02B5/22

CPC classification number: H01L27/14623 ,  G01J5/0802 ,  G01J5/58 ,  G02B5/22 ,  H01L31/02164

Abstract: A detection component is provided for detecting electromagnetic radiation, the detection component comprising a mask arranged to block the electromagnetic radiation for at least one detector. The opaque mask comprises a successive stack of a first metal layer, a second metal layer, a third transparent layer having a low optical index, and an assembly of metal components. The second metal layer, the transparent layer, and the assembly of components form MIM structures in the wavelength range. The invention further relates to a method for manufacturing such a detection component.

公开(公告)号：US11644415B2

公开(公告)日：2023-05-09

申请号：US17177672

申请日：2021-02-17

Applicant: Chongqing Institute of East China Normal University ,  ROI Optoelectronics Technology CO, LTD. ,  East China Normal University ,  University of Shanghai for Science and Technology

Inventor： Heping Zeng ,  Kangwen Yang ,  Hai Li

IPC: G01N21/31 ,  G01J5/58 ,  G01N33/00

CPC classification number: G01N21/31 ,  G01J5/58 ,  G01N33/0027 ,  G01N2201/06113

Abstract: Provided is a system for measuring gas temperature and component concentrations in a combustion field based on optical comb. The system includes two pulse laser devices, two continuous laser devices, a beam splitting device, a measurement path, an interference signal detecting device, an optical processing and electrical processing device and a signal acquisition and analysis device. The measurement path refers to the combustion field to be measured. The interference signal detecting device outputs an interference signal. The optical processing and electrical processing device includes several optic elements and electrical elements, and outputs an adaptive compensation signal and an asynchronous sampling clock signal after a series of processing on output of the two pulse laser devices and two continuous laser devices. The signal acquisition and analysis device outputs the measurement result based on the adaptive compensation signal, the asynchronous sampling clock signal and a stable interference signal.

公开(公告)号：US20220034723A1

公开(公告)日：2022-02-03

申请号：US17274949

申请日：2019-09-11

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Junichi OGAWA ,  Shunichi MIYAZAKI

IPC: G01J5/58

Abstract: A temperature measurement apparatus (10) according to the present disclosure includes a first irradiator (11a) configured to irradiate pulsed excitation light (L1) on a substance included in a chemical reaction system (20), a second irradiator (11b) configured to irradiate probe light (L2) on the substance, a detector (12) configured to detect the probe light (L2) irradiated on the substance by the second irradiator (11b), and a controller (15) configured to calculate a temperature of the substance included in the chemical reaction system (20) based on information related to the detection intensity of the probe light (L2) detected by the detector (12).

公开(公告)号：US11215510B2

公开(公告)日：2022-01-04

申请号：US15345946

申请日：2016-11-08

Applicant: Mitsubishi Electric Corporation

Inventor： Satoi Kobayashi ,  Takaki Sugino ,  Takafumi Hara ,  Yuji Kawano

IPC: G01J5/58 ,  G01J5/10 ,  G01J5/06 ,  G01J5/08 ,  G01J5/20 ,  G01J5/02

Abstract: In a thermal infrared detector having trench structures, at least one sensor element is provided between the trench structures, an etching hole through which the sensor element is hollowed out and thereby thermally insulated is provided in a substrate rear surface or on the periphery of a pixel area, and an opening portion is provided below the pixel area.

公开(公告)号：US11004620B2

公开(公告)日：2021-05-11

申请号：US16355963

申请日：2019-03-18

Applicant: EATON INTELLIGENT POWER LIMITED

Inventor： James Jeffery Benke

IPC: G01J5/58 ,  H01H1/00 ,  G01R31/327 ,  H02H1/00 ,  G01N25/72

Abstract: A circuit interrupter includes a temperature detection system that is configured to detect a measured temperature of at least one of a line conductor, a load conductor, a movable contact, and a stationary contact during operation of the circuit interrupter. The measured temperature is representative of an extent of wear of the set of separable contacts. In one embodiment the temperature detection system includes a temperature sensor that is an infrared sensor. In another embodiment, the temperature detection system includes a temperature sensor that is in physical contact with an electrically conductive structure within the circuit interrupter and therefore additionally employs a voltage filter that filters a line voltage from the signal from the temperature sensor. In another embodiment, the temperature detection system employs a temperature sensor that is in physical contact with an electrically conductive structure, but a wireless transceiver is used to wirelessly communicate the measured temperature.

公开(公告)号：US10915737B2

公开(公告)日：2021-02-09

申请号：US16291066

申请日：2019-03-04

Applicant: U.S. Army Research Laboratory

Inventor： Shuowen Hu ,  Nathaniel J. Short ,  Alex J. Yuffa ,  Gorden Videen ,  Kristan P. Gurton

IPC: G06K9/00 ,  G01J5/58 ,  G01J4/04 ,  G01J5/00

Abstract: Object/facial recognition systems, methods, architectures, mechanisms and/or apparatus for 3D face or object recognition using a 3D surface reconstructed from polarimetric thermal facial/object imager to form a 2D or 3D image which is rotated to conform with a pose of a reference image to allow comparison thereto.

公开(公告)号：US10908024B2

公开(公告)日：2021-02-02

申请号：US16317024

申请日：2014-08-19

Applicant: AK OPTICS TECHNOLOGY CO., LTD.

Inventor： Dong Yan ,  Chengmin Li ,  Linzi Wang ,  Jianpeng Liu ,  Longmao Ye

IPC: G01J5/00 ,  G01J5/08 ,  G01J5/52 ,  G01J5/58

Abstract: An apparatus and a method for online and real-time detection of a temperature of an epitaxial wafer (4) belong to the technical field of semiconductor detection. The apparatus comprises a MOCVD reaction chamber (1), a light source (6), a beam splitter (7), a reference light detector (8), a reflected light detector (9) and a data acquisition unit (10). The method, on the basis of the apparatus, can obtain a thermal radiation attenuation factor caused by a coating of a reactor chamber window and a reflectance attenuation factor caused by the coating of the reactor chamber window for the epitaxial wafer (4). The apparatus and method can eliminate influence of the coating of the reactor chamber window on an online and real-time temperature detection value, thereby improving the accuracy of the online and real-time temperature detection value.

公开(公告)号：US10788372B2

公开(公告)日：2020-09-29

申请号：US16682459

申请日：2019-11-13

Applicant: IRnova AB

Inventor： Anders Gamfeldt

IPC: G01J5/08 ,  G01J5/00 ,  G01J5/58 ,  G01J5/10

Abstract: The present specification generally relates to the field of imaging device and particularly discloses an imaging device for detecting infrared radiation. The imaging device comprises a first set of detectors responsive to infrared electromagnetic radiation in a first wavelength band, a second set of detectors and a filter disposed above the second set of detectors to prevent registration of electromagnetic radiation outside a second wavelength band at the second set of detectors. The second wavelength band is a subset of the first wavelength band. The imaging device is configured to detect a deviation from an expected value of a level of electromagnetic radiation in a third wavelength band based on signals obtained from the first set of detectors and the second set of detectors. The third wavelength band is within the first wavelength band and outside the second wavelength band.